Method of forming film bulk acoustic wave filter assembly

[0001] 1. Field of the Invention

[0002] This invention relates to a film bulk acoustic wave filter assembly, and more particularly to a film bulk acoustic wave filter assembly that can be applied in the integration of high-frequency circuit design and SOC.

[0003] 2. Related Art

[0004] RF micro devices are key aspects of the development of wireless communication. Communication passive devices such as duplexers, filters and power amplifiers need to be combined with an RF circuit individually. The wiring parts of the connection between the passive devices and the RF circuit generate parasitic effects due to RF signals, thereby increasing complexity in system integration. For example, U.S. Pat. No. 6,285,866 published on Sep. 4, 2001, discloses high-frequency passive devices and other active/passive devices that are integrated on a single chip to streamline system design and simplify test processes. According to the disclosure a thin or thick piezoelectric crystal wafer is bonded on a silicon substrate. Specifically, a silicon chip having active devices thereon is bonded to a piezoelectric chip. However, in the invention, a film bulk acoustic wave resonator is integrated with a semiconductor integrated circuit (IC) in a compatible semiconductor process.

[0005] An object of the invention is therefore to provide a film bulk acoustic wave filter assembly in which a film bulk acoustic wave filter is integrated with an RF circuit as a single chip so that the filter or a duplexer can be designed with circuit design simultaneously. In the invention, less than 2 μm thick piezoelectric film is grown on a silicon chip having active devices thereon, without any need of a piezoelectric chip. Passive device production can be integrated with the semiconductor process of forming a silicon chip having active devices thereon so as to form a suspended piezoelectric film. The piezoelectric film is first grown directly on an integrated circuit silicon chip at a temperature in the tolerable range of the circuit. An under-metal sacrificed layer is then etched off to form the suspended piezoelectric film. Replacement of semiconductor metal is further performed to grow a lower electrode and increase the characteristics of the resonator. Thereby, the simulation design is completed and system integration is less complicated, which has a great influence on integration of active/passive devices and SOC chip production.

[0012] FIG. 1 is a cross-sectional view of an IC chip obtained from CMOS standard processes. FIG. 2 is a schematic view showing part of the RF circuit region and part of the RF integrated chip of the invention.

[0013] Referring to FIG. 1, there are passivation layer 14, first metal layer 11, first silicon oxide layer 12 and second metal layer 13 successively above the IC chip.

[0014] Referring to FIG. 2, the front end module of conventional CMOS RF integrated circuit includes a low noise amplifier (LNA), a mixer, a voltage control oscillator (VCO) and a phase loop lock, which are able to be integrated on single chip at the beginning of the circuit design. Through the invention, passive devices that used to be produced individually in the art, such as a film bulk acoustic wave duplexer 41, film bulk acoustic filter 42 and film bulk acoustic wave resonator 43, can be produced integrally with an RF active circuit region 51 by a standard process and a silicon micro-electro-mechanical post process. Reference number 52 indicates an area covered by an integrated chip.

[0015] FIG. 3 shows the process of forming a film bulk acoustic wave filter by a standard CMOS process according to one embodiment of the invention. From up to down, there are upper electrode metal layer 21, piezoelectric material layer 22, lower electrode metal layer 23, and a frequency modulation layer 24 of the shunt resonator of the film bulk acoustic wave filter. The equivalent circuit is a film bulk acoustic wave filter in the FIG. 4, which is composed of two shunt resonators 61 and two series resonators 62.

[0016] FIG. 4 shows the layout of a filter used in the invention. The filter can be, for example, a Ladder-type bulk acoustic wave filter. The main purposes of such a design are to prevent the use of electrode channels, reduce structural complexity, make the contacts of the input and output equally high, and measurement easy to implement.

[0017] FIG. 5A to FIG. 5D are cross-sectional schematic views showing the process of integrating a film bulk acoustic wave filter with an RF communication circuit on a chip. An IC chip 1 produced by a standard CMOS process is provided. Part of the passivation layer 14 on the chip is removed during the CMOS process. Using the topmost metal layer 11 and second metal layer 13 as a sacrificed layer for etching for a chamber region and the micro manufacturing technique of the surface. A lower electrode layer 23 of the film bulk acoustic wave filter is formed on the topmost metal layer 11 using the CMOS process. The material for the lower electrode 23 must have good etching selectivity with proper lattices in order for the piezoelectric layer 22 to exhibit appropriate lattice direction and good piezoelectric properties. An upper electrode layer 21 is grown on the piezoelectric layer 22. Since the working bandwidth is important to the wave filter, it is necessary to form a frequency modulation metal layer 24 at the parallel connection site of the resonator to meet bandwidth requirements. The thickness of the frequency modulation metal layer has an upper-limit value due to the characteristics of the wave filter. The topmost metal layer 11 is wet etched through an etching hole 31 by wet etching to form a chamber region where the film bulk acoustic wave filter is suspended. The film bulk acoustic wave filter connects to the topmost metal layer 11 at the RF circuit site via the upper electrode layer 21. Thereby, signals are introduced to the circuit site.

[0018] FIG. 6A to FIG. 6D are top schematic views showing the process of integrating a film bulk acoustic wave filter with an RF communication circuit on a chip. When design the RF circuit on the silicon wafer in front end, define the top most metal region 11 of the CMOS standard process. A film bulk acoustic wave filter is manufactured based on the region. Use several post process mask to define a lower electrode metal layer 23, piezoelectric material layer 22, upper electrode metal layer 21, a frequency modulation layer 24 and a etching hole 31, which is co-operated with the standard depositing and etching CMOS process to complete a suspending structure of a empty chamber 32. Therefore the film bulk acoustic wave filter is able to combine with the RF active circuit on the same chip.

[0019] As described above, the film bulk acoustic wave filter and the RF communication circuit are integrated according to the invention. It will be apparent to the person skilled in the art that the invention as described above may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the invention, and all such modifications as would be obvious to one skilled in the art are intended to be included within the scope of the following claims.