US D1,145,726 S1Grant
Cover ring for use in a semiconductor processing chamber
Issue Date:2026-09-01
•1 Claims
•5 Drawing Sheets
Abstract
Metadata
Assignee
- Applied Materials Inc.
Inventors
- Abhishek Chowdhury
- Harisha Sathyanarayana
- Edwin C. Suarez
- Siqing Lu
- Nataraj Bhaskar Rao
Application Information
Application Number:US 29/949,945
Filing Date:2024-06-28
Priority Date:2020-11-18
Art Unit:2972
Classifications
Field of Search:
H10P 72/7412H10P 72/7426H10P 72/7424H10P 72/74C23C 14/50A21B 2/00A21B 3/00H10W 90/10
Patent Drawings (5 sheets)
Description
[0001] FIG. 1 is a bottom isometric view of a cover ring for use in a semiconductor processing chamber in accordance with some embodiments.
[0002] FIG. 2 is a top plan view thereof.
[0003] FIG. 3 is a bottom plan view thereof.
[0004] FIG. 4 is a front elevation view thereof.
[0005] FIG. 5 is a back elevation view thereof.
[0006] FIG. 6 is a right side elevation view thereof; and,
[0007] FIG. 7 is a left side elevation view thereof.
[0008] The broken lines in the drawings illustrate portions of the cover ring for use in a semiconductor processing chamber that form no part of the claimed design.
Claims
CLAIM
The ornamental design for a cover ring for use in a semiconductor processing chamber, as shown and described.
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