US 6,972,267 B2Grant
Sequential deposition of tantalum nitride using a tantalum-containing precursor and a nitrogen-containing precursor
Issue Date:2005-12-06
•20 Claims
•9 Drawing Sheets
Abstract
Disclosed is a method and apparatus that features deposition of tantalum films employing sequential deposition techniques, such as Atomic Layer Deposition (ALD). The method includes serially exposing a substrate to a flow of a nitrogen-containing gas, such as ammonia NH3, and a tantalum containing gas. The tantalum-containing gas is formed from a precursor, (tBuN)Ta(NEt2)3 (TBTDET), which is adsorbed onto the substrate. Prior to adsorption of TBTDET onto the substrate layer, the TBTDET precursor is heated within a predefined temperature range.
Metadata
Assignee
- Applied Materials, Inc.
Inventors
- Wei Cao
- Hua Chung
- Vincent Ku
- Ling Chen
Application Information
Application Number:US 10/379,438
Filing Date:2003-03-04
Priority Date:2002-03-04
Art Unit:2812
Patent Drawings (9 sheets)
Description
Cross-Reference to Related Applications
[0001] This application claims benefit of U.S. provisional patent application Ser. No. 60/362,189 filed Mar. 4, 2002, which is herein incorporated by reference.
Background of the Invention
[0002] 1. Field of the Invention
[0003] This invention relates to semiconductor processing. More particularly, this invention relates to improvements in the process of depositing refractory metal layers on semiconductor substrates using sequential deposition techniques.
[0004] 2. Description of the Related Art
[0005] The semiconductor industry continues to strive for larger production yields while increasing the uniformity of layers deposited on substrates having increasingly larger surface areas. These same factors in combination with new materials also provide higher integration of circuits per unit area on the substrate. As circuit integration increases, the need for greater uniformity and process control regarding layer characteristics rises. Formation of refractory metal layers in multi-level integrated circuits poses many challenges to process control, particularly with respect to contact formation.
[0006] Contacts are formed by depositing conductive interconnect material in an opening on the surface of insulating material disposed between two spaced-apart conductive layers. The aspect ratio of such an opening inhibits deposition of conductive interconnect material that demonstrates satisfactory step coverage and gap-fill, employing traditional interconnect material such as aluminum. In addition, the resistance of aluminum has frustrated attempts to increase the operational frequency of integrated circuits.
[0007] Attempts have been made to provide interconnect material with lower electrical resistivity than aluminum. This has led to the substitution of copper for aluminum. Copper suffers from diffusion resulting in the formation of undesirable intermetallic alloys that require the use of barrier materials.
[0008] Barrier layers formed from sputtered tantalum (Ta) and reactive sputtered tantalum nitride (TaN) have demonstrated properties suitable for use with copper. Exemplary properties include high conductivity, high thermal stability and resistance to diffusion of foreign atoms. However, sputter deposition of Ta and/or TaN films is limited to use for features of relatively large sizes, e.g., >0.3 μm and contacts in vias having small aspect ratios.
[0009] CVD offers an inherent advantage over PVD of better conformability, even in small structures 0.25 μm with high aspect ratios. As a result, CVD deposition of Ta and TaN with various metal-organic sources has been employed. Examples of metal-organic sources include tertbutylimidotris(diethylamido)tantalum (TBTDET), pentakis(dimethylamido)tantalum (PDMAT) and pentakis(diethylamido)tantalum (PDEAT).
[0010] Attempts have been made to use existing CVD-based Ta deposition techniques in an atomic layer deposition (ALD) mode. Such attempts, however, suffer drawbacks. For example, formation of Ta films from TaCl5 may require as many as three treatment cycles using various radial based chemistries to perform reduction process of the Ta to form tantalum nitride. Processes using TaCl5 may suffer from chlorine contamination within the tantalum nitride layer.
[0011] There is a need, therefore, for Ta chemistries that may be employed with fewer reduction steps and shorter cycle times.
Summary of the Invention
[0012] A method for forming a tantalum-containing layer on a substrate disposed in a processing chamber, comprising heating a TBTDET precursor to a predetermined temperature of at least 65° C. to form a tantalum-containing gas, forming a tantalum-containing layer upon the substrate by adsorption of the tantalum-containing gas onto the substrate, reacting a nitrogen-containing process gas with the tantalum-containing layer to produce a layer of tantalum nitride and repeating forming the tantalum-containing layer and reacting the nitrogen-containing process gas with the tantalum-containing layer to form a layer of tantalum nitride of desired thickness, defining a final tantalum nitride layer. In accordance with another embodiment of the present invention an apparatus is disclosed that carries-out the steps of the method.
Brief Description of the Drawings
[0013] So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
[0014] FIG. 1 is a detailed cross-sectional view of a substrate before deposition of a tantalum nitride layer in accordance with one embodiment of the present invention;
[0015] FIG. 2 is a detailed cross-sectional view of a substrate shown above in FIG. 1 after deposition of a tantalum nitride (TaN) layer and a copper contact in accordance with one embodiment of the present invention;
[0016] FIG. 3 is a schematic view showing deposition of a first molecule onto a substrate during sequential deposition techniques in accordance with one embodiment of the present invention;
[0017] FIG. 4 is a schematic view showing deposition of second molecule onto a substrate during sequential deposition techniques in accordance with one embodiment of the present invention;
[0018] FIG. 5 is a graphic representation showing the growth rate per cycle of a tantalum nitride layer versus a pre-heating temperature of a TBTDET precursor, in accordance with the present invention;
[0019] FIG. 6 is a perspective view of a semiconductor processing system in accordance with the present invention;
[0020] FIG. 7 is a detailed view of the processing chambers shown above in FIG. 6 ;
[0021] FIG. 8 is flow diagram showing a method of depositing a tantalum nitride layer, in accordance with one embodiment of the present invention;
[0022] FIG. 9 is flow diagram showing a method of depositing a tantalum nitride layer, in accordance with one embodiment of the present invention; and
[0023] FIG. 10 is flow diagram showing a method of depositing a tantalum nitride layer, in accordance with one embodiment of the present invention.
Detailed Description of the Preferred Embodiment
[0024] Referring to FIG. 1 an exemplary structure upon which a tantalum nitride layer, discussed more fully below, is formed in accordance with the present invention is shown as a substrate 10. Substrate 10 includes a wafer 12 that may have one or more layers, shown as layer 14, disposed thereon. Wafer 12 may be formed from any material suitable for semiconductor processing, such as silicon, and layer 14 may be formed from any suitable material, including dielectric or conductive materials. For purposes of the present example, layer 14 includes a void 16, exposing a region 18 of wafer 12.
[0025] Embodiments of the processes described herein deposit tantalum-containing materials or tantalum nitride on many substrates and surfaces. Substrates on which embodiments of the invention may be useful include, but are not limited to semiconductor wafers, such as crystalline silicon (e.g., Si<100>or Si<111>), silicon oxide, silicon germanium, doped or undoped polysilicon, doped or undoped silicon wafers silicon nitride and patterned or non-patterned wafers. Surfaces include bare silicon wafers, films, layers and materials with dielectric, conductive and barrier properties and include aluminum oxide and polysilicon. Pretreatment of surfaces includes polishing, etching, reduction, oxidation, hydroxylation, annealing and baking. A substrate can be pretreated to be terminated with a variety, of functional groups such as hydroxyls (OH), alkoxy (OR, where R=Me, Et, Pr or Bu), haloxyls (OX, where X=F, Cl, Br or I), halides (F, Cl, Br or I), oxygen radicals, aminos (NH or NH2) and amidos (NR or NR2, where R=Me, Et, Pr or Bu).
[0026] Referring to FIG. 2 , formed adjacent to layer 14 and region 18 is a barrier layer 20 containing a refractory metal compound, such as tantalum. In the present example, barrier layer 20 is formed from tantalum nitride, TaN, by sequentially exposing substrate 10 to processing gases to form layers of differing compounds on substrate 10. Although not required, in this present case monolayers of differing compounds may be formed. Tantalum nitride barrier layer 20 conforms to the profile of void 16 so as to cover region 18 and layer 14. A contact 22 is fabricated in accordance with the present invention by formation of a layer of copper 24 adjacent to barrier layer 20, filling void 16. Copper layer 24 may be formed using standard techniques (e.g., ALD, PVD, CVD and/or electroplating) and include seed formation and/or fill.
[0027] With this configuration, a contact consisting of tantalum nitride barrier layer 20 and copper layer 24 is formed. Tantalum nitride barrier layer 20 serves as a seed layer to promote the formation of copper layer 24 using, for example, electroplating techniques. Important characteristics that barrier layer 20 should demonstrate include good step coverage and thickness uniformity. To that end, tantalum nitride barrier layer 20 is deposited employing sequential techniques, such as atomic layer deposition.
[0028] Referring to FIGS. 2 , 3 and 4, one example of forming barrier layer 20 employing sequential deposition techniques includes exposing substrate 10 to a tantalum-containing gas formed from vaporization of a liquid precursor (tBuN)Ta(NEt2)3 (TBTDET) to form a tantalum-containing gas that includes TBTDET. It is believed that the initial surface of substrate 10, e.g., the surface of layer 14 and region 18, presents active ligands to the tantalum-containing gas. To that end, substrate 10 is heated in a range from about 250° C. to about 450° C. and placed in a controlled environment that is pressurized in a range from about 1 Torr to about 100 Torr, inclusive. Substrate 10 is exposed to a process gas that includes the tantalum-containing gas and a carrier gas. The carrier gas may be Ar, He, N2, H2, and combinations thereof and may be used as a purge gas. This results in a tantalum-containing layer being deposited on substrate 10. It is believed that the tantalum-containing layer has a surface of ligands comprising amido (—NEt2) and imido (═NtBu), shown generally as “a”. The tantalum-containing layer includes bound tantalum complexes with ligands, such that “a”=0–5, often 3 or 4.
[0029] The tantalum-containing layer is exposed to another process gas that includes a nitrogen-containing gas and a carrier gas to form the tantalum-containing layer forming a barrier layer 20 of tantalum nitride. In this example, the nitrogen-containing gas is NH3 gas and either Ar or N2 is the carrier gas. It is believed that the amido and imido ligands in the exposed surface of the tantalum-containing layer react with the NH3 process gas to form byproducts that include radicals (e.g., NH2, NEt2, NtBu, HNtBu or tBu), butene, amines (e.g., HNEt2 or H2NtBu), (Et2N)2 and H2 among others. In this manner, a surface comprising a layer of tantalum nitride molecules is formed upon substrate 10.
[0030] Although not required, the tantalum nitride layer may be a monolayer of tantalum nitride molecules. In some embodiments, the process proceeds cycle after cycle, until tantalum nitride barrier layer 20 has a desired thickness achieved, with each cycle having a duration from about 0.01 seconds to about 60 seconds, preferably from about 0.1 seconds to about 10 seconds, depending upon the processing system employed. The tantalum nitride barrier layer 20 generally has a thickness in the range from about 10 Å to about 1,000 Å.
[0031] An important precursor characteristic is to have a favorable vapor pressure. Precursors may be a plasma, gas, liquid or solid at ambient temperature and pressure. However, within the ALD chamber, precursors are volatilized. Organometallic compounds or complexes that may be heated prior to delivery include any chemical containing a metal and at least one organic group, such as alkyls, alkoxyls, alkylamidos and anilides. Precursors comprise of organometallic and halide compounds.
[0032] Exemplary tantalum precursors that may be heated to form tantalum-containing gases include tantalum compounds containing ligands such as alkylamidos, alkylimidos, cyclopentadienyls, halides, alkyls, alkoxides and combinations thereof. Alkylamido tantalum compounds used as tantalum precursors include (RR′N)5Ta, where R or R′ are independently hydrogen, methyl, ethyl, propyl or butyl. Alkylimido tantalum compounds used as tantalum precursors include (RN)(R′R″N)3Ta, where R, R′ or R″ are independently hydrogen, methyl, ethyl, propyl or butyl. Specific tantalum precursors include: (Et2N)5Ta, (Me2N)5Ta, (EtMeN)5Ta, (Me5C5)TaCl4, (acac)(EtO)4Ta, Br5Ta, Cl5Ta, I5Ta, F5Ta, (NO3)5Ta, (tBuO)5Ta, (iPrO)5Ta, (EtO)5Ta and (MeO)5Ta.
[0033] Exemplary nitrogen precursors utilized in nitrogen-containing gases include: NH3, N2, hydrazines (e.g., N2H4 or MeN2H3), amines (e.g., Me3N, Me2NH or MeNH2), anilines (e.g., C6H5NH2), organic azides (e.g., MeN3 or Me3SiN3), inorganic azides (e.g., NaN3 or Cp2CoN3) and radical nitrogen compounds (e.g., N3, N2, N, NH or NH2). Radical nitrogen compounds can be produced by heat, hot-wires and/or plasma.
[0034] Referring to FIGS. 4 and 5 , it was discovered that the time required to form tantalum nitride barrier layer 20 may be reduced by heating the TBTDET precursor before formation of the tantalum-containing layer on substrate 10. As shown by curve 30 it was found that by heating the TBTDET precursor in the range from about 65° C. to about 150° C., shown as segment 32, the growth rate of the layers of tantalum nitride per ALD cycle may be maximized. Specifically, point 34 shows the growth rate at about 65° C. being a little less than about 0.9 Å per cycle. Point 36 shows the growth rate at about 90° C. being a little less than about 1.2 Å per cycle, and point 38 shows the growth rate at about 150° C. being approximately 2.0 Å per cycle. A segment 40 of curve 30 shows that for temperatures below about 65° C., the growth rate of tantalum nitride is substantially reduced. A segment 42 of curve 30 shows that for temperatures above about 150° C., the growth rate of tantalum nitride is substantially reduced. Thus, the slope of a segment 32 of curve 30 shows that the growth rate of tantalum nitride barrier layer 20 is greater for temperatures in a range from about 65° C. to about 150° C. compared to other temperatures for the TBTDET precursor.
[0035] Referring to FIG. 6 , an exemplary wafer processing system employed to deposit a tantalum nitride layer in accordance with the present invention includes one or more processing chambers 44, 45 and 46. Processing chambers 44, 45 and 46 are disposed in a common work area 48 surrounded by a wall 50. Processing chambers 44, 45 and 46 are in data communication with a controller 54 that is connected to one or more monitors, shown as 56 and 58. Monitors 56 and 58 typically display common information concerning the process associated with the processing chambers 44, 45 and 46. Monitor 58 is mounted to the wall 50, with monitor 56 being disposed in the work area 48. Operational control of processing chambers 44, 45 and 46 may be achieved with use of a light pen, associated with one of monitors 56 and 58, to communicate with controller 54. For example, a light pen 60a is associated with monitor 56 and facilitates communication with the controller 54 through monitor 56. A light pen 60b facilitates communication with controller 54 through monitor 58.
[0036] Referring to both FIGS. 6 and 7 , each of processing chambers 44, 45 and 46 includes a housing 62 having a base wall 64, a cover 66, disposed opposite to base wall 64, and a sidewall 67, extending there between. Housing 62 defines a chamber 68. A pedestal 69 is disposed within processing chamber 68 to support substrate 10. Pedestal 69 may be mounted to move between cover 66 and base wall 64, using a displacement mechanism (not shown), but is typically fixed proximate to bottom wall 64. Supplies of processing fluids 70a, 70b, 70c and 71 are in fluid communication with processing chamber 68 via a manifold 72. In the present example supply 70a may contain NH3, supply 70b may contain N2 and supply 70c may contain Ar. Process fluid supply 71 includes an ampoule 71a in fluid communication with a vaporizer 71b. Ampoule 71a includes a supply of TBTDET precursor 71c and is in fluid communication with supply 70c. Ampoule 71a is in fluid communication with vaporizer 71b via precursor channel 71d to deliver, to processing chamber 68, precursor 71c, with the aid of carrier gas in supply 70c. Ampoule 71a, liquid 71c and channel 71d may be heated by conventional heating methods, e.g., heating tape in the range from about 65° C. to about 150° C. Regulation of the flow of gases from supplies 70a, 70b, 70c and 71 is effectuated via flow valves 73 that are regulated by computer control, discussed more fully below. Flow valves 73 may be any suitable valve. Actuation rates of flow valves 73 may be in the range of a microsecond to several milliseconds to seconds.
[0037] Substrate 10 is heated to processing temperature by a heater embedded within pedestal 69. For example, pedestal 69 may be resistively heated by applying an electric current from an AC power supply 75 to a heater element 76. Substrate 10 is, in turn, heated by pedestal 69, and can be maintained within a desired process temperature range, with the actual temperature varying dependent upon the gases employed and the topography of the surface upon which deposition is to occur. A temperature sensor 78, such as a thermocouple, is also embedded in pedestal 69 to monitor the temperature of pedestal 69 in a conventional manner. For example, the measured temperature may be used in a feedback loop to control the electrical current applied to heater element 76 by power supply 75, such that the wafer temperature can be maintained or controlled at a desired temperature that is suitable for the particular process application. Substrate 10 may be heated using radiant heat, e.g., heat lamps or plasma (not shown). A vacuum pump 80 is used to evacuate processing chamber 68 and to help maintain the proper gas flows and pressure inside processing chamber 68.
[0038] Referring to FIGS. 7 and 8 , a method in accordance with one embodiment of the present invention includes heating substrate 10 to a processing temperature in a range from about 250° C. to about 450° C. at step 100. At step 102 processing chamber 68 is pressurized in a range from about 1 Torr to about 100 Torr. This is achieved by activating pump 80 to evacuate processing chamber 68. At step 104, the TBTDET precursor is heated in ampoule 71a in a range from about 65° C. to about 150° C. This forms a tantalum-containing gas that includes TBTDET. At step 106 a purge gas, such as argon, Ar, is flowed into processing chamber 68 for a sufficient amount of time to purge processing chamber 68. The actual time during which Ar is flowed into processing chamber 68 is dependent upon the system employed.
[0039] In the present example, Ar is flowed into processing chamber 68 in a range of from about 5 to about 10 seconds to purge processing chamber 68. At step 108, the tantalum-containing gas is flowed into processing chamber 68 along with Ar gas to create a tantalum-containing layer on substrate 10 that includes TBTDET. To that end, Ar gas from supply 70c is flowed into ampoule 71a at a rate in the range from about 50 sccm to about 2,000 sccm, preferably about 500 sccm. After a sufficient time, which is dependent upon the process system employed, the flow of tantalum-containing gas is terminated, at step 110. In the present example, the flow of tantalum-containing gas is terminated after about 5 seconds to about 25 seconds after the flow commenced. The flow of Ar gas may terminate with the flow of tantalum-containing gas. Alternatively, the flow of Ar gas may continue for a sufficient amount of time, depending upon the processing system employed, to ensure removal from processing chamber 68 of tantalum-containing gas and reaction byproducts, at step 110.
[0040] In the present example the time that the flow of Ar gas continues is in the range from about 5 seconds to about 10 seconds. Subsequently at step 112, a nitrogen-containing gas, such as NH3 gas, is pulsed into processing chamber 68, along with the purge gas for a sufficient amount of time to create a reaction between nitrogen, in the NH3 gas, and the tantalum-containing layer to form a layer of tantalum nitride. The resulting layer of tantalum nitride may be a monolayer of tantalum nitride molecules. To that end, the duration of the pulse of NH3 gas is dependent upon the processing system employed, but in the present example the flow of NH3 gas was in the range from about 5 seconds to about 35 seconds. The pulse of the nitrogen-containing gas into processing chamber 68 is subsequently terminated, at step 114. The flow of the purge gas may be terminated along with the flow of the nitrogen-containing gas. Alternatively, the flow of the purge gas may continue at step 114. In this manner, NH3 gas and byproducts of the reaction of nitrogen with the tantalum-containing layer are removed from processing chamber 68. This completes one cycle of the sequential deposition technique in accordance with the present invention. The aforementioned cycle is repeated multiple times until barrier layer 20 reaches a desired thickness shown in FIG. 2 .
[0041] It has been found that each cycle results in the formation of a tantalum nitride layer having a thickness in a range from about 0.9 Å to about 1.2 Å. As a result, at step 116, it is determined whether the tantalum nitride layer has reached a desired thickness employing any known means in the art. Were it determined that the tantalum nitride layer had not reached a desired thickness, then the process would proceed to step 108. Were it determined that tantalum nitride layer had reached a desired thickness, then the process would proceed with further processing at step 118. An example of further processing could include formation of a copper layer 24, shown in FIG. 2 , employing standard formation techniques, such as electroplating. Further processing includes a seed layer or a nucleation layer deposited via ALD, CVD or PVD techniques.
[0042] Referring to both FIGS. 2 and 7 , the process for depositing the tantalum and copper layers 20 and 24 may be controlled using a computer program product that is executed by controller 54. To that end, controller 54 includes a central processing unit (CPU) 90, a volatile memory, such as a random access memory (RAM) 92 and permanent storage media, such as a floppy disk drive for use with a floppy diskette, or hard disk drive 94. The computer program code can be written in any conventional computer readable programming language; for example, 68000 assembly language, C, C++, Pascal, Fortran, and the like. Suitable program code is entered into a single file, or multiple files, using a conventional text editor and stored or embodied in a computer-readable medium, such as the hard disk drive 94. If the entered code text is in a high level language, the code is compiled and the resultant compiler code is then linked with an object code of precompiled Windows® library routines. To execute the linked and compiled object code the system user invokes the object code, causing CPU 90 to load the code in RAM 92. CPU 90 then reads and executes the code to perform the tasks identified in the program.
[0043] Referring to FIGS. 7 and 9 , a method in accordance with an alternate embodiment overcomes difficulty in having pump 80 establish the processing pressure during the differing processing steps of the sequential deposition process. Specifically, it was found that relying on pump 80 to establish the processing pressure might increase the time required to form a tantalum nitride layer. This is due, in part, to the time required for pump 80 to stabilize (settle) in order to evacuate at a constant rate and thus pump down the processing chamber 68 to establish the processing pressure. To avoid the pump stabilization problem, pump 80 may be set to evacuate processing chamber 68 at a constant rate throughout the sequential deposition process. Thereafter, the processing pressure would be established by the flow rates of the process gases into process chamber 68. To that end, at step 200, substrate 10 is heated to a processing temperature in a range from about 250° C. to about 450° C. At step 202 the pump is activated to evacuate processing chamber 68 at a constant rate. At step 204, the TBTDET precursor is heated in ampoule 71a in a range from 65° C. to about 150° C. This forms a tantalum-containing gas that includes TBTDET. At step 206 a purge gas, such as argon, is flowed into processing chamber 68 for a sufficient time to purge processing chamber 68 and establish a processing pressure. The processing pressure is in a range from about 1 Torr to about 100 Torr. Although the exact time required is dependent upon the processing system employed, in the present example, the Ar is flowed into processing chamber 68 in the range from about 5 seconds to about 10 seconds.
[0044] At step 208 the tantalum-containing gas is flowed into processing chamber 68 along with Ar gas to create a tantalum-containing layer on substrate 10. The flow rates of the tantalum-containing gas and the Ar gas is established so as to prevent varying the processing pressure established at step 206. To that end, Ar gas from supply 70c is flowed into ampoule 71a at a rate of approximately 500 sccm. After about 5 seconds to about 25 seconds, the flow of tantalum-containing gas is terminated, with the flow of Ar increased to maintain the processing pressure, at step 210. This continues for a sufficient time to remove tantalum-containing gas and reaction byproducts from processing chamber 68, typically about 5 seconds to about 10 seconds. Subsequently at step 212, a nitrogen-containing gas, such as NH3 gas, is introduced into processing chamber 68, along with the purge gas for a sufficient amount of time to react nitrogen, contained in the nitrogen-containing gas, with the tantalum-containing layer to form a tantalum nitride layer. The tantalum nitride layer may or may not be a monolayer of tantalum nitride molecules. The time required to achieve the nitrogen reaction depends upon the processing system employed. In the present example, the time is in the range from about 5 seconds to about 35 seconds. The flow rate of the NH3 gas and the purge gas are established so that the processing pressure established at step 206 is maintained. The flow of the NH3 process gas into processing chamber 68 is subsequently terminated, while the flow of purge gas is increased at step 214 to maintain a constant processing pressure. In this manner, the nitrogen-containing gas and byproducts of the nitrogen reaction with the tantalum-containing layer are removed from processing chamber 68. This completes one cycle of the sequential deposition technique in accordance with the present invention.
[0045] The aforementioned cycle is repeated multiple times until barrier layer 20 reaches a desired thickness shown in FIG. 2 . As a result, at step 216, shown in FIG. 9 , it is determined whether the tantalum nitride barrier layer has reached a desired thickness employing any known means in the art. Were it determined that tantalum nitride layer had not reached a desired thickness, and then the process would proceed to step 208. Were it determined that tantalum nitride layer had reached a desired thickness, and then the process would proceed with further processing at step 218. Generally, the tantalum nitride barrier layer is grown to a thickness in the range from about 10 Å to about 1,000 Å. An example of further processing could include formation of a copper layer 24, shown in FIG. 2 , employing standard formation techniques, such as electroplating.
[0046] Referring to FIGS. 7 and 10 in yet another embodiment of the present invention, removal of byproducts and precursors from processing chamber 68 may be achieved by evacuating processing chamber 68 of all gases present after formation of each tantalum-containing layer that is yet to under go a reaction with nitrogen. To that end, substrate 10 is heated to a processing temperature in a range from about 250° C. to about 450° C. at step 300, and the TBTDET precursor is heated in ampoule 71a in a range from about 65° C. to about 150° C. at step 302 to form a tantalum-containing gas that includes TBTDET. At step 304, pump 80 establishes a processing pressure in a range from about 1 Torr to about 100 Torr. At step 306 a purge gas, such as argon is flowed into processing chamber 68 for a sufficient amount of time to purge processing chamber 68. The time required to purge processing chamber 68 is dependent upon the processing system employed.
[0047] In the present example, the time required to purge processing chamber 68 is in a range from about 5 seconds to about 10 seconds. At step 308 the tantalum-containing gas is flowed into processing chamber 68 along with Ar gas to create a tantalum-containing layer on substrate 10. To that end, Ar gas from supply 70c is flowed into ampoule 71a at a rate of approximately 500 sccm. After a sufficient amount of time, the flow of tantalum-containing gas is terminated, while the flow of Ar continues. The amount of time during which the tantalum-containing gas flows is dependent upon the processing system employed.
[0048] In the present example the tantalum-containing gas is flowed into processing chamber 68 for approximately 5 seconds to about 25 seconds during step 310. During step 310, the flow of Ar gas into processing chamber 68 continues for a sufficient time to remove the tantalum-containing gas and reaction byproducts from processing chamber 68. The duration for which Ar gas is flowed into processing chamber 68 is dependent upon the processing system employed, but in the present example, is in the range from about 5 seconds to about 25 seconds.
[0049] Subsequently, at step 312 the flow of Ar gas is terminated and the processing chamber is evacuated of all gases present. At step 314 processing chamber 68 is brought to the processing pressure and the Ar gas is introduced therein. At step 316, the nitrogen-containing gas is introduced into processing chamber 68, along with the purge gas for a sufficient amount of time to react nitrogen in the nitrogen-containing gas with the tantalum-containing layer to form a layer of tantalum nitride. The time required to achieve the nitrogen reaction is dependent upon the processing system employed.
[0050] In the present example, the nitrogen-containing gas is flowed into processing chamber 68 in the range from 5 seconds to about 35 seconds during step 316. The flow of the tantalum-containing process gas into processing chamber 68 is subsequently terminated, while the flow of purge gas continues at step 318. In this manner, the tantalum-containing process gas and byproducts of the nitrogen reaction are removed from processing chamber 68. At step 320, the flow of Ar gas is terminated and the processing chamber is evacuated of all gases present therein at step 312. This completes one cycle of the sequential deposition technique in accordance with the present invention.
[0051] The aforementioned cycle is repeated multiple times until layer 14 reaches a desired thickness shown in FIG. 2 . As a result, at step 322 it is determined whether the aforementioned tantalum nitride layer has reached a desired thickness employing any known means in the art. Were it determined that tantalum nitride layer had not reached a desired thickness, and then the process would proceed to step 304. Were it determined that tantalum nitride layer had reached a desired thickness, and then the process would proceed with further processing at step 324. An example of further processing could include formation of a copper layer 24, shown in FIG. 2 , employing standard formation techniques, such as electroplating.
[0052] In some embodiments of the processes, tantalum nitride is formed with stoichiometry that includes TaNx, were x is in the range from about 0.4 to about 2. Tantalum nitride is often derived with the empirical formulas TaN, Ta3N5 Ta2N or Ta6N2.57. Tantalum nitride is deposited as amorphous or crystalline material. In some metal nitrides, slight variations of the stoichiometry can have a large impact on the electrical properties, e.g., Hf3N4 is an insulator while HfN is a conductor. Therefore, ALD provides stoichiometric control during the deposition of product compounds. The stoichiometry may be altered by various procedures following the deposition process, such as when Ta3N5 is thermally annealed to form TaN. Altering the precursor ratios during deposition also controls stoichiometry.
[0053] Many industrial applications exist for the product compounds synthesized by the various embodiments of the invention. Within the microelectronics industry, the product compounds are used as high-k transistor gate dielectric materials, transistor gate interface engineering, high-k capacitor dielectric materials (DRAMs), seed layers, diffusion barrier layers, adhesion layers, insulator layers, conducting layers and functionalized surface groups for patterned surfaces (e.g., selective deposition). In the realm of microelectromechanical systems (MEMS), the materials formed by the claimed invention are used as insulating, conducting or structural films. The materials can also serve as functionalized surface groups to reduce stiction. Additional functionality of surface groups is used in gas or liquid chromatography, chemical sensors and active sites for chemical attachment, patterned surfaces (e.g., combinatorial chemistry). Silicon nitride is also used as a hardening coating on tools and within optical devices.
[0054] Although the invention has been described in terms of specific embodiments, one skilled in the art will recognize that various changes to the reaction conditions, e.g., temperature, pressure, film thickness and the like can be substituted and are meant to be included herein and sequence of gases being deposited. For example, sequential deposition process may have different initial sequence. The initial sequence may include exposing the substrate to the reducing gas before the metal-containing gas is introduced into the processing chamber. In addition, the tantalum nitride layer may be employed for other features of circuits in addition to functioning as a diffusion barrier for contacts. Therefore, the scope of the invention should not be based upon the foregoing description. Rather, the scope of the invention should be determined based upon the claims recited herein, including the full scope of equivalents thereof.
[0055] While the foregoing is directed to embodiments of the present invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims
1. A method for forming a tantalum-containing material on a substrate, comprising:
heating a substrate to a deposition temperature within a process chamber;
heating a tantalum precursor within an ampoule to a predetermined temperature in a range from about 65° C. to about 150° C. to form a heated tantalum precursor;
flowing the heated tantalum precursor into a vaporizer to form a tantalum-containing gas;
flowing the tantalum-containing gas through a conduit and into the process chamber while maintaining the conduit at a temperature in a range from about 65° C. to about 150° C.; and
exposing the substrate to at least sequential pulses of the tantalum-containing gas and a nitrogen precursor gas during an ALD process to deposit a tantalum nitride material thereon.
2. The method of claim 1, wherein the substrate is exposed to a pretreatment process to form a treated surface containing a chemical functional group selected from the group consisting of hydroxyl, alkoxy, aminos, amidos, derivatives thereof and combinations thereof before the ALD process.
3. The method of claim 1, wherein the deposition temperature is in a range from about 250° C. to about 450° C.
4. The method of claim 3, wherein a copper-containing layer is deposited on the tantalum nitride material by an electroplating process.
5. The method of claim 3, wherein a seed layer or a nucleation layer is deposited on the tantalum nitride material by a vapor deposition process selected from the group consisting of an ALD process, a CVD process, a PVD process and combinations thereof.
6. The method of claim 3, wherein a copper seed layer and a copper bulk layer are deposited on the substrate comprising the tantalum nitride material by a deposition process independently selected from the group consisting of an electroplating process, an ALD process, a CVD process, a PVD process and combinations thereof.
7. The method of claim 3, wherein the tantalum nitride material comprises tantalum nitride with a chemical formula TaNx, wherein x is in a range from about 0.4 to about 2.
8. The method of claim 3, wherein the tantalum nitride material comprises tantalum nitride with a chemical formula of about Ta6N2.57.
9. A method for forming a tantalum-containing material on a substrate, comprising:
exposing a substrate to a pretreatment process to form a treated surface containing a chemical functional group selected from the group consisting of hydroxyl, alkoxy, aminos, amidos, derivatives thereof and combinations thereof;
heating the substrate to a deposition temperature within a process chamber;
heating a tantalum precursor within an ampoule to a predetermined temperature in a range from about 65° C. to about 150° C. to form a heated tantalum precursor;
flowing the heated tantalum precursor and a carrier gas into a vaporizer to form a tantalum-containing gas;
flowing the tantalum-containing gas through a conduit and into the process chamber while maintaining the conduit at a temperature in a range from about 65° C. to about 150° C.; and
exposing the substrate to at least sequential pulses of the tantalum-containing gas and a nitrogen precursor gas during an ALD process to deposit a tantalum nitride material thereon.
10. The method of claim 9, wherein a copper-containing layer is deposited on the tantalum nitride material by an electroplating process.
11. The method of claim 9, wherein a seed layer or a nucleation layer is deposited on the tantalum nitride material by a vapor deposition process selected from the group consisting of an ALD process, a CVD process, a PVD process and combinations thereof.
12. The method of claim 9, wherein a copper seed layer and a copper bulk layer are deposited on the substrate comprising the tantalum nitride material by a deposition process independently selected from the group consisting of an electroplating process, an ALD process, a CVD process, a PVD process and combinations thereof.
13. The method of claim 9, wherein the deposition temperature is in a range from about 250° C. to about 450° C.
14. The method of claim 13, wherein the tantalum nitride material comprises tantalum nitride with a chemical formula TaNx, wherein x is in a range from about 0.4 to about 2.
15. The method of claim 13, wherein the tantalum nitride material comprises tantalum nitride with a chemical formula of about Ta6N2.57.
16. A method for forming a tantalum-containing material on a substrate, comprising:
heating a substrate to a deposition temperature within a process chamber;
heating a tantalum precursor within an ampoule to a predetermined temperature in a range from about 65° C. to about 150° C. and forming a tantalum-containing gas;
flowing the tantalum-containing gas through a conduit and into the process chamber while maintaining the conduit at a temperature in a range from about 65° C. to about 150° C.;
exposing the substrate to at least sequential pulses of the tantalum-containing gas and a nitrogen precursor gas during an ALD process to deposit a tantalum nitride material thereon; and
depositing a copper seed layer and a copper bulk layer on the substrate.
17. The method of claim 16, wherein the copper seed layer is deposited on the tantalum nitride material by an electroplating process.
18. The method of claim 16, wherein the deposition temperature is in a range from about 250° C. to about 450° C.
19. The method of claim 18, wherein the tantalum nitride material comprises tantalum nitride with a chemical formula TaNx, wherein x is in a range from about 0.4 to about 2.
20. The method of claim 18, wherein the tantalum nitride material comprises tantalum nitride with a chemical formula of about Ta6N2.57.
Patent Citations (301)
| Patent | Date | Inventor | Cited By |
|---|---|---|---|
| US3594216(A) | 1971-07-01 | Charles et al. | Applicant |
| US4058430(A) | 1977-11-01 | Suntola et al. | Applicant |
| US4389973(A) | 1983-06-01 | Suntola et al. | Applicant |
| US4413022(A) | 1983-11-01 | Suntola et al. | Applicant |
| US4834831(A) | 1989-05-01 | Nishizawa et al. | Applicant |
| US4975252(A) | 1990-12-01 | Nishizawa et al. | Applicant |
| US4993357(A) | 1991-02-01 | Scholz | Applicant |
| US5196365(A) | 1993-03-01 | Gotou | Applicant |
| US5216959(A) | 1993-06-01 | Hayashi | Applicant |
| US5225366(A) | 1993-07-01 | Yoder | Applicant |
| US5281274(A) | 1994-01-01 | Yoder | Applicant |
| US5294286(A) | 1994-03-01 | Nishizawa et al. | Applicant |
| US5338362(A) | 1994-08-01 | Imahashi | Applicant |
| US5374570(A) | 1994-12-01 | Nasu et al. | Applicant |
| US5441703(A) | 1995-08-01 | Jurgensen | Applicant |
| US5443647(A) | 1995-08-01 | Aucoin et al. | Applicant |
| US5464666(A) | 1995-11-01 | Fine et al. | Applicant |
| US5480818(A) | 1996-01-01 | Matsumoto et al. | Applicant |
| US5483919(A) | 1996-01-01 | Yokoyama et al. | Applicant |
| US5503875(A) | 1996-04-01 | Imai et al. | Applicant |
| US5668054(A) | 1997-09-01 | Sun et al. | Applicant |
| US5674786(A) | 1997-10-01 | Turner et al. | Applicant |
| US5711811(A) | 1998-01-01 | Suntola et al. | Applicant |
| US5730802(A) | 1998-03-01 | Ishizumi et al. | Applicant |
| US5796116(A) | 1998-08-01 | Nakata et al. | Applicant |
| US5807792(A) | 1998-09-01 | Ilg et al. | Applicant |
| US5835677(A) | 1998-11-01 | Li et al. | Applicant |
| US5855680(A) | 1999-01-01 | Soininen et al. | Applicant |
| US5879459(A) | 1999-03-01 | Gadgil et al. | Applicant |
| US5916365(A) | 1999-06-01 | Sherman | Applicant |
| US5923056(A) | 1999-07-01 | Lee et al. | Applicant |
| US6015590(A) | 2000-01-01 | Suntola et al. | Applicant |
| US6015917(A) | 2000-01-01 | Bhandari et al. | Applicant |
| US6042652(A) | 2000-03-01 | Hyun et al. | Applicant |
| US6084302(A) | 2000-07-01 | Sandhu | Applicant |
| US6124158(A) | 2000-09-01 | Dautartas et al. | Applicant |
| US6125158(A) | 2000-09-01 | Carson et al. | Applicant |
| US6139700(A) | 2000-10-01 | Kang et al. | Applicant |
| US6144060(A) | 2000-11-01 | Park et al. | Applicant |
| US6174377(B1) | 2001-01-01 | Doering et al. | Applicant |
| US6174809(B1) | 2001-01-01 | Kang et al. | Applicant |
| US6183563(B1) | 2001-02-01 | Choi et al. | Applicant |
| US6197683(B1) | 2001-03-01 | Kang et al. | Applicant |
| US6200893(B1) | 2001-03-01 | Sneh | Applicant |
| US6203613(B1) | 2001-03-01 | Gates et al. | Applicant |
| US6207487(B1) | 2001-03-01 | Kim et al. | Applicant |
| US6231672(B1) | 2001-05-01 | Choi et al. | Applicant |
| US6268288(B1) | 2001-07-01 | Hautala et al. | Applicant |
| US6270572(B1) | 2001-08-01 | Kim et al. | Applicant |
| US6284646(B1) | 2001-09-01 | Leem | Applicant |
| US6287965(B1) | 2001-09-01 | Kang et al. | Applicant |
| US6305314(B1) | 2001-10-01 | Sneh et al. | Applicant |
| US6306216(B1) | 2001-10-01 | Kim et al. | Applicant |
| US6342277(B1) | 2002-01-01 | Sherman | Applicant |
| US6348376(B2) | 2002-02-01 | Lim et al. | Applicant |
| US6358829(B2) | 2002-03-01 | Yoon et al. | Applicant |
| US6372598(B2) | 2002-04-01 | Kang et al. | Applicant |
| US6379748(B1) | 2002-04-01 | Bhandari et al. | Applicant |
| US6391785(B1) | 2002-05-01 | Satta et al. | Applicant |
| US6399491(B2) | 2002-06-01 | Jeon et al. | Applicant |
| US6413381(B1) | 2002-07-01 | Lee et al. | Examiner |
| US6416577(B1) | 2002-07-01 | Suntoloa et al. | Applicant |
| US6416822(B1) | 2002-07-01 | Chiang et al. | Examiner |
| US6428859(B1) | 2002-08-01 | Chiang et al. | Applicant |
| US6447607(B2) | 2002-09-01 | Soininen et al. | Applicant |
| US6451119(B2) | 2002-09-01 | Sneh et al. | Applicant |
| US6451695(B2) | 2002-09-01 | Sneh | Applicant |
| US6454860(B2) | 2002-09-01 | Metzner et al. | Examiner |
| US6464779(B1) | 2002-10-01 | Powell et al. | Applicant |
| US6468924(B2) | 2002-10-01 | Lee et al. | Applicant |
| US6475276(B1) | 2002-11-01 | Elers et al. | Applicant |
| US6475910(B1) | 2002-11-01 | Sneh | Applicant |
| US6478872(B1) | 2002-11-01 | Chae et al. | Applicant |
| US6481945(B1) | 2002-11-01 | Hasper et al. | Applicant |
| US6482262(B1) | 2002-11-01 | Elers et al. | Applicant |
| US6482733(B2) | 2002-11-01 | Raaijmakers et al. | Applicant |
| US6482740(B2) | 2002-11-01 | Soininen et al. | Applicant |
| US6511539(B1) | 2003-01-01 | Raaijmakers | Applicant |
| US6534395(B2) | 2003-03-01 | Werkhoven et al. | Applicant |
| US6551406(B2) | 2003-04-01 | Kilpi | Applicant |
| US6569501(B2) | 2003-05-01 | Chiang et al. | Applicant |
| US6572705(B1) | 2003-06-01 | Suntola et al. | Applicant |
| US6578287(B2) | 2003-06-01 | Aswad | Applicant |
| US6579372(B2) | 2003-06-01 | Park | Applicant |
| US6585823(B1) | 2003-07-01 | Van Wijck | Applicant |
| US6596602(B2) | 2003-07-01 | Iizuka et al. | Applicant |
| US6599572(B2) | 2003-07-01 | Saanila et al. | Applicant |
| US6607976(B2) | 2003-08-01 | Chen et al. | Applicant |
| US6620723(B1) | 2003-09-01 | Byun et al. | Applicant |
| US6620956(B2) | 2003-09-01 | Chen et al. | Applicant |
| US6630030(B1) | 2003-10-01 | Suntola et al. | Applicant |
| US6630201(B2) | 2003-10-01 | Chiang et al. | Applicant |
| US6632279(B1) | 2003-10-01 | Ritala et al. | Applicant |
| US6660126(B2) | 2003-12-01 | Nguyen et al. | Applicant |
| US6686271(B2) | 2004-02-01 | Raaijmakers et al. | Applicant |
| US6716287(B1) | 2004-04-01 | Santiago et al. | Applicant |
| US6718126(B2) | 2004-04-01 | Lei | Applicant |
| US6734020(B2) | 2004-05-01 | Yang et al. | Applicant |
| US6772072(B2) | 2004-08-01 | Ganguli et al. | Applicant |
| US6773507(B2) | 2004-08-01 | Jallepally et al. | Applicant |
| US6777352(B2) | 2004-08-01 | Tepman et al. | Applicant |
| US6778762(B1) | 2004-08-01 | Shareef et al. | Applicant |
| US6784096(B2) | 2004-08-01 | Chen et al. | Applicant |
| US6800173(B2) | 2004-10-01 | Chiang et al. | Applicant |
| US6803272(B1) | 2004-10-01 | Halliyal et al. | Applicant |
| US6811814(B2) | 2004-11-01 | Chen et al. | Applicant |
| US6818094(B2) | 2004-11-01 | Yudovsky | Applicant |
| US6821563(B2) | 2004-11-01 | Yudovsky | Applicant |
| US6821891(B2) | 2004-11-01 | Chen et al. | Applicant |
| US6838125(B2) | 2005-01-01 | Chung et al. | Applicant |
| US6866746(B2) | 2005-03-01 | Lei et al. | Applicant |
| US6868859(B2) | 2005-03-01 | Yudovsky | Applicant |
| US2001/0000866(A1) | 2001-05-01 | Sneh et al. | Applicant |
| US2001/0002280(A1) | 2001-05-01 | Sneh | Applicant |
| US2001/0009140(A1) | 2001-07-01 | Bondestam et al. | Applicant |
| US2001/0009695(A1) | 2001-07-01 | Saanila et al. | Applicant |
| US2001/0011526(A1) | 2001-08-01 | Doering et al. | Applicant |
| US2001/0013312(A1) | 2001-08-01 | Soininen et al. | Applicant |
| US2001/0014371(A1) | 2001-08-01 | Kilpi | Applicant |
| US2001/0024387(A1) | 2001-09-01 | Raaijmakers et al. | Applicant |
| US2001/0025979(A1) | 2001-10-01 | Kim et al. | Applicant |
| US2001/0028924(A1) | 2001-10-01 | Sherman | Applicant |
| US2001/0034123(A1) | 2001-10-01 | Jeon et al. | Applicant |
| US2001/0041250(A1) | 2001-11-01 | Werkhoven et al. | Applicant |
| US2001/0042523(A1) | 2001-11-01 | Kesala | Applicant |
| US2001/0042799(A1) | 2001-11-01 | Kim et al. | Applicant |
| US2001/0054377(A1) | 2001-12-01 | Lindfors et al. | Applicant |
| US2001/0054730(A1) | 2001-12-01 | Kim et al. | Applicant |
| US2001/0054769(A1) | 2001-12-01 | Raaijmakers et al. | Applicant |
| US2002/0000196(A1) | 2002-01-01 | Park | Applicant |
| US2002/0000598(A1) | 2002-01-01 | Kang et al. | Applicant |
| US2002/0007790(A1) | 2002-01-01 | Park | Applicant |
| US2002/0009544(A1) | 2002-01-01 | McFeely et al. | Applicant |
| US2002/0020869(A1) | 2002-02-01 | Park et al. | Applicant |
| US2002/0021544(A1) | 2002-02-01 | Cho et al. | Applicant |
| US2002/0031618(A1) | 2002-03-01 | Sherman | Applicant |
| US2002/0041931(A1) | 2002-04-01 | Suntola et al. | Applicant |
| US2002/0048635(A1) | 2002-04-01 | Kim et al. | Applicant |
| US2002/0052097(A1) | 2002-05-01 | Park | Applicant |
| US2002/0060363(A1) | 2002-05-01 | Xi et al. | Applicant |
| US2002/0066411(A1) | 2002-06-01 | Chiang et al. | Applicant |
| US2002/0068458(A1) | 2002-06-01 | Chiang et al. | Applicant |
| US2002/0073924(A1) | 2002-06-01 | Chiang et al. | Applicant |
| US2002/0076481(A1) | 2002-06-01 | Chiang et al. | Applicant |
| US2002/0076507(A1) | 2002-06-01 | Chiang et al. | Applicant |
| US2002/0076508(A1) | 2002-06-01 | Chiang et al. | Applicant |
| US2002/0076837(A1) | 2002-06-01 | Hujanen et al. | Applicant |
| US2002/0086106(A1) | 2002-07-01 | Park et al. | Applicant |
| US2002/0086111(A1) | 2002-07-01 | Byun et al. | Applicant |
| US2002/0086507(A1) | 2002-07-01 | Park et al. | Applicant |
| US2002/0092471(A1) | 2002-07-01 | Kang et al. | Applicant |
| US2002/0092584(A1) | 2002-07-01 | Soininen et al. | Applicant |
| US2002/0094689(A1) | 2002-07-01 | Park | Applicant |
| US2002/0098627(A1) | 2002-07-01 | Pomarede et al. | Applicant |
| US2002/0098685(A1) | 2002-07-01 | Sophie et al. | Applicant |
| US2002/0104481(A1) | 2002-08-01 | Chiang et al. | Applicant |
| US2002/0106536(A1) | 2002-08-01 | Lee et al. | Applicant |
| US2002/0106846(A1) | 2002-08-01 | Seutter et al. | Examiner |
| US2002/0108570(A1) | 2002-08-01 | Lindfors | Applicant |
| US2002/0117399(A1) | 2002-08-01 | Chen et al. | Applicant |
| US2002/0121241(A1) | 2002-09-01 | Nguyen et al. | Applicant |
| US2002/0121342(A1) | 2002-09-01 | Nguyen et al. | Applicant |
| US2002/0122884(A1) | 2002-09-01 | Chen et al. | Applicant |
| US2002/0127336(A1) | 2002-09-01 | Chen et al. | Applicant |
| US2002/0127745(A1) | 2002-09-01 | Lu et al. | Applicant |
| US2002/0134307(A1) | 2002-09-01 | Choi | Applicant |
| US2002/0144655(A1) | 2002-10-01 | Chiang et al. | Applicant |
| US2002/0144657(A1) | 2002-10-01 | Chiang et al. | Applicant |
| US2002/0146511(A1) | 2002-10-01 | Chiang et al. | Applicant |
| US2002/0155722(A1) | 2002-10-01 | Satta et al. | Applicant |
| US2002/0162506(A1) | 2002-11-01 | Sneh et al. | Applicant |
| US2002/0164421(A1) | 2002-11-01 | Chiang et al. | Applicant |
| US2002/0164423(A1) | 2002-11-01 | Chiang et al. | Applicant |
| US2002/0177282(A1) | 2002-11-01 | Song | Applicant |
| US2002/0182320(A1) | 2002-12-01 | Leskela et al. | Applicant |
| US2002/0187256(A1) | 2002-12-01 | Elers et al. | Applicant |
| US2002/0187631(A1) | 2002-12-01 | Kim et al. | Applicant |
| US2002/0197402(A1) | 2002-12-01 | Chiang et al. | Applicant |
| US2003/0004723(A1) | 2003-01-01 | Chihara | Applicant |
| US2003/0010451(A1) | 2003-01-01 | Tzu et al. | Applicant |
| US2003/0013320(A1) | 2003-01-01 | Kim et al. | Applicant |
| US2003/0022338(A1) | 2003-01-01 | Ruben et al. | Applicant |
| US2003/0031807(A1) | 2003-02-01 | Elers et al. | Applicant |
| US2003/0032281(A1) | 2003-02-01 | Werkhoven et al. | Applicant |
| US2003/0042630(A1) | 2003-03-01 | Babcoke et al. | Applicant |
| US2003/0049931(A1) | 2003-03-01 | Byun et al. | Examiner |
| US2003/0049942(A1) | 2003-03-01 | Haukka et al. | Applicant |
| US2003/0053799(A1) | 2003-03-01 | Lei | Applicant |
| US2003/0054631(A1) | 2003-03-01 | Raaijmakers et al. | Applicant |
| US2003/0057526(A1) | 2003-03-01 | Chung et al. | Applicant |
| US2003/0057527(A1) | 2003-03-01 | Chung et al. | Applicant |
| US2003/0059538(A1) | 2003-03-01 | Chung et al. | Applicant |
| US2003/0072913(A1) | 2003-04-01 | Chou et al. | Applicant |
| US2003/0072975(A1) | 2003-04-01 | Shero et al. | Applicant |
| US2003/0075273(A1) | 2003-04-01 | Kilpela et al. | Applicant |
| US2003/0075925(A1) | 2003-04-01 | Lindfors et al. | Applicant |
| US2003/0079686(A1) | 2003-05-01 | Chen et al. | Applicant |
| US2003/0082296(A1) | 2003-05-01 | Elers et al. | Applicant |
| US2003/0082301(A1) | 2003-05-01 | Chen et al. | Applicant |
| US2003/0082307(A1) | 2003-05-01 | Chung et al. | Applicant |
| US2003/0089308(A1) | 2003-05-01 | Raaijmakers et al. | Applicant |
| US2003/0096468(A1) | 2003-05-01 | Soininen et al. | Applicant |
| US2003/0097013(A1) | 2003-05-01 | Chen et al. | Applicant |
| US2003/0101927(A1) | 2003-06-01 | Raaijmakers | Applicant |
| US2003/0106490(A1) | 2003-06-01 | Jallepally et al. | Applicant |
| US2003/0108674(A1) | 2003-06-01 | Chung et al. | Applicant |
| US2003/0113187(A1) | 2003-06-01 | Lei et al. | Applicant |
| US2003/0116087(A1) | 2003-06-01 | Nguyen et al. | Applicant |
| US2003/0121469(A1) | 2003-07-01 | Lindfors et al. | Applicant |
| US2003/0121608(A1) | 2003-07-01 | Chen et al. | Applicant |
| US2003/0124262(A1) | 2003-07-01 | Chen et al. | Applicant |
| US2003/0129308(A1) | 2003-07-01 | Chen et al. | Applicant |
| US2003/0129826(A1) | 2003-07-01 | Werkhoven et al. | Applicant |
| US2003/0134508(A1) | 2003-07-01 | Raaijmakers et al. | Applicant |
| US2003/0140854(A1) | 2003-07-01 | Kilpi | Applicant |
| US2003/0140857(A1) | 2003-07-01 | Umotoy et al. | Examiner |
| US2003/0143328(A1) | 2003-07-01 | Chen et al. | Applicant |
| US2003/0143747(A1) | 2003-07-01 | Bondestam et al. | Applicant |
| US2003/0143839(A1) | 2003-07-01 | Raaijmakers et al. | Applicant |
| US2003/0153177(A1) | 2003-08-01 | Bhattacharyya | Applicant |
| US2003/0168750(A1) | 2003-09-01 | Basceri et al. | Applicant |
| US2003/0172872(A1) | 2003-09-01 | Thakur et al. | Applicant |
| US2003/0173586(A1) | 2003-09-01 | Moriwaki et al. | Applicant |
| US2003/0186495(A1) | 2003-10-01 | Saanila et al. | Applicant |
| US2003/0190423(A1) | 2003-10-01 | Yang et al. | Applicant |
| US2003/0190804(A1) | 2003-10-01 | Glenn et al. | Applicant |
| US2003/0194493(A1) | 2003-10-01 | Chang et al. | Applicant |
| US2003/0198754(A1) | 2003-10-01 | Xi et al. | Applicant |
| US2003/0205729(A1) | 2003-11-01 | Basceri et al. | Applicant |
| US2003/0213560(A1) | 2003-11-01 | Wang et al. | Applicant |
| US2003/0213987(A1) | 2003-11-01 | Basceri et al. | Applicant |
| US2003/0216981(A1) | 2003-11-01 | Tillman | Applicant |
| US2003/0221780(A1) | 2003-12-01 | Lei et al. | Applicant |
| US2003/0224107(A1) | 2003-12-01 | Lindfors et al. | Applicant |
| US2003/0224578(A1) | 2003-12-01 | Chung et al. | Applicant |
| US2003/0224600(A1) | 2003-12-01 | Cao et al. | Applicant |
| US2003/0232497(A1) | 2003-12-01 | Xi et al. | Applicant |
| US2004/0009307(A1) | 2004-01-01 | Koh et al. | Applicant |
| US2004/0009665(A1) | 2004-01-01 | Chen et al. | Applicant |
| US2004/0011404(A1) | 2004-01-01 | Ku et al. | Applicant |
| US2004/0011504(A1) | 2004-01-01 | Ku et al. | Applicant |
| US2004/0013577(A1) | 2004-01-01 | Ganguli et al. | Applicant |
| US2004/0014320(A1) | 2004-01-01 | Chen et al. | Applicant |
| US2004/0015300(A1) | 2004-01-01 | Ganguli et al. | Applicant |
| US2004/0016866(A1) | 2004-01-01 | Huang et al. | Applicant |
| US2004/0018304(A1) | 2004-01-01 | Chung et al. | Applicant |
| US2004/0018747(A1) | 2004-01-01 | Byun et al. | Applicant |
| US2004/0025370(A1) | 2004-02-01 | Guenther | Applicant |
| US2004/0033698(A1) | 2004-02-01 | Lee et al. | Applicant |
| US2004/0046197(A1) | 2004-03-01 | Basceri et al. | Applicant |
| US2004/0065255(A1) | 2004-04-01 | Yang et al. | Applicant |
| US2004/0069227(A1) | 2004-04-01 | Ku et al. | Applicant |
| US2004/0071897(A1) | 2004-04-01 | Verplancken et al. | Applicant |
| US2004/0077183(A1) | 2004-04-01 | Chung et al. | Applicant |
| US2004/0078723(A1) | 2004-04-01 | Gross et al. | Applicant |
| US2004/0144308(A1) | 2004-07-01 | Yudovsky | Applicant |
| US2004/0144311(A1) | 2004-07-01 | Chen et al. | Applicant |
| US2004/0187304(A1) | 2004-09-01 | Chen et al. | Applicant |
| US2004/0256351(A1) | 2004-12-01 | Chung et al. | Applicant |
| US2005/0009325(A1) | 2005-01-01 | Chung et al. | Applicant |
| EP1142894 | 2001-10-01 | Applicant | |
| EP1167569 | 2002-01-01 | Applicant | |
| GB2355727 | 2001-05-01 | Applicant | |
| JP4-291916 | 1992-10-01 | Applicant | |
| JP5-047666 | 1993-02-01 | Applicant | |
| JP5-206036 | 1993-08-01 | Applicant | |
| JP5-234899 | 1993-09-01 | Applicant | |
| JP5-270997 | 1993-10-01 | Applicant | |
| JP6-224138 | 1994-08-01 | Applicant | |
| JP7-300649 | 1995-11-01 | Applicant | |
| JP2000-319772 | 2000-11-01 | Applicant | |
| JP2001-020075 | 2001-01-01 | Applicant | |
| JP2001-172767 | 2001-06-01 | Applicant | |
| JP2000-212752 | 2002-11-01 | Applicant | |
| JP2001-111000 | 2002-12-01 | Applicant | |
| WO96/17107 | 1996-06-01 | Applicant | |
| WO99/01595 | 1999-01-01 | Applicant | |
| WO99/29924 | 1999-06-01 | Applicant | |
| WO99/29924 | 1999-06-01 | Applicant | |
| WO99/65064 | 1999-12-01 | Applicant | |
| WO/16377 | 2000-03-01 | Applicant | |
| WO/54320 | 2000-09-01 | Applicant | |
| WO/79576 | 2000-12-01 | Applicant | |
| WO1/17692 | 2001-03-01 | Applicant | |
| WO1/27346 | 2001-04-01 | Applicant | |
| WO1/27347 | 2001-04-01 | Applicant | |
| WO1/29280 | 2001-04-01 | Applicant | |
| WO1/29891 | 2001-04-01 | Applicant | |
| WO1/29893 | 2001-04-01 | Applicant | |
| WO1/36702 | 2001-05-01 | Applicant | |
| WO1/66832 | 2001-09-01 | Applicant | |
| WO1/88972 | 2001-11-01 | Applicant | |
| WO2/08485 | 2002-01-01 | Applicant | |
| WO2/01628 | 2002-01-01 | Applicant | |
| WO2/08488 | 2002-01-01 | Applicant | |
| WO2/43115 | 2002-05-01 | Applicant | |
| WO2/45167 | 2002-06-01 | Applicant | |
| WO2/45871 | 2002-06-01 | Applicant | |
| WO2/67319 | 2002-08-01 | Applicant | |
| WO3/23835 | 2003-03-01 | Applicant | |
| WO3/44242 | 2003-05-01 | Applicant |
Non-Patent Literature (19)
- Kukli, et al., “Tailoring the Dielectric Properties of HfO2-Ta2-O5 Nanolaminates,” Applied Physics Letters, vol. 68, No. 26, Jun. 24, 1996; p. 3737-9.Applicant
- Kukli, et al. “Atomic Layer Epitaxy Growth of Tantalum Oxide Thin Films from Ta(OC2H5)5 and H2O,” Journal of the Electrochemical Society, vol. 142, No. 5, May 1995; p. 1670-5.Applicant
- Kukli, et al., “In situ Study of Atomic Layer Epitaxy Growth of Tantalum Oxide Thin Films From Ta(OC2H5)5 and H2O,” Applied Surface Science, vol. 112, No. 5, Mar. 1997, p. 236-42.Applicant
- Kukli, et al., “Properties of Ta2O5-Based Dielectric Nanolaminates Deposited by Atomic Layer Epitaxy,” Journal of Electrochemical Society, vol. 144, No. 1, Jan. 1997; p. 300-6.Applicant
- Kukli, et al., “Properties of {Nb1-xTax}2O5 Solid Solutions and {Nb1-xTax}2O5-ZrO2 Nanolaminates Grown by Atomic Layer Epitaxy,” 1997; p. 785-93.Applicant
- Ritala, M., et al., “Chemical Vapor Deposition,” Jan. 1999, p. 6-9.Applicant
- Rossnagel, et al. “Plasma-enhanced Atomic Layer Deposition of Ta and Ti for Interconnect Diffusion Barriers,” J. Vac. Sci. Technol. B., vol. 18, No. 4 (Jul. 2000); p2016-20.Applicant
- Niinisto, et al. “Synthesis of Oxide Thin Films and Overlayers by Atomic Layer Epitaxy for Advanced Applications,” Materials Science and Engineering B41 (1996) 23-29.Applicant
- Eisenbraum, et al. “Atomic Layer Deposition (ALD) of Tantalum-based materials for zero thickness copper barrier applications,” Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No. 01EX461) 2001.Applicant
- Clark-Phelps, et al. “Engineered Tantalum Aluminate and Hafnium Aluminate ALD Films for Ultrathin Dielectric Films with Improved Electrical and Thermal Properties,” Mat. Res. Soc. Symp. Proc. vol. 670 (2001).Applicant
- Juppo, et al. “Deposition of Copper Films by an Alternate Supply of CuCI and Zn,” Journal of Vacuum Science & Technology, vol. 15, No. 4 (Jul. 1997), pp. 2330-2333.Applicant
- Martensson, et al. “Atomic Layer Epitaxy of Copper Growth and Selectivity in the Cu(II)-2,2,6,6-tetramethyl-3-5heptanedionate H2 Process,” J. Electrochem. Soc., vol. 145, No. 8 (Aug. 1998), pp. 2926-2931.Applicant
- Martensson, et al. “Atomic layer Epitaxy of Copper and Tantalum,” Chem. Vap. Deposition )1997) vol. 3, No. 1.Applicant
- Martensson, et al. “Cu2 as Copper Source in Atomic layer Epitaxy,” Chemical Vapor Deposition. Proceedings of the Fourteenth International Conference and EUROCVD-11 (1997), pp. 1529-1536.Applicant
- Martensson, et al. “Use of Atomic Layer Epitaxy for Fabrication of Si/TiN/Cu Structures,” Journal of Vacuum Science & Technology, vol. 17, No. 5 (Sep. 1999), pp. 2122-2128.Applicant
- McGeachin., °Synthesis and Properties of Some β-diketimines Derived from Acetylacetone, and Their Metal Complexes,° Canadian Journal of Chemistry, vol. 46, (Jun. 1968) No. 11.Applicant
- Shenai, et al. “Correlation of vapor pressure equation and film properties with trimethylindium purity for the MOVPE grown III-V compounds,” Journal of Crystal Growth 248 (2003) pp. 91-98.Applicant
- Solanki, et al. “Atomic Layer Deposition of Copper Seed Layers,” Electrochem. Solid-State Lett., vol. 3, No. 10 (2000), pp. 479-480.Applicant
- Utriainen, et al. “Studies of Metallic Thin Film Growth in an Atomic layer Epitaxy Reactor Using M(acac)2(M=Ni, Cu, Pt) Precursors,” Applied Surface Science, vol. 157, No. 3 (2000), pp. 151-158.Applicant