Multi-layer gate dielectric

[0001] This application is a continuation of co-pending U.S. patent application Ser. No. 12/615,938 filed Nov. 10, 2009, entitled “A MULTI-LAYER GATE DIELECTRIC”, which is a continuation of U.S. patent application Ser. No. 09/109,261 filed Jun. 30, 1998 now abandoned, entitled “A MULTI-LAYER GATE DIELECTRIC”

[0002] 1. Field of the Invention

[0003] The invention relates to integrated circuit devices and more particularly to enhancing dielectric material in those device.

[0004] 2. Description of Related Art

[0005] One way to improve integrated circuit performance is through scaling the individual devices that comprise the integrated circuit. Thus, each subsequent generation of integrated circuit generally involves reducing the size of the individual devices on, for example, a semiconductor chip. The Morse rule is a common benchmark in the integrated circuit technology and provides that devices will be scaled down or reduced in size by one-third for each new generation.

[0006] The scale of a transistor device requires consideration of the desired performance of the device. For example, one goal may be to increase the current flow in the semiconductor material of the transistor. The current flow is proportional to the voltage applied to the gate electrode and the capacitance seen at the gate:
Q∝C(V−V_th)
where Q is one measure of the current flow, C is capacitance, V is the voltage applied to the gate electrode, and V_th is the threshold voltage of the device.

[0007] To increase the voltage applied to a device requires an increase in power, P (P∝V²). However, at the same time as increasing the charge in the transistor, subsequent generations also seek to reduce the power required to run the device, since, importantly, a reduction of power reduces the heat generated by the device. Thus, to increase the current flow through the device without increasing the power requires an increase in the capacitance in the gate.

[0008] One way to increase the capacitance is by adjusting the thickness of the gate dielectric. In general, the capacitance is related to the gate dielectric by the following formula:
C=k_ox/t_electrical
where k_ox is the dielectric constant of silicon dioxide (SiO₂) and t_electrical is the electrical thickness of the gate dielectric. The electrical thickness of the gate dielectric is greater than the actual thickness of the dielectric in most semiconductor devices. In general, as carriers flow through the channel of a semiconductor-based transistor device there is a quantum effect experienced in the channel which causes an area directly below the gate to become insulative. The insulative region acts like an extension of the gate dielectric by essentially extending the dielectric into a portion of the channel. The second cause of increase gate dielectric thickness attributable to t_electrical is experienced by a similar phenomenon happening in the gate electrode itself. At inversion, a gate electrode of polysilicon, for example, will generally experience a depletion of carriers in the area of the polysilicon near the gate dielectric. Accordingly, the gate dielectric appears to extend into the polysilicon gate electrode.

[0009] The result of the quantum effect in the channel and a depletion in the polysilicon gate electrode is an electrical thickness (t_electrical) of the gate dielectric greater than the actual thickness of the gate dielectric. The magnitude of the channel quantum effect and polysilicon depletion may be estimated or determined for a given technology. Accordingly, the electrical thickness (t_electrical) for a SiO₂ may be calculated and scaled for a given technology.

[0010] In considering the capacitance effects of the gate dielectric, a consideration of the thickness of gate dielectric is important for other reasons. First, the gate dielectric cannot be too thin as a thin gate dielectric will allow a leakage current from the channel through the gate electrode. At the same time, the gate dielectric cannot be too thick because such a gate structure may produce an undesirable fringe electric field. The desired electric field at the gate is typically perpendicular to the surface of the semiconductor substrate. Beyond a certain gate dielectric thickness, generally thought to be beyond one-third the lateral width of the gate electrode for a SiO₂ gate dielectric, the electrical field deviates from a perpendicular course and sprays about the gate electrode leading to an undesirable fringe electric field.

[0011] What is needed is a way to increase the capacitance of a gate dielectric without decreasing the performance of the device. It is preferable if the increased capacitance is consistent with scaling techniques and may be used in multiple generation technologies.

[0012] A transistor gate dielectric is disclosed. The transistor gate dielectric includes a first dielectric material having a first dielectric constant and a second dielectric material having a second dielectric constant different from the first dielectric constant.

[0014] The invention relates to a transistor gate dielectric made up of at least two different dielectric materials. For example, one embodiment contemplates a gate dielectric made up of two different dielectric materials each with its own dielectric constant. The dielectric material nearest the substrate, e.g., a semiconductor substrate will have a modest dielectric constant that produces a defect-free interface with the substrate and is stable against oxide formation. The second dielectric material will have a relatively high dielectric constant and be stable in contact with the desired gate material. By varying the thickness of the material, a gate dielectric can be formed that is scalable for different technology generations, has a low leakage current, and maintains an electric field of the gate perpendicular to the surface of the semiconductor. A transistor gate utilizing the multi-layer gate dielectric is also disclosed.

[0015] FIG. 1 illustrates an embodiment of the multi-layer gate dielectric of the invention. FIG. 1 shows transistor 100 consisting of gate electrode 110 overlying gate dielectric 140. Gate electrode 110 and gate dielectric 140 overlie semiconductor substrate 105 such as, for example, a silicon semiconductor substrate. Formed in substrate 105 adjacent transistor gate electrode 110 are diffusion or junction regions 160. The transistor is isolated from other devices, in this example, by shallow trench isolation structures 150.

[0016] Gate dielectric 140 is made up of, in this example, a bi-layer gate dielectric stack. The gate dielectric material is deposited by conventional techniques such as chemical vapor deposition or other deposition techniques according to the specifics of the material. The individual dielectric materials that make up the gate dielectric stack are patterned using conventional techniques such as masking and etching.

[0017] In one embodiment, the bottom dielectric layer 130 is selected to have a modest dielectric constant, k₁, that forms a generally defect-free interface with substrate 105. A generally defect-free interface is one that has a sufficiently high (e.g., >8 MV/cm) dielectric breakdown strength implying that the dielectric layer is pin-hole free and contains a negligible number of defects that would lead to breakdown of the dielectric layer at lower electric fields. Bottom dielectric layer 130 should also be stable on silicon and stable against oxide formation. In one embodiment, bottom dielectric layer 130 materials are chosen that have a heat of formation greater than the heat of formation of SiO₂. The chemistry in terms of stability of bottom layer 130 is important to achieve the low defect interface. Examples of suitable bottom dielectric layer 130 include, but are not limited to, hafnium oxide (HfO₂), zirconium oxide (ZrO₂), barium oxide (BaO), lanthanum oxide (La₂O3), and yttrium oxide (Y₂O₃).

[0018] In this embodiment, top dielectric layer 120 is selected to have a relatively high dielectric constant, k₂, and is a material that is stable in contact with gate electrode 110. Examples of suitable top dielectric layers are BaSrTiO₃ (BST) and PbZrTiO₃ (PZT). One function of top dielectric layer 120 is to block any leakage current through bottom dielectric layer 130, without adding to the equivalent thickness of gate dielectric 140 (i.e., equivalent thickness of an SiO₂ gate dielectric) and contributing to the production of a fringe electric field.

[0019] One guideline to select the appropriate dielectric layer thickness t₁ for bottom dielectric layer 130, and t₂ for top dielectric layer 120, is the following. For a given technology generation (i.e., a given gate length of gate electrode 110 and equivalent oxide thickness of a SiO₂ gate dielectric, t_ox), a total thickness, t, of gate dielectric 140 should be less than one-third of the gate length of gate electrode 110. The effective dielectric constant, k, may then be determined by the following relationship:
k=k_ox(t/t_ox)  (1)
wherein k_ox is the dielectric constant of SiO₂ which is typically represented as 4.0.

[0020] Combining the above relationship with a relationship for calculating the effective dielectric constant of gate dielectric 140 of the following:
k=t/(t₁/k₁+t₂/k₂),  (2)
the total thickness of dielectric layer 140 may be calculated:
t=t₁+t₂.  (3)
Combining equations (1), (2), and (3) yields the following:
t₁/k₁+t₂/k₂=t_ox/k_ox.  (4)
Equation (4) is then solved for a thickness of bottom dielectric layer 130 having a known dielectric constant, k₁, and top dielectric layer 120 also having a known dielectric constant, k₂. Table I shows the individual thicknesses of first dielectric layer 130 (t₁) and second dielectric layer 120 (t₂) for various technologies scaled by the Morse rule starting with a gate electrode length of 150 nanometers, for a k₁ of 30 and a k₂ of 300.

[0021] Table I demonstrates that a multi-layer dielectric gate stack, in this case, a bi-layer dielectric gate stack, is scalable for a given technology. For example, for each technology, given a first dielectric layer 130 having a dielectric constant k₁ of 30 and a second dielectric layer 120 having a dielectric constant k₂ of 300, a total gate dielectric layer thickness less than one-third of the individual gate lengths is maintained. Further, the choice of second gate dielectric layer 120 of material to block the leakage current maintains the performance of the device. Finally, by manipulating the gate dielectric materials, the capacitance of the device may be appropriately increased for the given technology.

[0022] For a gate electrode 110 that is polysilicon, a third dielectric layer may be utilized to act as a barrier layer to prevent interaction between top dielectric layer 120 materials having high dielectric constants and the polysilicon gate material. Suitable third dielectric materials include, but are not limited to, HfO₂, ZrO₂, BaO, La₂O₃, and Y₂O₃ (notably the same materials suitable as bottom dielectric layer 130).

[0023] The above example is described with respect to gate electrode 110 being a polysilicon. It is to be appreciated that the same principles may be applied to gate electrodes of different materials, such as, for example, metal gates. In the case of a metal gate electrode, the electrical thickness (t_electrical) may be reduced since, in general, metal gate electrodes do not experience the depletion seen by polysilicon. Table I also shows the scaling of the bi-layer dielectric materials discussed above using metal gate technology.

[0024]

TABLE I
Technology
Generation	1	2	3	4	5	6
Lgate (nm)	150	100	70	50	35	25
t_electrical (Å)	30	21	15	10	7	5
t_ox (Å): metal gate	26	17	11	6	3	1
t (Å): total stack thick	300	210	147	103	72	50
t1 (Å), k1 = 30	183	118	75	39	17	3
t2 (Å), k2 = 300	117	92	72	64	55	48

[0025] In the preceding detailed description, the invention is described with reference to specific embodiments thereof. It will, however, be evident that various modifications and changes may be made thereto without departing from the broader spirit and scope of the invention as set forth in the claims. The specification and drawings are, accordingly, to be regarded in an illustrative rather than a restrictive sense.