Semiconductor device and semiconductor module using the same

[0002] The present invention relates to a semiconductor device including a wiring tape, which is adhered to the periphery of a semiconductor chip, and comparable in package size with a bare chip, and a semiconductor module including a plurality of such semiconductor devices densely arranged bidimensionally or tridimensionally.

[0003] Today, a multichip module made up of a plurality of density arranged semiconductor devices is under development. Various package configurations and mounting methods have already been proposed in relation to a multichip module. Conventional structures that implement the dense arrangement of semiconductor devices may be classified into specific types that will be described hereinafter.

[0004] In one type of structure, semiconductor devices are monodimensionally stacked on a circuit board in the vertical direction. Japanese Patent Laid-Open Publication No. 9-275183, for example, teaches a semiconductor device having outer connecting portions arranged on the top and bottom thereof. This kind of semiconductor devices may be stacked in the monodimensional configuration.

[0005] In another type of structure, semiconductor devices are not only stacked in the vertical direction, but also arranged side by side in the horizontal direction, i.e., in parallel to a circuit board. More specifically, a plurality of stacks of semiconductor devices are arranged side by side in one direction parallel to a circuit board or arranged side by side in two directions parallel to a circuit board, but perpendicular to each other. Let the former structure and latter structure be referred to as a bidimensional structure and a tridimensional structure, respectively.

[0006] U.S. Pat. No. 5,790,380 discloses a semiconductor device having the bidimensional structure and including a single flexible wiring board. The flexible wiring board is attached to the top, bottom and one side of a semiconductor chip by being part. Outer connecting portions are arranged on the one side of the chip. Also disclosed in this document are a semiconductor module having a second flexible wiring board attached to a stack of such semiconductor devices and a semiconductor module having a third wiring board attached to a plurality of such modules.

[0007] Japanese Patent Laid-Open Publication No. 10-335570 proposes a semiconductor module having a plurality of semiconductor devices arranged in the tridimensional structure. Specifically, each semiconductor device includes a polygonal insulation package accommodating a semiconductor chip in a cavity formed thereinside. Outer connecting portions, which are implemented by pins, are arranged on each surface of the package. The chip and outer connecting portions are electrically interconnected via conductive leads and bonding wires. Such semiconductor devices are arranged tridimensionally.

[0008] However, the semiconductor device taught in the previously mentioned Laid-Open Publication No. 9-275183 has outer connecting portions arranged only on the top and bottom of the semiconductor chip and therefore implements only the monodimensional structure. Dense arrangement available with this structure is limited. Further, even if a plurality of stacks of such semiconductor devices are positioned side by side, the semiconductor devices adjoining each other in the horizontal direction cannot be electrically connected. For example, the top semiconductor devices of two modules adjoining each other in the horizontal direction cannot be electrically interconnected without the intermediary of underlying semiconductor devices and a circuit board. This aggravates electric characteristics and brings about the more dense arrangement of a greater number of wirings due to the increasing density. The dense arrangement of wirings translates into a decrease in the width of the individual wiring and a decrease in the distance between nearby wirings, which, in turn, obstruct the design and production of wirings and increase the cost.

[0009] The bidimensional structure disclosed in U.S. Pat. No. 5,790,380 needs the second and third flexible wiring boards in addition to the first flexible wiring board because outer connecting portions are arranged only on one side of the chip, lowering the mounting density. Moreover, semiconductor devices cannot be interconnected without the intermediary of the second and third wiring boards and circuit board. This also results in the problem stated above in relation to Laid-Open Publication No. 9-275183.

[0010] A problem with the tridimensional structure proposed in Laid-Open Publication No. 10-335570 is that the polygonal insulation package is a substantial thickness and has the semiconductor chip bonded within the cavity by wire bonding. The resulting package sizes is therefore far greater than the chip size and critically obstructs dense mounting. Further, two semiconductor devices adjoining each other via an intermediate semiconductor device cannot be electrically interconnected without the intermediary of a semiconductor chip included in the intermediate semiconductor device. This increases the length a signal transfer path between the semiconductor devices to be interconnected and increases the load on the circuit design of a semiconductor chip.

[0011] It is therefore an object of the present invention to provide, at a low cost, bidimensional or tridimensional semiconductor module exhibiting desirable electric characteristics without aggravating wiring density, and a semiconductor device comparable in package size with a bare chip for constricting the semiconductor module.

[0012] In accordance with the present invention, a semiconductor device includes a semiconductor chip and a single wiring tape including a wiring layer having a preselected pattern. Outer connecting portions are arranged on the wiring tape while inner connecting portions are formed in the wiring tape and connected to electrodes included in the semiconductor chip. The wiring tape is bent at the edges of the semiconductor chip and adhered to at least three surfaces of the semiconductor chip. The outer connecting portions are arranged on the above at least three surfaces.

[0013] A semiconductor module including a plurality of semiconductor devices each having the above configuration is also disclosed.

[0014] The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description taken with the accompanying drawings in which:

[0015] FIG. 1A is a plan view showing a first embodiment of the semiconductor device in accordance with the present invention being assembled;

[0016] FIG. 1B is a front view of the first embodiment;

[0017] FIG. 1C is a front view showing the first embodiment in an assembled condition;

[0018] FIG. 1D is a front view of a semiconductor module including a plurality of semiconductor devices each having the configuration shown in FIG. 1C;

[0019] FIG. 2A is a plan view showing a second embodiment of the semiconductor device in accordance with the present invention being assembled;

[0020] FIG. 2B is a front view of the second embodiment;

[0021] FIG. 2C is a front view of the second embodiment in an assembled condition;

[0022] FIG. 2D is a front view of a semiconductor module including a plurality of semiconductor devices each having the configuration shown in FIG. 2C;

[0023] FIG. 3A is a plan view showing a wiring tape representative of a third embodiment of the semiconductor device in accordance with the present invention;

[0024] FIG. 3B is a front view of the third embodiment being assembled;

[0025] FIGS. 3C through 3D are front views each showing the third embodiment in a particular assembling step;

[0026] FIG. 3E is a front view of the third embodiment in an assembled condition;

[0027] FIG. 3F is a front view of a semiconductor module including a plurality of semiconductor devices each having the configuration shown in FIG. 3E;

[0028] FIG. 4A is a plan view showing a fourth embodiment of the semiconductor device in accordance with the present invention being assembled;

[0029] FIG. 4B is a plan view showing the fourth embodiment in an assembled condition;

[0030] FIG. 5 is a fragmentary section showing a specific structure including a semiconductor chip and a wiring tape adhered to the chip;

[0031] FIG. 6 is a fragmentary section showing another specific structure including a wiring tape and semiconductor chips adhered thereto;

[0032] FIG. 7 is a section showing a specific procedure for producing the wiring tape; and

[0033] FIG. 8 is an isometric view showing a specific tridimensional semiconductor module available with the present invention.

[0034] Preferred embodiments of the semiconductor device and semiconductor module in accordance with the present invention will be described hereinafter.

[0035] Referring to FIGS. 1A through 1D, a semiconductor device and a semiconductor module embodying the present invention are shown. As shown in FIGS. 1A through 1C, the semiconductor device, generally 71, is made up of a semiconductor chip 1 and a single wiring tape 2 resembling a film carrier. The semiconductor chip 1 is produced from a semiconductor wafer, not shown, and has a conventional rectangular shape. Specifically, the chip 1 has a top, a top, a bottom and four sides that form a rectangle. Each two contiguous surfaces of the chip 1 are substantially perpendicular to each other while each two surfaces of the same facing each other are substantially parallel to each other. More specifically, the top and bottom of the chip 1 are substantially parallel to each other while the front side and rear side and the right side and left side, as viewed in FIGS. 1A through 1D, each are parallel to each other.

[0036] A wiring layer, not shown, is formed in the wiring tape 2 in a preselected pattern. Preselected portions of the wiring layer are exposed to the outside on the surface of the wiring tape 2, forming outer connecting portions 36. The illustrative embodiment uses a BGA (Ball Grid Array). The outer connecting portions 36 are therefore implemented as lands to be loaded with solder balls 3. The wiring tape 2 is an extremely thin, flexible sheet having a contour corresponding to a rectangle that is formed when the top, bottom and one side of the chip 1 are developed.

[0037] A specific procedure for assembling the semiconductor device 71 will be described hereinafter. First, as shown in FIG. 1A, the solder balls 3 are bonded to the outer connecting portions 36 only in part of the wiring tape 2 that is to be adhered to the top and one side of the chip 1. That is, the solder balls 3 are absent in the other part of the wiring tape 2 that is to be adhered to the bottom of the chip 1. At the same time, a wiring tape 2 having solder balls 3 bonded to only part thereof that is to be adhered to the top of the chip 1 is prepared.

[0038] As shown in FIG. 1B, the wiring tape 2 with the solder balls 3 is adhered to the top of the chip 1. The wiring tape 2 is then bent at the edges of the chip 1 and closely adhered to one side and bottom of the chip 1, as shown in FIG. 1C. In the illustrative embodiment, adhesive is applied to the rear surface of the wiring tape 2 beforehand, so that the wiring tape 2 can be adhered to the chip 1.

[0039] As shown in FIG. 1C, the semiconductor device 71 assembled by the above procedure is made up of the chip 1 and a single wiring tape including a wiring layer. The wiring tape 2 has inner connecting portions in addition to the outer connecting portions 36. The inner connecting portions are implemented by metal 34 (see FIG. 5) connected to an electrode 5 (see FIG. 5), which is provided on the chip 1. The inner connecting portions are positioned in part of the wiring tape 2 to be adhered to the chip 1.

[0040] The wiring tape 2 is adhered to the top, bottom and one side oft he chip 1 by being part at the edges of the chip 1. The outer connecting portions 36 are positioned on all of the above three surfaces of the chip 1. Consequently, the outer connecting portions 36 are arranged on, among the top, bottom and one side of the chip 1 to which the wiring tape 2 is adhered, the top and bottom (a pair of surfaces facing each other) substantially parallel to each other.

[0041] FIG. 1D shows a semiconductor module made up of a plurality of bidimensionally arranged semiconductor devices 71 each having the configuration shown in FIG. 1C. As shown, a plurality of semiconductor devices 71 are not only stacked on a circuit board 4, but also arranged side by side in the right-and-left direction. The solder balls 3 physically, electrically connect the semiconductor devices 71 adjoining each other in the vertical and horizontal directions. Also, the solder balls 3 physically, electrically connect the semiconductor devices 71 positioned at the bottoms of the stacks to the circuit board 4. In this condition, this semiconductor devices 71 adjoining each other are electrically connected via the outer connecting portions 36 of the wiring tape 2. In addition, the semiconductor devices 71 are connected together in the vertical direction (perpendicular to the circuit board 4) and horizontal direction (parallel to the circuit board 4) by the solder balls 3.

[0042] The semiconductor devices 71 can be stacked because the outer connecting portions 36 are positioned on, among the top, bottom and one side of each chip 1 to which the wiring tape 2 is adhered, the top and bottom that are substantially parallel to each other. While FIG. 1D shows the semiconductor devices 71 stacked in three steps, they may be stacked in four or more steps, as desired.

[0043] Further, two semiconductor devices 71 can be positioned side by side in the right-and-left direction because of the outer connecting portions 36 positioned on one side of each chip 1 to which the wiring tape 2 is also adhered.

[0044] As shown in FIG. 1A, the wiring tape 2 may be provided with an extension 60 (phantom line) that is to be adhered to the side of the chip 1 facing the above-described one side. This allows more semiconductor devices 71 to be arranged side by side in the right-and-left direction and physically, electrically interconnected via outer connecting portions, which are provided on the extension 60 also, and solder balls 3.

[0045] As also shown in FIG. 1A, the wiring tape 2 may be additionally provided with extensions 61aand 61b(phantom line) that are to be respectively adhered to a pair of sides of the chip 1 facing each other i.e., the front side and rear side. This allows a number of semiconductor devices 71 to be arranged side by side on the circuit board 4 in the direction perpendicular to the sheet surface of FIG. 1D and physically, electrically connected via outer connecting portions, which are provided on the extensions 61aand 61balso, and solder balls 3. FIG. 8 shows a specific configuration of the resulting tridimensional semiconductor module. More semiconductor devices 71 may be arranged in the vertical and horizontal directions, as desired.

[0046] As stated above, in the illustrative embodiment, the outer connecting portions 36 and solder balls 3 physically, electrically connect nearby semiconductor devices 71. That is, each semiconductor device 71 can be electrically connected to another semiconductor device 71 without the intermediary of the circuit board 4 and therefore via the shortest possible route.

[0047] Moreover, as shown in FIG. 1D, the solder balls 3 and wiring tapes 2 cooperate to form, e.g., a wiring path 51 shown in FIG. 1D. The wiring path 51 electrically connect two semiconductor devices 71aand 71bvia a wiring tape 2cadhered to a semiconductor chip 1cincluded in a semiconductor device 71c,which intervenes between the semiconductor devices 71aand 71b.That is, the semiconductor devices 71aand 71bare electrically interconnected without the intermediary of a semiconductor chip 1cincluded in the semiconductor device 71c.

[0048] Reference will be made to FIGS. 2A through 2D for describing an alternative embodiment of the present invention. This embodiment is similar to the first embodiment except for the following configuration. As shown in FIGS. 2C and 2D corresponding to FIGS. 1C and 1D, respectively, each semiconductor device 72 has two semiconductor chips 10 and 11 adhered to each other at their rear surfaces in a double-chip fashion. Each wiring tape 20 therefore has a contour corresponding to a rectangle that is formed when the top, bottom and one side of the laminated of the chips 10 and 11 are developed. The wiring tape 20 differs from the wiring tape 20 of the previous embodiment in that it covers the above one side of the laminate of the chips 10 and 11.

[0049] A specific procedure for assembling the semiconductor device 72 and a semiconductor module will be described hereinafter. First, as shown in FIG. 2B, a single wiring tape 20 resembling a film carrier is adhered to the surfaces of the two chips 10 and 11. Subsequently, as shown in FIG. 2C, the wiring tape 20 is bent at the edges of the chips 10 and 11 and adhered to the sides of the chips 10 and 11. The chips 10 and 11 are adhered to each other at their rear surfaces.

[0050] As shown in FIG. 2D, a plurality of semiconductor devices 72 each having the configuration shown in FIG. 2C may be arranged bidimensionally in order to constitute a semiconductor module. Further, as shown in FIG. 2A, the wiring tape 20 may be provided with extensions 62, 63aand 63b(phantom line), so that the semiconductor devices 72 can be arranged in any other bidimensional configuration or in a tridimensional configuration similar to the configuration of FIG. 8.

[0051] In the illustrative embodiment, the solder balls 3 and wiring tapes 20 cooperate to form, e.g., a wiring path 53 shown in FIG. 2D. The wiring path 53 electrically connect two chips 10aand 10cvia a wiring tape 20cadhered to a semiconductor chip 11c.which intervenes between the chips 10aand 10c.That is, the chips 10aand 10care electrically interconnected without the intermediary of the chip 11c.

[0052] Another alternative embodiment of the present invention will be described with reference to FIGS. 3A through 3F. As shown, a semiconductor device 73 is made up of six semiconductor chips 12 through 17 and a single wiring tape 21 that resembles a film carrier. The chips 12 through 17 each are identical in configuration with the chip 1 of the first embodiment. In the illustrative embodiment, the wiring tape 21 has a length more than four times as great as the dimension of each of the chips 12 through 17.

[0053] A specific procedure for assembling the semiconductor device 73 will be described hereinafter. First, solder balls 3 are bonded to outer connecting portions 36 formed on the wiring tape 21, which is indicated by a solid line in FIG. 3A. More specifically, the solder balls 3 are bonded to part of the wiring tape 21 that is to be adhered to the front surface of the chip 12 and the sides of the chips 12 through 17. At the same time, a wiring tape 21 having solder balls 3 bonded only to part thereof to be adhered to the front surface of the chip 12 is prepared.

[0054] As shown in FIG. 3B, the front surfaces of the chips 12 and 17 are respectively adhered to the rear surface of the opposite end portions of the wiring tape 21 where the outer connecting portions are formed. The chips 13, 14, 15 and 16 are then adhered to the opposite surfaces of the intermediate portion of the wiring tape 21 at front surfaces thereof. Subsequently, as shown in FIG. 3C, the wiring tape 21 is bent at the edges of the chips 12 and 13 and adhered to the sides of the chips 12 and 13. Also, the rear surfaces of the chips 12 and 13 are adhered to each other.

[0055] As shown in FIG. 3D, the wiring tape 21 is then bent at the edges of the chips 14 and 15 and adhered to the sides of the chips 14 and 15. At the same time, the rear surfaces of the chips 14 and 15 are adhered to each other. Further, as shown in FIG. 3E, the wiring tape 21 is bent at the edges of the chips 16 and 17 and adhered to the sides of the chips 16 and 17. Also, the rear surfaces of the chips 16 and 17 are adhered to each other.

[0056] As shown in FIG. 3E, the semiconductor device 73 has three pairs of semiconductor chips; the chips in each pair are adhered together at their rear surfaces. Specifically, the chips 12 and 13, chips 14 and 15 and chips 16 and 17 are combined to constitute three double-chips 81, 82 and 83, respectively.

[0057] In the illustrative embodiment, the wiring tape 21 has inner connecting portions having a preselected pattern in addition to the outer connecting portions 36. The inner connecting portions are implemented by metal 44, 44band 44c(see FIG. 6) respectively connected to electrodes 5a,5band 5c(see FIG. 6), which are provided on the chip. The inner connecting portions are positioned on part of the wiring tape 21 to be adhered to the chip.

[0058] Two double-chips 81 and 82 (or 82 and 83) facing each other at one surface thereof contact each other with the intermediary of the wiring tape 21. Part of the wiring tape 21, which is contiguous with part of the same intervening between the chips is bent at the edges of the chips and adhered to the outer surfaces of the chips. The other surfaces refer to the bottom and left side of the double chip 81, the right side of the double-chip 82, and the top and left side of the double-chip 83. The outer connecting portions 36 are positioned on each of the above surfaces, i.e., two pairs of substantially parallel surfaces included in the surfaces to which the wiring tape 21 is adhered. The two pairs of substantially parallel surfaces are the top and bottom of the semiconductor device 73 and the right side and left side of the semiconductor device 73.

[0059] FIG. 3F shows a semiconductor module made up of a plurality of bidimensionally arranged semiconductor devices 73 each having the configuration shown in FIG. 3E. As shown, the semiconductor devices 73 are stacked on a circuit board 4 and arranged side by side in the right-and-left direction. The solder balls 3 physically, electrically connect the semiconductor devices 73 adjoining in the vertical and horizontal directions. Also, the solder balls 3 physically, electrically connect the semiconductor devices 71 positioned at the bottoms of the stacks to the circuit board 4. In this condition, the semiconductor devices 73 adjoining each other are electrically connected via the outer connecting portions 36 of the wiring tapes 21. In addition, the semiconductor devices 73 are connected together in the vertical direction (perpendicular to the circuit board 4) and horizontal direction (parallel to the circuit board 4) by the solder balls 3.

[0060] The semiconductor devices 73 can be stacked because the outer connecting portions 36 are positioned on the top and bottom that are substantially parallel to each other. While FIG. 3F shows the semiconductor devices 73 stacked in two steps, they may be stacked in three or more steps, as desired.

[0061] Further, a number of semiconductor devices 73 can be positioned side by side in the right-and-left direction because of the outer connecting portions 36 positioned the right side and left side, which are substantially parallel to each other. While FIG. 3 shows three semiconductor devices 73 arranged side by side, four or more semiconductor devices 73 may be arranged side by side.

[0062] As shown in FIG. 3A, the wiring tape 2 may be provided with some or all of extensions 64a,64b,65a,65b,66aand 66b(phantom line) that are to be adhered to the sides of the double-chips 81 through 83 facing each other, i.e., front sides and rear sides. This allows a number of semiconductor devices 73 to be arranged in the direction perpendicular to the sheet surface of FIG. 3F and physically, electrically connected via outer connecting portions, which are provided on the extensions 64athrough 66balso, and solder balls 3. The resulting semiconductor module has a tridimensional configuration similar to the configuration of FIG. 8.

[0063] As stated above, in the illustrative embodiment, the outer connecting portions 36 and solder balls 3 physically, electrically connect nearby semiconductor devices 73. That is, each semiconductor device 73 can be electrically connected to another semiconductor device 73 without the intermediary of the circuit board 4 and therefore via the shortest possible route.

[0064] Further, as shown in FIG. 3E, the solder balls 3 and wiring tape 2 cooperate to form, e.g., a wiring path 54. The wiring path 54 electrically connects two semiconductor devices 12 and 15 via the wiring tape 21 adhered to semiconductor chips 13 and 14, which intervene between the semiconductor devices 12 and 15. That is, the semiconductor devices 12 and 15 are electrically interconnected without the intermediary of the chips 13 and 14.

[0065] Moreover, as shown in FIG. 3F, the solder balls 3 and wiring tape 2 cooperate to form, e.g., a wiring path 55. The wiring path 55 electrically connects two semiconductor devices 73aand 73bvia a wiring tape 21cincluded in a semiconductor device 73c,which intervenes between the semiconductor devices 73aand 73b.That is, the semiconductor devices 73aand 73bare electrically interconnected without the intermediary of the chips of the semiconductor device 73c.

[0066] The double-chips 81, 82 and 83 each may be replaced with a single chip, in which case each semiconductor device 73 will not be provided with the three chips 13, 14 (or 15) and 16 and will be assembled in the manner described above.

[0067] Referring to FIGS. 4A and 4B, a further alternative embodiment of the present invention is shown. As shown, a semiconductor device 74 is made up of a semiconductor chip 18 and a wiring tape 22 resembling a film carrier. The chip 18 is identical in configuration with the chip 1 of the first embodiment. In the illustrative embodiment, the wiring tape 22 has a rectangular configuration dimensioned slightly greater than the length of the diagonal line of the chip 18 in the vertical and horizontal directions.

[0068] A specific procedure for assembling the semiconductor device 74 will be described hereinafter. First, solder balls 3 are bonded to the front surface of the wiring tape 22. Subsequently, the front surface of the chip 18 is adhered to the center of the rear surface of the wiring tape 22. At this instant, as shown in FIG. 4A, the chip 18 is positioned such that four sides thereof are inclined by 45° relative to the sides of the wiring tape 22. Thereafter, the wiring tape 22 is folded down at the edges of the chip 18 in such a manner as to cover the entire periphery of the chip 18, i.e., four sides and rear surface of the chip 18 and then adhered to the chip 18. As shown in FIG. 4B, the four corners of the wiring tape 22 greater at the center of the rear surface of the tape 22.

[0069] In the illustrative embodiment, the wiring tape 22 is adhered to all of six surfaces of the chip 18. The outer connecting portions 36 are positioned on three or more of the six surfaces of the chip 18. This allows a plurality of semiconductor devices 74 to be arranged bidimensionally or tridimensionally in the same manner as in the first embodiment.

[0070] The wiring tape 22, which is adhered to all of the six surfaces of the chip 18, has a rectangular contour and therefore needs a minimum amount of material. In addition, such a contour promotes efficient wiring design. The chip 18 may be replaced with two chips adhered to each other at their rear surfaces, if desired.

[0071] Reference will be made to FIG. 5 for describing a specific structure of each of the semiconductor devices 71, 72 and 74 of the first, second and fourth embodiments. As shown, the wiring tape 2, 20 or 22 is a laminate of an insulation film 31, a wiring layer 32, an adhesive layer 33, buried metal 34, and a cover coat 35. The wiring layer 32 is formed on one surface of the insulation film 31 in a preselected pattern by lithography. The cover coat or insulator 35 covers the above surface of the insulation film 31. The cover coat 35 is open at each land portion of the wiring layer 32 in order to implement the outer connecting portion 36. The solder ball 3 is bonded to the outer connecting portion 36. The adhesive layer 33 is formed on the other surface of the insulation film 31.

[0072] The wiring tape 2, 20 or 22 is adhered to the semiconductor chip 1, 10, 11 or 18 via the adhesive layer 33. The metal 34, playing the role of the inner connecting portion, is buried in aligned holes formed in part of the insulation film 31 and adhesive layer 33 that faces an electrode 5 included in the chip. The metal 34 is connected to the wiring layer 32 at one end and conjnected to the electrode 5 at the other end. The cover coat 35 is formed with a hole 37 above the metal 34. To connect the electrode 5 and metal 34, a bonding tool 30 presses part of the wiring layer 32 overlying the metal 34 via the hole 37 for thereby bonding the metal 34 to the electrode 5.

[0073] FIG. 6 shows a specific structure of the semiconductor device 73 of the third embodiment. As shown, the wiring tape 21 is a laminate of two insulation films 41aand 41b,a wiring layer 42, two adhesive layers 43aand 43b,and buried metals 44a,44band 44c.The wiring layer 42 intervenes between the insulation films 41aand 41band has a preselected wiring pattern. The wiring layer 42 is formed on one surface of the insulation film 41bby lithography. Subsequently, the insulation film 41ais formed on the above surface of the insulation film 41b.In a portion 8 where a chip is to be mounted on one surface of the wiring tape 21, the insulation film 42 is formed with a hole at a land portion by etching, punching, laser drilling or similar technology, forming the outer connecting portion 36. The solder ball 3 is bonded to the outer connecting portion 36.

[0074] In a portion A where chips are to be mounted on both surfaces of the wiring tape 21, the adhesive layer 43ais formed on the surface of the insulation film 41aopposite to the surface where the wiring layer 42 is formed. The chip 14 or 15 is adhered to the wiring tapes 21 via the adhesive layer 43a.The metal 44ais buried in aligned holes formed in the insulation film 41aand adhesive layer 43aat a position where it faces an electrode 5aincluded in the chip 14 or 15. The metal 44ais connected to the wiring layer 42 at one end and connected to the electrode 5aat the other end.

[0075] Likewise, in the portion A, the adhesive layer 43bis formed on the surface of the insulation film 41bopposite to the surface where the wiring layer 42 is formed. The chip 13 or 16 is adhered to the wiring tape 21 via the adhesive layer 43b.The metal 44bis buried in aligned holes formed in the insulation film 41band adhesive layer 43bat a position where it faces an electrode 5bincluded in the chip 13 or 16. The metal 44bis connected to the wiring layer 42 at one end and connected to the electrode 5bat the other end.

[0076] To connect the electrodes 5aand 5bto the metals 44aand 44b,respectively, the rear surface of the chip 14 or 15 and that of the chip 13 or 16 are pressed to, in turn, press the wiring tape 21 therebetween. As a result, the metals 44aand 44bare bonded to the electrodes 5aand 5b,respectively.

[0077] In the portion B, the adhesive layer 43bis formed on the surface of the insulation film 41bopposite to the wiring layer 42. The wiring tape 21 and chip 12 or 17 are connected together by the adhesive layer 43b.The metal 44cis buried in aligned holes formed in the insulation film 41band adhesive layer 43bat a position where it faces an electrode 5cincluded in the chip 12 or 17. The metal 44cis connected to the wiring layer 42 at one end and connected to the electrode 5cat the other end. A hole 47 is formed in the wiring film 41aabove the metal 44c.To connect the electrode 5cand metal 44c,a bonding tool 30 presses part of the wiring layer 42 positioned above the metal 44cexposed to the outside via the hole 47.

[0078] In the configuration shown in FIG. 6, the insulation films 41aand 41bare formed of, e.g., polyimide while the wiring layers 42 is implemented by, e.g., copper foil. Such materials are, however, only illustrative and may be replaced with any other suitable materials.

[0079] FIG. 7 shows a specific procedure for forming any one of the wiring tapes 2, 20 and 22. As shown in FIG. 7, (a), the wiring layer 32 of copper is formed on one surface of the insulation film 31 formed of polyimide. Adhesive is coated on the other surface of the wiring film 31, forming the adhesive layer 33. The insulation film 31 is about 12 μm thick. The wiring layer 32 is about 18 μm thick. Further, the adhesive layer 33 is about 10 μm thick.

[0080] Subsequently, as shown in FIG. 7, (b), the wiring layer 32 is selectively etched to form a wiring pattern (circuit patterning). As shown in FIG. 7, (c), the surface of the wiring layer 32 where the wiring pattern is present is coated with the cover coat 35 (cover resist casting). As shown in FIG. 7, (d), a hole 91 is formed throughout the adhesive layer 33 and insulation film 31 from the side opposite to the wiring layer 32 (laser drilling), so that the wiring layer 32 is exposed to the outside via the hole 91.

[0081] As shown in FIG. 7, (e), copper (Cu) 92 is buried in the hole 91 in such a manner as to slightly protrude from the surface of the adhesive layer 33 (inner Cu plating using an excimer laser). As shown in FIG. 7, (f), gold (Au) is plated on the surface of the copper 92 that protrudes from the above surface of the adhesive layer 33 (inner Au plating), thereby coating copper 92. As shown in FIG. 7, (g), part of the cover coat 35 covering a land portion 94, which is included in the wiring layer 32, is removed by etching (outer laser drilling), so that the land portion 94 is exposed to the outside. Finally, as shown in FIG. 7, (h), gold 95 is plated on the land portion 94 so as to cover it (outer Au plating).

[0082] By the procedure shown in FIG. 7, the wiring tape 2, 20 or 22 is formed. As for the wiring tape 21, the cover resist casting step of FIG. 7, (c), is replaced with a step of forming the insulation film 41aand a step of forming the adhesive layer 43a.

[0083] In the illustrative embodiments shown and described, a wiring layer is partly exposed to the outside to form a land that plays the role of the outer connecting portion of the wiring tape. A solder ball is bonded to the land in order to connect semiconductor devices to each other. The solder ball may be replaced with any other suitable metal bump or even with a conductive projection contiguous with the wiring layer, if desired. Also, metal buried in the wiring tape to serve as an inner connecting portion may be omitted, in which case the wiring layer will be directly bonded to the electrode of a semiconductor chip.

[0084] In summary, it will be seen that the present invention provides a semiconductor device and a semiconductor module having various unprecedented advantages, as enumerated below.

[0085] (1) A single wiring tape is adhered to three or more surfaces of a semiconductor chip, providing the semiconductor device with a package size comparable with a bare chip size. This successfully avoids the dense arrangement of a number of wirings.

[0086] (2) Outer connecting portions are positioned on three or more surfaces of a semiconductor chip, so that a bidimensional or tridimensional, dense semiconductor module is achieved.

[0087] (3) The wiring tape allows the chips of the semiconductor module to be electrically interconnected via a relatively short route, avoiding the dense arrangement of a number of wirings on the wiring tape as well as on a circuit board. This allows the width of the individual wiring and the distance between nearby wirings to be increased and thereby reduces the mounting cost of the wiring tape and circuit board.

[0088] (4) Consequently, the bidimensional or tridimensional semiconductor module achieves desirable electric characteristics. In addition, such a semiconductor module and the semiconductor device as small as a bare chip can be produced at low cost.

[0089] (5) Various modifications will become possible for those skilled in the art after receiving the teachings of the present disclosure without departing from the scope thereof.