US 9,423,360 B1Grant
Optical components
Issue Date:2016-08-23
•20 Claims
•6 Drawing Sheets
Abstract
The following relates to assessing the quality of an optical component. The optical component comprises an arrangement of a first and a second optically transmissive component grating having a component relative orientation angle, and the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle. A master component comprises a substantially matching arrangement of a first and a second optically transmissive master grating having the desired relative orientation angle. The components are supported with the first and second component gratings in the vicinity of the first and second master gratings, and first and second fringe patterns formed by the first gratings and second gratings respectively are used to output a quality assessment, which is based on the fringe spacing of the second fringe pattern when the fringe spacing of the first fringe pattern is substantially maximal.
Metadata
Assignee
- Microsoft Technology Licensing, LLC
Inventors
- Pasi Kostamo
- Ari J. Tervonen
Application Information
Application Number:US 14/617,735
Filing Date:2015-02-09
Priority Date:2015-02-09
Art Unit:2886
Classifications
IPC:
G01B11/00G01N21/958G01N21/88G01N21/95
Field of Search:
G03F 9/00G02B 5/00G02F 1/00H01L 23/00G01B 11/00G06T 5/00G01N 23/00
Patent Drawings (6 sheets)
Description
Background
[0001] Optical components can be used in optical systems to alter the state of visible light in a predictable and desired manner, for example in display systems to make a desired image visible to a user. Optical components may also be used as e.g. moulds for making other optical components. Optical components can interact with light by way of reflection, refraction, diffraction etc. Diffraction occurs when a propagating wave interacts with a structure, such as an obstacle or slit. Diffraction can be described as the interference of waves and is most pronounced when that structure is comparable in size to the wavelength of the wave. Optical diffraction of visible light is due to the wave nature of light and can be described as the interference of light waves. Visible light has wavelengths between approximately 390 and 700 nanometers (nm) and diffraction of visible light is most pronounced when propagating light encounters structures similar scale e.g. of order 100 or 1000 nm in scale. One example of a diffractive structure is a periodic diffractive structure. Periodic structures can cause diffraction of light which is typically most pronounced when the periodic structure has a spatial period of similar size to the wavelength of the light. Types of periodic structures include, for instance, surface modulations on a surface of an optical component, refractive index modulations, holograms etc. Herein, a “diffraction grating” (or simply “grating”) means any (part of) an optical component which has a diffractive periodic structure. A diffraction grating has a grating period, which is the distance over which its structure repeats. When propagating light encounters the periodic structure, diffraction causes the light to be split into multiple beams in different directions. These directions depend on the wavelength of the light thus diffractions gratings cause dispersion of polychromatic (e.g. white) light, whereby the polychromatic light is split into different coloured beams travelling in different directions.
[0002] When the period structure is on a surface of an optical component, it is referred to a surface grating. When the periodic structure is due to modulation of the surface itself, it is referred to as a surface relief grating (SRG). An example of a SRG is uniform straight grooves in a surface of an optical component that are separated by uniform straight groove spacing regions. Groove spacing regions are referred to herein as “lines”, “grating lines” and “filling regions”. The nature of the diffraction by a SRG depends both on the wavelength of light incident on the grating and various optical characteristics of the SRG, such as line spacing, groove depth and groove slant angle. SRGs have many useful applications. One example is an SRG light guide application. A light guide (also referred to herein as a “waveguide”) is an optical component used to transport light by way of internal reflection e.g. total internal reflection (TIR) within the light guide. A light guide may be used, for instance, in a light guide-based display system for transporting light of a desired image from a light engine to a human eye to make the image visible to the eye.
[0003] In the case of a waveguide-based display system, different gratings forming part of the same waveguide may serve various functions. Waveguide-based display systems typically comprise a light engine, which collimates light of an image into collimated input beams which form a virtual version of that image at infinity. The input beams may be directed towards an incoupling grating of the waveguide, which is arranged to couple them into the waveguide at angles which are sufficiently steep to cause TIR of the incoupled beams within the waveguide. An outcoupling (exit) grating on the waveguide may receive the incoupled beams internally and diffract them outwardly in directions that match the input beams (so that they form the same virtual version of the image). A user's eye can then reconstruct the image when looking at the exit grating. Usually, the exit grating is also arranged to provide beam expansion of the outputted beams so as to provide an eyebox of increased size compared with viewing the light engine directly. Intermediate grating(s) of the same waveguide may provide additional beam expansion to further increase the size of the eyebox.
[0004] For some such waveguide grating arrangements, the incoupling, outcoupling and (where applicable) intermediate grating(s) will only manipulate the image light as intended if their various gratings are oriented relative to one another in a specific manner. Deviation from this intended orientation can cause degradation of the final image as perceived by the user. When such waveguides are manufactured in bulk for incorporation in different waveguide display systems, each should preserve these specific relationships to avoid degrading the quality of the final display systems. Other types of optical component with various applications may also comprise different gratings where it is desirable for the relative orientation of those gratings to match a desired value as closely as possible.
Summary
[0005] This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. Nor is the claimed subject matter limited to implementations that solve any or all of the disadvantages noted in the Background section.
[0006] The disclosure considers an optical component comprising an arrangement of a first and a second component grating having a component relative orientation angle. The quality of the optical component is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle. A quality assessment is made by comparing the optical component to a master component comprising a substantially matching arrangement of a first and a second optically transmissive master grating having the desired relative orientation angle.
[0007] When the optical and master components are supported with the first and second component gratings in the vicinity of the first and second master gratings, a first fringe pattern is formed by the first gratings as their relative orientation angle (first relative orientation angle) is changed towards zero, the fringe spacing of which increases as that first relative orientation angle decreases. Similarly, a second fringe pattern is formed by the second gratings as their relative orientation angle (second relative orientation angle) is changed towards zero, the fringe spacing of which also increases as that second relative orientation angle decreases. The disclosure recognizes that, when the fringe spacing of the first fringe pattern is substantially maximal (the first relative orientation angle thus being substantially zero), the fringe spacing of the second fringe pattern—which is indicative of the second relative orientation angle in general—is also indicative of the deviation of the component relative orientation angle from the desired relative orientation angle (as this deviation is substantially equal to the second relative orientation angle when the first relative orientation angle is substantially zero), and is thus indicative of the quality of the optical component.
[0008] A first aspect is directed to a quality assessment apparatus for assessing the quality of such an optical component. The apparatus comprises a configurable support system, a light sensor, a drive mechanism and a controller. The support system is configured to support such an optical and such a master component with the first and second component gratings of the optical component in the vicinity of the first and second master gratings of the master component. The light sensor is configured to receive light which has interacted with both of the first and light which has interacted with both of the second gratings, and to generate sensor data from the received light. The drive mechanism is coupled to the support system. The controller is configured to control the drive mechanism based on the sensor data to reconfigure the support system from a current configuration to a new configuration in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal. In addition, the controller is configured to measure from the sensor data the fringe spacing of a second fringe pattern formed by the second gratings in the new configuration, and to output a quality assessment based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.
[0009] Second and third aspects are directed to a quality assessment process, and a computer program product comprising code configured, when executed, to implement that process. Such an optical component and such a master component are supported by a configurable support system with the first and second component gratings of the optical component in the vicinity of the first and second master gratings of the master component. The process comprises the following. Sensor data is received, the sensor data generated from light which has interacted with both of the first gratings and light which has interacted with both of the second gratings. The support system is reconfigured based on the sensor data from a current configuration to a new configuration, in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal. The fringe spacing of a second fringe pattern formed by the second gratings in the new configuration is measured from the sensor data. A quality assessment is outputted based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.
Brief Description of Figures
[0010] FIG. 1A is a frontal view of an optical component;
[0011] FIG. 1B is a schematic illustration of an optical component, shown interacting with incident light and viewed from the side;
[0012] FIG. 2A is a schematic illustration of a straight binary grating, shown interacting with incident light and viewed from the side;
[0013] FIG. 2B is a schematic illustration of a slanted binary grating, shown interacting with incident light and viewed from the side;
[0014] FIG. 2C is a schematic illustration of an overhanging triangular grating, shown interacting with incident light and viewed from the side;
[0015] FIG. 3A is a frontal view of an optical component comprising an arrangement of gratings;
[0016] FIG. 3B is a frontal view of a master component comprising a substantially matching arrangement of gratings;
[0017] FIG. 4A is a perspective view of the optical component and the master component during a quality assessment process;
[0018] FIG. 4B shows fringe patterns observed at different points in time during the quality assessment process;
[0019] FIG. 5 is a block diagram of a quality assessment apparatus.
Detailed Description
[0020] FIGS. 1A and 1B show from the top and the side respectively an optical component 2, such as a waveguide or a mould for making other optical components, having an outer surface S. The optical component is optically transmissive in this embodiment, but may not be optically transmissive in other embodiments. The optical component 4 comprises a grating 4, formed by (that is, whose periodic structure arises as a result of) surface modulations over the surface S, which constitute a surface grating (specifically, an SRG). The modulations comprise grating lines which are substantially parallel and elongate (substantially longer than they are wide), and also substantially straight in this example (though they need not be straight in general).
[0021] FIG. 1B shows the optical component 2, and in particular the grating 4, interacting with an incoming illuminating light beam I that is inwardly incident on the grating 4. The light I is white light in this example, and thus has multiple colour components. The light I interacts with the grating 4 which splits the light into several beams directed inwardly into the optical component 2. Some of the light I may also be reflected back from the surface S as a reflected beam R0. A zero-order mode inward beam T0 and any reflection R0 are created in accordance with the normal principles of diffraction as well as other non-zero-order (±n-order) modes (which can be explained as wave interference). FIG. 1B shows first-order inward beams T1, T−1; it will be appreciated that higher-order beams may or may not also be created depending on the configuration of the optical component 2. Because the nature of the diffraction is dependent on wavelength, for higher-order modes, different colour components (i.e. wavelength components) of the incident light I are, when present, split into beams of different colours at different angles of propagation relative to one another as illustrated in FIG. 1B .
[0022] FIGS. 2A-2C are close-up schematic cross sectional views of different exemplary gratings 4a-4c (collectively referenced as 4 herein), formed by modulations of the surface S of the optical component 2 (which is viewed from the side in these figures). Light beams are denoted as arrows whose thicknesses denote approximate relative intensity (with higher intensity beams shown as thicker arrows).
[0023] FIG. 2A shows an example of a straight binary grating 4a. The straight binary grating 4a is formed by a series of grooves 7a in the surface S separated by protruding groove spacing regions 9a which are also referred to herein as “filling regions”, “grating lines” or simply “lines”. The grating 4a has a spatial period of d (referred to as the “grating period”), which is the distance over which the modulations' shape repeats. The grooves 7a have a depth h and have substantially straight walls and substantially flat bases. As such, the filling regions have a height h and a width that is substantially uniform over the height h of the filling regions, labelled “w” in FIG. 2A (with w being some fraction f of the period: w=f*d).
[0024] For a straight binary grating, the walls are substantially perpendicular to the surface S. For this reason, the grating 4a causes symmetric diffraction of incident light I that is entering perpendicularly to the surface, in that each +n-order mode beam (e.g. T1) created by the grating 4a has substantially the same intensity as the corresponding −n-order mode beam (e.g. T−1), typically less than about one fifth (0.2) of the intensity of the incident beam I.
[0025] FIG. 2B shows an example of a slanted binary grating 4b. The slanted grating 4b is also formed by grooves, labelled 7b, in the surface S having substantially straight walls and substantially flat bases separated by lines 9b of width w. However, in contrast to the straight grating 4a, the walls are slanted by an amount relative to the normal, denoted by the angle α in FIG. 2B . The grooves 7b have a depth h as measured along the normal. Due to the asymmetry introduced by the non-zero slant, ±n-order mode inward beams travelling away from the slant direction have greater intensity that their + n-order mode counterparts (e.g. in the example of FIG. 2B , the T1 beam is directed away from the direction of slant and has usually greater intensity than the T−1 beam, though this depends on e.g. the grating period d); by increasing the slant by a sufficient amount, those + n counterparts can be substantially eliminated (i.e. to have substantially zero intensity). The intensity of the T0 beam is typically also reduced very much by a slanted binary grating such that, in the example of FIG. 2B , the first-order beam T1 typically has an intensity of at most about four fifths (0.8) the intensity of the incident beam I.
[0026] The binary gratings 4a and 4b can be viewed as being formed by spatial waveforms embedded in the surface S that have a substantially square wave shape (with period d). In the case of the grating 4b, the shape is a skewed square wave shape skewed by α.
[0027] FIG. 2C shows an example of an overhanging triangular grating 4c which is a special case of an overhanging trapezoidal grating. The triangular 4c is formed by grooves 7c in the surface S that are triangular in shape (and which thus have discernible tips) and which have a depth h as measured along the normal. Filling regions 9c take the form of triangular, tooth-like protrusions (teeth), having medians that make an angle α with the normal (α being the slant angle of the grating 4c). The teeth have tips that are separated by d (which is the grating period of the grating 4c), a width that is w at the base of the teeth and which narrows to substantially zero at the tips of the teeth. For the grating of FIG. 4c , w≈d, but generally can be w<d. The grating is overhanging in that the tips of the teeth extend over the tips of the grooves. It is possible to construct overhanging triangular grating gratings that substantially eliminate both the transmission-mode T0 beam and the + n-mode beams, leaving only ±n-order mode beams (e.g. only T1). The grooves have walls which are at an angle γ to the median (wall angle). The grating 4c can be viewed as formed by a spatial waveform embedded in S that has a substantially triangular wave shape, which is skewed by α.
[0028] The grooves and spacing regions that form the gratings 4a-4c constitute surface modulations.
[0029] Other type of grating are also possible, for example other types of trapezoidal grating patterns (which may not narrow in width all the way to zero), sinusoidal grating patterns etc. and have a modulation width that can be readily defined in a suitable manner. Such other patterns also exhibit depth h, linewidth w, slant angle α and wall angles γ which can be defined in a similar manner to FIG. 2A-C .
[0030] A grating 4 has a grating vector (generally denoted as d), whose size (magnitude) is 2π/d, and which is in a direction perpendicular to the grating lines which form that grating—see FIG. 1A .
[0031] In light guide-based display applications (e.g. where SRGs are used for coupling of light into and out of a light guide of the display system, and/or for providing beam expansion of beams coupled into the waveguide), d is typically between about 250 and 500 nm, and h between about 30 and 400 nm. The slant angle α is typically between about −45 and 45 degrees and is measured in the direction of the grating vector.
[0032] FIG. 3A shows a frontal view of an optical component 2C. The optical component 2C is of the general type described above, and comprises a fixed arrangement of a first and a second component grating 4iC, 4iiC, which can be of any of the general types discussed above. Herein, a fixed arrangement of gratings means that at least the orientation of those gratings relative to one another is fixed. The gratings 4iC, 4iiC are optically transmissive parts of the optical component 2C; that is, at least those parts are formed of optically transmissive material that allows at least some light to pass through the component gratings 4iC, 4iiC (all the way through the optical component 2C) in a direction generally normal to the gratings (parallel to the z-axis shown in FIG. 3A ). In this example, the gratings 4iC, 4iiC lie substantially parallel to the same plane (xy-plane). The gratings 4iC, 4iiC are formed by surface modulations (specifically, lines and grooves) over respective portions of the optical component's surface, each lying substantially parallel to the xy-plane. The surface modulations are on frontal surface portions of the optical component 2C from the viewpoint of FIG. 3 (in alternative optical component 2C, one of the gratings may be formed by reward surface modulations on a rear surface portion instead).
[0033] The optical component 2C may be a mass-produced optical components (that is, one of a large number of optical components produced in bulk e.g. in a factory set-up), in which for example the optical component 2C is moulded from polymer.
[0034] As indicated above, in various applications, it is desirable for different gratings of the same optical component to have orientations relative to one another that match a desired orientation as closely as possible (e.g. some idealized relationship, at which the performance of the optical component is optimized with respect to its intended functions, which may be revealed though a suitable mathematical analysis).
[0035] For example, in one type of known display system—in which an incoupling, intermediate and exit grating of an optical component (which acts as a waveguide) function in tandem to cause two-dimensionally expanded versions of beams incoupled at the incoupling grating to be outputted at the exit grating—the incoupling and exit gratings should have a relative orientation angle 2ρ (i.e. relative to one another) which is double that of the incoupling and intermediate gratings (itself ρ). Moreover, that relative orientation angle ρ of the incoupling and intermediate gratings (i.e. relative to one another) should have a specific relationship with the grating periods d1, d2 of the incoupling and intermediate gratings, namely ρ=arccos(d1/(2d2)). Deviation from these relationships can cause degradation in the quality of the final image as perceived by the user. Hence, the relationships should be preserved as closely as possible to ensure that the waveguide does not significantly degrade the image.
[0036] However, in practice and particularly in the context of mass-manufacturing, it can be difficult to ensure that all such optical components are manufactured to the same standard of quality. Various inaccuracies and imprecisions can develop in the manufacturing set-up which can cause degradation of the final products. Such inaccuracies and imprecisions can be difficult to detect, and become increasingly so as the scale of the manufacturing operation is increased. Of particular concern in the present context is degradation in the form of misalignment of different gratings on the same optical component.
[0037] Hereinbelow, techniques are presented which facilitate an automatic quality assessment that is both quick and reliable, in which the quality of an optical component (e.g. 2C) comprising at least two gratings (e.g. 4iC, 4iiC) is assessed in terms of a deviation of their actual relative orientation (relative to one another) from a desired relative orientation e.g. that at which the performance of the optical component 4C is optimized with respect to its intended function.
[0038] To this end, a comparison is made between the optical component 2C and a high-quality master component 2M, which is itself a high-quality optical component but the nature of which may make it unsuitable for use in mass-manufactured end-products (e.g. because to do so would be too costly and/or time-consuming). The master component 2M is shown in FIG. 3B .
[0039] As shown in FIG. 3B , the master component 2M comprises a fixed arrangement of gratings, which are first and second master gratings 4iM, 4iiM, also of the general type discussed above and which are optically transmissive in the same manner as the component gratings 4iC, 4iiC (though in other embodiments they may not be optically transmissive). The grating arrangement of the master component 2M substantially matches the grating arrangement of the optical component 2C; that is, the master grating arrangement is such that the master gratings 4iM, 4iiM have approximately (though not necessarily exactly) the same orientation relative to one another as the component gratings 4iC, 4iiC, the first master grating 4iM (resp. second master grating 4iiM) substantially matches the first component grating 4iC (resp. second component grating 4iiC) and, moreover, when the master component 2M is placed at a location forward of the optical component 2C at which at least part of the first component grating 4iC is observable through the first master grating 4iM, at least part of the second component grating 4iiC is observable through the second master grating 4iiM at the same time. Note that “observable” in this context simply means that there exists a line of sight in the general ±z-direction that intersects both first gratings 4iC, 4iM (resp. both second gratings 4iiC, 4iiM), along which light can propagate through both components 2C, 2M so as to interact with both first gratings 4iC, 4iM (resp. both second gratings 4iiC, 4iiM), which light is detectable upon exiting the components 2C, 2M having interacted thus. In this case, the master component 2M of FIG. 3A , the master gratings 4iM, 4iiM also lie substantially parallel to the xy-plane when the optical and master components 2C, 2M are suitably aligned relative to one another.
[0040] The master component 2M may have substantially the same overall shape as the optical component 2C and/or substantially the same overall optical characteristics, though this is not required.
[0041] The master component 2M may, for instance, be formed of fused silica or some other suitable material that has been subject to a microfabrication process, in which the master gratings 4iM, 4iiM are formed by etching of and/or deposition on the surface of the material. Using such microfabrication processes, it is possible to create master gratings 4iM, 4iiM having the desired relative orientation to a very high level of accuracy (i.e. of very high quality, as the term is used herein), which can be verified by performing suitable tests on the master gratings to measure the relative orientation of the master gratings to ensure that it is indeed precisely the desired orientation and/or by testing the optical characteristics of the master gratings to ensure that the master component functions in same the manner in which the to-be-tested optical components are intended to function. Such tests, whilst generally accurate, tend to be costly and time-consuming, and thus not suitable per-se for application to mass-produced optical components. However, once it has been verified that the master component 2M is of the requisite high quality, as indicated, the quality of such mass-manufactured optical components (e.g. 2C) can be assessed quickly and reliably by way of comparison with the master component 2M in the manner set out below.
[0042] Returning to FIG. 3A , the first component grating has a grating vector diC (first component grating vector) and the second component has a second grating vector diiC (second component grating vector), each parallel to the respective grating lines of the relevant grating and lying in the plane of that grating. An angle ΔφC is shown, which is the angle between the component grating vectors diC, diiC as measured in the xy-plane and which is referred to herein as the relative orientation angle of the first and second component gratings 4iC, 4iiC or simply as the “component relative orientation angle”—it is this angle which is intended to precisely match a desired relative orientation angle, and the processes described herein provide an automatic assessment of the extent to which that match has been realized in practice.
[0043] Returning to FIG. 3B , the first master grating has a grating vector diM (first master grating vector) and the second component has a second grating vector diiM (second master grating vector), each perpendicular to the respective grating lines of the relevant grating and lying in the plane of that grating. An angle ΔφM is shown, which is the angle between the master grating vectors diM, diiM as measured in the xy-plane and which is referred to herein as the relative orientation angle of the first and second master gratings 4iM, 4iiM—it is this angle which is known to be the desired relative orientation angle to a high level of precision, and the quality of the (e.g. mass-produced) optical component 4C is assessed in terms of the size of a deviation of ΔφC from ΔφM i.e. in terms of |ΔφC−ΔφM|. When this deviation is substantially zero, the quality of the optical component 2C is considered to be optimal.
[0044] The optical and master components each comprise respective alignment marks 12C, 12M shown in FIGS. 3A and 3B respectively. The alignments marks are arranged such that, when the master component 2M is moved forward of the optical component 2C to bring the master marks of 12C into alignment with the component marks 12M when viewed in the z-direction, the first master grating 4iM is at least approximately aligned (by angle) with the first component grating 4iC. This is discussed below.
[0045] A quality assessment process will now be described with reference to FIGS. 4A and 4B .
[0046] FIG. 4A is a perspective view of the master and optical components 2M, 2C during the process, in which the xy-plane 3 is shown. The master component 12M is supported forward of the optical component 12C and substantially parallel to the xy-plane, with the first component grating 4iC opposing the first master grating 4iM, and the second component grating 4iiC opposing the second master grating 4iiM. In this configuration, the first gratings 4iC, 4iM lie substantially parallel to the same plane as one another (which is the xy-plane 3), and the second gratings 4iiC, 4iiM also lie substantially parallel to the same plane as one another (which is also the xy-plane 3).
[0047] The respective geometric projections of the component grating vectors diC, diiC and master grating vectors diM, diiM in the xy-plane 3 are shown. Note that herein (including in the figures), the notation diC, diiC, diM, diiM is used interchangeably to denote both the grating vectors themselves and the geometric projections of the grating vectors in the xy-plane, and it will be clear from the context which is meant. For the sake of clarity, the master projections diM, diiM are represented by thicker arrows than the component projections diC, diiC in FIG. 4A .
[0048] In addition to the relative orientation angle ΔφC of the first and second component gratings 4iC, 4iiC (which is an inherent property of the optical component 2C) and the relative orientation angle ΔφM of the first and second master gratings 4iM, 4iM (which is an inherent property of the master component 2M), an angle Δφi is shown, which is the angle between the first master grating vector diM and the first component grating vector diC as measured in the xy-plane 3, and which is referred to herein as the relative orientation angle of the first gratings 4iM, 4iC or simply as the “first relative orientation angle”. Another angle Δφii is shown, which is the angle between the second master grating vector diiM and the second component grating vector diiC as measured in the xy-plane, and which is referred to herein as the relative orientation angle between the second gratings 4iiM, 4iiC or simply as the “second relative orientation angle”. The angles Δφi, Δφii are properties of the current orientation of the optical component 2C relative to the master component 2M, and change as that orientation is changed.
[0049] A first line of sight (LOS1) is shown, which lies substantially parallel to the z-axis and which intersects both the first gratings 4iC, 4iM of the optical and master components 2C, 2M respectively. A second line of sight (LOS2) is shown, which also lies substantially parallel to the z-axis but which intersects both the second gratings 4iiC, 4iiM of the optical and master components 2C, 2M respectively.
[0050] The disclosure recognizes that, when the optical component 2C and the master component 2M are held in a relative xy-orientation such that the first relative orientation angle Δφi of the first gratings 4iC, 4iM is substantially zero (substantially perfect alignment)—which can be achieved by effecting xy-rotation of one or both of the master and optical component 2M, 2C—the size of the second relative orientation angle |Δφii| of the second gratings 4iiC, 4iiM will be substantially equal to |ΔφC−ΔφM| i.e. the size of the deviation of the component relative orientation angle ΔφC of the component gratings 4iC, 4iiC from the desired relative orientation angle ΔφM that separates the master gratings 4iM, 4iiM, which as discussed above is precisely the quantity that is indicative of the quality of the optical component 2C. The size of the second relative orientation angle at a point in time when Δφi=0 is denoted |Δφii|Δφi =0=|ΔφC−ΔφM|. When |Δφii|Δφi =0=|ΔφC−ΔφM|=0, the optical component 2C is considered to have optimal quality, with larger |Δφii|Δφi =0=|ΔφC−ΔφM| being considered lower quality.
[0051] In changing the relative xy-orientation of the two components 2C, 2M, the orientation ΔφC of the component gratings 4iC, 4iiC relative to one another is unchanged, as is the orientation ΔφM of the master gratings 4iM, 4iiM relative to one another (these being inherent properties of the respective components). In contrast, what is changed is the orientation of the component gratings relative to the master gratings—in particular the orientation Δφi of the first component grating 4iC relative to the first master grating 4iM, and the orientation of the Δφii of the second component grating 4iC relative to the second master grating 4iM, which are each changed by substantially the same amount when the xy-orientation of the components 2C, 2M is changed from a current xy-orientation to a new xy-orientation.
[0052] The disclosure further recognizes that, when the first gratings are in near, but not perfect alignment—e.g. about (5/100)°≦Δφi≦about (1/1000)° (near alignment range)—a first fringe pattern will be visible along the first line of sight LOS1, that pattern formed by light which has propagated through or been reflected from, and which has thus interacted with, both first gratings 4iC, 4iM, which are effectively overlaid on one another when viewed along the first line of sight LOS1. The first fringe pattern exhibits a fringe spacing that increases as Δφi decreases, becoming maximal (theoretically infinite) when Δφi=0. When Δφi is within approximately the aforementioned approximate near alignment range, the fringe spacing will be measurable i.e. such that the fringes are neither too small nor too large to be undetectable. For example, when Δφi≈(5/1000)°, the fringe pattern will typically have a fringe spacing around 2 mm, which is readily observable. The period of the fringe pattern is ≈d/Δφ (the approximation is very accurate with small angles), with d the grating period and Δφ in radians. The fringes appear perpendicular to the grating lines.
[0053] Eventually, as Δφi tends towards zero, it will become sufficiently small that the fringes become larger than the surface area of the first gratings (or at least larger than a portion that area if only that portion is being observed). Typically, this will occur around Δφi≈(1/1000)°, at which point the fringe spacing is considered substantially maximal and Δφi substantially zero—by adjusting the relative xy-orientation alignment of the optical and master component 2C, 2M from an initial configuration to the point at which that substantially maximal fringe spacing is reached (new configuration), it is thus possible to align the first gratings 4iC, 4iM to that level of accuracy. Moreover, when the first gratings 4iC, 4iM are thus aligned in the new configuration with Δφi substantially zero, provided |Δφii|Δφi =0 is itself with the aforementioned approximate near alignment range, a second fringe pattern will also be visible along the second line of sight LOS2, formed in an equivalent manner by light which has passed through or reflected from the surfaces with gratings and thus interacted with both of the second gratings 4iiC, 4iiM, which are similarly effectively overlaid on one another when viewed along the second line of sight LOS2. The larger the fringe spacing of the second fringe pattern in the new configuration, the smaller |Δφii|Δφi =0=|ΔφC−ΔφM|. That is, the larger the fringe spacing of the second fringe pattern in the new configuration, the higher the quality of the optical component 2C i.e. the smaller the deviation of the component relative orientation angle φC between the two component gratings 4iC, 4iiC from the desired relative orientation angle φM between the corresponding master gratings 4iM, 4iiM.
[0054] This is illustrated in FIG. 4B , which shows exemplary first and second fringe patterns as visible over an area 7 (also shown in FIG. 4A ), as viewed generally along the lines of sight LOS1, LOS2. The fringe patterns are shown in FIG. 7B at various points in time during the quality assessment process.
[0055] The far-left hand side of FIG. 4B shows a view of the area 7 when the components 2C, 2M are in an initial configuration, in which the first gratings 4iC, 4iM of the optical and master component 2C, 2M are in near alignment. In this example, the initial configuration is achieved by aligning the alignment marks 12C of the optical component 2C with the corresponding alignment marks 12M of the master component 2M as viewed in a direction generally parallel to the z-axis (intermediate configuration), which alignment marks 12C, 12M are such that, when so aligned in the intermediate configuration, Δφi is within the aforementioned approximate near alignment range. The optical component 2C can be provided with the alignments 12M marks at the time of its manufacturing process (e.g. for a moulded optical component, alignment mark structure can be included on the same mould from which the grating structure is imparted). Typically, the nature of the manufacturing process in question means that, notwithstanding potential imprecisions/inaccuracies of the kind being tested for by the present process, it is possible to provide suitable alignment marks that can be used to achieve such near alignment within the near alignment range.
[0056] Alternatively, the process may be performed without alignment marks, and the xy-orientation of the two components 2C, 2M can simply be scanned from any arbitrary starting point until the first fringe pattern becomes visible (such scanning could also be used if, for some reason, Δφi is not in fact within the approximate near alignment range even when such alignment marks are so aligned e.g. due to unexpectedly large manufacturing errors). Typically, the use of alignment marks reduces the time it takes to make the quality assessment, which can be particularly significant in terms of the overall efficiency of the process when there are a large number of optical components to be assessed.
[0057] Once near alignment of the first gratings 4iC, 4iM has been so achieved, the xy-orientation of the component 2C, 2M is fine tuned to a new configuration in which the fringe spacing of the first fringe pattern (indicated by a distance labelled D in FIG. 4B ) is substantially maximal and thus in which Δφi≈0—this is shown on the far right of FIG. 4B . The intervening views of FIG. 4B represent the changing view as the components 2M, 2C are moved to change their xy-orientation from the initial configuration on the far-left to the new configuration on the far-right. The fringe spacing of the second fringe pattern (indicated by a distance labelled D′ in FIG. 4B ) in the new configuration can then be measured, and the measured fringe spacing used to output a quality assessment, with the quality assessment indicating lower (resp. higher) quality the smaller (resp. larger) the measured fringe spacing.
[0058] Should the fringe spacing of the second fringe pattern in the new configuration be substantially zero (i.e. should both the fringe spacing of the first fringe pattern and the fringe spacing of the second fringe pattern be substantially zero simultaneously), that indicates there to be substantially no deviation of φC from φM and that the optical component 2C is thus of substantially optimal quality.
[0059] Although FIG. 4A shows the fringe patterns as having been created by light which has passed though both gratings by way of example, it is not required that light passes through both plates (thus the optical components do not have to be optically transmissive) for the fringe patterns to appear so the gratings—the patterns can be formed of reflected light (e.g. light of reflective diffraction modes). In practice the fringe patterns are usually most visible when the light is reflected from the surfaces of the gratings as compared with a situation in which the light passes through both.
[0060] FIG. 5 is a block diagram of the quality assessment apparatus 1, which comprises a controller 20, a drive mechanism 22, a configurable support system 24 and a sensor 6 (which is also shown in FIG. 4A , disposed along the lines of sight LOS1, LOS2).
[0061] The configurable support system 24 supports the optical and master components 2C, 2M in a configurable configuration. The system 24 can be configured to effect relative motion between the two components 2C, 2M to align the alignment marks 12C, 12M, and moreover to effect the subsequent fine-tuning—that is, to change at least the xy-orientation of the master and component to vary Δφi and Δφii in the manner described above. The drive mechanism 22 is coupled to the support system 24, and is controllable to change the configuration of the system 24 in a controlled manner.
[0062] The light sensor 22 receives light from (senses) the first gratings 2iM, 2iC and from the second gratings 2iiM, 2iiC, and in particular from the second fringe patterns described above, from which it generates sensor data that is received by the controller 20.
[0063] Based on the received sensor data, the controller 20 controls the drive mechanism 22 to reconfigure the configuration of the components 2C, 2M until the sensor data indicates that the substantially maximal fringe spacing D of the first fringe pattern has been achieved. The controller 20 also measures from the sensor data the fringe spacing D′ at that point in time. Based on this measured fringe spacing, the controller 20 outputs a suitable quality assessment e.g. to an operator of the apparatus 1 via a user interface of the controller 20, or to some other component of the apparatus 1 (not shown) e.g. computer storage, in which the assessment is stored for later use.
[0064] The sensor 6 may also capture light of (that is, sense) the alignment marks 12C, 12M, and the controller 20 may—prior to performing the fine tuning reconfiguration—perform an initial reconfiguration to achieve alignment of the alignment marks 12C, 12M based on sensor data pertaining to the alignment marks as received from the sensor 6. For example, the sensor 6 may capture images of the marks 12C, 12M, on which image recognition is performed to detect those marks and to identify when the detected marks are aligned.
[0065] The controller 20 can be implemented as code executed on a suitable processor.
[0066] In practice, visibility of the fringe pattern can be increased by suitable illumination of the apparatus. For instance, to enhance the visibility of the fringe pattern, a laser (not shown) may be used to provide a beam that is directed towards the gratings 4iC, 4iM, 4iiC, 4iiM so that part passes though both the first gratings 4iC, 4iM and another part through both the second gratings 4iiC, 4iiM. A beam expander (not shown) may be used to expand the beam before reaching the gratings 4iC, 4iM, 4iiC, 4iiM, so as to increase the size of the area (e.g. 7) over which the visibility is enhanced. For example, the beam may be expanded to encompass the gratings 4iC, 4iM, 4iiC, 4iiM to provide the enhanced visibility of the fringe patterns over the full extent of the gratings 4iC, 4iM, 4iiC, 4iiM.
[0067] In a first embodiment, the sensor 6 comprises an image sensing component in the form of a camera, which supplies images of at least the area 7 to the controller 20 (such images capturing views of the type shown in FIG. 4B ). The controller comprises an image recognition module which performs an automatic image recognition procedure on the received images to detect the fringes of the fringe patterns when captured in the images. The controller adjusts Δφi until the results of the image recognition procedure indicate that the fringe spacing D of the first fringe pattern is substantially maximal, and then measures the fringe spacing D′ of the second fringe pattern at that point in time, again based on the results of the image recognition procedure.
[0068] The fringe spacing can be so measured in various different ways, for instance in terms of a spatial period-type metric (which is D′ in FIG. 4B ) or a spatial frequency-type metric e.g. by counting the number of fringes visible within a predetermined distance (lower frequency indicating larger fringes thus higher quality).
[0069] In a second embodiment, the sensor 6 comprises a first and a second photodiode (or other suitable first and second sensor components), which are shielded from surrounding light but for a respective small pinhole—e.g. having a diameter ˜1 mm (order of magnitude)—through which only a small portion of the first and second fringe pattern is observable respectively. That is, such that the only light received by the first (resp. second) photodiode is from a small portion of the first (resp. second) fringe pattern the size of the respective pinhole, so that once the relevant gratings are in near alignment, the fringes are larger than the pinhole. The controller 20 then changes the xy-orientation of the component 2C, 2M, e.g. at a uniform rate. As the gratings (4iC, 4iM/4iiC, 4iiM) are brought into alignment, the fringe spacing of the relevant fringe pattern increases, which effectively results in movement of those fringes (this is evident in FIG. 4D ). Thus the intensity of the light received by the photodiodes oscillates between high (when only part of a light fringe is observable through the pinhole) and low (when only part of a dark fringe is perceivable through the pinhole) as the xy-orientation of the components 2C, 2M is changed. As the fringe spacing increases, the rate of this oscillation will decrease due to the light and dark fringes becoming progressively larger so that the rate of oscillation observed by the first photodiode through the first pinhole is minimal as Δφi becomes substantially zero—in the second embodiment, the controller adjusts the xy-orientation until that minimum rate of oscillation is achieved, and measures the fringe spacing D′ of the second fringe pattern in terms of the rate of oscillation observed by the second photodiode through the second pinhole at a point in time at which that minimum rate of oscillation as observed by the first photodiode through the first pinhole is achieved.
[0070] The rate of oscillation can be so measured in various different ways, for instance in terms of a temporal period-type metric e.g. obtained by timing individual oscillations or temporal frequency-type metric e.g. obtained by counting the number of oscillations that occur over an interval of predetermined length.
[0071] As mentioned, the optical component can be a mould for making other optical components. Moulds are needed in large quantities because the end product is needed in very high quantities. Thus it's also useful to have a quick method for analysing moulds.
[0072] The quality assessment outputted by the controller can take a number of forms. For example, the controller may simply output a value of the second pattern fringe spacing D′ as measured at a point in time when the fringe spacing D of the first pattern is substantially zero (e.g. expressed as a measured spatial period, spatial frequency, temporal period, temporal frequency etc.) as this is directly indicative of the quality of the component. Alternatively, the controller could compute some suitable quality metric based on the measured fringe spacing, for example in the simplest case a binary metric that can take one of two values, one of which indicates acceptable quality (when the measured fringe spacing is above a predetermined threshold) and the other unacceptable quality (when the measured fringe spacing is below that threshold), though more complex quality metrics can alternatively be used to provide richer information.
[0073] Whilst in the above, the exemplary first gratings 4iC, 4iM (resp. second gratings 4iiC, 4iiM) match due to the fact that they are both formed of substantially straight grating lines, in general gratings which are considered to “substantially match” do not necessarily have to be formed of straight grating lines, nor do they have to be formed of identically shaped curved grating lines. In general, two gratings “substantially match” provided some parts of their respective structures are similar enough for it to be possible to create an observable fringe pattern that exhibits a discernible fringe spacing by overlaying those parts (even though other parts of their structure may be markedly different). Matching gratings may or may not have the same grating period.
[0074] Whilst in the above, the component gratings 4iC, 4iiC (and, correspondingly, the master gratings 4iM, 4iiM, which are in a substantially matching arrangement) are formed by modulations over substantially parallel surface portions, this does not have to be the case in general (for non-parallel gratings, the various angles shown e.g. in FIG. 4A can be equivalently defined by way of geometric projection onto a suitable plane e.g. whose normal is in the direction of the vector sum of the normals of the non-parallel gratings, which is the direction of the mean of those directions). Further, whilst in the above the surface modulations are over substantially flat surface portions, the disclosed techniques can also be applied to curved gratings e.g. formed by modulations on curved surface portions.
[0075] Further, in general the terminology “opposing gratings” (or similar) encompasses gratings which are not parallel. Two gratings are considered to be opposing when there exists a line of sight intersecting both gratings (e.g. in a direction that substantially matches the normals to those gratings), along which a resulting fringe pattern can be observed when those gratings are in near alignment. Whilst the above has been described with reference to opposing gratings, the techniques can be applied to non-opposing gratings, whereby the fringe pattern is formed for instance by a beam which has been guided onto both gratings by reflection.
[0076] The various gratings 4iC, 4iiC, 4iM, 4iiM can be binary (slanted/non-slanted), sinusoidal, trapezoidal (e.g. triangular) in shape (among others) and need not have the same shape, slant a, width w, depth h etc. as one another (though this is not excluded).
[0077] Whilst the above considers a substantially software-implemented controller 20, the functionality of the controller can be implemented using software, firmware, hardware (e.g., fixed logic circuitry), or a combination of these implementations. The terms “module,” “functionality,” “component” and “logic” as used herein generally represent, where applicable, software, firmware, hardware, or a combination thereof. In the case of a software implementation, the module, functionality, or logic represents program code that performs specified tasks when executed on a processor (e.g. CPU or CPUs). The program code can be stored in one or more computer readable memory devices. The features of the techniques described below are platform-independent, meaning that the techniques may be implemented on a variety of commercial computing platforms having a variety of processors.
[0078] For example, the apparatus may also include an entity (e.g. software) that causes hardware of a computer of the apparatus to perform operations, e.g., processors functional blocks, and so on. For example, the computer may include a computer-readable medium that may be configured to maintain instructions that cause the computer, and more particularly the operating system and associated hardware of the computer to perform operations. Thus, the instructions function to configure the operating system and associated hardware to perform the operations and in this way result in transformation of the operating system and associated hardware to perform functions. The instructions may be provided by the computer-readable medium to the computer through a variety of different configurations.
[0079] One such configuration of a computer-readable medium is signal bearing medium and thus is configured to transmit the instructions (e.g. as a carrier wave) to the computing device, such as via a network. The computer-readable medium may also be configured as a computer-readable storage medium and thus is not a signal bearing medium. Examples of a computer-readable storage medium include a random-access memory (RAM), read-only memory (ROM), an optical disc, flash memory, hard disk memory, and other memory devices that may us magnetic, optical, and other techniques to store instructions and other data.
[0080] In embodiments of the various aspect set out in the Summary section, the optical component and the master component may comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, wherein the sensor senses the marks, and wherein the controller is configured based on sensor data pertaining to the marks to reconfigure the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is then reconfigured to the new configuration.
[0081] The light sensor may comprise a camera which captures images of the first fringe pattern as the support system is reconfigured, and wherein the controller comprises an image recognition module which performs an automatic image recognition procedure to detect the first fringe pattern in the images, wherein the controller reconfigures the support system based on the results of the image recognition procedure.
[0082] The images may also be of the second fringe pattern, the automatic image recognition procedure detects the second fringe pattern, and the controller measures the fringe spacing of the second fringe pattern based on the results of the image recognition procedure.
[0083] The light sensor may comprise a sensor component which receives light of only a small portion of the first fringe pattern as the support system is reconfigured, and the controller may reconfigure the support system based on the rate at which the intensity of that light changes.
[0084] The light sensor may comprise another sensor component which receives light of only a small portion of the second fringe pattern, and the controller may measure the fringe spacing of the second fringe pattern based on the rate at which the intensity of that light changes.
[0085] The apparatus may comprise a laser which provides a beam and a beam expander which expands the beam to illuminate the gratings with an expanded beam that substantially encompasses the gratings so as to enhance the visibility of the fringe patterns.
[0086] The optical component and the master component may comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, and the process may comprise reconfiguring the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is then reconfigured to the new configuration.
[0087] The component gratings may be formed by surface modulations on the surface of the optical component. The surface modulations may be on substantially parallel portions of the surface of the optical component.
[0088] Both the component gratings may be formed by surface modulations on frontal portions of the surface of the optical component.
[0089] One of the component gratings may be formed by surface modulations on a frontal portion of the surface of the optical component and the other is formed by surface modulations on a rearward portion of the surface of the optical component.
[0090] The optical component may comprise polymer or may be a mould for moulding such optical components.
[0091] A microfabrication process may be performed on the master component to fabricate the master gratings prior to performing the steps of the second aspect.
[0092] The master component gratings may be tested to assess the quality of the master component prior to performing the steps of the second aspect.
[0093] The first component grating may have a period d1 and the second component grating may have a period d2, and the desired orientation angle of the master gratings may be substantially arccos(d1/(2d2)).
[0094] Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are disclosed as example forms of implementing the claims.
Claims
The invention claimed is:
1. A quality assessment apparatus for assessing the quality of an optical component, the optical component comprising an arrangement of a first and a second component grating having a component relative orientation angle, wherein the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle, the apparatus comprising:
a configurable support system configured to support a master component comprising a substantially matching arrangement of a first and a second master grating having the desired relative orientation angle and to support the optical component with the first and second component gratings in the vicinity of the first and second master gratings, the apparatus further comprising:
a light sensor configured to receive light which has interacted with both of the first gratings and light which has interacted with both of the second gratings, and to generate sensor data from the received light;
a drive mechanism coupled to the support system; and
a controller configured (i) to control the drive mechanism based on the sensor data to reconfigure the support system from a current configuration to a new configuration in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal and (ii) to measure from the sensor data the fringe spacing of a second fringe pattern formed by the second gratings in the new configuration, and to output a quality assessment based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.
2. A quality assessment apparatus according to claim 1, wherein the optical component and the master component comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, wherein the sensor senses the marks, and wherein the controller is configured based on sensor data pertaining to the marks to reconfigure the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is then reconfigured to the new configuration.
3. A quality assessment apparatus according to claim 1, wherein the light sensor comprises a camera which captures images of the first fringe pattern as the support system is reconfigured, and wherein the controller comprises an image recognition module which performs an automatic image recognition procedure to detect the first fringe pattern in the images, wherein the controller reconfigures the support system based on the results of the image recognition procedure.
4. A quality assessment apparatus according to claim 3, wherein the images are also of the second fringe pattern, the automatic image recognition procedure detects the second fringe pattern, and the controller measures the fringe spacing of the second fringe pattern based on the results of the image recognition procedure.
5. A quality assessment apparatus according to claim 1, wherein the light sensor comprises a sensor component which receives light of only a small portion of the first fringe pattern as the support system is reconfigured, and the controller reconfigures the support system based on the rate at which the intensity of that light changes.
6. A quality assessment apparatus according to claim 5, wherein the light sensor comprises another sensor component which receives light of only a small portion of the second fringe pattern, and the controller measures the fringe spacing of the second fringe pattern based on the rate at which the intensity of that light changes.
7. A quality assessment apparatus according to claim 1 comprising a laser which provides a beam and a beam expander which expands the beam to illuminate the gratings with an expanded beam that substantially encompasses the gratings so as to enhance the visibility of the fringe patterns.
8. A quality assessment process for assessing the quality of an optical component, the optical component comprising an arrangement of a first and a second component grating having a component relative orientation angle, wherein the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle, wherein the optical component and a master component comprising a substantially matching arrangement of a first and a second master grating having the desired relative orientation angle are supported by a configurable support system with the first and second component gratings in the vicinity of the first and second master gratings, the process comprising:
receiving sensor data, the sensor data generated from light received which has interacted with both of the first gratings and light which has interacted with both of the second gratings;
reconfiguring the support system based on the sensor data from a current configuration to a new configuration, in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal;
measuring from the sensor data the fringe spacing of a second fringe pattern formed by the second gratings in the new configuration; and
outputting a quality assessment based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.
9. A quality assessment process according to claim 8, wherein the optical component and the master component comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, and wherein the process comprises reconfiguring the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is then reconfigured to the new configuration.
10. A quality assessment process according to claim 8, wherein the component gratings are formed by surface modulations on the surface of the optical component.
11. A quality assessment process according to claim 8, wherein the surface modulations are on substantially parallel portions of the surface of the optical component.
12. A quality assessment process according to claim 8, wherein both the component gratings are formed by surface modulations on frontal portions of the surface of the optical component.
13. A quality assessment process according to claim 8 wherein one of the component gratings is formed by surface modulations on a frontal portion of the surface of the optical component and the other is formed by surface modulations on a rearward portion of the surface of the optical component.
14. A quality assessment process according to claim 8, wherein the optical component comprises polymer or is a mould for moulding such optical components.
17. A quality assessment process according to claim 8, wherein the first component grating has a period d1 and the second component grating has a period d2, and the desired orientation angle of the master gratings is substantially arccos(d1/(2d2)).
18. An apparatus comprising:
one or more processors; and
a computer-readable storage medium having stored thereon code for assessing the quality of an optical component, the optical component comprising an arrangement of a first and a second component grating having a component relative orientation angle, wherein the quality is assessed in terms of a deviation of the component relative orientation angle from a desired relative orientation angle, wherein the optical component and a master component comprising a substantially matching arrangement of a first and a second master grating having the desired relative orientation angle are supported by a configurable support system with the first and second component gratings in the vicinity of the first and second master gratings, the code configured when executed by the one or more processors to cause operations comprising:
receiving sensor data, the sensor data generated from light which has interacted with both of the first gratings and light which has interacted with both of the second gratings;
reconfiguring the support system based on the sensor data from a current configuration to a new configuration, in which the fringe spacing of a first fringe pattern formed by the first gratings is substantially maximal;
measuring from the sensor data the fringe spacing of a second fringe pattern formed by the second gratings in the new configuration; and
outputting a quality assessment based on the measured fringe spacing which is indicative of the deviation of the component relative orientation angle from the desired relative orientation angle.
19. An apparatus according to claim 18, wherein the optical component and the master component comprise alignment marks located so that, when the marks are aligned, the first fringe pattern is observable, wherein the sensor data includes sensor data pertaining to the marks, and wherein the operations comprise reconfiguring, based on the sensor data pertaining to the marks, the support system from the current configuration to an intermediate configuration, in which the alignments marks are substantially aligned and from which the support system is reconfigured to the new configuration.
20. An apparatus according to claim 18 wherein the sensor data comprises images of the first fringe pattern and the operations comprise performing automatic image recognition on the images to detect the first fringe pattern, wherein a drive mechanism coupled to the support system is controlled based on the results of the image recognition procedure.
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