Pre-pattern surface modification for low-k dielectrics using A H2 plasma

[0002] This application claims priority under 35 USC §119(e)(1) of provisional application No. 60/255,715 filed Dec. 14, 2000.

[0003] The invention is generally related to the field of forming interconnect layers in a semiconductor device and more specifically to patterning low-k dielectric films.

[0004] As the density of semiconductor devices increases, the resistance-capacitance (RC) delay time in the back-end-of the-line (BEOL) increases and dominates the circuit performance. To reduce RC delay time at BEOL, the demands on interconnect layers for connecting the semiconductor devices to each other also increase. Therefore, there is a desire to switch from the traditional aluminum metal interconnects to copper interconnects and from traditional silicon-dioxide-based dielectrics to low-k dielectrics, such as organo-silicate glass (OSG). Semiconductor fabrication processes for working with the copper interconnects and newer low-k dielectrics are still needed.

[0005] As compared to the traditional subtractive plasma dry etching of aluminum, suitable copper etches for a semiconductor fabrication environment are not readily available. To overcome the copper etch problem, damascene processes have been developed. In a damascene process, the IMD (intra-metal dielectric) is formed first. The IMD is then patterned and etched to form trenches for the interconnect lines. If connection vias have not already been formed, a dual damascene process may be used. In a dual damascene process, an ILD (interlevel dielectric) is deposited before the IMD. An etch-stop layer, such as SiN, can be optionally used in between the IMD and the ILD. The via is formed in the ILD for connection to lower interconnect levels and the trench is formed in the IMD. A barrier layer and a copper seed layer are then deposited over the structure. The barrier layer is typically tantalum nitride or some other binary transition metal nitride. The copper layer is electrochemically deposited (ECD) using the seed layer over the entire structure. The copper is then chemically-mechanically polished (CMP'd) to remove the copper from over the IMD, leaving copper interconnect lines and vias. A metal etch is thereby avoided.

[0006] When low-k dielectrics such as OSG are used for the IMD and ILD, a problem known as resist poisoning occurs. Resist poisoning occurs during a patterning step such as via pattern or trench pattern. It is a result of the interaction between a DUV (deep ultra-violet) resist and low-k films. Resist poisoning causes poor resist sidewall profiles, resist scumming, and large CD variations. Furthermore, the required resist exposure dose to achieve the target CD becomes too high and varies with film aging. A process to reduce or eliminate resist poisoning in low-k dielectrics is therefore desired.

[0007] The invention is a surface treatment for low-k films that improves patterning. The low-k film is treated with a dry plasma process to eliminate or significantly reduce resist poisoning. A gas chemistry of H₂with an inert gas such as Ar or N₂is used. The H₂plasma treatment can be performed at various stages in the semiconductor fabrication process with or without the presence of resist. For example, this treatment can be applied to as-deposited low k films before patterning (pre-treatment) or to stripping photo resist for lithograph rework.

[0008] An advantage of the invention is providing a treatment to reduce or eliminate resist poisoning of low-k dielectric films.

[0009] This and other advantages will be apparent to those of ordinary skill in the art having reference to the specification in conjunction with the drawings.

[0010] In the drawings:

[0011] FIGS. 1A-1F are cross-sectional diagrams of a process for forming metal interconnects according to the embodiments of the invention;

[0012] FIG. 2A is a cross-sectional SEM diagram of an etched via without pre-treatment according to the invention; and

[0013] FIG. 2B is a cross-sectional SEM diagram of an etched via with pretreatment according to the invention.

[0014] The invention will now be described in conjunction with dual damascene copper interconnect process. It will be apparent to those of ordinary skill in the art that the benefits of the invention may be applied generally to patterning of low-k (K<3.0) and ultra-low-k (K<2.5) films.

[0015] In order to form the copper interconnects using a dual damascene process, the interlevel dielectric (ILD 102) and intrametal dielectric (IMD 104) in FIG. 1A are patterned and etched to form trenches in IMD 104 and vias in ILD 102. When low-k or ultra low-k materials are used for the ILD and IMD, an interaction between the resist and the low-k materials causes resist poisoning. The cause of resist poisoning is believed to be the interaction of between the DUV resist and nitrogen-containing reagents from the low-k films. Possible sources of nitrogen include: the low-k film, the dielectric cap, the optional IMD etch-stop layer (e.g., SiN), N₂in the clean (ash) process, N₂in the etch chemistry, and the photoresist itself.

[0016] In order to reduce or eliminate the resist poisoning, a pre-pattern treatment using a dry (plasma) process is performed. The dry process cleans the surface of the IMD by removing surface particles and etch polymers. A reducing-type plasma with a gas chemistry of H₂with an inert gas such as argon or nitrogen is used. H₂/Ar is used in the preferred embodiment as N₂adds an additional nitrogen source.

[0017] As an example, the following H₂/Ar plasma process may be used for the first dry step:

[0018] Embodiments of the invention will now be discussed with reference to FIGS. 1A-1F. A semiconductor body 100 is processed through formation of the ILD 102/IMD 104. Semiconductor body 100 typically comprises a silicon substrate having transistors and other elements formed therein. IMD 104 is the dielectric for a copper interconnect level. Copper interconnect level may be the first or any subsequent metal interconnect level of the semiconductor device 120.

[0019] An ILD 102 is formed over semiconductor body 100. IMD 104 is formed over ILD 102. A trench etch-stop layer (not shown) may optionally be placed between ILD 102 and IMD 104. ILD 102 and IMD 104 comprise low-k or ultra low-k dielectrics, such as organo-silicate glass (OSG). In the preferred embodiment, ILD 102 and IMD 104 comprise the same material. However, ILD 102 and IMD 104 may alternatively comprise different materials. A capping layer (not shown) may be formed over IMD 104 if desired. Typically, the capping layer comprises silicon nitride, Alternatively, silicon oxide, silicon oxynitride (SiON), or Si-rich nitride (SRN) or SiC capping layer, or no capping layer may be used.

[0020] In a first embodiment of the invention, a pre-pattern dry treatment is performed prior to forming the via pattern 130. A plasma process is used with a gas chemistry comprising H₂and an inert gas such as argon or nitrogen. Then, the via pattern 130 is formed as shown in FIG. 1B. The pre-pattern H₂plasma treatment reduces resist poisoning at the via pattern level.

[0021] It is sometimes necessary to rework a resist pattern. Rework is a process of removing the photoresist and/or BARC material for re-patterning. Pattern re-work significantly worsens the resist poisoning problem if a non-optimized ash process is used for re-work. Accordingly, in a second embodiment of the invention, the H₂plasma pre-treatment is used to rework via pattern 130. Using the H₂plasma pre-treatment according to the invention as a pattern re-work reduces or eliminates resist poisoning associated with the via pattern.

[0022] After any desired pattern re-work, the via 106 is then etched through IMD 104 and ILD 102, as shown in FIG. 1C. In order to protect the bottom of via 106 during the subsequent trench etch, via 106 may be partially or completely filled. For example, an organic barc (bottom anti-reflection coating) may be deposited over the structure and etched back such that BARC material remains only in the vias 106.

[0023] After a post via etch clean, a pre-trench pattern dry treatment is performed prior to forming the trench pattern 132, according to a third embodiment of the invention. A plasma process is used with a gas chemistry comprising H₂and an inert gas such as argon or nitrogen. Then, the trench pattern 132 is formed over IMD 104, as shown in FIG. 1D. The pre-pattern H₂plasma treatment reduces resist poisoning at the trench pattern level.

[0024] After any desired pattern rework, a trench 108 is etched in IMD 104, as shown in FIG. 1E. Trench pattern 132 is then removed.

[0025] Barrier layer 110 is deposited over IMD 104 including in trench 108 and via 106. Barrier layer 110 functions to prevent copper diffusion into the ILD and IMD layers. Suitable barrier materials such as Ta/TaN are known in the art. A seed copper layer is then deposited over barrier layer 110.

[0026] Electrochemical deposition (ECD) may then be used to deposit copper layer 124. Various copper ECD processes are known in the art. In one example, a 3-step process is used. After placing the wafer in the plating solution, a current of approximately 0.75 Amps is passed through the seed layer for a time on the order of 15 seconds. The current is then increased to around 3 Amps for approximately 60 seconds. Final plating occurs at a current of about 7.5 Amps with the duration determined by the final desired thickness. A quick spin-rinse dry (SRD) is performed in the plating cell above the plating solution. The wafer is then transferred to the SRD cell and a post-ECD SRD is used to clean the plating residue.

[0027] After copper ECD, the copper 124 and barrier 110 are chemically mechanically polished (CMP) to remove the material from above IMD 104. The resulting structure is shown in FIG. 1F. Next level ILD and IMD may be deposited and processing may then continue to form additional metal interconnect levels and package the device.

[0028] As a result of the H₂plasma pre-treatment according to the invention, the DUV pattern energy required to achieve the target CD (critical dimension) is reduced and the via sidewall angle is increased. FIG. 2A is a cross-sectional SEM showing an etched via without pre-treatment of the OSG dielectric. The exposure energy dose was 35 mJ/cm²and the via sidewall angle was 81-82°. FIG. 2B is a cross-sectional SEM showing an etched via with a H₂/N₂plasma pretreatment according to the invention. The exposure energy was 30 mJ/cm²and the resulting via sidewall angle was 86°.

[0029] While this invention has been described with reference to illustrative embodiments, this description is not intended to be construed in a limiting sense. Various modifications and combinations of the illustrative embodiments, as well as other embodiments of the invention, will be apparent to persons skilled in the art upon reference to the description. It is therefore intended that the appended claims encompass any such modifications or embodiments.