US 8,124,994 B2Grant
Electrical current distribution in light emitting devices
Issue Date:2012-02-28
•8 Claims
•9 Drawing Sheets
Abstract
A light emitting device is disclosed that has a plurality of epitaxial layers including an active layer, at least one of a reflective layer and an ohmic contact on a first side of the epitaxial layers; and a layer of a conductive metal on a second side of the epitaxial layers and having a light emitting surface. A terminal is on the light emitting surface, the terminal comprising an array for diffusing electrical current and minimizing its effect on light output. The array may have a bonding pad, an outer portion, and a joining portion connecting the bonding pad and the outer portion; the outer portion and the joining portion being for current dissipation.
Metadata
Assignee
- Tinggi Technologies Private Limited
Inventors
- Shu Yuan
- Shiming Lin
Application Information
Application Number:US 12/440,019
Filing Date:2007-09-04
Priority Date:2006-09-04
Art Unit:2891
Classifications
IPC:
H01L33/00H01L21/00
Patent Drawings (9 sheets)
Description
Cross Reference to Related Applications
[0001] This patent application is a U.S. National Phase application under 35 U.S.C. §371 of International Application No. PCT/SG2007/000288, filed on Sep. 4, 2007, entitled ELECTRICAL CURRENT DISTRIBUTION IN LIGHT EMITTING DEVICES, which claims priority to Singapore patent application number 200606050-3, filed Sep. 4, 2006.
Field of the Invention
[0002] This invention relates to electrical current distribution in light emitting devices and refers particularly, through not exclusively, to apparatus for spreading the electrical current so as to maximize light output.
Reference to Related Application
[0003] Reference is made to earlier Singapore patent application 200506301-1 filed 29 Sep. 2005, the contents of which are incorporated herein by reference as if disclosed herein in their entirely.
Backgroud of the Invention
[0004] In most light emitting devices such as for example, light emitting diodes and laser diodes, bonding pads occupy about 15% of the surface area of the light emitting surface. Where the bonding pad is located, light cannot be emitted.
[0005] Also, as the electrical current flows from the bonding pad to the active region and will follow the path of least resistance (normally the shortest path, in uniform materials) the maximum current flow, and thus maximum light output, is beneath the bonding pad. This results in a significant reduction in the light output.
Summary of the Invention
[0006] In accordance with a first preferred aspect there is provided a light emitting device comprising a plurality of epitaxial layers including an active layer; at least one of a reflective layer and an ohmic contact on a first side of the epitaxial layers; and a layer of a conductive metal on a second side of the epitaxial layers and having a light emitting surface. A terminal is on the light emitting surface. The terminal has an array for diffusing electrical current and minimizing its effect on light output.
[0007] The array may comprise a bonding pad, an outer portion, and a joining portion connecting the bonding pad and the outer portion; the outer portion and the joining portion being for current dissipation. The outer portion may be at or adjacent a periphery of the light emitting surface. The joining portion may comprise a plurality of spokes joining the bonding pad and the outer portion.
[0008] There may be a second reflective layer between the array and the light emitting surface. Alternatively, the second reflective layer may be at a bottom of a trench in the light emitting surface.
[0009] In accordance with a second preferred aspect there is provided a method of fabricating a light emitting device. The light emitting device has a plurality of epitaxial layers including an active layer, a reflective layer on a first side of the epitaxial layers, and a conductive metal on a second side of the epitaxial layers. The method includes forming a terminal on a light emitting surface of the conductive metal, the terminal having an array for diffusing electrical current and minimizing its effect on light output.
[0010] The forming of the array may be by forming a bonding pad, an outer portion, and a joining portion electrically connecting the bonding pad and the outer portion; the outer portion and the joining portion being for current dissipation. The outer portion may be at or adjacent a periphery of the light emitting surface. The joining portion may comprise a plurality of spokes joining the bonding pad and the outer portion.
[0011] The method may further comprise forming second reflective layer on the light emitting surface before forming the array on the second reflective layer.
[0012] Alternatively, the method may further comprise forming trench in the tight emitting surface, forming a second reflective layer at a bottom of the trench, the array being formed on the second reflective layer.
Brief Description of the Drawings
[0013] In order that the present invention may be fully understood and readily put into practical effect, there shall now be described by way of non-limitative example only preferred embodiments of the present invention, the description being with reference to the accompanying illustrative drawings.
[0014] In the drawings:
[0015] FIG. 1 is a schematic side view of a light emitting device;
[0016] FIG. 2 is a schematic side view of a preferred embodiment of a light emitting device;
[0017] FIG. 3 is a stop pan view of the device of FIG. 2 ;
[0018] FIG. 4 is a vertical cross-section along the lines and in the direction of arrows 4-4 on FIG. 3 ; and
[0019] FIG. 5 is an enlarged view of the trench of FIG. 4 ;
[0020] FIG. 6 is an alternative to the arrangement of FIG. 5 ;
[0021] FIGS. 7 to 13 are series of views corresponding to FIG. 4 showing the fabrication of the device of FIGS. 2 to 4 .
Detailed Description of the Preferred Embodiments
[0022] To first refer to FIG. 1 there is shown a light emitting device 101 such as, for example, a light emitting diode or a laser diode, and having a reflective layer and/or ohmic contact 103 on a first side of a plurality of epitaxial layers including an active region 102. A conductive metal layer 104 is on a second side of the epitaxial layers. The reflective layer 103 may be on the epitaxial layers and the ohmic contact on the reflective layer, or vice versa. There may be only one of them. A bonding pad 105 is provided on the light output surface 107. The electrical current flows in the metal layer 104 to the active layer 102 by the paths as shown with the dotted lines on FIG. 1 . As can be seen, the maximum electrical current is concentrated under the bond pad 105. That means the maximum light emitted by the active layer 102 (as shown by the sold lines) will also be concentrated under the bonding pad 105. Such light will be reflected back into layer 104 by the bonding pad 105. This significantly reduces the light output.
[0023] FIGS. 2 to 4 show a preferred embodiment where like reference numerals are used for like components but the prefix number “1” is changed to “2”. Here, the bonding pad 105 is replaced by a terminal layer 215.
[0024] The terminal layer 215 comprises an array 214 of electrically conductive material, preferably the same material as the bonding pad 205, and which is electrically connected to both the bonding pad 205 and the light output surface 207. The array 214 is distributed over the surface 207 so that electrical current will flow from the terminal layer 215 to the active region 202 in a diffused or distributed manner.
[0025] The array 214 preferably has the bonding pad 205 as its center so the distribution of the array 214 is relatively uniform over the surface 207. Also, it is preferred for the array 214 to be of reduced height when compared with the bonding pad 205.
[0026] As shown, the array 214 comprises an outer portion 206 that is at or adjacent the periphery of surface 207. This is to provide for light emission from at, and adjacent to, the periphery of active region 202. Electrically and physically connecting the outer portion 206 and the bonding pad 205 is a joining portion 208 that is, in this case, four equally-spaced radial “spokes” extending from the bonding pad 205 to the outer portion 206. All spokes 208 are preferably identical, and are more preferably of the same height and width as the outer portion 206. Although four spokes 208 are shown in a cruciform shape, there may be any suitable number of spokes such as, for example, one, two, three, four, five, six, and so forth.
[0027] Between the spokes 208 and the outer portion 206 are light-emitting openings 209 for emission of light from light output surface 207.
[0028] The outer portion 206 and/or each spoke 208 or array 214 may be located in a trench 211 formed in the light output surface 207. The trench 211 may have a reflective layer 212 at its bottom 213 so that light propagated by active region 202 under the array 214 will be more efficiently reflected by reflective layer 212. The reflective layer 212 may have a diffusing surface so that light will be reflected from it an angle other than perpendicular. The reflective layer 212 is electrically conductive to enable electric current to pass from array 214 to the active region 202. The reflecting layer 212 is preferably of the same shape and dimensions on surface 207 as the array 214.
[0029] As shown in FIG. 6 , the trench 211 may not be used and the reflective layer 212 may be applied directly to the light output surface 207 beneath array 214.
[0030] FIGS. 7 to 13 show the process. These are FIGS. 11 to 17 of the related application, and are the process step after the original sapphire substrate 4 is removed.
[0031] As shown in FIG. 8 , after removal of the sapphire substrate 4, the devices are isolated from each other by trench etching from the newly exposed surface 13 along the edges of the mesa, as shown in FIGS. 8 to 10 , with a photoresist layer 6(d) protecting the regions of the n-type GaN layer 3 during the etching process.
[0032] Alternatively, the lowermost surface 13 of the n-type layer 3 may be cleaved at locations in alignment with the photoresists 12 and the dies separated. This is of advantage for laser diodes as the exposed side surfaces of the n-type layer 3 are substantially parallel, thus causing a large amount of total internal reflection. This acts as a light amplification system for improved, and directed light, output.
[0033] Pad etching takes place after applying a fifth resist layer 6(e) over the exposed surfaces of SiO2 layer 8, the sides of the n-type GaN layer 3, and the center of the n-type GaN layer 3 [FIGS. 9( a) and (b)] thus forming projecting portions 14 and recess portions 15 of n-type GaN layer 3.
[0034] The resist 6(e) is the removed and a further resist 6(f) applied over the exposed surfaces of the n-type GaN layer 3 and the outer periphery of the SiO2 layer 8 to thus leave a gap 16 for die isolation. Etching takes place (FIG. 10 ) through the gap 16 and the SiO2 layer 8, and seed layer 11 until the ends of the thick photoresists 12 are exposed. The resist 6(f) is removed.
[0035] A final resist layer 6(g) is applied over all exposed lower-surfaces from the edge of the SiO2 layer 8 through to adjacent the center of the n-type GaN layer 3, where a central gap 17 remains (FIG. 11 ).
[0036] An array 214 of layer or layers 18 of n-type metals are then applied over the resist 6(g) with the layer 18 at the gap 17 at the center of the n-type GaN layer 3 being applied directly to the GaN layer 3 (FIG. 12 ). The resist layer 6(g) with the layer 18 attached, is removed leaving the layer 18 attached to the center 17 of the n-type GaN layer 3 where gap 17 was previously located.
[0037] In this way the seed layers 11, 10, 9 and the copper layer 9(a) act as reflectors to increase light output, with copper layer 9(a) being one terminal, thus not interfering with light output. The second terminal is layer 18 in array 214 on the n-type layer 3 of GaN and this is an array at and/or around the center of that layer 3, thus minimizing its effect on light output, and increasing the diffusion of current.
[0038] Whilst there has been described in the foregoing description preferred embodiments of the present invention, it will be understood by those skilled in the technology concerned that many variations or modifications in details of design or construction may be made without departing from the present invention.
Claims
What is claimed is:
1. A light emitting device comprising:
a plurality of epitaxial layers including an active layer;
a reflective layer on a first side of the epitaxial layers;
a layer of a conductive metal on a second side of the epitaxial layers and having a light emitting surface;
a terminal comprising an array on the light emitting surface, the array being for diffusing electrical current and minimizing its effect on light output; and
a second reflective layer of a same shape and dimensions as the array, the second reflective layer being beneath the array on the light emitting surface or at a bottom of a trench in the light emitting surface, the second reflective layer being for reflecting light propagated by the active layer under the array and being electrically conductive to enable electric current to pass from the array to the active layer, the second reflective layer including a diffusing surface to reflect the light propagated by the active layer at an angle other than perpendicular to the reflective layer.
2. The light emitting device as claimed in claim 1, wherein the array comprises a bonding pad, an outer portion, and a joining portion connecting the bonding pad and the outer portion; the outer portion and the joining portion being for current dissipation.
3. The light emitting device as claimed in claim 2, wherein the outer portion is at or adjacent a periphery of the light emitting surface.
4. The light emitting device as claimed in claim 2, wherein the joining portion comprises a plurality of spokes joining the bonding pad and the outer portion.
5. A method of fabricating a light emitting device comprising a plurality of epitaxial layers including an active layer, a reflective layer on a first side of the epitaxial layers and a conductive metal on a second side of the epitaxial layer, the conductive metal having a light emitting surface; the method comprising:
forming a second reflective layer on the light emitting surface or at a bottom of a trench in the light emitting surface; and
forming a terminal comprising an array on the second reflective layer, the array being for diffusing electrical current and minimizing its effect on light output;
the second reflective layer being of a same shape and dimensions as the array, the second reflective layer also for reflecting light propagated by the active layer under the array and being electrically conductive to enable electric current to pass from the array to the active layer, and the second reflective layer including a diffusing surface to reflect light propagated by the active layer at an angle other than perpendicular to the reflective layer.
6. The method in claim 5, wherein the forming of the array is by forming a bonding pad, an outer portion, and a joining portion electrically connecting the bonding pad and the outer portion; the outer portion and the joining portion being for current dissipation.
7. The method as claimed in claim 6, wherein the outer portion is at or adjacent a periphery of the light emitting surface.
8. The method as claimed in claim 6, wherein the joining portion comprises a plurality of spokes joining the bonding pad and the outer portion.
Patent Citations (157)
| Patent | Date | Inventor | Cited By |
|---|---|---|---|
| US3897627(A) | 1975-08-01 | Klatskin | Applicant |
| US4107720(A) | 1978-08-01 | Pucel et al. | Applicant |
| US5192987(A) | 1993-03-01 | Khan et al. | Applicant |
| US5405804(A) | 1995-04-01 | Yabe | Applicant |
| US5654228(A) | 1997-08-01 | Shieh et al. | Applicant |
| US5719433(A) | 1998-02-01 | Delage et al. | Applicant |
| US5811927(A) | 1998-09-01 | Anderson et al. | Applicant |
| US5879862(A) | 1999-03-01 | Roh | Applicant |
| US6020261(A) | 2000-02-01 | Weisman | Applicant |
| US6091085(A) | 2000-07-01 | Lester | Applicant |
| US6169297(B1) | 2001-01-01 | Jang et al. | Applicant |
| US6210479(B1) | 2001-04-01 | Bojarczuk et al. | Applicant |
| US6259156(B1) | 2001-07-01 | Kohno et al. | Applicant |
| US6303405(B1) | 2001-10-01 | Yoshida et al. | Applicant |
| US6307218(B1) | 2001-10-01 | Steigerwald et al. | Applicant |
| US6319778(B1) | 2001-11-01 | Chen et al. | Applicant |
| US6365429(B1) | 2002-04-01 | Kneissl et al. | Applicant |
| US6380564(B1) | 2002-04-01 | Chen et al. | Applicant |
| US6420242(B1) | 2002-07-01 | Cheung et al. | Applicant |
| US6420732(B1) | 2002-07-01 | Kung et al. | Applicant |
| US6426512(B1) | 2002-07-01 | Ito et al. | Applicant |
| US6448102(B1) | 2002-09-01 | Kneissl et al. | Applicant |
| US6455870(B1) | 2002-09-01 | Wang et al. | Applicant |
| US6492661(B1) | 2002-12-01 | Chien et al. | Applicant |
| US6509270(B1) | 2003-01-01 | Held | Applicant |
| US6562648(B1) | 2003-05-01 | Wong et al. | Applicant |
| US6573537(B1) | 2003-06-01 | Steigerwald et al. | Applicant |
| US6586875(B1) | 2003-07-01 | Chen et al. | Applicant |
| US6589857(B2) | 2003-07-01 | Ogawa et al. | Applicant |
| US6627921(B2) | 2003-09-01 | Wong et al. | Applicant |
| US6627989(B2) | 2003-09-01 | Kohno et al. | Applicant |
| US6649437(B1) | 2003-11-01 | Yang et al. | Applicant |
| US6677173(B2) | 2004-01-01 | Ota | Applicant |
| US6821804(B2) | 2004-11-01 | Thibeault et al. | Applicant |
| US7338822(B2) | 2008-03-01 | Wu et al. | Applicant |
| US7348212(B2) | 2008-03-01 | Schiaffino et al. | Applicant |
| US2001/0055324(A1) | 2001-12-01 | Ota | Applicant |
| US2002/0022286(A1) | 2002-02-01 | Nikolaev et al. | Applicant |
| US2002/0034835(A1) | 2002-03-01 | Chen et al. | Applicant |
| US2002/0093023(A1) | 2002-07-01 | Camras et al. | Applicant |
| US2002/0113279(A1) | 2002-08-01 | Hanamaki et al. | Applicant |
| US2002/0117681(A1) | 2002-08-01 | Weeks et al. | Applicant |
| US2002/0134985(A1) | 2002-09-01 | Chen et al. | Applicant |
| US2002/0137243(A1) | 2002-09-01 | Chen et al. | Applicant |
| US2002/0179910(A1) | 2002-12-01 | Slater, Jr. | Applicant |
| US2003/0038284(A1) | 2003-02-01 | Kurahashi et al. | Applicant |
| US2003/0064535(A1) | 2003-04-01 | Kub et al. | Applicant |
| US2003/0111667(A1) | 2003-06-01 | Schubert | Applicant |
| US2003/0151357(A1) | 2003-08-01 | Uemura | Applicant |
| US2003/0178626(A1) | 2003-09-01 | Sugiyama et al. | Applicant |
| US2003/0189212(A1) | 2003-10-01 | Yoo | Applicant |
| US2003/0189215(A1) | 2003-10-01 | Lee et al. | Applicant |
| US2003/0218179(A1) | 2003-11-01 | Koide et al. | Applicant |
| US2004/0026709(A1) | 2004-02-01 | Bader et al. | Applicant |
| US2004/0031967(A1) | 2004-02-01 | Fudeta et al. | Applicant |
| US2004/0033638(A1) | 2004-02-01 | Bader et al. | Applicant |
| US2004/0065889(A1) | 2004-04-01 | Ueda et al. | Applicant |
| US2004/0104395(A1) | 2004-06-01 | Hagimoto et al. | Applicant |
| US2004/0110395(A1) | 2004-06-01 | Ueda et al. | Applicant |
| US2004/0130037(A1) | 2004-07-01 | Mishra et al. | Applicant |
| US2004/0144991(A1) | 2004-07-01 | Kikkawa | Applicant |
| US2004/0217362(A1) | 2004-11-01 | Slater, Jr. et al. | Applicant |
| US2004/0235210(A1) | 2004-11-01 | Tamura et al. | Applicant |
| US2005/0014303(A1) | 2005-01-01 | Tsai et al. | Applicant |
| US2005/0026399(A1) | 2005-02-01 | Chien et al. | Applicant |
| US2005/0035354(A1) | 2005-02-01 | Lin et al. | Applicant |
| US2005/0082555(A1) | 2005-04-01 | Chien et al. | Applicant |
| US2005/0087884(A1) | 2005-04-01 | Stokes et al. | Applicant |
| US2005/0093002(A1) | 2005-05-01 | Tsai et al. | Applicant |
| US2005/0098792(A1) | 2005-05-01 | Lee et al. | Applicant |
| US2005/0127397(A1) | 2005-06-01 | Borges et al. | Applicant |
| US2005/0142875(A1) | 2005-06-01 | Yoo | Applicant |
| US2005/0164482(A1) | 2005-07-01 | Saxlar | Applicant |
| US2005/0173692(A1) | 2005-08-01 | Park et al. | Applicant |
| US2006/0006554(A1) | 2006-01-01 | Yoo et al. | Applicant |
| US2006/0099730(A1) | 2006-05-01 | Lee et al. | Applicant |
| US2006/0124939(A1) | 2006-06-01 | Lee et al. | Applicant |
| US2006/0151801(A1) | 2006-07-01 | Doan et al. | Applicant |
| US2006/0154390(A1) | 2006-07-01 | Tran et al. | Applicant |
| US2006/0154391(A1) | 2006-07-01 | Tran et al. | Applicant |
| US2006/0154392(A1) | 2006-07-01 | Tran et al. | Applicant |
| US2006/0154393(A1) | 2006-07-01 | Doan et al. | Applicant |
| US2006/0157721(A1) | 2006-07-01 | Tran et al. | Applicant |
| US2006/0163586(A1) | 2006-07-01 | Denbaars et al. | Applicant |
| US2006/0186418(A1) | 2006-08-01 | Edmond et al. | Applicant |
| US2007/0029541(A1) | 2007-02-01 | Xin et al. | Applicant |
| US2008/0164480(A1) | 2008-07-01 | Kang et al. | Applicant |
| US2008/0210970(A1) | 2008-09-01 | Kang et al. | Applicant |
| US2008/0265366(A1) | 2008-10-01 | Guo et al. | Applicant |
| CN1373522(A) | 2002-10-01 | Applicant | |
| EP1061590(A1) | 2000-12-01 | Applicant | |
| EP1139409(A2) | 2001-10-01 | Applicant | |
| EP1326290(A2) | 2003-07-01 | Applicant | |
| EP1502284(A2) | 2005-02-01 | Applicant | |
| EP1693891(A2) | 2006-08-01 | Applicant | |
| JP50-074876 | 1975-06-01 | Applicant | |
| JP52-055480 | 1977-05-01 | Applicant | |
| JP59-112667 | 1984-06-01 | Applicant | |
| JP63-095661 | 1988-04-01 | Applicant | |
| JP4-078186 | 1992-03-01 | Applicant | |
| JP5-291621 | 1993-11-01 | Applicant | |
| JP7-326628 | 1995-12-01 | Applicant | |
| JP10-117016 | 1998-05-01 | Applicant | |
| JP2000-164928 | 2000-06-01 | Applicant | |
| JP2000-183400 | 2000-06-01 | Applicant | |
| JP2000-277804 | 2000-10-01 | Applicant | |
| JP2000-294837 | 2000-10-01 | Applicant | |
| JP2001-035974 | 2001-02-01 | Applicant | |
| JP2001-036129 | 2001-02-01 | Applicant | |
| JP2001-049491 | 2001-02-01 | Applicant | |
| JP2001-168094 | 2001-06-01 | Applicant | |
| JP2001-168387 | 2001-06-01 | Applicant | |
| JP2001-237461 | 2001-08-01 | Applicant | |
| JP2001-274507 | 2001-10-01 | Applicant | |
| JP2001-313422 | 2001-11-01 | Applicant | |
| JP2003-152138 | 2003-05-01 | Applicant | |
| JP2003-218383 | 2003-07-01 | Applicant | |
| JP2003-303743 | 2003-10-01 | Applicant | |
| JP2003-309286 | 2003-10-01 | Applicant | |
| JP2003-318443 | 2003-11-01 | Applicant | |
| JP2003-347590 | 2003-12-01 | Applicant | |
| JP2004-072052 | 2004-03-01 | Applicant | |
| JP2004-088083 | 2004-03-01 | Applicant | |
| JP2004-319552 | 2004-11-01 | Applicant | |
| JP2005-012188 | 2005-01-01 | Applicant | |
| JP2005-236048 | 2005-09-01 | Applicant | |
| JP2005-260255 | 2005-09-01 | Applicant | |
| JP2005-286187 | 2005-10-01 | Applicant | |
| JP2006-253647 | 2006-09-01 | Applicant | |
| KR20010088931 | 2001-09-01 | Applicant | |
| KR10-0338180 | 2002-05-01 | Applicant | |
| KR10-2002-079659 | 2002-10-01 | Applicant | |
| KR20040058479 | 2004-07-01 | Applicant | |
| KR20040104232 | 2004-12-01 | Applicant | |
| SG200401424-7 | 2004-03-01 | Applicant | |
| SG200401964-2 | 2004-04-01 | Applicant | |
| SG200506301-1 | 2005-09-01 | Applicant | |
| SG200506897-8 | 2005-10-01 | Applicant | |
| SG200508210-2 | 2005-12-01 | Applicant | |
| SG200605500-8 | 2006-08-01 | Applicant | |
| TW419836(B) | 2001-01-01 | Applicant | |
| TW475276(B) | 2002-02-01 | Applicant | |
| TW540171(B) | 2003-07-01 | Applicant | |
| WO1/47039(A1) | 2001-06-01 | Applicant | |
| WO2004/102686(A1) | 2004-11-01 | Applicant | |
| WO2005/029572(A1) | 2005-03-01 | Applicant | |
| WO2005/029573(A1) | 2005-03-01 | Applicant | |
| WO2005/062745(A2) | 2005-07-01 | Applicant | |
| WO2005/064666(A1) | 2005-07-01 | Applicant | |
| WO2005/088743(A1) | 2005-09-01 | Applicant | |
| WO2005/096365(A1) | 2005-10-01 | Applicant | |
| WO2005/098974(A1) | 2005-10-01 | Applicant | |
| WO2005/104780(A2) | 2005-11-01 | Applicant | |
| WO2007/046773(A1) | 2007-04-01 | Applicant | |
| WO2007/037762(A1) | 2007-05-01 | Applicant | |
| WO2007/073354(A1) | 2007-06-01 | Applicant | |
| WO2008/020819(A1) | 2008-02-01 | Applicant |
Non-Patent Literature (25)
- M.K. Kelly, et al., “Optical Process for Liftoff of Group III-Nitride Films,” Physica Status Solidi (a), vol. 159, Issue 1, pp. R3-R4, (Nov. 28, 1996).Applicant
- Tetsuzo Ueda, et al., “Vertical InGaN-Based Blue Light Emitting Diode with Plated Metal Base Fabricated using Laser Lift-Off Technique,” Physica Status Solidi (c), vol. 0, Issue 7, pp. 2219-2222, (Oct. 20, 2003).Applicant
- Chen-Fu Chu, et al., “Comparison of p-Side Down and p-Side Up GaN Light-Emitting Diodes Fabricated by Laser Lift-Off”, Japan Journal of Applied Physics, vol. 42, Part 2, No. 2B, pp. L147-L150, (Feb. 15, 2003).Applicant
- W.H. Li, et al., “Electrochemical Deposition of Copper on Pattemed Cu/Ta(N)SiO2 Surfaces for Super Filling of Sub-Micron Features”, Joumal of Applied Electrochemistry, vol. 31, pp. 1395-1397, (Aug. 20, 2001).Applicant
- Zhifang Fan, et al., “Very Low Resistance Multilayer Ohmic Contact to n-Gan,” Applied Physics Letters, vol. 68, Issue 12, pp. 1672-1674, (Mar. 18, 1996).Applicant
- I. Schnitzer, et al., “30% External Quantum Efficiency from Surface Textured, Thin-Film Light-Emitting Diodes,” Applied Physics Letters, vol. 63, Issue 16, pp. 2174-2176, (Oct. 18, 1993).Applicant
- Shyi-Ming Pan, et al., “Improvement of InGaN-GaN Light-Emitting Diodies with Surface-Textured Indium-Tin-Oxide Transparent Ohmic Contacts,” IEEE Photonics Technology Letters, vol. 15, Issue 5, pp. 649-651, (May 2003).Applicant
- Chul Huh, et al., “Improved Light-Output and Electrical Performance of InGaN-Based Light-Emitting Diode by Microroughening of the p-GaN Surface,” Journal of Applied Physics, vol. 93, Issue 11, pp. 9383-9385, (Jun. 1, 2003).Applicant
- F.A. Kish, et al., “Very High-Efficiency Semiconductor Wafer-Bonded Transparent-Substrate (AlxGa1-x)0.5In0.5P/GaP Light-Emitting Diodes,” Applied Physics Letters, vol. 64, Issue 21, pp. 2839-2841, (May 23, 1994).Applicant
- R.H. Horng, et al., “AlGaInP Light-Emitting Diodes with Mirror Substrates Fabricated by Wafer Bonding,” Applied Physics Letters, vol. 75, Issue 20, pp. 3054-3056, (Nov. 15, 1999).Applicant
- H. Sugawara, et al., “Characteristics of a Distributed Bragg Reflector for the Visible-Light Spectral Region using InGaAIP and GaAs: Comparison of Transparent- and Loss-Type Structures,” Journal of Applied Physics, vol. 74, Issue 5, pp. 3189-3193, (Sep. 1, 1993).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2003/000222 containing Communication relating to the Results of the Partial International Search Report, 3 pgs., (Dec. 9, 2003).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2003/000223 containing Communication relating to the Results of the Partial International Search Report, 3 pgs., (Dec. 9, 2003).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2005/000061 containing Communication relating to the Results of the Partial International Search Report, 2 pgs., (May 12, 2005).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2005/000062 containing Communication relating to the Results of the Partial International Search Report, 2 pgs., (May 12, 2005).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2006/000254 containing Communication relating to the Results of the Partial International Search Report, 4 pgs., (Nov. 16, 2006).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2006/000255 containing Communication relating to the Results of the Partial International Search Report, 3 pgs., (Nov. 6, 2006).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2006/000395 containing Communication relating to the Results of the Partial International Search Report, 3 pgs., (Feb. 26, 2007).Applicant
- PCT International Search Report for PCT Application No. PCT/SG2005/000261 containing Communication relating to the Results of the Partial International Search Report, 3 pgs., (Oct. 12, 2007).Applicant
- International Search Report for PCT/SG2007/000288, 4 pgs. (Oct. 30, 2007).Applicant
- PCT International Preliminary Report on Patentability for PCT Counterpart Application No. PCT/SG2007/000288, 5 pgs., (Jul. 11, 2008).Applicant
- PCT Written Opinion of the International Searching Authority for PCT Counterpart Application No. PCT/SG2007/000288, 5 pgs., (Nov. 9, 2007).Applicant
- Supplementary European Search Report for European Application No. 05711220.3-2222, 3 pgs., (Nov. 30, 2010).Applicant
- Supplementary European Search Report for European Application No. 06784267.4-1235, 4 pgs., (Feb. 4, 2011).Applicant
- Supplementary European Search Report for European Application No. 03818739, 1 pg., (Jan. 19, 2011).Applicant