Correction system, method of correcting deflection distortion, program and method for manufacturing a semiconductor device

[0001] This application is based upon and claims the benefit of priority from the prior Japanese Patent Applications No. P2003-342369, filed on Sep. 30, 2003; the entire contents of which are incorporated herein by reference.

[0002] 1. Field of the Invention

[0003] The present invention relates to a charged-particle beam drawing tool, and, more particularly, relates to a correction system, a correction method, a program for correcting a deflection distortion by a deflector and a method for manufacturing a semiconductor device.

[0004] 2. Description of the Related Art

[0005] As integrated circuits have become finer and have higher density, charged-particle beam drawing tools using a charged-particle beam, such as an electron beam (EB) or a focused ion beam (FIB), are becoming more important. A charged-particle beam drawing tool, as a semiconductor manufacturing device, is required to achieve stable operation, a high rate of throughput, and a fine-processing capability. However, there is a limit to the precision with which parts constituting the charged-particle beam drawing tool are processed and assembled. Accordingly, a deflection distortion may be caused by a deflector for deflecting a charged-particle beam. When a charged-particle beam is deflected, there are some cases where the deflection distortion causes an aberration between a position which is actually illuminated by the charged-particle beam and a position expected to be illuminated at a design stage. In order to direct a charged-particle beam with high accuracy, it is important to correct the deflection distortion due to the deflector.

[0006] As a correction method in a charged-particle beam drawing tool, a method is employed in which a correction value for correcting the deflection distortion is calculated, and a deflection voltage equivalent to the correction value is fed back to a deflector. As a method of calculating the correction value, for example, a deflection area on a stage to which a charged-particle beam is deflected is virtually divided into equal blocks in a matrix. A correction coefficient of a correction formula for correcting a deflection distortion is calculated for each of the equal blocks, and a correction value is calculated based on the correction formula using the correction coefficients.

[0007] However, the distribution of an electrical field or a magnetic field formed by a deflector is likely to become less even as the field is farther from an optical axis of the deflector. Accordingly, deflection distortion has a tendency to increase as a charged-particle beam becomes farther from the optical axis. The method in which the deflection area is equally divided results in the correction accuracy being decreased as the deflection area becomes farther from the optical axis. In this connection, a method in which a deflection area is virtually divided into equal small blocks can be also considered in order to achieve high accuracy, even at a position far from an optical axis. However, the method in which the deflection area is divided into equal small blocks requires an enormous amount of time to provide a correction for each of the equal small deflection blocks. As a result, the throughput decreases. That is, there is a trade-off relation between the accuracy with which the deflection distortion is corrected and the time required to correct the deflection distortion.

[0008] A feature of the present invention inheres in a method of correcting deflection distortion including dividing a deflection area to which a charged-particle beam is deflected into equal initial blocks as an initial setting, calculating an initial aberration amount for each of the initial blocks generated when the charged-particle beam is deflected: dividing the deflection area into main blocks in accordance with a change rate of the initial aberration amount, calculating a main aberration amount for each of the main blocks generated when the charged-particle beam is deflected, and calculating a correction value correcting a deflection distortion based on the main aberration amount.

[0009] Another feature of the present invention inheres in a correction system including an initial division unit configured to divide a deflection area to which a charged-particle beam is deflected into equal initial blocks as an initial setting, an initial aberration calculation unit configured to calculate a initial aberration amount for each of the initial blocks generated when the charged-particle beam is deflected, a main division unit configured to divide the deflection area into main blocks in accordance with a change rate of the initial aberration amount, a main aberration calculation unit configured to calculate a main aberration amount for each of the main blocks generated when the charged-particle beam is deflected, and a correction unit configured to calculate a correction value correcting a deflection distortion based on the main aberration amount.

[0010] An additional feature of the present invention inheres in a program for executing an application on a correction system. The program includes instructions for dividing a deflection area to which a charged-particle beam is deflected into initial blocks as an initial setting, instructions for calculating an initial aberration amount for each of the initial blocks generated when the charged-particle beam is deflected, instructions for dividing the deflection area into main blocks in accordance with a change rate of the initial aberration amount, instructions for calculating a main aberration amount for each of the main blocks generated when the charged-particle beam is deflected, and instructions for calculating a correction value correcting a deflection distortion based on the main aberration amount.

[0011] Further additional features of the present invention inhere in a method for manufacturing a semiconductor device comprising generating layout data of a device pattern for each layer of the semiconductor device corresponding to stages in a manufacturing process, preparing a set of masks for each layers of the semiconductor device, each of masks dividing the deflection area to which a charged-particle beam is deflected into initial blocks as an initial setting, calculating an initial aberration amount for each of the initial blocks generated when the charged-particle beam is deflected, dividing the deflection area into main blocks in accordance with a change rate of the initial aberration amount, calculating a main aberration amount for each of the main blocks generated when the charged-particle beam is deflected, calculating a correction value correcting a deflection distortion based on the main aberration amount, and delineating masks corresponding to the stages, respectively, by deflecting the charged-particle beam using the correction value based on the layout data in a charged-particle beam drawing tool; coating a resist film on a semiconductor wafer; delineating an etching mask by exposing a device pattern of one of a mask in the set of masks to the resist film; and processing the semiconductor wafer using the etching mask.

[0028] Various embodiments of the present invention will be described with reference to the accompanying drawings. It is to be noted that the same or similar reference numerals are applied to the same or similar parts and elements throughout the drawings, and the description of the same or similar parts and elements will be omitted or simplified.

[0029] In the embodiments of the present invention, description will be given taking “an electron beam” as an example of “a charged-particle beam”. However, “an ion beam” may be employed as the charged-particle beam. That is, the description below can be applied to the case of the ion beam as in the case of the electron beam.

[0030] As shown in FIG. 1, a central processing unit (CPU) 4 of a correction system according to an embodiment of the present invention includes: an initial division unit 41 dividing a deflection area to which an electron beam is deflected into a plurality of equal initial blocks as an initial setting; an initial aberration calculation unit 42 calculating an initial aberration amount for each of the plurality of initial blocks generated when the electron beam is deflected; a main division unit 43 dividing the deflection area into a plurality of main blocks in accordance with a change rate of the initial aberration amounts; a main aberration calculation unit 44 calculating a main aberration amount for each of the plurality of main blocks generated when the electron beam is deflected; and a correction unit 45 calculating correction values for correcting a deflection distortion based on the main aberration amounts. The CPU 4 shown in FIG. 1 is included in a charged-particle beam drawing tool (electron beam drawing tool) as shown in FIG. 2.

[0031] As shown in FIG. 2, a charged-particle beam drawing tool (electron beam drawing tool) according to an embodiment of the present invention includes a correction system 1, an exposure unit 2, and a control circuit 3. The correction system 1 and the control circuit 3 are connected to each other through a bus 10. The exposure unit 2 includes an electron gun 11, a condenser lens 14, first and second shaping apertures 15 and 20, a blanking aperture 16, blanking deflectors 17a and 17b, a projection lens 18, character projection (CP) selection deflectors 19a and 19b, a demagnification lens 21, an objective lens 23, objective deflectors 22a and 22b, a detector 24, a mark mount 25 for measuring the position and the dimension of an electron beam, a stage 26 movable in X and Y directions, and a Faraday cup 28 for detecting an electron beam.

[0032] The electron gun 11 generates an electron beam. The condenser lens 14 adjusts illumination conditions of the electron beam. The first and second shaping apertures 15 and 20 form the electron beam into a desired shape. The blanking aperture 16 turns on/off the electron beam. The blanking deflectors 17a and 17b deflect the electron beam onto the blanking aperture 16. The projection lens 18 forms an image plane on the second shaping aperture 20. For the CP selection deflectors 19a and 19b, and the objective deflectors 22a and 22b, for example, coils and electrostatic deflectors can be used. The CP selection deflectors 19a and 19b control the degree of optical superposition by the first and second shaping apertures 15 and 20 by selecting a pattern (character) which the first and second shaping aperture 15 and 20 has. Each of the objective deflectors 22a and 22b has a main deflector and a sub-deflector to achieve highly accurate deflection without decreasing the throughput, and has a plurality of deflection electrodes to minimize deflection errors. The objective deflectors 22a and 22b control a main illumination position on the mark mount 25 or a sample 27 by deflecting the electron beam. The demagnification lens 21 and the objective lens 23 allow the electron beam to form an image on the mark mount (reference chip) 25 or the sample 27.

[0033] For the sample 27 to be placed on the stage 26, a semiconductor substrate, or the like, made of silicone (Si) or the like and coated with a resist film, can be used when a semiconductor device is manufactured. When an exposure mask is fabricated, a glass plate, or the like, coated with a resist film can be used. The detector 24 detects back-scattered electrons or secondary electrons from the mark mount 25 and the sample 27. A position detection mark M₀ is arranged on the mark mount 25, as shown in FIG. 3A for example. At least one mark is sufficient to be arranged on the mark mount 25. As shown in FIG. 3B, a mark mount 25a may also be used on which a plurality of position detection marks M₀ to M₈ are arranged. Moreover, a position detection mark may also be arranged on the stage 26 shown in FIG. 1. Any of the sample 27, the Faraday cup 28 and the mark mount 25 on the stage 26 can be selected by moving the stage 26 in the X and Y directions. By moving the stage 26, the position detection mark M₀ on the mark mount 25 can be aligned with the center of a deflection area F to which an electron beam is deflected and directed, as shown in FIG. 4. The deflection area F is defined as a rectangular region on the basis of an optical axis O of the objective deflectors 22a and 22b.

[0034] The control circuit 3 shown in FIG. 2 includes a lens control circuit 31, a blanking deflection circuit 32, a CP selection circuit 33, a beam deflection circuit 34, a detection signal processing circuit 35, and a stage control circuit 36. The lens control circuit 31 applies a voltage to the condenser lens (lens holder) 14 so as to adjust the illumination conditions of the electron beam, to the condenser lens 14. The blanking deflection circuit 32 applies a deflection voltage to the blanking deflectors 17a and 17b so that the blanking deflectors 17a and 17b turn on/off the electron beam. The CP selection circuit 33 applies voltage to the CP selection deflectors 19a and 19b so that the CP selection deflectors 19a and 19b control the superposition of the electron beam. The beam deflection circuit 34 applies a deflection voltage to the objective deflectors 22a and 22b so that the objective deflectors 22a and 22b deflect the electron beam. The detection signal processing circuit 35 converts the back-scattered electrons or secondary electrons detected by the detector 24 to an electrical signal and transmits the electrical signal to the CPU 4. A motor 29 and a laser interferometer 30 are individually connected to the stage control circuit 36. The stage control circuit 36 controls the position of the stage 26 by driving the motor 29 based on the position of the coordinates of the stage 26 measured by the laser interferometer 30.

[0035] In the exposure unit 2, the current density of an electron beam generated by the electron gun 11 is adjusted to a desired density by the condenser lens 14, and the first shaping aperture 15 is evenly illuminated by the electron beam. The electron beam passing through the first shaping aperture 15 is then directed onto the second shaping aperture 20 by the projection lens 18. The electron beam formed by the optical superposition by the first and second shaping apertures 15 and 20 forms an image on the sample 27 through the demagnification lens 21 and the objective lens 23. The objective deflectors 22a and 22b form an electrical field in accordance with a deflection voltage applied by the beam deflection circuit 34, whereby the electron beam is deflected. When moving the sample 27, the electron beam is deflected to the blanking aperture 16 using the blanking deflectors 17a and 17b so that an inappropriate part of the sample 27 will not be exposed to light. Accordingly, the electron beam is prevented from being exposed to the surface of the sample 27.

[0036] Here, when the electron beam is deflected using the electron beam drawing tool, there are some cases where the actual position illuminated by the electron beam does not coincide with a desired position which was expected to be illuminated during a design stage (hereinafter, simply referred to as “desired illumination position”), due to deflection distortion attributable to the deflectors, e.g., distortion due to shift, magnification, rotation, high-order distortion, and the like. The aberration between an actual illumination position and a desired illumination position is corrected by the following correction equations (1) and (2), using correction values (X₀, Y₀), the coordinates (X, Y) of the desired illumination position, and correction coefficients a₀ to a₉ and b₀ to b₉.
X₀=a₀+a₁x+a₂y+a₃xy+a₄x²+a₅y²+a₆x³+a₇y³+a₈x²y+a₉xy²  (1)
Y₀=b₀+b₁x+b₂y+b₃xy+b₄x²+b₅y²+b₆x³+b₇y³+b₈x²y+b₉xy²  (2)

[0037] Here, the correction coefficients a₀ and b₀ are off-set values; the correction coefficients a₁ and b₂ are values for correcting magnification; the correction coefficients a₂ and b₁ are values for correcting rotation; and the correction values a₃ to a₉ and b₃ to b₉ are values for correcting high-order distortion. When an electron beam is deflected, the coordinates of a desired illumination position are substituted for X and Y in the right sides of the correction equations (1) and (2), and the correction values (X₀, Y₀) are calculated using the correction coefficients a₀ to a₉ and b₀ to b₉ which are predetermined. A deflection distortion is corrected by applying a deflection voltage to the deflectors equivalent to the correction values (X₀, Y₀). However, when the values of the predetermined correction coefficients a₀ to a₉ and b₀ to b₉ are inaccurate, suitable correction values (X₀, Y₀) cannot be obtained in some cases. In order to correct a deflection distortion with high accuracy, it is important to calculate suitable values for the correction values (X₀, Y₀).

[0038] The correction system 1 includes the CPU 4, an input device 5, an output device 6, a main memory 7, an auxiliary memory 8, and a program storage device 9. As shown in FIG. 5 for example, the initial division unit 41 of the CPU 4 virtually divides the deflection area F (an outermost frame indicated by dotted lines), to which an electron beam is deflected, on the mark mount 25 into a plurality of equal initial blocks SA_ij (i=1 to 4, j=1 to 4).

[0039] The initial aberration calculation unit 42 shown in FIG. 1 includes an initial setting module 42a, an initial obtainment module 42b and an initial calculation module 42c. As shown in FIG. 5 for example, the initial setting module 42a sets initial target positions PA_kl (k=1 to 4, l=1 to 4), which are defined inside the plurality of initial blocks SA_ij, respectively for the plurality of initial blocks SA_ij. The initial target positions PA_kl are set, for example, at the centers of the respective initial blocks SA_ij. Alternatively, the initial target positions PA_kl may be set at the grid positions of the plurality of initial blocks SA_ij.

[0040] Here, as shown in FIG. 6A, the mark M₀ on the mark mount 25 is aligned with the initial target position PA₁₁ by driving the stage 26 based on the initial target positions PA_kl. Alternatively, as shown in FIG. 6B, the plurality of marks M₀ to M₈ on the mark mount 25a may be aligned with the initial target positions PA₁₁ to PA₃₃. An electron beam is deflected and directed onto the initial target position PA₁₁. Back-scattered electrons or secondary electrons from the mark M₀ are detected using the detector 24. Here, as shown in FIG. 7, a position which the electron beam actually illuminates after deflecting the electron beam to one of the initial target positions PA_kl is determined an initial illumination position PB_kl. As shown in FIG. 7 for example, the initial illumination positions PB_kl move to positions obtained from the initial target positions PA_kl by rotating the deflection area F around the optical axis O. The initial obtainment module 42b shown in FIG. 1 obtains each of the initial illumination positions PB_kl shown in FIG. 7. As shown in FIG. 7, the initial calculation module 42c respectively calculates differences between the initial target positions PA_kl and the initial illumination positions PB_kl as initial aberration amounts (δxb_kl, δyb_kl).

[0041] When initial illumination positions PC_kl, PD_kl or PE_kl as shown in FIGS. 8 to 10 respectively are obtained by the initial obtainment module 42b as well, the initial calculation module 42c similarly calculates initial aberration amounts (δxc_kl, δyc_kl), (δxd_kl, δyd_kl) or (δxe_kl, δye_kl) from the initial target positions PA_kl, respectively. The initial illumination positions PC_kl shown in FIG. 8 move to positions obtained from the initial target positions PA_kl by, for example, linearly (proportionally) enlarging the deflection area F in one direction (the left or right direction shown on the drawing). The initial illumination positions PD_kl shown in FIG. 9 move to positions obtained from the initial target positions PA_kl by gradually and nonlinearly changing the distance of the deflection area F from the optical axis O. The initial illumination positions PE_kl shown in FIG. 10 move to positions obtained from the initial target positions PA_kl by steeply and nonlinearly changing the distance of the deflection area F from the optical axis O.

[0042] The main division unit 43 shown in FIG. 1 respectively divides the deflection area F into a plurality of main blocks in accordance with the change rate of the initial aberration amounts (δxb_kl, δyb_kl), (δxc_kl, δyc_kl), (δxd_kl, δyd_kl), or (δxe_kl, δye_kl) inside the deflection area F, the initial aberration amounts calculated by the initial calculation module 42c. When, as shown in FIGS. 7 and 8 for example, the initial aberration amounts (δxb_kl, δyb_kl) or (δxc_kl, δyc_kl) change linearly with, i.e. proportional to, the distance from the optical axis O (the front-face and back-face direction of the drawing), the deflection area F is divided into such a plurality of main blocks SB_mn (m=1 to 7, n=1 to 7) that the sizes of the main blocks SB_mn change linearly with the distance from the optical axis O, as shown in FIG. 11. In FIG. 11, the ratio between the lengths of one sides of the main blocks SB₁₁, SB₂₂, SB₃₃, and SB ₄₄ is 1:2:4:8. The ratio between the areas of the main blocks SB₁₁, SB₂₂, SB₃₃, and SB ₄₄ is 1:4:16:64, and the ratio between the areas of the main blocks SB₁₄, SB₂₄, SB₃₄, and SB ₄₄ is 1:2:4:8.

[0043] On the other hand, when, as shown in FIGS. 9 and 10, the initial aberration amounts (δxd_kl, δyd_kl) or (δxe_kl, δye_kl) change nonlinearly with, i.e. do not change proportional to, the distance from the optical axis O, the deflection area F is divided into such a plurality of main blocks SC_mn that the sizes of the main blocks SC_mn change nonlinearly with the distance from the optical axis O, as shown in FIG. 12. In FIG. 12, the ratio between the lengths of one side of the main blocks SC₁₁, SC₂₂, SC₃₃, and SC₄₄ is 1:2:3:4. The ratio between the areas of the main blocks SC₁₁, SC₂₂, SC₃₃, and SC₄₄ is 1:4:9:16. The ratio between the areas of the main blocks SC₁₄, SC₂₄, SC₃₄, and SC₄₄ is 1:2:3:4. In particular, when the initial aberration amounts (δxe_kl, δye_kl) change steeply as shown in FIG. 10, the deflection area F is divided into a plurality of blocks as shown in FIG. 13 or 14. In FIG. 13, the deflection area F is divided into a plurality of main blocks SD_mn (m=1 to 7, n=1 to 7), and only the main blocks SD₁₁, SD₁₂, SD₁₆, SD₁₇, SD₂₁, SD₂₇, SD₆₁, SD₆₇, SD₇₁, SD₇₂, SD₇₆, and SD₇₇ are each further divided into a plurality of equal blocks (for example, 3×3=9 blocks). The main blocks shown in FIG. 14 are obtained by a combination of the division methods shown in FIGS. 11 to 13.

[0044] Furthermore, when the deflection area F includes first and second regions which have different change rates of the initial aberration amounts of the respective initial blocks, the first and second regions are each divided into a plurality of main blocks in accordance with the respective change rates of the initial aberration amounts in the first and second regions. In other words, the main division unit 43 divides a region where the initial aberration amounts are relatively large into relatively small main blocks in order to obtain a high accuracy, and divides a region where the initial aberration amounts are relatively small into relatively large main blocks.

[0045] The main aberration calculation unit 44 shown in FIG. 1 includes a main setting module 44a, a main obtainment module 44b and a main calculation module 44c. As shown in FIG. 11, the main setting module 44a sets at least one main target position PF_op (o=0 to 7, p=0 to 7) for each of the plurality of main blocks SB_mn. The main target positions PF_op may be set at the positions of the grid points of the plurality of main blocks SB_mn as shown in FIG. 11, or may be set at the centers of the respective main blocks SB_mn. As shown in FIG. 15, the main obtainment module 44b obtains a main illumination position PG_op when an electron beam is deflected to each of the main target positions PF_op. The main calculation module 44c shown in FIG. 1 respectively calculates main aberration amounts (δx_op, δy_op) between the main target positions PF_op and the main illumination positions PG_op shown in FIG. 15.

[0046] When an electron beam is deflected to a desired illumination position, the correction unit 45 shown in FIG. 1 calculates the correction values (X₀, Y₀) using the correction equations (1) and (2), based on, for example, the main aberration amounts (δx_op, δy_op) calculated by the main calculation module 44c. Specifically, the correction values (X₀, Y₀) are calculated by substituting values (x-δx_op, y-δy_op) for terms x and y in the right sides of the correction equations (1) and (2), the values (x-δx_op, y-δy_op) obtained by subtracting the main aberration amounts (δx_op, δy_op) from the coordinates (x, y) of the desired illumination position, respectively.

[0047] The CPU 4 further includes a control unit and an exposure control unit, which are omitted from illustration. The control unit controls input and output of signals and performance of the CPU 4, the control circuit 3, input device 5, and the output device 6 shown in FIG. 2 or the like. The exposure control unit reads pattern data for exposure from a pattern data storage region 70 in the main memory 7 shown in FIG. 16. The exposure control unit controls electron beam exposure in the exposure unit 2 shown in FIG. 2.

[0048] As shown in FIG. 16, the main memory 7 shown in FIG. 2 includes the pattern data storage region 70, a block data storage region 71, a design data storage region 72, a target position storage region 73, an illumination position storage region 74, an aberration amount storage region 75, and a division method storage region 76. The pattern data storage region 70 stores pattern data for exposure. The block data storage region 71 stores data of the plurality of equal initial blocks SA_ij into which the deflection area F is divided by the initial division unit 41, and the plurality of main blocks SB_mn into which the deflection area F is divides by the main division unit 43 and the like. The design data storage region 72 stores data of the construction and characteristics of the electron optics system of the electron beam drawing tool shown in FIG. 2, the construction and characteristics of the objective deflectors 22a and 22b, and the interval (period) between the marks M₀ to M₈ on the mark mount 25a and the like. The target position storage region 73 stores the initial target positions PA_kl and the main target positions PF_op set by the initial setting module 42a and the main setting module 44a respectively. The illumination position storage region 74 stores the initial illumination positions PB_kl and the main illumination positions PG_op, obtained by the initial obtainment module 42b and the main obtainment module 44b respectively. The aberration amount storage region 75 stores the initial aberration amounts (δxb_kl, δyb_kl) and the main aberration amounts (δx_op, δy_op) calculated by the initial calculation unit 42c and the main calculation module 44c, respectively. The division method storage region 76 stores data of various division methods for dividing the deflection area F into the plurality of main blocks in advance.

[0049] The input device 5, shown in FIG. 2, may be, for example, a keyboard, a mouse, a recognition device such as a optical character readers (OCR), a drawing input device such as an image scanner, or a special input device such as a voice input device. The output device 6 may be a display device such as a liquid crystal display (LCD), CRT display, or a printing device such as an ink jet printer or a laser printer. The auxiliary memory 8 has random-access memory (RAM). The RAM serves as a temporary data memory for storing data used in executing a program by the CPU 4, and used as a working domain.

[0050] The program storage device 9 stores a program (a deflection distortion correction program) executed by the CPU 4 (the details of the program are described later). As the program storage device 9, a semiconductor memory, a magnetic disk, an optical disc, a magneto-optical disc and a magnetic tape, can be used. Specifically, a flexible disk, a CD-ROM, a MO disk, a cassette tape and an open reel tape, etc. can be used.

[0051] Next, a description will be given of an example of a method of correcting deflection distortion according to the embodiment of the present invention, referring to a flowchart of FIG. 17 as an example.

[0052] In step S100, as shown in FIG. 2, the mark mount 25 is placed on the stage 26. As shown in FIG. 4 with arrow, the mark M₀ on the mark mount 25 is moved to a nearby optical axis O, by moving the stage 26. The optical axis O substantially corresponds to the center of the deflection area F to which the electron beam is deflected. The electron beam is directed to the mark M₀ without deflection, and then the position of the mark M₀ is detected using the deflector 24. The stage 26 is fixed with the optical axis O based on the difference between the position of the mark M₀ and the actually illumination position of the electron beam, by moving the stage 26 in order to align the position of the mark M₀.

[0053] In step S101, as shown in FIG. 5, the initial division unit 41 shown in FIG. 1 virtually divides the deflection area F into a plurality of equal initial blocks SA_ij (i=1 to 4, j=1 to 4) as an initial setting. The data of the plurality of initial blocks SA_ij is stored in the block data storage region 71 shown in FIG. 16.

[0054] In step S102, the initial setting module 42a shown in FIG. 1 reads the data of the plurality of initial blocks SA_ij from the block data storage region 71. The initial setting module 42a then sets initial target positions PA_kl (k=1 to 4, j=1 to 4) defined inside the plurality of initial blocks SA_ij for each of the plurality of the initial blocks SA_ij shown in FIG. 5. In FIG. 5 for example, the initial target positions PA_kl are set at the center of the initial blocks SA_ij respectively. The initial target positions PA_kl are stored in the target position storage region 73 shown in FIG. 16.

[0055] In step S103, as shown in FIG. 6A, the mark M₀ on the mark mount 25 is placed to the initial target positions PA₀₀, by driving the stage 26 based on the initial target positions PA_kl from the target position storage region 73. An electron beam is deflected to the initial target positions PA₀₀. Back-scattered electrons or secondary electrons from the mark M₀ are detected using the deflector 24. The initial illumination positions PB₀₀ are obtained by the initial obtainment module 42b. As the same time, the mark M₀ is also moved to the initial target positions PA₀₁ to PA₄₄ one by one, and then the electron beam is deflected to the mark M₀. The position of the mark M₀ is detected using the deflector 24, and then the initial illumination positions PB₀₁ to PB₄₄ are obtained, as shown in FIG. 7. The initial illumination positions PB_kl are stored in the illumination position storage region 74 shown in FIG. 16.

[0056] In step S104, the initial calculation unit 42c shown in FIG. 1 reads the initial illumination positions PB_kl and the initial target positions PA_kl from the illumination position storage region 74 and the target position storage region 73 respectively. The initial calculation unit 42c then calculates the difference between the initial target positions PA_kl and the initial illumination positions PB_kl shown in FIG. 7 as the initial aberration amounts (δxb_kl, δyb_kl). The initial aberration amounts (δxb_kl, δyb_kl) are stored in the aberration amount storage region 75 shown in FIG. 16.

[0057] In step S105, the main division unit 43 shown in FIG. 1 reads the initial aberration amounts (δxb_kl, δyb_kl) from the aberration amount storage region 75. The main division unit 43 then selects a suitable division method from among various division methods of the deflection area F from the division method storage region 76, in accordance with the change rate of the initial aberration amounts (δxb_kl, δyb_kl). As shown in FIG. 11, the main division unit 43 then divides the deflection area F into a plurality of main blocks SB_mn (m=1 to 7, n=1 to 7) with the suitable division method. The data of the plurality of main blocks SB_mn is stored in the block data storage region 71 shown in FIG. 16.

[0058] In step S106, the main setting module 44a shown in FIG. 1 reads the data of the plurality of main blocks SB_mn from the block data storage region 71. As shown in FIG. 11, the main setting module 44a then sets at least one main target position PF_op which is defined inside the plurality of main blocks SB_mn for each of the plurality of main blocks SB_mn. For example, in FIG. 11, the main target positions PF_op are set at the corners of grid positions of the plurality of main blocks SB_mn. The main target positions PF_op is stored in the target position storage region 73 shown in FIG. 16.

[0059] In step S107, the mark M₀ on the mark mount 25 shown in FIG. 3A is placed to nearby the main target positions PC₀₀ shown in FIG. 11, by moving the stage 26 based on the main target positions PF_op from the target position storage region 73. The electron beam is deflected to the mark M₀. The main illumination positions PG₀₀ shown in FIG. 15 are obtained by the main obtainment module 44b shown in FIG. 1, by detecting back-scattered electrons or secondary electrons from the mark M₀ using the deflector 24. The mark M₀ is also moved to the main target positions PF₀₁ to PF₇₇ one by one. The electron beam is deflected to the mark M₀. The main illumination positions PG₀₁ to PG₇₇ are obtained by detecting the position of the mark M₀. The main illumination positions PG_op is stored in the illumination position storage region 74 shown in FIG. 16.

[0060] In step S108, the main calculation module 44c shown in FIG. 1 reads the main target positions PF_op and the main illumination positions PG_op stored in the target position storage region 73 and the illumination position storage region 74 respectively. The main calculation module 44c then calculates main aberration amounts (δx_op, δy_op) between the main target positions PF_op and the main illumination positions PG_op. The main aberration amount such as the main aberration amounts (δx₃₃, δy₃₃), (δx₃₄, δy₃₄) (δx₄₃, δy₄₃), (δx₄₄, δy₄₄) or the like in the main blocks SB₄₄, which is relatively near the optical axis O, is calculated with relatively large intervals. Alternatively, the main aberration amount, for example, such as the main aberration amounts (δx₀₀, δy₀₀), (δx₀₁, δy₀₁), (δx₁₀, δy₁₀) (δx₁₁, δy₁₁) in the main blocks SB₁₁, which is relatively far from the optical axis O, is calculated by small intervals. The main aberration amounts (δx_op, δy_op) are stored in the aberration amount storage region 75 shown in FIG. 16.

[0061] In step S109, when an electron beam is deflected to a desired illumination position, the correction unit 45 reads the main aberration amounts (δx_op, δy_op) from the aberration amount storage region 75 corresponding to the main blocks having the desired illumination position from among the plurality of main blocks SB_mn. The correction unit 45 calculates correction values (X₀, Y₀), by substituting the differences (x−δx_op, y−δy_op) subtracting the coordinates (x, y) of the desired illumination position from the main aberration amounts (δx_op, δy_op) for terms x, y of the right side of the correction equations (1) and (2). A deflection distortion is corrected by applying a deflection voltage equivalent to the correction values (X₀, Y₀) from the beam deflection circuit 34 to the objective deflectors 22a and 22b.

[0062] In the electron beam drawing tool, the more minutely the deflection area F is divided, the more accurately a deflection distortion can be corrected. However, the time for correction increases, and therefore the throughput is decreased. For example, when the deflection area F is equally divided by the size of the smallest main block SB₁₁ shown in FIG. 11 in order to provide a highly accurate correction, it is necessary to measure for 22×22=484 blocks, which requires an enormous amount of time.

[0063] On the other hand, according to an embodiment of the present invention, since the deflection area F is divided into 7×7=49 blocks as shown in FIG. 11, for example, about one tenth the frequency of and time for detecting marks is sufficient. Moreover, the deflection area F is divided into the plurality of main blocks SB_mn using a suitable division method selected in accordance with the change rate of the initial aberration amounts (δxb_kl, δyb_kl) Accordingly, a block where the change rate of the initial aberration amounts (δxb_kl, δyb_kl) is relatively large is minutely divided in order to provide a highly accurate correction, and it is possible to obtain correction accuracy of a similar degree to that in the case of dividing the deflection area F into 484 blocks. As described above, according to an embodiment of the present invention, it is possible to correct a deflection distortion, due to the objective deflectors 22a and 22b, with high accuracy and in a short time.

[0064] In addition, in the step S105, when the change rate of the initial aberration amounts in an arbitrary region (first region) of the deflection area is different from the initial aberration amounts in another region (second region), the main division unit 43 divides the entire deflection area F into the plurality of equal main blocks SD_mn (m=1 to 7, n=1 to 7) in accordance with the change rate of the first region, as shown in FIG. 13. Moreover, the main division unit 43 further divides the main blocks SD₁₁, SD₁₂, SD₁₆, SD₁₇, SD₂₁, SD₂₇, SD₆₁, SD₆₇, SD₇₁, SD₇₂, SD₇₆, and SD₇₇, which correspond to the second region, each into equal blocks (for example, 3×3=9 blocks). In addition, as shown in FIG. 14, the deflection area F may be divided using a combination of the division methods shown in FIGS. 11 to 13, in accordance with the change rates of the initial aberration amounts.

[0065] Note that in the correction method, even though the case obtaining the initial illumination positions PB_kl shown in FIG. 7 in step S103 is showed as an example, it is also possible to correct a deflection distortion attribute to the objective deflectors 22a and 22b with high accuracy and in a short time when the initial illumination positions PC_kl, PD_kl, PE_kl shown in FIG. 8 to FIG. 10 are obtained instead of the initial illumination positions PB_kl.

[0066] Next, a description will be given of an example of a program of correcting a deflection distortion according to an embodiment of the present invention. The deflection distortion correction program includes: dividing the deflection area of the electron beam into a plurality of equal initial blocks by the initial division unit 41, and storing the data of the deflection area divided in the block data storage region 71; calculating an initial aberration amount, generated when the electron beam is deflected and directed, for each of the plurality of initial blocks by the initial aberration calculation unit 42, and storing the initial aberration amount in the aberration amount storage region 75; dividing the deflection area into a plurality of main blocks by the main division unit 43 in accordance with a change rate of the initial aberration amount, and storing the data of the deflection area divided in the block data storage region 71; calculating a main aberration amount, generated when the electron beam is deflected and directed, for each of the plurality of main blocks by the main aberration calculation unit 44, and storing the main aberration amount in the aberration amount storage region 75; and calculating correction values for correcting a deflection distortion by the correction unit 45 based on the main aberration amount. The deflection distortion correction program is executed by the CPU 4 shown in FIG. 1. The deflection distortion correction program can be stored in a computer-readable storage medium such as the program storage device 9. The above-described correction method is carried out by a computer system, such as the CPU 4 shown in FIG. 2, reading the recording medium so as to execute the deflection distortion correction program.

[0067] Next, a description will be made regarding a method for manufacturing a semiconductor device (a large-scale integrated circuit LSI) by use of the electron beam drawing tool shown in FIG. 2, with reference to FIG. 18. As shown in FIG. 18, the method for manufacturing a semiconductor device according to an embodiment of the present invention includes a design process in Step S10, a mask manufacturing process in Step S20, and a chip manufacturing process in Step S30. The chip manufacturing process in Step S30 includes a pre-process (wafer process) for fabricating an integrated circuit on a silicon wafer in Step S31a, and post-processing (assembly process) from dicing to inspection in Step S31b. Now, a description will be given below regarding the details of the respective processes.

[0068] First, process mask simulation is carried out in Step S10. Device simulation is performed by use of a result of the process mask simulation and each value of currents and voltages to be input to each of the electrodes is set. Circuit simulation of the LSI is performed based on electrical properties obtained by the device simulation. Accordingly, layout data of device patterns is generated for each layer of the device layers corresponding to each stage in a manufacturing process.

[0069] In step S20, pattern data of mask (drawing mask data) corresponding to each of the layers of a semiconductor chip is determined, using a CAD system based on patterns such as a layout designed in the design process in step S10. In the electron beam drawing tool (the pattern generator) shown in FIG. 2, the deflection area to which the electron beam is deflected is divided into a plurality of equal initial blocks as an initial setting (steps S100 and S101 in FIG. 17). The initial aberration amounts generated when the electron beam is deflected and directed is calculated for each of the plurality of the initial blocks (steps S102 to S104). The deflection area is divided into a plurality of main blocks in accordance with the change rate of the initial aberration amounts (step S105). The main aberration amounts generated when the electron beam is deflected and directed is calculated for each of the plurality of main blocks (steps S106 to S108). The main aberration amount is stored in the main memory 7. The correction values for correcting a deflection distortion are calculated based on the main aberration amounts of exposure (step S109). In the electron beam drawing tool, a deflection distortion is corrected by applying a deflection voltage, which is equivalent to correction values, to the deflector. Photo masks for each of the layers corresponding to each stage is delineated on a mask substrate made of a material such as quartz glass or the like, by deflecting an electron beam by use of the deflector. Consequently, a set of masks for each layers of the semiconductor device is prepared.

[0070] Next, a series of processes including an oxidation process in Step S310, a resist coating process in Step S311, the photolithography process in Step S312, an ion implantation process in Step S313, a thermal treatment process in Step S314, and the like are repeatedly performed in a front-end process (substrate process) in Step 31a. In step S313, a resist film (a photo resist film) is spin-coated on a semiconductor wafer. In Step S312, a resist films on the semiconductor wafers is exposed by the step-and-repeat method and patterned, by use of an exposure device (an aligner) with the masks corresponding layer. Accordingly, etching masks are delineated. In step S313, the semiconductor wafer is processed using the etching masks delineated in step S312. When the above-described series of processes are completed, the procedure advances to Step S31b.

[0071] Next, a back-end process (surface wiring process) for wiring the substrate surface is performed in Step S31b. A series of processes including a chemical vapor deposition (CVD) process in Step S315, a resist coating process in Step S316, the photolithography process in Step S317, an etching process in Step 318, a metal deposition process in Step 319, and the like are repeatedly performed in the back-end process. In Step S317, etching masks made of resist film are delineated by exposing device patterns of one of a mask in the set of masks using the exposure system. When the above-described series of processes are completed, the procedure advances to Step S32.

[0072] When a multilayer wiring structure is competed and the pre-process is finished, the substrate is diced into chips of a given size by a dicing machine such as a diamond blade in Step S32. The chip is then mounted on a packaging material made of metal, ceramic or the like. After electrode pads on the chip and leads on a leadframe are connected to one another, a desired package assembly process such as plastic molding is performed.

[0073] In Step S40, the semiconductor device is completed after an inspection of properties relating to performance and function of the semiconductor device, and other given inspections on lead shapes, dimensional conditions, a reliability test, and the like. In Step S50, the semiconductor device which has cleared the above-described processes is packaged to be protected against moisture, static electricity and the like, and is then shipped out.

[0074] According to the method for manufacturing a semiconductor device according to the embodiment of the present invention, it is possible to correct a deflection distortion by a deflector of the electron beam drawing tool with high accuracy and in a short time in step S20. Therefore, it is possible to avoid reduction in yields, to reduce manufacturing costs, and to effectuate mass production in a short time.

[0075] Note that in step S20, even though the procedure which is the same as the steps S100 to S109 shown in FIG. 17 is explained, new correction coefficients A₀ to A₉, B₀ to B₉ can be calculated based on the main aberration amounts (step S110 shown in FIG. 21), and correction values can be calculated using the new correction coefficients A₀ to A₉, B₀ to B₉ in steps S100 to S111 shown in FIG. 21.

[0076] Furthermore, in the photolithography process in steps S312 and S317 shown in FIG. 18, as for the exposure device, the electron beam drawing tool shown in FIG. 2 can be used instead of the aligner. It is possible to delineate device patterns to the resist film on the semiconductor substrate with high accuracy, by correcting a deflection distortion using the electron beam drawing tool shown in FIG. 2 in steps S100 to 109. Accordingly, it is possible to avoid reduction in yields, and to reduce manufacturing costs. Note that, drawing can be carried out based on the pattern data generated in step S20 without preparing the set of masks in step S20.

(Modification)

[0077] In an electron beam drawing tool according to a modification of the present invention, as shown in FIGS. 19 and 20, a CPU 4x and a main memory 7x are different from the CPU 4 and the main memory 7 shown in FIG. 1, respectively. The CPU 4x shown in FIG. 19 further includes a correction coefficient calculation unit 46, and a correction unit 45x, which is different from the correction unit 45 shown in FIG. 1.

[0078] The correction coefficient calculation unit 46 substitutes, for example, the coordinates of the main target positions PF_op shown in FIG. 11, which are set by the main setting module 44a, for the terms x and y in the right sides, of the correction equations (1) and (2) while dealing with the correction coefficients a₀ to a₉ and b₀ to b₉ in the correction equations (1) and (2) as unknowns. Further, the correction coefficient calculation unit 46 substitutes the coordinates of the main illumination positions PG_op shown in FIG. 15, which are obtained by the main obtainment module 44b, for X₀ and Y₀ in the left sides, of the correction equations (1) and (2). Thus, the correction coefficient calculation unit 46 calculates new correction coefficients A₀ to A₉ and B₀ to B₉ using the simultaneous equations.

[0079] For example, in the case of the initial aberration amounts (δxb_kl, δyb_kl) shown in FIG. 7, the values of new correction coefficients A₀ to A₉ and B₀ to B₉ are calculated as having the following relationships: A₁>1, B₁=1, A₂ to A₉=0, and B₂ to B₉=0. In the case of the initial aberration amounts (δxc_kl, δyc_kl) shown in FIG. 8, the values of new correction coefficients A₀ to A₉ and B₀ to B₉ have the following relationships: A₁=B₁=1, A₂″ 0, A₀ and A₃ to A₉=0, and B₀ and B₂ to B₉=0. Moreover, in the case of the initial aberration amounts (δxd_k, δyd_kl) or (δxe_kl, δye_kl) shown in FIGS. 9 and 10, respectively, the values of new correction coefficients A₀ to A₉ and B₀ to B₉ have the following relationships: A₀ to A₉″0 and B₀ to B₉″0.

[0080] A set of the new correction coefficients A₀ to A₉ and B₀ to B₉ may be calculated, for example, for the entire deflection area F shown in FIG. 11. When it is insufficient for correction, even by calculating one set of the correction coefficients A₀ to A₉ and B₀ to B₉ for the entire deflection area F, the correction coefficients A₀ to A₉ and B₀ to B₉ may be calculated for each of the main blocks SB_mn. In addition, the correction coefficients A₀ to A₉ and B₀ to B₉ may be calculated selectively for each of some arbitrary main blocks (e.g., SB₁₁) in which the change rate of the main aberration amounts is large, for example, among the plurality of main blocks SB_mn.

[0081] Furthermore, the correction coefficient calculation unit 46 may check whether or not the values of new correction coefficients A₀ to A₉ and B₀ to B₉ are suitable for correction. Specifically, for example, the coordinates of any of the main target positions PF_op shown in FIG. 11 are substituted for the terms x and y in the right sides, of the correction equations (1) and (2) using the new correction coefficients A₀ to A₉ and B₀ to B₉, thereby calculating the correction values (X₀, Y₀). A deflection voltage equivalent to the correction values (X₀, Y₀) is applied to the objective deflectors 22a and 22b, thereby deflecting an electron beam. The suitability for correction is checked by comparing the main aberration amount (δx_op, δy_op) between the main illumination position PG_op and the main target position PF_op shown in FIG. 20, with an arbitrarily set tolerance. Note that the main illumination positions PG_op may be obtained by actually measurement, or by simulation.

[0082] The correction unit 45x calculates correction values (X₀, Y₀) using the correction equations (1) and (2) which have new correction coefficients A₀ to A₉, B₀ to B₉ calculated by the correction coefficient calculation unit 46. A deflection distortion by the objective deflectors 22a and 22b is corrected, by applying a deflection voltage equivalent to the correction values (X₀, Y₀) from the beam deflection circuit 34 to the objective deflectors 22a and 22b.

[0083] The main memory 7x shown in FIG. 20 further includes a correction coefficient storage region 77 which is different from the main memory 7 shown in FIG. 1. The correction coefficient storage region 77 stores new correction coefficients A₀ to A₉, B₀ to B₉ calculated by the correction coefficient calculation unit 46 shown in FIG. 20. The constitution of the electron beam drawing tool according to the modification of the present invention is substantially the same as the constitution of the electron beam drawing tool shown in FIG. 2, and thus no further description the constitution of the electron beam drawing tool is provided.

[0084] Next, a description will be given of an example of a method of correcting deflection distortion according to the modification of the present invention, referring to a flowchart of FIG. 21 as an example.

[0085] The procedure of steps S100 to S108 is substantially the same as the procedure shown in FIG. 17, and thus no further description the procedure of the step S100 to S108 is provided. In step S110, the correction coefficient calculation unit 46 shown in FIG. 19 calculates new correction coefficients A₀ to A₉, B₀ to B₉ using the correction equations (1) and (2), based on the main aberration amounts (δx_op, δy_op) between the main target positions PF_op and the main illumination positions PG_op for each of the plurality of main blocks SB_mn from the aberration amount storage region 75 shown in FIG. 20. The new correction coefficients A₀ to A₉, B₀ to B₉ are stored in the correction coefficient storage region 77. Furthermore, the correction coefficient calculation unit 46 may check whether the new correction coefficients A₀ to A₉, B₀ to B₉ are adequate for correction or not. As a result of the check, when the new correction coefficients A₀ to A₉, B₀ to B₉ are unsuitable for correction, the procedure return to step S105, the main division unit 43 can select another division method for suitable for correction in accordance with a change rate of the initial aberration amounts, and then can divide the deflection area F.

[0086] In step S111, when the electron beam is deflected to a desired illumination position, the correction unit 45x reads the new correction coefficients A₀ to A₉, B₀ to B₉ from the correction coefficient storage region 77 shown in FIG. 20. Correction values (X₀, Y₀) are calculated by substituting the coordinates of desired illumination position for terms x, y of the right side of the correction equations (1) and (2) with the new correction coefficients A₀ to A₉, B₀ to B₉. A deflection distortion by the objective deflectors 22a and 22b is corrected by applying a deflection voltage equivalent to the correction values (X₀, Y₀) from the beam deflection circuit 34 to the objective deflectors 22a and 22b. When the correction coefficients A₀ to A₉, B₀ to B₉ are calculated for each of the respective plurality of main blocks SB_mn in step S110, the correction unit 45x reads the correction coefficients A₀ to A₉, B₀ to B₉ corresponding to the main blocks of the desired illumination position. The correction unit 45x then calculates correction values (X₀, Y₀) using the correction coefficients A₀ to A₉, B₀ to B₉. Accordingly, it is possible to correct a deflection distortion with high accuracy.

[0087] According to the electron beam drawing tool provided with the CPU 4x shown in FIG. 19, even in the case that new correction coefficients A₀ to A₉, B₀ to B₉ is calculated, and correction values (X₀, Y₀) are calculated using the new correction coefficients A₀ to A₉, B₀ to B₉, it is possible to achieve high accuracy correction, and throughput can be improved, the same as that of the electron beam drawing tool shown in FIG. 2.

[0088] Note that since each of the correction equations (1) and (2) has ten unknowns A₀ to A₉ or B₀ to B₉, respectively, it is sufficient to set at least ten main target positions PF_op in the entire deflection area F in the step S106 when one set of the correction coefficients A₀ to A₉ and B₀ to B₉ are calculated for the entire deflection area F in the step S110. On the other hand, when the correction coefficients A₀ to A₉ and B₀ to B₉ are calculated for each of the plurality of main blocks SB_mn, it is sufficient to set at least ten main target positions PF_op for each of the plurality of main blocks SB_mn.

(Other Embodiment)

[0089] As another embodiment of the present invention, although a description is given, in the step S103 of FIGS. 17 and 21, of the case where the initial illumination positions, which are actually illuminated by an electron beam, are obtained by the initial obtainment module 42b shown in FIG. 19, the initial obtainment module 42b may be a simulator. In the case of using the simulator, an electron beam is virtually deflected and directed by simulation based on the data of the construction of the objective deflectors 22a and 22b, and of the electron optical system, which are stored in the design data storage unit 72, and also based on the data of the deflection voltage and the like. As a result, the main illumination positions, which are virtually illuminated by the electron beam, are obtained as shown in FIG. 22.

[0090] Moreover, in the step S101 of FIGS. 17 and 21, for convenience of explanation, the deflection area is equally divided into 4×4=16 initial blocks SA₁₁ to SA₄₄ as shown in FIG. 5. However, the number of the initial blocks into which the deflection area is equally divided, and the size of the initial blocks are not particularly limited as long as each falls in a range that enables the change rate of the initial aberration amounts (δxb_kl, δyb_kl) to be recognized.

[0091] Further, in the step S105 of FIGS. 17 and 21, the deflection area F is divided into the plurality of main blocks: 7×7=49 main blocks shown in FIGS. 11 and 12, 145 main blocks shown in FIG. 13, and 133 main blocks shown in FIG. 14. However, the number of main blocks and the size of the main blocks is not particularly limited as long as each falls in a range that enables sufficient accuracy to be obtained, and as long as the time for the measurement and correction falls within an arbitrarily set range.

[0092] Furthermore, it is possible to use n degree polynomials (n≧4) instead of the cubic polynomials shown in the correction equations (1) and (2). In the case of using n degree polynomials, it is sufficient that, in the steps S103 and S107 of FIGS. 17 and 21, the mark is detected at a number of points equal to or more than the number of unknowns serving as the coefficients of the respective terms in the polynomials of degree n.

[0093] In the step S103 of FIGS. 17 and 21, the case is shown in which, to obtain the initial illumination positions PB_kl individually, the positions of the mark M₀ are detected by moving one mark M₀ shown in FIG. 3A. However, the positions of the plurality of marks M₀ to M₈ corresponding to the plurality of initial target positions PA_kl and corresponding to the plurality of main target positions PB_mn, may be detected by moving the stage 26 only once, using the mark mount 25a on which the plurality of marks M₀ to M₈ are arranged as shown in FIG. 3B. The use of the plurality of marks M₀ to M₈ makes it possible to reduce the time required to move the stage 26. Here, it is sufficient that the deflection area F is divided into the plurality of initial blocks and into the plurality of main blocks in accordance with the spacing of the arranged marks M₀ to M₈, or that a mark mount is used which has a plurality of marks corresponding to intervals between the grid points of the initial blocks and the main blocks. In addition, in the step S107 of FIGS. 17 and 21 as well, the mark mount 25a, on which the plurality of marks M₀ to M₈ is arranged, may be used similarly.

[0094] In the procedures of steps S103 and S107 shown in FIGS. 17 and 21, there are some cases where an error occurs in the positional relationship between the plurality of marks when the plurality of marks is arranged in advance at the initial target positions PA_kl and the main target positions PB_kl. In the case of occurring error, the correction coefficients A₀ to A₉ and B₀ to B₉ may be calculated by storing data concerning the error in the positional relationship in the main memory 7 or the like in advance; measuring the positional relationship between the marks may be measured; complementing (correcting) the error in the positional relationship between the marks. In addition, the number of the plurality of marks is not particularly limited. The stage 26 may be moved and measured in accordance with the number of the marks and the number of desired measurement points.

[0095] Each of the objective deflectors 22a and 22b may include a plurality of deflectors, such as a main deflector and a sub-deflector. Therefore, it may be possible to calculate correction values (X₀, Y₀) equivalent to a deflection voltage to be applied to a deflector having a deflection distortion from among the plurality of the deflectors. Alternatively, it may also be possible to calculate correction values (X₀, Y₀) equivalent to a deflection voltage to be applied to a deflector without a deflection distortion different from the deflector having a deflection distortion. Moreover, it may also be possible to calculate correction values (X₀, Y₀) equivalent to a deflection voltage to be applied to the plurality of deflectors.