Sensor with positive coupling between dual ferromagnetic free layer laminates

[0001] Information storage devices are used to retrieve and/or store data in computers and other consumer electronics devices. A magnetic hard disk drive is an example of an information storage device that includes one or more heads that can both read and write, but other information storage devices also include heads—sometimes including heads that cannot write. A head that can read may be referred to as a “read head” herein, even if it includes other structures and functions such as a transducer for writing, a heater, microactuator, electronic lapping guide, laser diode, etc.

[0002] In a modern magnetic hard disk drive device, each head is a sub-component of a head gimbal assembly (HGA) that typically includes a suspension assembly with a laminated flexure to carry the electrical signals to and from the head. The HGA, in turn, is a sub-component of a head stack assembly (HSA) that typically includes a plurality of HGAs, an actuator, and a flexible printed circuit. The plurality of HGAs are attached to various arms of the actuator.

[0003] Contemporary read heads typically include a read sensor (e.g. a tunneling magnetoresistive or so-called “giant” magnetoresistive read sensor) that is merged with an inductive write transducer to effect reading and writing from/to a recording media (e.g. disk or tape). Typically the read sensor includes a ferromagnetic “free layer” that has a magnetic orientation that changes relative to a ferromagnetic “pinned layer,” due to externally applied magnetic fields from the recording media. The magnetic orientation of the pinned layer is fixed or pinned, so that the changes in magnetic orientation of the free layer are effectively changes in the relative magnetic orientation of the free layer and pinned layer. Typically, the free layer is separated from the pinned layer by a non-magnetic metallic spacer layer in the case of giant magnetoresistive (GMR) heads. Typically, the free layer is separated from the pinned layer by an insulative and typically ceramic barrier layer in the case of tunneling magnetoresistive (TMR) heads.

[0004] Recently, due to an industrial need for read sensors having increased sensitivity, there has been increased interest in read sensors having dual (or more) free layers separated by a spacer layer or barrier layer. In such read sensors, the magnetic orientation of each free layer may be biased so that it rotates oppositely from that of the free layer on the other side of the spacer or barrier layer, in response to an externally applied magnetic field from the recording media. Such opposite rotation has been termed as a so-called “scissor” mode of operation.

[0005] However, the performance of such dual free layer read sensors (e.g. the magnetoresistive ratio) depends upon the coupling between the free layers, their composition, and their internal structure. Hence, there is a need in the art for improved free layer compositions and structures that may provide or improve a desired free layer coupling and/or otherwise enhance the performance of dual free layer read sensors.

[0013] FIG. 1 is a top perspective view of a disk drive 100 capable of including an embodiment of the present invention. The disk drive 100 includes a disk drive base 102 and two annular magnetic disks 104. The disk drive 100 further includes a spindle 106, rotatably mounted on the disk drive base 102, for rotating the disks 104. The rotation of the disks 104 establishes air flow through recirculation filter 108. In other embodiments, disk drive 100 may have only a single disk, or alternatively, more than two disks.

[0014] The disk drive 100 further includes an actuator 116 that is rotatably mounted on disk drive base 102. Voice coil motor 112 rotates the actuator 116 through a limited angular range so that at least one head gimbal assembly (HGA) 114 is desirably positioned relative to one or more tracks of information on a corresponding one of the disks 104. Each HGA 114 preferably includes a read head 150 for reading and writing from/to one of the disks 104. The actuator 116 may occasionally be latched at an extreme angular position within the limited angular range, by latch 120.

[0015] In the embodiment of FIG. 1, the actuator 116 includes three arms upon which four HGAs 114 are attached, each corresponding to a surface of one of the two disks 104. However in other embodiments fewer or more HGAs 114 may be included depending on the number of disks 104 that are included and whether the disk drive 100 is depopulated. Electrical signals to/from the HGAs 114 are carried to other drive electronics via a flexible printed circuit that includes a flex cable 122 (preferably including a preamplifier circuit) and flex cable bracket 124.

[0016] FIG. 2 is perspective view of a disk drive head actuator 210, which has two arms 213, 214 disposed on opposite sides of a disk 204 (shown in phantom lines). Each of the actuator arms 213, 214 supports and positions one of the HGAs 217, 218 over each of the two opposing major surfaces of the disk 204. However, depopulated disk drives are also contemplated, having fewer HGAs than major disk surfaces.

[0017] FIG. 3 is a bottom perspective view of an HGA 300, capable of including an embodiment of the present invention. The HGA 300 includes a load beam 302, and a read head 310 for reading and writing data from and to a magnetic disk (e.g. disk 104 of FIG. 1). The read head 310 of FIG. 3 includes a slider substrate having an air bearing surface (the label 310 points to this surface) and an opposing top surface (not visible because facing away from the viewer in FIG. 3). The slider substrate preferably comprises AlTiC, although another ceramic or silicon might also be used. The slider substrate of the read head 310 also includes a trailing face that includes a read transducer (too small to be visible in FIG. 3). The read head 310 may also include a write transducer that may be an inductive magnetic write transducer.

[0018] In FIG. 3, a first purpose of the load beam 302 may be to provide limited vertical compliance for the read head 310 to follow vertical undulations of the surface of a disk as it rotates. A second purpose of the load beam 302 may be to preload the air bearing surface of the read head 310 against an adjacent disk surface by a preload force that is commonly referred to as the “gram load.” The HGA 300 may also include a laminated flexure 304. The laminated flexure 304 may include a tongue 306 to which the read head 310 is attached. For example, the read head 310 may be bonded to the tongue 306 of the laminated flexure 304 by an adhesive such as a UV cured epoxy, thermal set epoxy, epoxy doped with an electrically conductive filler, etc., or a conventional solder material. Only a portion of the tongue 306 is visible in the view of FIG. 3 because the read head 310 partially obscures it.

[0019] In the embodiment of FIG. 3, a first purpose of the laminated flexure 304 may be to provide compliance for the head 310 to follow pitch and roll angular undulations of the surface of the disk as it rotates, while restricting relative motion between the read head 310 and the load beam 302 in the lateral direction and about a yaw axis. A second purpose of the laminated flexure 304 may be to provide a plurality of electrical paths to facilitate signal transmission to/from the read head 310. For that second purpose, the laminated flexure 304 may include a plurality of electrically conductive traces that are defined in an electrically conductive (e.g. copper) sub-layer of the laminated flexure 304. The electrically conductive traces may be insulated from a support layer (e.g. stainless steel) by a dielectric layer (e.g. polyimide). The electrically conductive traces may extend away from the read head 310 along a flexure tail 308 of the laminated flexure 304, to reach a portion of the flex cable (not shown) that includes a preamplifier chip near the body of the actuator (e.g. actuator 116 of FIG. 1).

[0020] In the embodiment of FIG. 3, the load beam 302 is attached to a mounting plate 320. These components may be made of stainless steel, and their attachment to each other may be made by a plurality of spot welds, for example. In certain embodiments, the suspension assembly mounting plate 320 may include an annular swage boss to facilitate attachment of the suspension assembly to an actuator arm (e.g. an arm of the actuator arm 116 of FIG. 1) by the conventional attachment process known as swaging. In that case, the suspension assembly mounting plate 320 may also be referred to as a “swage mounting plate.” The load beam 302, the laminated flexure 304 (without the read head 310), and the mounting plate 320, may together be referred to as a “suspension assembly.” Once the read head 310 is added to the suspension assembly (e.g. by being bonded to the tongue 306 of the laminated flexure 304), the assembly may then be referred to as a HGA.

[0021] FIG. 4 is a simplified schematic representation of a dual free layer read sensor 400 capable of including an embodiment of the present invention, which includes a dual free layer sensor stack 404 and an adjacent soft biasing structure 402. Only half of the adjacent soft biasing structure 402 is shown in FIG. 4, so that the dual free layer sensor stack 404 can be more clearly depicted. However, another half of the adjacent soft biasing structure 402 preferably would be disposed over the footprint 403 shown in phantom (dashed) lines, opposite the dual free layer sensor stack 404 from the half of the adjacent soft biasing structure 402 that is shown in FIG. 4).

[0022] In the simplified schematic representation of FIG. 4, a magnetic hard biasing structure 406 is disposed behind the dual free layer sensor stack 404, with the recording media (not shown) disposed in front of the dual free layer sensor stack 404 (on the opposite side of the dual free layer sensor stack 404 than is the magnetic hard biasing structure 406). The recording media is not shown in FIG. 4 because it would obstruct the view of and obscure all else that is shown.

[0023] In the simplified schematic representation of FIG. 4, the dual free layer sensor stack 404 includes a first ferromagnetic free layer 410 and a second ferromagnetic free layer 420, separated by a nonmagnetic spacer or insulative barrier layer 430. The adjacent soft biasing structure 402 includes a first ferromagnetic soft bias layer 460 separated from a second ferromagnetic soft bias layer 470 by a nonmagnetic coupling layer 480 (e.g. a ruthenium layer).

[0024] In the simplified schematic representation of FIG. 4, a possible example direction of magnetization of each of the ferromagnetic layers is represented by an arrow. For example, an example direction of magnetization of the first ferromagnetic soft bias layer 460 is represented by the arrow 461, and an example direction of magnetization of the second ferromagnetic soft bias layer 470 is represented by the arrow 471. Since the first and second ferromagnetic soft bias layers 460 and 470 are antiferromagnetically coupled through the coupling layer 480 in the example of FIG. 4, the arrows 461 and 471 are pointed in opposite directions. Such antiferromagnetic coupling may also be referred to as negative coupling herein. By contrast, ferromagnetic coupling (i.e. positive coupling) would tend to cause the magnetization direction of the coupled layers to point in the same direction.

[0025] In the simplified schematic representation of FIG. 4, an example magnetization direction of the hard bias structure 406 is represented by the arrow 407 (which points towards the magnetic media in the representation of FIG. 4). An example direction of magnetization of the first ferromagnetic free layer 410 is represented by the arrow 411. An example direction of magnetization of the second ferromagnetic free layer 420 is represented by the arrow 421.

[0026] In the simplified schematic representation of FIG. 4, the first and second ferromagnetic free layers 410 and 420 are preferably ferromagnetically (i.e. positively) coupled through the spacer or barrier layer 430. Consequently, the directions 411 and 421 of the coupled free layers would tend towards being in the same direction (e.g. aligned with the magnetization direction 407 of the hard bias structure 406). However, the magnetic field from the soft bias structure 402 tends to skew the magnetization directions 411 and 421 of the first and second ferromagnetic free layers 410, 420, oppositely, so that they do not point in the same direction. In certain embodiments, the magnetization directions 411 and 421 of the first and second ferromagnetic free layers 410, 420 are preferably skewed by the hard and soft biasing structures to be orthogonal to each other in the quiescent state (i.e. in the absence of any external field applied from the media).

[0027] As a result of the difference in skew between the magnetization directions 411 and 421 of the first and second ferromagnetic free layers 410, 420, an external magnetic field applied from the media (towards or away from the hard bias structure 406) would tend to oppositely rotate the magnetization directions 411 and 421. Such opposite rotation in response to an external magnetic field applied from the media may be termed as a “scissor” mode of operation.

[0028] Note that in the simplified example of FIG. 4, it is contemplated that additional layers may be present in the dual free layer sensor stack 404. For example, the dual free layer sensor stack 404 may include a capping layer 492 and a buffer layer 494 (e.g. Ta, Ti, Cr, Ru, Hf, Cu, or Ag), and/or other layers in addition to the first and second ferromagnetic free layers 410, 420 and the spacer or barrier layer 430. However, the remainder of the description herein focuses on novel examples of the composition and structure of the first and second ferromagnetic free layers of a dual free layer read sensor, and the spacer or barrier layer between them, without excluding the possibility of existence of other layers.

[0029] FIG. 5 depicts a dual free layer sensor laminate 500 according to an embodiment of the present invention. The dual free layer sensor laminate 500 includes a first ferromagnetic free layer 510 that is not magnetically pinned, and a second ferromagnetic free layer 520 that is not magnetically pinned. In certain embodiments, each of the first and second ferromagnetic free layers 510, 520 has a total thickness in the range of 10 to 100 Angstroms. In the embodiment of FIG. 5, the dual free layer sensor laminate 500 includes a non-magnetic spacer layer 530 disposed between the first and second ferromagnetic free layers 510, 520. In certain preferred embodiments, the first and second ferromagnetic free layers 510, 520 are positively (ferromagnetically) coupled, rather than being negatively (anti-ferromagnetically) coupled. Such desired coupling may be provided by the novel example laminates and sub-layer compositions described herein.

[0030] In certain giant magnetoresistive (GMR) embodiments, the non-magnetic spacer layer 530 may comprise a non-ferromagnetic metal (e.g. Cu, Ag, Au, Ta, Ru, Cr, or alloys thereof), and preferably have a thickness in the range of 5 to 100 Angstroms. In certain tunneling magnetoresistive (TMR) embodiments, the non-magnetic spacer layer 530 may comprise an insulative barrier layer (e.g. aluminum oxide, titanium oxide, or magnesium oxide), and preferably have a thickness in the range of 2.5 to 20 Angstroms.

[0031] In the embodiment of FIG. 5, the first ferromagnetic free layer 510 comprises a first plurality of ferromagnetic sub-layers that includes a first cobalt iron sub-layer 512 that is in contact with the non-magnetic spacer layer 530, and a first amorphous cobalt boron sub-layer 514 that is not in contact with the non-magnetic spacer layer 530. Likewise, the second ferromagnetic free layer 520 comprises a second plurality of ferromagnetic sub-layers that includes a second cobalt iron sub-layer 522 that is in contact with the non-magnetic spacer layer 530, and a second amorphous cobalt boron sub-layer 524 that is not in contact with the non-magnetic spacer layer 530.

[0032] In certain embodiments, each of the first and second amorphous cobalt boron sub-layers 514, 524 may have a composition Co_(100−y)B_(y) with y preferably being in the range of 10 to 30 atomic percentage (e.g. 20%). In certain other embodiments, each of the first and second amorphous cobalt boron sub-layers 514, 524 may have a composition Co_{(100−y−z)}Fe_(z)B_(y) with y preferably being in the range of 10 to 30 atomic percentage and z preferably being in the range of 5 to 60 atomic percentage. In certain embodiments, each of the first and second amorphous cobalt boron sub-layers 514, 524 may preferably have a thickness in the range of 5 to 100 Angstroms (e.g. 50 Angstroms).

[0033] In the embodiment of FIG. 5, each of the first and second cobalt iron sub-layers 512, 522 has a composition Co_(100−x)Fe_(x) with x preferably being in the range of 10 to 90 atomic percentage (e.g. 70%). In certain embodiments, each of the first and second cobalt iron sub-layers 512, 522 may have a thickness that is preferably in the range of 3 to 20 Angstroms (e.g. most preferably in the range 4 to 7 Angstroms). In certain embodiments, the foregoing example laminate arrangement, and sub-layer thicknesses and/or compositions, may advantageously provide positive (ferromagnetic rather than anti-ferromagnetic) coupling between the first and second ferromagnetic free layers 510, 520 through the non-magnetic spacer layer 530.

[0034] FIG. 6 depicts a dual free layer sensor laminate 600 according to another embodiment of the present invention. The dual free layer sensor laminate 600 includes a first ferromagnetic free layer 610 that is not magnetically pinned, and a second ferromagnetic free layer 620 that is not magnetically pinned. In certain embodiments, each of the first and second ferromagnetic free layers 610, 620 has a total thickness in the range of 10 to 100 Angstroms. In the embodiment of FIG. 6, the dual free layer sensor laminate 600 includes a non-magnetic spacer layer 630 disposed between the first and second ferromagnetic free layers 610, 620. In certain preferred embodiments, the first and second ferromagnetic free layers 610, 620 are positively (ferromagnetically) coupled, rather than being negatively (anti-ferromagnetically) coupled.

[0035] In certain GMR embodiments, the non-magnetic spacer layer 630 may comprise a non-ferromagnetic metal (e.g. Cu, Ag, Au, Ta, Ru, Cr, or alloys thereof), and preferably have a thickness in the range of 5 to 100 Angstroms. In certain TMR embodiments, the non-magnetic spacer layer 630 may comprise an insulative barrier layer (e.g. aluminum oxide, titanium oxide, or magnesium oxide), and preferably have a thickness in the range of 2.5 to 20 Angstroms.

[0036] In the embodiment of FIG. 6, the first ferromagnetic free layer 610 comprises a first plurality of ferromagnetic sub-layers that includes a first cobalt iron sub-layer 612 that is in contact with the non-magnetic spacer layer 630, and three amorphous cobalt boron sub-layers 614, 616, and 618 that are not in contact with the non-magnetic spacer layer 630. Likewise, the second ferromagnetic free layer 620 comprises a second plurality of ferromagnetic sub-layers that includes a second cobalt iron sub-layer 622 that is in contact with the non-magnetic spacer layer 630, and three amorphous cobalt boron sub-layers 624, 626, and 628 that are not in contact with the non-magnetic spacer layer 630.

[0037] In certain embodiments, each of the amorphous cobalt boron sub-layers 614, 616, 618, 624, 626, and 628 may have a composition Co_(100−y)B_(y) with y preferably being in the range of 10 to 30 atomic percentage (e.g. 20%). In certain other embodiments, each of the amorphous cobalt boron sub-layers 614, 616, 618, 624, 626, and 628 may have a composition Co_{(100−y−z)}Fe_(z)B_(y) with y preferably being in the range of 10 to 30 atomic percentage and z preferably being in the range of 5 to 60 atomic percentage. In certain embodiments, each of the amorphous cobalt boron sub-layers 614, 616, 618, 624, 626, and 628 may preferably have a thickness in the range of 5 to 100 Angstroms (e.g. most preferably in the range 15 to 19 Angstroms).

[0038] In the embodiment of FIG. 6, the amorphous cobalt boron sub-layers 614, 616, 618, 624, 626, and 628 alternate with dusting layers 644, 646, 654, and 656. That is, dusting layer 644 is disposed between the amorphous cobalt boron sub-layers 614 and 616, and dusting layer 646 is disposed between the amorphous cobalt boron sub-layers 616 and 618. Likewise, dusting layer 654 is disposed between the amorphous cobalt boron sub-layers 624 and 626, and dusting layer 656 is disposed between the amorphous cobalt boron sub-layers 626 and 628.

[0039] In certain embodiments, each of the dusting layers 644, 646, 654, and 656 comprises ruthenium. In certain other embodiments, each of the dusting layers 644, 646, 654, and 656 comprises nickel iron having a composition Ni_(100−z)Fe_(z) with z being in the range of 3 to 10 atomic percentage (e.g. 5%). Each of the dusting layers 644, 646, 654, and 656 may preferably have a dusting layer thickness in the range of 0.5 to 10 Angstroms (e.g. 2 Angstroms).

[0040] In the embodiment of FIG. 6, each of the first and second cobalt iron sub-layers 612, 622 has a composition Co_(100−x)Fe_(x) with x preferably being in the range of 10 to 90 atomic percentage (e.g. 70%). In certain embodiments, each of the first and second cobalt iron sub-layers 612, 622 may preferably have a thickness in the range of 3 to 20 Angstroms (e.g. most preferably in the range 4 to 7 Angstroms). In certain embodiments, the foregoing example laminate arrangement, and sub-layer thicknesses and/or compositions, may advantageously provide positive (ferromagnetic rather than anti-ferromagnetic) coupling between the first and second ferromagnetic free layers 610, 620 through the non-magnetic spacer layer 630.

[0041] FIG. 7 depicts a dual free layer sensor laminate 700 according to another embodiment of the present invention. The dual free layer sensor laminate 700 includes a first ferromagnetic free layer 710 that is not magnetically pinned, and a second ferromagnetic free layer 720 that is not magnetically pinned. In certain embodiments, each of the first and second ferromagnetic free layers 710, 720 has a total thickness in the range of 10 to 100 Angstroms. In the embodiment of FIG. 7, the dual free layer sensor laminate 700 includes a non-magnetic spacer layer 730 disposed between the first and second ferromagnetic free layers 710, 720. In certain preferred embodiments, the first and second ferromagnetic free layers 710, 720 are positively (ferromagnetically) coupled, rather than being negatively (anti-ferromagnetically) coupled. In certain GMR embodiments, the non-magnetic spacer layer 730 may comprise a non-ferromagnetic metal (e.g. Cu, Ag, Au, Ta, Ru, Cr, or alloys thereof), and preferably have a thickness in the range of 5 to 100 Angstroms.

[0042] In certain TMR embodiments, the non-magnetic spacer layer 730 is an insulative barrier layer (e.g. aluminum oxide, titanium oxide, or magnesium oxide), and preferably has a thickness in the range of 2.5 to 20 Angstroms. In such TMR embodiments the insulative barrier layer 730 may be formed by natural oxidation of a metal (e.g. magnesium) in a low-pressure atmosphere (e.g. ˜0.5 mTorr) of O₂ or Ar/O₂ mixture (e.g. 9:1 mixture of argon and oxygen). Specifically, upon completion of the deposition of the first ferromagnetic free layer 710, iterative cycles of metal deposition and oxidation may be employed to form the insulating barrier 730. The insulating barrier 730 may then be in-situ annealed at an intermediate temperature for a short time (e.g. 200° C. for 5 min). After heat treatment, a thin metal layer of the like (e.g. 1.5 Angstrom layer of magnesium) may be added to the insulative barrier layer 730 to cap it. Next, the insulating barrier 730 may be cooled down to a well below room temperature (e.g. 120° K). Such cooling may facilitate subsequent deposition of the second ferromagnetic free layer 720 by altering bulk and surface properties and temperature of the insulating barrier 730 upon which the second ferromagnetic free layer 720 is grown. In certain embodiments, this process may enhance the interlayer coupling between the first and second ferromagnetic free layers 710 and 720, and/or beneficially increase the tunneling magnetoresistive ratio.

[0043] In the embodiment of FIG. 7, the first ferromagnetic free layer 710 comprises a first plurality of ferromagnetic sub-layers that includes a first cobalt iron sub-layer 712 that is in contact with the non-magnetic spacer layer 730, a first amorphous cobalt boron sub-layer 714 that is not in contact with the non-magnetic spacer layer 730, a NiFe layer 718, and a dusting layer 744 that is disposed between the NiFe layer 718 and the first amorphous cobalt boron sub-layer 714. Likewise, the second ferromagnetic free layer 720 comprises a second plurality of ferromagnetic sub-layers that includes a second cobalt iron sub-layer 722 that is in contact with the non-magnetic spacer layer 730, and a second amorphous cobalt boron sub-layer 724 that is not in contact with the non-magnetic spacer layer 730, a NiFe layer 728, and a dusting layer 754 that is disposed between the NiFe layer 728 and the second amorphous cobalt boron sub-layer 724.

[0044] In certain embodiments, each of the first and second amorphous cobalt boron sub-layers 714, 724 may have a composition Co_(100−y)B_(y) with y preferably being in the range of 10 to 30 atomic percentage (e.g. 20%). In certain other embodiments, each of the first and second amorphous cobalt boron sub-layers 714, 724 may have a composition Co_{(100−y−z)}Fe_(z)B_(y) with y preferably being in the range of 10 to 30 atomic percentage and z preferably being in the range of 5 to 60 atomic percentage. In certain embodiments, each of the first and second amorphous cobalt boron sub-layers 714, 724 may preferably have a thickness in the range of 5 to 100 Angstroms (e.g. 20 Angstroms).

[0045] In certain embodiments, each of the dusting layers 744 and 754 comprises iron or tantalum, and preferably has a dusting layer thickness in the range of 0.5 to 10 Angstroms (e.g. 2 Angstroms). In certain embodiments, each of the NiFe layers 718 and 728 is composed predominantly of nickel and has a thickness in the range of 30 to 70 Angstroms (e.g. 50 Angstroms).

[0046] In the embodiment of FIG. 7, each of the first and second cobalt iron sub-layers 712, 722 has a composition Co_(100−x)Fe_(x) with x preferably being in the range of 10 to 90 atomic percentage (e.g. 70%). In certain embodiments, each of the first and second cobalt iron sub-layers 712, 722 may have a thickness that is preferably in the range of 3 to 20 Angstroms (e.g. 4 Angstroms). In certain embodiments, the foregoing example laminate arrangement, and sub-layer thicknesses and/or compositions, may advantageously provide positive (ferromagnetic rather than anti-ferromagnetic) coupling between the first and second ferromagnetic free layers 710, 720 through the non-magnetic spacer layer 730.

[0047] In the foregoing specification, the invention is described with reference to specific exemplary embodiments, but those skilled in the art will recognize that the invention is not limited to those. It is contemplated that various features and aspects of the invention may be used individually or jointly and possibly in a different environment or application. The specification and drawings are, accordingly, to be regarded as illustrative and exemplary rather than restrictive. For example, the word “preferably,” and the phrase “preferably but not necessarily,” are used synonymously herein to consistently include the meaning of “not necessarily” or optionally. The drawings are not necessarily to scale. “Comprising,” “including,” and “having,” are intended to be open-ended terms.