Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry

Patent Citations (33)

Non-Patent Literature (31)

• “Automatic Rotating Element Ellipsometers: Calibration, Operation and Real-Time Applications”, Collins, Rev. Sci. Instrum, 61(8) (1990), provides general insight.Applicant
• “Regression Calibration Method for Rotating Element Ellipsometers” Thin Solid Films, Johs, 234 (1993) is disclosed as it describes a mathematical regression based approach to calibrating ellipsometer systems.Applicant
• “Systematic and Ramdom Errors in Rotating-Analyzer Ellipsometry”, Nijs & Silfhout, J. Opt. Soc. Am. A., vol. 5, No. 6, (Jun. 1988), describes a first order mathematical correction factor approach to accounting for window effects in Rotating Analyzer ellipsometers.Applicant
• “Systematic Errors in Rotating-Compensator ellipsometry”, Kleim et al., J. Opt. Soc. Am., vol. 11, No. 9, (Sep. 1994) describes first order corrections for imperfections in windows and compensators in Rotating Compensator ellipsometers.Applicant
• “Instrumental and Computational Advances for Real-time Processes Control Using Spectroscopic Ellipsometry”, Pickering et al,Int. Conf. on Netrology and Charcterization for VSLI Tech., NIST, (Mar. 1998).Applicant
• “Unified Analysis of Ellipsometry Errors Due to Imperfect Components Cell-Window Birifringence, and Incorrect Azimuth Angles”, Azzam & Bashara; J. of the Opt. Soc. Am., vol. 61, No. 5, (May 1971).Applicant
• “Analysis of Systematic Errors in Rotating-Analyzer Ellipsometers”, Azzam & Bashara; J. of the Opt. Coc. Am., vol. 64, No. 11, (Nov. 1974).Applicant
• “The Influence of Cell Window Imperfections on the Calibration and Measured Data of Two Types of Rotating Analyzer Ellipsometers”, Azzam & Bashara; J. of the Opt. Soc. Am., vol. 61, No. 6, (Nov. 1971).Applicant
• “The Influence of Cell Window Imperfections on the Calibration and Measured Data of Two Types of Rotating Analyzer Ellipsometers”, Straaher et al., Surface Sci., North Holland, 96, (1980).Applicant
• “In Situ Multi-Wavelength Ellipsometric Control of Thickness and Composition of Bragg Reflector Structures”, by Herzinger, Johs, Reich, Caroenter & Van Hove, Mat. Res. Soc. Symp. Proc., vol. 406, (1996).Applicant
• “A New Calculus For The Treatment Of Optical Systems”, Jones, J.O.S. A., vol. 31, (Jul. 1941).Applicant
• WO 91/14157 Published PCT Application.Applicant
• WO 92/12404 Published PCT Application.Applicant
• WO 96/18205 Published PCT Application.Applicant
• WO 99/02950 Published PCT Application.Applicant
• Copy of Dec. 1996 Vintage J.A. Woollam Co. M-44/M-88 Multiwavelength Ellipsometers indicating Focused Spot to 20 Microns, including signed Letter from Roger Bruhn, the photographer who took the pictures therein, which letter attests to the date it was produced.Applicant
• Copy of SOPRA Brochure disclosing their MOSS System, which utilized Achromatic Focusing lenses and which predates Jul. 11, 2000. Sopra is a competitor of the J.A. Woollam Co. Inc.Applicant
• Article from Oct. 1997 J. of Tribology titled “Flying Height Measurement on Al2O3 Film of a Magentic Slider” by Yufeng Li of Samsung; discloses use of a J.A. Woollam Co. M-44 Multiwavelength Ellipsometer to focus a beam to 17 microns. This system had doublet achromatic lenses installed therein.Applicant
• Article from Thin Solid Films Published Mar. 27, 2000, by Zapien et al, showing use of achromatic focusing lenses before and after a sample in a spectroscopie ellipsomter.Applicant
• Excerpts from a “classic” textbook titled OPTICS, by Hecht, Addison Wesley Press, (1977), which discribes use of Multiple Element Achromatic Lenses.Applicant
• Articles from Thin Solid Films Published Apr. 1993, by El-Ghazzawi et al, showing use of focusing lenses in the SOPRA company model “MOSS ES-4G Spectroscopic Ellipsometer”.Applicant
• Two J.A. Woollam Co. spectroscopic ellipsometer “models” with achromatic multiple-element lenses sold prior to Jul. 11, 2000: M-44 (44 wavelengths, blue to red), and “VASE” (continuous wavelengths from blue to infrared).Applicant
• Catalog pages of Edmund Scientific Corporation achromatic lens sets (dated prior to Jul 11, 2000).Applicant
• J.A. Woollam Co., Inc. Purchase Orders from Edmund Scientific Company, with catalog cover dates and part numbers predating Jul. 11, 2000.Applicant
• Evidence of sales (Purchase orders, shipping documents, invoices, from customers) of the “M-44” type spectroscopic ellipsometers containing achromatic focusing lenses prior to Jul. 11, 2000.Applicant
• Order bills for M-44 Ellipsometer with achromatic focusing lenses for NANOmetrics Corporation. Order numbers correspond with “Packing List” and “Purchase Order Receiver” numbers listed in Erik Bylin's Affidavit.Applicant
• Affidavit from John Woollam, President of J.A. Woollam Co.Applicant
• Affidavit from Hiroki Hashimoto of Fujitsu Corporation, Japan in both English and Japanese; along with the Fujitsu purchase order sheet and Acceptance Report.Applicant
• Affidavitt from Michio Suzuki of J.A. Woollam Co., Japan in both English and Japanese; along with purchase order sheet.Applicant
• Affidavit from Geng Wang of Samsung Information Systems America, Inc.; along with the purchase order and original quotation.Applicant
• Affidavit from Erik Bylin, Product Manager, NANOmetrics Corporation.Applicant