Micro electromechanical switch for detecting acceleration or decelaration

[0002] For feedback control systems, especially in the automobile industry, there is a need for a simple and reliable switch for sensing acceleration or deceleration; that is, G-forces. Such a switch should be inexpensive and immune to severe environmental conditions, and miniaturized.

[0003] It is therefore a general object of the present invention to provide a micro electromechanical switch for detecting acceleration or deceleration.

[0004] In accordance with the above object, there is provided a micro electromechanical (MEM) switch for detecting acceleration or deceleration comprising a micro electromechanical planar mass displaceable by the acceleration or deceleration from a rest position to a displaced position including means for suspending the planar mass from an anchor for linear movement in at least one plane.

[0005] Light emitting means above said planar mass with at least one photodiode means below the mass which is at least partially there between the two when the mass is in one of its positions. Modulation of light from the light emitting means caused by movement of the mass in the plane is sensed whereby acceleration or deceleration is indicated.

[0006] FIG. 1 is a simplified diagrammatic view in elevation of the present invention;

[0007] FIG. 2 is a side view of FIG. 1;

[0008] FIG. 3 is an end view of FIG. 2;

[0009] FIG. 4 is a partial perspective view showing how an actual physical device embodying the present invention would be installed;

[0010] FIG. 5 is a enlarged planar view of FIG. 1 showing more detail; and

[0011] FIG. 6 is an electric circuit used in conjunction with the present invention.

[0012] Referring now to FIG. 1, the micro electromechanical switch of the present invention includes a micro machined shutter on mass 10 constructed of a planar rectangular piece of silicon connected to an anchor 11 by suspension beams 12. Beams 12 allow the shutter to move in the bi-direction indicated by the double-ended arrow 13 to alternatively totally or partially cover the photodiodes 14aor 14b. In other words, shutter 10 is a mass displaceable in a bi-direction 13 by acceleration or deceleration due to the suspension of beam 12.

[0013] FIG. 2 illustrates the construction of FIG. 1 where a silicon base 16 is micro machined to provide the anchor 11, suspension beams 12 and the shutter 10. Embedded in the silicon base 16 are the photodiodes 14a, 14b. Thus, as illustrated in FIG. 3, which is an end view of FIG. 2, when shutter 10 is moved to the left or right it interrupts a light beam from the light emitting diode source 17 to thus, depending on the direction, affect the voltage or current output of photodiode 14aor 14b.

[0014] FIG. 4 illustrates a conventional electronic package where the entire construction of FIGS. 1, 2 and 3 is indicated as the integrated circuit 21 in a container 22 having a typical conventional TO package and having a transparent lid 23 with light source 17 above it with input power and signal leads 24. As discussed above, such a device might typically be used in a feedback control system of a moving vehicle such as an automobile.

[0015] The detailed construction of the suspension beam 12 is illustrated in FIG. 5 where from anchor 11 there is an outgoing pair of silicon arms 31 terminating at 32 and forming another convoluted pair of arms 33 and 34 which are connected to shutter 10. This is all accomplished with typical micro electromechanical techniques. For example, see the co-pending application, Ser. No. 09/299,472, filed Apr. 26, 1999, entitled METHOD OF FABRICATING ANGULAR RATE SENSOR FROM A STRUCTURAL WAFER OF SINGLE CRYSTAL SILICON, and assigned to the present assignee. In addition, there are several technical articles relating to MEMS technology.

[0016] FIG. 6 illustrates an electrical circuit which effectively prevents transient effects from producing a false G-force output. This is accomplished by feeding the outputs of the electric outputs of the photo detectors 14a, 14bthrough a pair of inverters 36 and 37 (this is because normally the photodiodes would be actuated by the light beam from the light emitting diode 17) through an RC integrating circuit as indicated, which through a buffer amplifier 38 and a comparator 39, having a reference input, will produce an output only if the shutter 10 has been displaced by acceleration or deceleration for a predetermined amount of time. In other words, the RC circuit integrates the signal to assure some threshold level is met which is, of course, again measured by the reference input to comparator 39. The output of comparator 39 then is stored or processed by a convenient microprocessor and used for any necessary feedback control action.

[0017] Thus, a micro electromechanical switch for detecting acceleration and deceleration has been provided.