Electromechanical grating display system with segmented waveplate

[0002] This invention relates to a display system with a linear array of electromechanical grating devices that is scanned in order to generate a two-dimensional image. More particularly, the invention relates to an electromechanical grating display system that uses a segmented waveplate to select diffracted light beams for projection onto a screen.

[0003] Spatial light modulators consisting of an array of high-speed electromechanical phase gratings are important for a variety of systems, including display, optical processing, printing, optical data storage and spectroscopy. Each of the devices on the array can be individually controlled to selectively reflect or diffract an incident light beam into a number of light beams of discrete orders. Depending on the application, one or more of the modulated light beams may be collected and used by the optical system.

[0004] Electromechanical phase gratings can be formed in metallized elastomer gels. The electrodes below the elastomer are patterned so that the application of a voltage deforms the elastomer producing a nearly sinusoidal phase grating. These types of devices have been successfully used in color projection displays; see Metallized viscoelastic control layers for light-valve projection displays, by Brinker et al., Displays 16, 1994, pp. 13-20, and Full-colour diffraction-based optical system for light-valve projection displays,by

[0005] Roder et al., Displays 16, 1995, pp. 27-34.

[0006] An electromechanical phase grating with a much faster response time can be made of suspended micromechanical ribbon elements, as described in U.S. Pat. No. 5,311,360, issued May 10, 1994 to Bloom et al., entitled Method and Apparatus for Modulating a Light Beam. This device, also known as a grating light valve (GLV), can be fabricated with CMOS-like processes on silicon. For display or printing, linear arrays of GLV devices can be used with a scanning Schlieren optical system as described in U.S. Pat. No. 5,982,553, issuedNov. 9, 1999 to Bloom et al., entitled Display Device Incorporating One-Dimensional Grating Light-Valve Array. Alternatively, an interferometric optical system can be used to display an image as disclosed in U.S. Pat. No. 6,088,102, issued Jul. 11, 2000 to Manhart, entitled Display Apparatus Including Grating Light-Valve Array and Interferometric Optical System. In the scanning Schlieren display system of Bloom et al. '553, the plane of diffraction that contains the diffracted light beams is parallel to the axis of the linear GLV array because the grating period is parallel to the axis. This feature increases the cost and complexity of the display system. Specifically, efficient collection of the primary diffracted light beams requires at least one dimension of the optical elements to be significantly larger than the extent of the linear GLV array. Furthermore, the diffracted and reflected light beams overlap spatially throughout most of the optical system. Separation of diffracted light from reflected light is accomplished in close proximity to a Fourier plane of the Schlieren optical system. However, the Fourier plane is also usually the preferred location of a scanning mirror for producing a two-dimensional image.

[0007] Recently, a linear array of electromechanical conformal grating devices was disclosed by Kowarz, in U.S. Ser. No. 09/491,354, filed Jan. 26, 2000. For this class of devices, it is preferable to have the grating period perpendicular to the axis of the linear array. The diffracted light beams are then spatially separated throughout most of the optical system. In U.S. Ser. No. 09/491,354, it was mentioned that a simplified display system can be designed based on this type of spatial light modulator. However, no specific description of the display system was given. There is a need therefore for a scanning display system that utilizes a linear array of electromechanical conformal grating devices. Furthermore, there is a need for a display system that is simpler and less costly than other known systems.

[0008] The need is met according to the present invention by providing a display system that includes: a light source providing illumination; a linear array of electromechanical grating devices of at least two individually operable devices receiving the illumination wherein a grating period is oriented at a predetermined angle with respect to an axis of the linear array wherein the angle is large enough to separate diffracted light beams prior to a projection lens system for projecting light onto a screen; a polarization sensitive element that passes diffracted light beams according to their polarization state; a segmented waveplate for altering the polarization state of a discrete number of selected diffracted light beams wherein the segmented waveplate is located between the linear array and the polarization sensitive element; a scanning element for moving the selectively passed diffracted light beams on the screen; and a controller for providing a data stream to the individually operable devices.

[0009] The present invention has several advantages, including: 1) improvement in contrast by eliminating reflections from the projection lens, because such reflections are directed away from the screen; 2) reduction in size of the scanning mirror, because now the scanning mirror can be placed directly at the Fourier plane; 3) increase in design flexibility, because now selection and separation of diffracted orders can take place almost anywhere in the system, rather than solely at the Fourier plane; and 4) reduction in size of lenses and other optical elements.

[0010] FIG. 1 is a perspective, partially cut-away view of a spatial light modulator with electromechanical conformal grating devices, showing two devices in a linear array;

[0011] FIG. 2 is a top view of a spatial light modulator with electromechanical conformal grating devices, showing four individually operable devices in a linear array;

[0012] FIGS. 3aand 3bare cross-sectional views through line III—III in FIG. 2, showing the operation of an electromechanical conformal grating device in an unactuated state and an actuated state, respectively;

[0013] FIGS. 4aand 4bshow the operation of a conventional electromechanical two-level grating device in an unactuated state and an actuated state, respectively;

[0014] FIG. 5 is a top view of a spatial light modulator with conventional GLV devices, showing five individually operable devices in a linear array with deformable ribbon elements oriented perpendicular to the axis of the array and the grating period oriented parallel to the axis;

[0015] FIG. 6 is a top view of a spatial light modulator with conventional GLV devices, showing five individually operable devices in a linear array with deformable ribbon elements oriented parallel to the axis of the array and the grating period oriented perpendicular to the axis;

[0016] FIG. 7 is a schematic illustrating a prior art, line-scanned Schleiren display system that includes a light source, illumination optics, a linear array of conventional GLV devices, a projection lens, a scanning mirror, a controller, and a turning mirror located at the Fourier plane of the projection lens;

[0017] FIG. 8 is a schematic illustrating a line-scanned display system that includes a light source, illumination optics, a linear array of electromechanical conformal grating devices, a projection lens, a scanning mirror, a controller, and a turning mirror located between the linear array and the projection lens;

[0018] FIG. 9 shows a linear array of electromechanical conformal grating devices illuminated by a line of light;

[0019] FIG. 10 is a view of the projection screen that illustrates the formation of a two-dimensional image by scanning a line image across the screen;

[0020] FIGS. 11a-11hare density plots of the light distribution in different planes of a prior art, line-scanned Schleiren display system in which the modulator is a linear array of conventional GLV devices with deformable ribbon elements oriented perpendicular to the axis of the array;

[0021] FIGS. 12a-12hare density plots of the light distribution in different planes of a line-scanned display system in which the modulator is a linear array of electromechanical conformal grating devices;

[0022] FIG. 13 is a schematic illustrating an embodiment of the display system in which the turning mirror is placed between the first projection lens and the scanning mirror, and an intermediate image plane is formed in the system;

[0023] FIG. 14 is a schematic illustrating an embodiment of the display system that includes a polarization beamsplitter and a segmented waveplate for separating +1^stand −1^storder light beams from the 0^thorder light beam;

[0024] FIG. 15ashows the segmented waveplate for order separation;

[0025] FIG. 15bshows an alternate version of the segmented waveplate for order separation;

[0026] FIG. 16 is a schematic illustrating a color, line-scanned display system that includes a three-color light source, illumination optics, a color combination cube, three linear arrays of electromechanical conformal grating devices, three projection lenses, a scanning mirror, a polarization beamsplitter, and three segmented waveplates for separating +1^stand −1^storder light beams from 0^thorder light beams;

[0027] FIG. 17 is a schematic illustrating a color, line-scanned display system with a single multi-color segmented waveplate;

[0028] FIG. 18 shows the multi-color segmented waveplate for order separation;

[0029] FIG. 19 is a schematic illustrating an alternate embodiment of a color, line-scanned display system with three segmented waveplates; and

[0030] FIG. 20 is a schematic illustrating a printer system that includes a polarization beamsplitter and a segmented waveplate for separating +1^stand −1^storder light beams from the 0^thorder light beam.

[0031] The structure and operation of an electromechanical conformal grating device is illustrated in FIGS. 1-3. FIG. 1 shows two side-by-side conformal grating devices 5aand 5bin an unactuated state. In this embodiment, the devices can be operated by the application of an electrostatic force. The grating devices 5aand 5bare formed on top of a substrate 10 covered by a bottom conductive layer 12 which acts as an electrode to actuate the conformal grating devices 5aand 5b. The bottom conductive layer 12 is covered by a dielectric protective layer 14 followed by a standoff layer 16 and a spacer layer 18. On top of the spacer layer 18, a ribbon layer 20 is formed which is covered by a reflective layer 22. The reflective layer 22 is also a conductor in order to provide electrodes for the actuation of the conformal grating devices 5aand 5b. The reflective and conductive layer 22 is patterned to provide electrodes to the two conformal grating devices 5aand 5b. The ribbon layer 20 preferably comprises a material with a sufficient tensile stress to provide a large restoring force. Each of the two conformal grating devices 5aand 5bhas an associated elongated ribbon element 23aand 23b, respectively, patterned from the reflective and conductive layer 22 and the ribbon layer 20. The elongated ribbon elements 23aand 23bare supported by end supports 24aand 24bformed from the spacer layer 18 and by one or more intermediate supports 27 that are uniformly separated in order to form four equal-width channels 25. The elongated ribbon elements 23aand 23bare secured to the end supports 24aand 24band to the intermediate supports 27. A plurality of square standoffs 29 is patterned at the bottom of the channels 25 from the standoff layer 16. These standoffs 29 reduce the possibility of the ribbon elements 23aand 23bsticking when actuated.

[0032] A top view of a four-device linear array of conformal grating devices 6a, 6b, 6c, and 5dis shown in FIG. 2. The elongated ribbon elements 23a, 23b, 23c, and 23dare depicted partially removed over the portion of the diagram below the line III—III in order to show the underlying structure. For best optical performance and maximum contrast, the intermediate supports 27 must be completely hidden below the elongated ribbon elements 23a, 23b, 23cand 23d. Therefore, when viewed from the top, the intermediate supports 27 must not be visible in the gaps 28 between the conformal grating devices 5a-5d. Here each of the conformal grating devices 5a-5dhas three intermediate supports 27 with four equal-width channels 25. The center-to-center separation A of the intermediate supports 27 defines the period of the conformal grating devices 5a-5din the actuated state. The elongated ribbon elements 23a-23dare mechanically and electrically isolated from one another, allowing independent operation of the four conformal grating devices 5a-5d. The bottom conductive layer 12 of FIG. 1 can be common to all of the devices.

[0033] FIG. 3ais a side view, through line III—III of FIG. 2, of two channels of the conformal grating device 5b(as shown and described in FIG. 1) in the unactuated state. FIG. 3bshows the same view of the actuated state. For operation of the device, an attractive electrostatic force is produced by applying a voltage difference between the bottom conductive layer 12 and the reflective, conducting layer 22 of the elongated ribbon element 23b. In the unactuated state (see FIG. 3a), with no voltage difference, the ribbon element 23bis suspended flat between the end supports 24aand 24b. In this state, an incident light beam 30 is primarily diffracted into a 0th order light beam 32 in the mirror direction. To obtain the actuated state, a voltage is applied to the conformal grating device 6b, which deforms the elongated ribbon element 23band produces a partially conformal grating with period Λ. FIG. 3bshows the conformal grating device 5b(as shown and described in FIG. 1) in the fully actuated state with the elongated ribbon element 23bin contact with the standoffs 29. The height difference between the bottom of element 23band the top of the standoffs 29 is chosen to be approximately ¼ of the wavelength λ of the incident light. The optimum height depends on the specific shape of the actuated device. In the actuated state, the incident light beam 30 is primarily diffracted into the +1st order light beam 35aand −1st order light beam 36b, with additional light diffracted into the +2nd order 36aand −2nd order 36b. A small amount of light is diffracted into even higher orders and some is diffracted into the 0th order. One or more of the diffracted beams can be collected and used by the optical system, depending on the application. When the applied voltage is removed, the forces due to the tensile stress and bending restores the ribbon element 23bto its original unactuated state.

[0034] A linear array of conformal grating devices is formed by arranging the devices as illustrated in FIGS. 1-3 with the direction of the grating period A along the y direction and perpendicular to the axis of the array (i.e., the x direction). For a given incident angle, the planes containing the various diffracted light beams are distinct. These planes all intersect in a line at the linear array. Even with a large linear array consisting, possibly, of several thousand devices illuminated by a narrow line of light, the diffracted light beams become spatially separated over a relatively short distance. This feature simplifies the optical system design and enables feasible designs in which the separation of diffracted light beams can be done spatially without Schlieren optics.

[0035] A conventional Grating Light Valve (GLV) is shown in FIGS. 4aand 4b. FIG. 4adepicts the ribbon structure of the device in the unactuated state and FIG. 4bin the actuated state. For operation of the device, an attractive electrostatic force is produced by a voltage difference between the bottom conductive layer 42 and the reflective and conductive layer 48 atop the ribbon element 46. In the unactuated state, with no voltage difference, all of the ribbon elements 46 in the GLV device are suspended above the substrate 40 at the same height. In this state, an incident light beam 54 is primarily reflected as from a mirror to form a 0th order diffracted light beam 55. To obtain the actuated state (see FIG. 4b), a voltage is applied to every other ribbon element 46 producing a grating. In the fully actuated state, every other ribbon element 46 is in contact with the protective layer 44. When the height difference between adjacent ribbon elements is ¼ of the wavelength of an incident light beam 56, the light beam is primarily diffracted into a +1st order light beam 57 and a −1st order light beam 58. One or more of the diffracted beams can be collected and used by an optical system, depending on the application. When the applied voltage is removed, the force due to the tensile stress restores the ribbon elements 46 to their original unactuated state (see FIG. 4a).

[0036] The table below summarizes the key differences between a conformal grating device and a conventional GLV for a single device of each type.

[0037] It should be noted that the parameters above pertain to the preferred forms of each of the devices.

[0038] In a linear array made from conventional GLV devices, the ribbon elements are usually all arranged parallel to each other. FIG. 5 shows the top view of a portion of such a linear array. In this example, each of 5 devices 45a, 45b, 45c, 45dand 45econtains 4 movable ribbon elements 46athat are electrically connected to each other and 4 stationary ribbon elements 46bthat are connected to ground. The application of a voltage to a device causes the movable ribbon elements 46abelonging to that device to actuate in unison into the channel 50. The grating period Λformed by the actuated ribbons is parallel to the axis of the array and perpendicular to the length of the ribbon elements 46aand 46b. The diffracted light beams then overlap spatially over a relatively long distance.

[0039] As a comparative example between the two types of linear arrays, let us consider an array of conformal grating devices that is 4 cm long (2000 devices 20 μm wide) illuminated by a 100 μm wide line of light. For devices with a period chosen such that the diffracted orders are angularly separated by 1 degree, the orders will become spatially separated in approximately 6 mm. This rapid separation of diffracted orders occurs because the grating period is perpendicular to the axis of the linear array of conformal grating devices and is parallel to the length of the ribbon elements. A similar 4 cm linear array of prior art GLV devices with a 4 degree angular separation between diffracted orders would require at least 60 cm for spatial separation, without the use of a Schlieren optical system. This relatively slow order separation occurs because the grating period is parallel to the axis of the linear array of GLV devices.

[0040] A linear array of GLV devices can also be constructed with the ribbon elements perpendicular to the axis of the array as illustrated in FIG. 6. Each of the 5 devices 62a, 62b, 62c, 62dand 62eis individually operable and has its own channel 60a, 60b, 60c, 60dand 60e. For such a GLV array, the grating period Λis perpendicular to the axis of the array and the diffracted light beams become spatially separated over a relatively short distance. However, this type of GLV array suffers from the existence of significant gaps between devices that cause some pixelation in the display.

[0041] FIG. 7 shows a GLV-based display system of the prior art that has a Schlieren optical system. The linear array 85 consists of GLV devices of the type shown in FIG. 5. Light is emitted from a source 70 and passes through a spherical lens 72 and a cylindrical lens 74 before hitting a turning mirror 82. The turning mirror 82 is placed at the Fourier (focal) plane of a projection lens system 75. Although only a single lens element is shown, in practice, the projection lens system will consist of multiple elements. Light reflected by the turning mirror 82 is focused by the projection lens system 75 into a line illuminating the linear array 85. A small portion of the illumination that strikes the projection lens system 75 will be reflected. In order to avoid a reduction in the contrast of the display system from such reflections, the projection lens system 75 needs to have very good optical coatings and/or needs to be used off-axis. The GLV devices of the linear array 85 are selectively activated by the controller 80 to correspond to a line of pixels. If a particular device of the array is actuated by application of a voltage to the ribbon elements, it diffracts light primarily into +1st order and −1st order light beams. If a particular device is not actuated, it diffracts light primarily into the 0th order light beam. These three primary light beams are collected by the same projection lens 75, which focuses the three light beams into distinct spots at the Fourier plane. The 0th order light beam hits the turning mirror 82 and is reflected towards the light source 70. The +1st and −1st order light beams pass above and below the turning mirror 82 and strike a scanning mirror 77 that sweeps the light beams across a screen 90 to form a viewable two-dimensional image. Higher-order light beams also show up as spots in the Fourier plane and can be blocked from reaching the screen 90 by a stop in the Fourier plane (not shown). The controller 80 synchronizes the sweep of the scanning mirror 77 with the actuation of the devices of the linear array 85.

[0042] In the prior art display system of FIG. 7, in order to effectively separate the +1st and −1st order light beams from the 0th order light beam, the turning mirror 82 must be placed near the Fourier plane of the projection lens system 75, i.e., it must be located at approximately the focal distance f from the lens. However, this location is also best for placing the scanning mirror 77 because the +1st and −1st order light beams are tightly focused here, allowing for a reduction in the size and weight of the scanning mirror 77.

[0043] FIGS. 8-10 illustrate a display system with a turning mirror 82 placed between the linear array 85 and the projection lens system 75. Light emitted by source 70 is conditioned by a spherical lens 72 and a cylindrical lens 74 before hitting the turning mirror 82 and focusing on the linear array 85. In this system, the axis of the cylindrical lens 74 is rotated 90 degrees with respect to the cylindrical lens 74 in FIG. 7. By placing the turning mirror 82 between the linear array 85 and the projection lens system 75, the contrast-reducing reflections of the prior art system of FIG. 7 are eliminated because the illuminating light beam never passes through the projection lens system 75. FIG. 9 shows the linear array 85 illuminated by a line of light 88. In this particular example there are 17 electromechanical conformal grating devices shown. In practice, there would be hundreds or thousands of devices. The controller 80 selects the devices to be actuated based on the desired pixel pattern for a given line of a two-dimensional image. If a particular device is not actuated, it diffracts the incident light beam primarily into the 0th order light beam, which subsequently hits the turning mirror 82 and is reflected towards the source 70. If the device is actuated, it diffracts the incident light beams primarily into +1st order and −1st order light beams. These two first-order diffracted light beams pass around the turning mirror 82 and are projected on the screen 90 by the projection lens system 75. Higher-order diffracted light beams can be blocked by the addition of a stop 83. The scanning mirror 77 sweeps the line image across the screen 90 to form the two-dimensional image. Preferably, the scanning mirror 77 is placed near the Fourier plane of the projection lens system 75. FIG. 10 is a view facing the screen 90 showing the formation of a two-dimensional image from a series of 1080 sequential line scans.

[0044] Clearly, there are two kinds of diffracted light beams in this display system: those that are blocked by obstructing elements from reaching the screen 90 and those that pass around obstructing elements to form an image on the screen 90. In this particular system, the obstructing elements are the turning mirror 82 that blocks the 0th order light beam and the stops 83 that block the ±2nd, ±3rd, ±4th . . . orders of light. As will be explained later, according to the present invention, the combination of a polarization sensitive element, such as a beamsplitter, and a segmented waveplate can be used as an alternate method for choosing the diffracted light beams that are allowed to reach the screen 90.

[0045] The linear array 85 is preferably constructed of electromechanical conformal grating devices of the type shown in FIGS. 1-3. It may also be constructed of GLV devices of the type shown in FIG. 6, or of other kinds of electromechanical grating devices. However, in order to place the turning mirror 82 before the projection lens system 75, the grating period Λmust be rotated at a sufficiently large angle with respect to the long axis of the linear array 85. For the electromechanical conformal grating devices of FIGS. 1-3 and the GLV devices of FIG. 6, this angle is 90 degrees. A lesser angle can also be used so long as the diffracted orders become separated before reaching the projection lens system 75. It is impractical, however, to make this type of display system with no rotation between the grating period and the axis of the linear array 85. Therefore, a conventional linear array of GLV devices of the type shown in FIG. 5 cannot be used with this kind of system.

[0046] The significant differences between the display system of the prior art (FIG. 7) and the display system of FIG. 8 can be understood by examining the propagation of the diffracted light beams throughout the two systems. FIGS. 11a-11hshow the amplitude of the diffracted light beams along several parallel planes between the linear array 85 and the screen 90 for the prior art system of FIG. 7. In this modeled example, the lens has a focal length f of 50 mm, the linear array is 1 cm long. D refers to the distance between the linear array 85 to the plane of interest. As the diffracted light beams emerge from the linear array 85, they begin to spread along the direction of the axis of the linear array as illustrated in FIGS. 11a-11d. The interference between the various diffracted beams causes a rapid variation in the intensity known to those skilled in the art as tilt fringes. At the plane just before the projection lens (see FIG. 11d), the diffracted light beams have spread to about twice the length of the linear array. The lens must be large enough to avoid truncating the diffracted light beams to be projected on the screen, which are the −1st and +1st order light beams in this case. After passing through the projection lens system 75, the beams begin to focus. At a distance of D=90 mm from the linear array 85, the various diffracted orders are spatially separated. Distinct spots are visible that correspond to the +3rd, +2nd, +1st, 0th , −1st, −2nd and −3rd orders (see FIG. 11g). At the Fourier plane (D=100 mm), the turning mirror 82 blocks the 0th order light beam and a stop blocks the +3rd, +2nd, −2nd and −3rd orders. The +1st and −1st order light beams continue towards the screen 90 where they overlap spatially to form the line image. It is important to note that the various order light beams are only spatially separated near the Fourier plane (near D=100 mm). Therefore, only the vicinity of this plane is available for separating the +1st and −1st order light beams from the rest of the diffracted orders.

[0047] FIGS. 12a-12hshow the amplitude of the diffracted light beams along several parallel planes for the display system of FIG. 8. In contrast to the prior art display system, as the various diffracted light beams propagate from one plane to the next, they spread out in a direction perpendicular to the axis of the linear array 85. They become spatially separated a few millimeters from the linear array 85 and remain spatially separated throughout the system, except near the screen 90 and any intermediate image planes. FIG. 12dshows the light distribution just before the turning mirror 82 and the stop 83, which block the unwanted diffracted orders. Only the +1st and −1st order light beams pass through the projection lens system 75. For better optical efficiency, higher diffracted orders could also be allowed through. FIGS. 12e-12hshow the +1st and −1st order light beams after they have gone through the projection lens system and pass through focus at the Fourier plane (D=100 mm). Near the Fourier plane, the two first order light beams are tightly focused into two spots. Therefore, by placing the scanning mirror 77 here, it can be kept small and light. The +1st and −1st order light beams overlap spatially when they finally reach the screen 90.

[0048] An alternate embodiment of the display system is shown in FIG. 13. The projection lens system now consists of 3 separate lens groups 75a, 75band 75c. The turning mirror 82 is placed between the first lens group 75aand the scanning mirror 77 adjacent to the first lens group 75a. This location for the turning mirror 82 can be beneficial because the diffracted light beams are collimated along one axis in this space. The cylindrical lens 74 axis is rotated 90 degrees with respect to the cylinder lens of FIG. 8. The scanning mirror 77 is preferably placed at the Fourier plane (focal plane) of the first lens group 75a. The second lens group 75bcreates an intermediate image 92 of the linear array 85 that can be used to modify the image appearing on the screen 90. For example, an aperture can be placed in this plane to create a sharp boundary for the image. The third lens group 75cprojects the intermediate image 92 onto the screen 90.

[0049] In the embodiments of FIGS. 8 and 13, the turning mirror 82 is used both for providing illumination to the linear array 85 and for blocking the 0^thorder light beam from reaching the screen 90. This requires precise positioning of a small turning mirror 82, which can be difficult for the case of conformal grating devices where the diffracted orders may only be separated by 1 degree. Furthermore, the embodiment of FIG. 13 can have a reduction in contrast of the projected image caused by weak reflections of the incident light from the first lens group 75a.

[0050] According to the present invention, a display system that incorporates a segmented waveplate 120 can be used to eliminate these two problems as illustrated in FIGS. 14 and 15a. Referring to FIG. 14, the source 70 emits linearly polarized light that is reflected by a polarization element, here shown as a polarization beamsplitter 96 and focuses on the linear array 85. For optimum illumination and light efficiency, the source is preferably a linearly polarized laser. Unpolarized sources may also be used since the polarization beamsplitter 96 will render the reflected light linearly polarized. Referring to FIG. 15a, the incident light illuminating the linear array 85 passes unmodified through the central portion 124 of the segmented waveplate 120. If a particular device on the linear array 85 of FIG. 14 is not actuated, it diffracts the incident light beam primarily into the 0th order light beam. The 0th order passes back through the central portion 124, hits the polarization beamsplitter 96 of FIG. 14 and is reflected towards the source 70 of FIG. 14. On the other hand, if a particular device is actuated, it diffracts the incident light beam primarily into +1st order and −1st order light beams. These two first-order diffracted light beams pass through the half-wave segments 122 of the segmented waveplate 120 of FIG. 16a, which then rotates the linear polarization by 90 degrees. Specifically in FIG. 14, the polarization beamsplitter 96 allows this state of polarization to be projected onto a screen 90 by a projection lens system 75. Higher-order diffracted light beams can be blocked by the addition of a stop 83 or by adding additional clear portions to the segmented waveplate 120.

[0051] FIG. 15bshows an alternative embodiment of the segmented waveplate 120 in which the central portion 124 is replaced by a full-wave segment 126. In practice this solution may be more easily manufacturable, since it can be implemented by merely overlapping two half-wave plates. The optical subsystem 140 of FIG. 14 that combines the linear array 85, the segmented waveplate 120 and the polarization beamsplitter 96 is a basic block that can be incorporated into other types of systems. The specific example of a printer will be discussed later. If higher efficiency is desired, the segmented waveplate 120 can be selected so that higher order light beams pass through the system.

[0052] The above embodiments can be used either for single color or for color-sequential display systems. For a color-sequential display, the light source 70 produces a plurality of colors that are sequential in time and the controller 80 is synchronized with the light source 70. For example, if the light source 70 consists of three combined red, green and blue lasers, these lasers are turned on sequentially to produce overlapping red, green and blue images on the screen 90. The image data sent by the controller 80 to the linear array 85 is synchronized with the turned-on laser color.

[0053] Color-sequential display systems waste two-thirds of the available light because only one color is projected at a time. FIG. 16 depicts an embodiment of the invention that projects three colors simultaneously. In FIG. 16, the light source 70 emits linearly-polarized red, green and blue beams. After these three beams strike polarization beamsplitter 96, they are separated by a color combination cube 100 and are focused onto distinct linear arrays by three projection lenses 72r, 72gand 72b. Red light illuminates linear array 85r, green light illuminates linear array 85gand blue light illuminates linear array 85b. The 0^thorder light beams emerging from the three linear arrays pass unmodified through the central portions of three segmented waveplates 120r, 120gand 120b. However, the +1^stand −1^storder light beams pass through the half-wave portions of the segmented waveplates, which rotates the beam polarization by 90 degrees. Each of the waveplates is chosen to match the color of interest. All of the +1^st, 0^stand −1^storder light beams are combined by the color combination cube 100 and subsequently strike the polarization beamsplitter 96. Because of the difference in the state of polarization, the polarization beamsplitter 96 reflects the red, green and blue 0^thorder beams back towards the source and allows the red, green and blue +1^stand −1^storder light beams to project onto a screen 90.

[0054] Alternatively, a color-simultaneous display system can be made with a single multi-color segmented waveplate 130 located between a polarization beamsplitter 96 and a color combination cube 100, as shown in FIGS. 17 and 18. In this embodiment, each of the linear arrays 85r, 85gand 85bhas the same period Λ, or a period chosen so that the red, green and blue +1^thand −1^storder light beams do not spatially overlap as they pass through the multi-color segmented waveplate 130. Referring to FIG. 18, the red, green and blue 0^thorder light beams are transmitted unmodified through a central opening 134 and are reflected towards a light source 70 of FIG. 17 by the polarization beamsplitter 96. The red, green and blue +1^stand −1^storder light beams each pass through a corresponding half-wave segment 132r, 132gand 132b, which causes the beams to be projected onto the screen 90.

[0055] In practice, because color combination cubes usually only work well with a particular state of linear polarization, the embodiment of FIG. 17 allows for a better design than the one of FIG. 16. In the display system of FIG. 17 all of the +1^stand −1^storder light beams traveling through the color combination cube 100 have the same state of polarization as their 0^thorder counterparts. On the other hand, in the display system of FIG. 16, the state of polarization of the +1^stand −1^storder light beams in the color combination cube 100 is rotated with respect to the 0^thorder. Therefore, the system of FIG. 16 requires good performance from the color combination cube 100 for both states of linear polarization of each color, whereas the one of FIG. 17 only requires good performance for a single state of linear polarization.

[0056] The color-simultaneous display systems of FIGS. 16 and 17 each require three projection lens systems 72r, 72g, 72b. A lower-cost color-simultaneous display system with a single projection lens system 75 is illustrated in FIG. 19.

[0057] The embodiments described above can readily be altered to obtain printing systems. For example, FIG. 20 shows a printer that is fashioned from the optical subsystem 140 from FIG. 14. An imaging lens 105 is used at finite conjugates to create a line image of a linear array 85 on light sensitive media 110. This line image is formed from the +1^storder and −1^storder light beams that pass through the polarization beamsplitter 96. Although a scanning mirror 77, as shown in FIG. 14, could be used to create a two-dimensional image from the line image, it is usually preferable to use a media transport system to move the light sensitive media 110 with respect to the line image. In FIG. 20, the media transport system is a rotating drum 107. The motion of the media must be synchronized with the actuation of the electromechanical conformal grating devices of the linear array 85 by the controller 80. This embodiment can be used for either a monochrome or a color-sequential printer. To obtain a high-speed printer that can print three colors simultaneously on photographic paper, three linear arrays would be needed.

[0058] The invention has been described in detail with particular reference to certain preferred embodiments thereof, but it will be understood that variations and modifications can be effected within the spirit and scope of the invention.

[0059] 5aconformal grating device

[0060] 5bconformal grating device

[0061] 5cconformal grating device

[0062] 5dconformal grating device

[0063] 10 substrate

[0064] 12 bottom conductive layer

[0065] 14 protective layer

[0066] 16 standoff layer

[0067] 18 spacer layer

[0068] 20 ribbon layer

[0069] 22 reflective, conductive layer

[0070] 23aelongated ribbon element

[0071] 23belongated ribbon element

[0072] 23celongated ribbon element

[0073] 23delongated ribbon element

[0074] 24aend support

[0075] 24bend support

[0076] 25 channel

[0077] 27 intermediate support

[0078] 28 gap

[0079] 29 standoff

[0080] 30 incident light beam

[0081] 32 0^thorder light beam

[0082] 35a+1^storder light beam

[0083] 35b−1^storder light beam

[0084] 36a+2^ndorder light beam

[0085] 36b−2^ndorder light beam

[0086] 40 substrate

[0087] 42 bottom conductive layer

[0088] 44 protective layer

[0089] 45aGLV device

[0090] 45bGLV device

[0091] 45cGLV device

[0092] 45dGLV device

[0093] 45eGLV device

[0094] 46 ribbon element

[0095] 46amovable ribbon element

[0096] 46bstationary ribbon element

[0097] 48 reflective and conductive layer

[0098] 50 channel

[0099] 54 incident light beam

[0100] 55 0th order light beam

[0101] 56 incident light beam

[0102] 57 +1st order light beam

[0103] 58 −1st order light beam

[0104] 60achannel

[0105] 60bchannel

[0106] 60cchannel

[0107] 60dchannel

[0108] 60echannel

[0109] 62aGLV device

[0110] 62bGLV device

[0111] 62cGLV device

[0112] 62dGLV device

[0113] 62eGLV device

[0114] 70 light source

[0115] 72 spherical lens

[0116] 72rprojection lens

[0117] 72gprojection lens

[0118] 72bprojection lens

[0119] 74 cylindrical lens

[0120] 75 projection lens system

[0121] 75afirst lens group

[0122] 75bsecond lens group

[0123] 75cthird lens group

[0124] 77 scanning mirror

[0125] 80 controller

[0126] 82 turning mirror

[0127] 83 stop

[0128] 85 linear array

[0129] 85rlinear array

[0130] 85glinear array

[0131] 85blinear array

[0132] 88 line of light

[0133] 90 screen

[0134] 92 intermediate image

[0135] 96 polarization beamsplitter

[0136] 100 color combination cube

[0137] 105 imaging lens

[0138] 107 rotating drum

[0139] 110 light sensitive media

[0140] 120 segmented waveplate

[0141] 120rsegmented waveplate

[0142] 120gsegmented waveplate

[0143] 120bsegmented waveplate

[0144] 122 half-wave segment

[0145] 124 central portion

[0146] 126 full-wave segment

[0147] 130 multi-color segmented waveplate

[0148] 132rhalf-wave segment for red

[0149] 132ghalf-wave segment for green

[0150] 132bhalf-wave segment for blue

[0151] 134 central opening

[0152] 140 optical subsystem

[0153] f focal distance