Semiconductor structures using a group III-nitride quaternary material system with reduced phase separation

[0002] This application relates to U.S. patent application Ser. No. 09/276,886 (filed Mar. 26, 1999) issued, Ser. No. 09/277,319 (filed Mar. 26, 1999)pending, Ser. No. 09/365,105 (filed Jul. 30, 1999) now U.S. Pat. No. 6,229,150 (issued May 8, 2001), Ser. No. 09/442,077 (filed Nov. 16, 1999) abandoned, and Ser. No. 09/476,017 (filed on Dec. 31, 1999) pending in the names of the same inventors, assigned to the same assignee, and incorporated herein by reference.

[0003] This application relates to semiconductor structures and processes, and particularly relates to group III-nitride quaternary and pentenary materials systems and methods such as might be used in blue or ultraviolet laser diodes and other similar semiconductors.

[0004] The development of the blue laser light source has heralded the next generation of high density optical devices, including disc memories, DVDs, and so on. FIG. 1 shows a cross sectional illustration of a prior art semiconductor laser devices. (S. Nakamura, MRS BULLETIN, Vol. 23, No. 5, pp. 37-43, 1998.) On a sapphire substrate 5, a gallium nitride (GaN) buffer layer 10 is formed, followed by an n-type GaN layer 15, and a 0.1 μm thick silicon dioxide (SiO2) layer 20 which is patterned to form 4 μm wide stripe windows 25 with a periodicity of 12 μm in the GaN<1-100> direction. Thereafter, an n-type GaN layer 30, an n-type indium gallium nitride (In _0.1Ga_0.9N) layer 35, an n-type aluminum gallium nitride (Al_0.14Ga_0.86N)/GaN MD-SLS (Modulation Doped Strained-Layer Superlattices) cladding layer 40, and an n-type GaN cladding layer 45 are formed. Next, an In_0.02Ga_0.98N/In_0.15Ga_0.85N MQW (Multiple Quantum Well) active layer 50 is formed followed by a p-type Al_0.2Ga_0.8N cladding layer 55, a p-type GaN cladding layer 60, a p-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 65, and a p-type GaN cladding layer 70. A ridge stripe structure is formed in the p-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 65 to confine the optical field which propagates in the ridge waveguide structure in the lateral direction. Electrodes are formed on the p-type GaN cladding layer 70 and n-type GaN cladding layer 30 to provide current injection.

[0005] In the structure shown in FIG. 1, the n-type GaN cladding layer 45 and the p-type GaN 60 cladding layer are light-guiding layers. The n-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 40 and the p-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 65 act as cladding layers for confinement of the carriers and the light emitted from the active region of the InGaN MQW layer 50. The n-type In_0.1Ga_0.9N layer 35 serves as a buffer layer for the thick AlGaN film growth to prevent cracking.

[0006] By using the structure shown in FIG. 1, carriers are injected into the InGaN MQW active layer 50 through the electrodes, leading to emission of light in the wavelength region of 400 nm. The optical field is confined in the active layer in the lateral direction due to the ridge waveguide structure formed in the p-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 65 because the effective refractive index under the ridge stripe region is larger than that outside the ridge stripe region. On the other hand, the optical field is confined in the active layer in the transverse direction by the n-type GaN cladding layer 45, the n-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layers 40, the p-type GaN cladding layer 60, and the p-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 65 because the refractive index of the of the active layer is larger than that of the n-type GaN cladding layer 45 and the p-type GaN cladding layer 60, the n-type Al_0.14Ga_0.86N/GaN MD-SLS layer 40, and the p-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 65. Therefore, fundamental transverse mode operation is obtained.

[0007] However, for the structure shown in FIG. 1, it is difficult to reduce the defect density to the order of less than 10⁸cm⁻², because the lattice constants of AlGaN, InGaN, and GaN differ sufficiently different from each other that defects are generated in the structure as a way to release the strain energy whenever the total thickness of the n-type In_0.1Ga_0.9N layer 35, the In_0.02Ga_0.98N/In_0.15Ga_0.85N MQW active layer 50, the n-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 40, the p-type Al_0.14Ga_0.86N/GaN MD-SLS cladding layer 65, and the p-type Al_0.2Ga_0.8N cladding layer 55 exceeds the critical thickness. The defects result from phase separation and act as absorption centers for the lasing light, causing decreased light emission efficiency and increased threshold current. The result is that the operating current becomes large, which in turn causes reliability to suffer.

[0008] Moreover, the ternary alloy system of InGaN is used as an active layer in the structure shown in FIG. 1. In this case, the band gap energy changes from 1.9 eV for InN to 3.5 eV for GaN. Therefore, ultraviolet light which has an energy level higher than 3.5 eV cannot be obtained by using an InGaN active layer. This presents difficulties, since ultraviolet light is attractive as a light source for the optical pick up device in, for example, higher density optical disc memory systems and other devices.

[0009] To better understand the defects which result from phase separation in conventional ternary materials systems, the mismatch of lattice constants between InN, GaN, and AlN must be understood. The lattice mismatch between InN and GaN, between InN and AlN, and between GaN and AlN, are 11.3%, 13.9%, and 2.3%, respectively. Therefore, an internal strain energy accumulates in an InGaAlN layer, even if the equivalent lattice constant is the same as that of the substrate due to the fact that equivalent bond lengths are different from each other between InN, GaN, and AlN. In order to reduce the internal strain energy, there is a compositional range which phase separates in the InGaAlN lattice mismatched material system, where In atoms, Ga atoms, and Al atoms are inhomogeneously distributed in the layer. The result of phase separation is that In atoms, Ga atoms, and Al atoms in the InGaAlN layers are not distributed uniformly according to the atomic mole fraction in each constituent layer. In turn, this means the band gap energy distribution of any layer which includes phase separation also becomes inhomogeneous. The band gap region of the phase separated portion acts disproportionately as an optical absorption center or causes optical scattering for the waveguided light. As noted above, a typical prior art solution to these problems has been to increase drive current, thus reducing the life of the semiconductor device.

[0010] As a result, there has been a long felt need for a semiconductor structure which minimizes lattice defects due to phase separation and can be used, for example, as a laser diode which emits blue or UV light at high efficiency, and for other semiconductor structures such as transistors.

[0011] The present invention substantially overcomes the limitations of the prior art by providing semiconductor structures and methods which substantially reduce defect densities by materially reducing phase separation between the layers of the structures. This in turn permits substantially improved emission efficiency. In general, the present invention utilizes group III-nitride quaternary and pentenary material systems and methods which may generally be described by the formula In_1−x−yGa_xAl_yN_1−zAs_z, where x, y and z are not all zero. It will be appreciated that, where one of x, y or z is zero, a quaternary system results. However, if none of x, y or z are zero, and the sum of x and y does not total one, a pentenary material system results.

[0012] To reduce phase separation, it has been found possible to provide a semiconductor device with GaAlNAs layers having homogeneous Al content distribution as well as homogeneous As content distribution in each layer. In a light emitting device, this permits optical absorption loss and waveguide scattering loss to be reduced, resulting in a high efficiency light emitting device. By carefully selecting the amounts of Al and As, devices with at least two general ranges of band gaps may be produced, allowing development of light emitting devices in both the infrared and the blue/uv ranges.

[0013] In a first exemplary embodiment of a GaAlNAs quaternary material system in accordance with the present invention, sufficient homogeneity to avoid phase separation has been found when the Al content, represented by x, and the As content, represented by y, ideally satisfy the condition that 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy nearly equals to a constant value. In a typical embodiment of a light emitting device, the constant value may be 3.18. The lack of phase separation results because the lattice constants of the constituent layers in the structure are sufficiently close to each, in most cases being nearly equal, that the generation of defects is suppressed.

[0014] A device according to a first embodiment of the present invention typically includes a first layer of GaAlNAs material of a first conductivity, a GaAlNAs active layer, and a layer of GaAlNAs material of an opposite conductivity successively formed on one another. By maintaining the mole fractions essentially in accordance with the formula 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy nearly equals to a constant value, for example on the order of or nearly equal to 3.18, the lattice constants of the constituent layers remain substantially equal to each other, leading to decreased generation of defects.

[0015] In an alternative embodiment, the semiconductor structure is fabricated essentially as above, using a quaternary materials system to eliminate phase separation and promote homogeneity across the layer boundaries. Thus, as before, the first cladding layer is a first conduction type and composition of GaAlNAs, the active layer is GaAlNAs of a second composition, and the second cladding layer is an opposite conduction type of GaAlNAs having the composition of the first layer. However, in addition, the second cladding layer has a ridge structure. As before, the optical absorption loss and waveguide scattering loss is reduced, leading to higher efficiencies, with added benefit that the optical field is able to be confined in the lateral direction in the active layer under the ridge structure. This structure also permits fundamental transverse mode operation.

[0016] In a third embodiment of the invention, suited particularly to implementation as a laser diode, the semiconductor structure comprises a first cladding of a first conduction type of an Ga_1−x1Al_x1N_1−y1As_y1material, an active layer of an Ga_1−x2Al_x2N_1−y2As_y2material, and a second cladding layer of an opposite conduction type of an Ga_1−x3A_x3N_1−y3As_y3material, each successively formed on the prior layer. In such a materials system, x1, x2, and x3 define the Al content and y1, y2, and y3 define the As content. Moreover, x1, y1, x2, y2, x3, and y3 have a relationship of 0<x1<1, 0<x2<1, 0<x3<1, 0<y1<1, 0<y2<1, 0<y3<1, 0.26x1+37y1<=1, 0.26x2+37y2<=1, 0.26x3+37y3<=1, Eg_GaN(1−x1)(1−y1)+Eg_GaAs(1−x1)y1+Eg_AlNx1(1−y1)+Eg_AlAsx1y1>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2(1−y2)+Eg_AlAsx2y2, and Eg_GaN(1−x3)(1−y3)+Eg_GaAs(1−x3)y3+Eg_AlNx3(1−y3)+Eg_AlAsx3y3>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2 (1−y2)+Eg_AlAsx2y2, where Eg_GaN, Eg_GaAs, Eg_AlN, and EgAlAS are the band gap energy of GaN, GaAs, AlN, and AlAs, respectively.

[0017] To provide a reproducible semiconductor structure according to the above materials system, an exemplary embodiment of GaAlNAs layers have Al content, x, and As content, y, which satisfy the relationship 0<x<1, 0<y<1 and 0.26x+37y<=1. As before, this materials system permits reduction of the optical absorption loss and the waveguide scattering loss, resulting in a high efficiency light emitting device. Moreover, the band gap energy of the GaAlNAs of an active layer becomes smaller than that of the first cladding layer and the second cladding layer when x1, y1, x2, y2, x3, and y3 have a relationship of 0<x1<1, 0<x2<1, 0<x3<1, 0<y1<1, 0<y2<1, 0<y3<1, 0.26x1+37y1<=1, 0.26x2+37y2<=1, 0.26x3+37y3<=1, Eg_GaN(1−x1)(1−y1)+Eg_GaAs(1−x1)y1+Eg_AlNx1(1−y1)+Eg_AlAsx1y1>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2(1−y2)+Eg_AlAsx2y2, and Eg_GaN(1−x3)(1−y3)+Eg_GaAs(1x3)y3+Eg_AlNx3(1−y3)+Eg_AlAsx3y3>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2(1−y2)+Eg_AlAsx2y2. Under these conditions, the injected carriers are confined in the active layer. In at least some embodiments, it is preferable that the third light emitting device has a GaAlNAs single or multiple quantum well active layer whose Al content, xw, and As content, yw, of all the constituent layers satisfy the relationship of 0<xw<1, 0<yw<1, and 0.26xw+37yw<=1.

[0018] One of the benefits of the foregoing structure is to reduce the threshold current density of a laser diode. This can be achieved by use of a single or multiple quantum well structure, which reduces the density of the states of the active layer. This causes the carrier density necessary for population inversion to become smaller, leading to a reduced or low threshold current density laser diode.

[0019] It is preferred that in the third light emitting device, the condition of 3.18(1−xs)(1−ys)+3.99(1−xs)ys+3.11xs(1−ys)+4xsys nearly equals to a constant value—on the order of or near 3.18—is satisfied, wherein xs and ys are the Al content and the As content, respectively, in each the constituent layers. As before, this causes the lattice constants of the each constituent layers to be nearly equal to each other, which in turn substantially minimizes defects due to phase separation.

[0020] In a fourth embodiment of the present invention, the semiconductor structure may comprise a first cladding layer of a first conduction type of a material Ga_1−x1Al_x1N_1−y1As_y1, a Ga_1−x2Al_x2N_1−y2As_y2active layer, and a second cladding layer of an opposite conduction type of a material Ga_1−x3Al_x3N_1−y3As_y3, each successively formed one upon the prior layer. In addition, the second cladding layer has a ridge structure. For the foregoing materials system, x1, x2, and x3 define the Al content, y1, y2, and y3 define the As content, and x1, y1, x2, y2, x3, and y3 have a relationship of 0<x1<1, 0<x2<1, 0<x3<1, 0<y1<1, 0<y2<1,0<y3<1, 0.26x1+37y1<=1, 0.26x2+37y2<=1, 0.26x3+37y3<=1, Eg_GaN(1−x1)(1−y1)+Eg_GaAs(1−x1)y1+Eg_AlNx1(1−y1)+Eg_AlAsx1y1>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2(1−y2)+Eg_AlAsx2y2, and Eg_GaN(1−x3)(1−y3)+Eg_GaAs(1−x3)y3+Eg_AlNx3(1−y3)+Eg_AlAsx3y3>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2(1−y2)+Eg_AlAsx2y2, where Eg_GaN, Eg_GaAsEg_AlN, and Eg_AlAsare the band gap energy of GaN, GaAs, AlN, and AlAs, respectively.

[0021] As with the prior embodiments, each of the GaAlNAs layers have a homogeneous Al and As content distribution, which can be obtained reproducibly when Al content, x, and As content, y, of each GaAlNAs layer satisfies the relationship 0<x<1, 0<y<1 and 0.26x+37y<=1. The band gap energy of the GaAlNAs active layer becomes smaller than that of the first cladding layer and the second cladding layer when x1, y1, x2, y2, x3, and y3 have a relationship of x1, y1, x2, y2, x3, and y3 have a relationship of 0<x1<1, 0<x2<1, 0<x3<1, 0<y1<1, 0<y2<1, 0<y3<1, 0.26x1+37y1<=1, 0.26x2+37y2<=1, 0.26x3+37y3<=1, Eg_GaN(1−x1)(1−y1)+Eg_GaAs(1−x1)y1+Eg_AlNx1(1−y1)+Eg_AlAsx1y1>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2(1−y2)+Eg_AlAsx2y2, and Eg_Gan(1−x3)(1−y3+Eg_GaAs(1−x3)y3+Eg_AlNx3(1−y3)+Eg_AlAsx3y3>Eg_GaN(1−x2)(1−y2)+Eg_GaAs(1−x2)y2+Eg_AlNx2(1−y2)+Eg_AlAsx2y2. Similar to the prior embodiments, the injected carriers are confined in the active layer and the optical field is confined in the lateral direction in the active layer under the ridge structure, producing a fundamental transverse mode operation.

[0022] Also similar to the prior embodiments, the fourth embodiment typically includes a GaAlNAs single or multiple quantum well active layer whose Al content, xw, and As content, yw, of all the constituent layers satisfy the relationship of 0<xw<1, 0<yw<1, and 0.26xw+37yw<=1. Also, the condition 3.18(1−xs)(1−ys)+3.99(1−xs)ys+3.11xs(1−ys)+4xsys nearly equals to a constant value, for example on the order of or near 3.18 is typically satisfied, where xs and ys are the Al content and the As content, respectively, in each constituent layer. Similar parameters apply for other substrates, such as sapphire, silicon carbide, and so on.

[0023] In the Group-III nitride materials, InN is also attractive for the application to visible light emitting devices, visible light detectors, and high power transistor devices because of its relativlely wide band gap and direct band gap. The same structural design concepts for GaAlNAs material are also can be applied to the semocinductor devices using the other material systems such as InGaNAs, AlInNAs.

[0024] In the case of the semiconductor device using InGaNAs material system, each of the InGaNAs layers have a homogeneous In content, Ga content, N content and As content distribution, which can be obtained reproducibly when Ga content, x, As content, y, of each InGaNAs layer satisfies the relationship 0<=x<=1, 0<=y <=1, and x/0.2+y/0.9<=1 or 1.25x−8.33y>=1.

[0025] In the case of the semiconductor device using AlInNAs material system, each of the AlInNAs layers have a homogeneous Al content, In content, N content, and As content distribution, which can be obtained reproducibly when In content, x, As content, y, of each AlInNAs layer satisfies the relationship 0<=x<=1, 0<=y<=1, and 1<=x/0.1+y/0.02 or x/0.9−2.22y>=1.

[0026] The foregoing results may be achieved with conventional processing temperatures and times, typically in the range of 500° C. to 1000° C. See “Growth of high optical and electrical quality GaN layers using low-pressure metalorganic chemical vapor deposition”, Appl Phys. Lett.58(5), Feb. 4, 1991 p. 526 et seq.

[0027] The present invention may be better appreciated by the following Detailed Description of the Invention, taken together with the attached Figures.

[0028] FIG. 1 shows a prior art laser diode structure using a conventional ternary materials system.

[0029] FIG. 2 shows in cross-sectional view a semiconductor structure according to a first embodiment of the invention.

[0030] FIG. 3 shows a graph of the light-current characteristics of a laser diode according to the structure of FIG. 1.

[0031] FIG. 4 shows an exemplary series of the fabrication steps for a semiconductor structure in accordance with a first embodiment of the invention.

[0032] FIG. 5 shows in cross-sectional view a semiconductor structure according to a second embodiment.

[0033] FIG. 6 shows a graph of the light-current characteristics of a laser diode according to the structure of FIG. 4.

[0034] FIG. 7 shows an exemplary series of the fabrication steps for a semiconductor structure in accordance with the first embodiment of the invention.

[0035] FIG. 8 is a cross-sectional illustration of a semiconductor laser diode of a third embodiment.

[0036] FIG. 9 shows the light-current characteristics of the laser diode of the third embodiment.

[0037] FIG. 10 shows a series of the fabrication steps of a semiconductor laser diode in one experiment example of the third embodiment.

[0038] FIG. 11 is a cross-sectional illustration of a semiconductor laser diode of a fourth embodiment.

[0039] FIG. 12 shows the light-current characteristics of the laser diode of the fourth embodiment.

[0040] FIG. 13 shows a series of the fabrication steps of a semiconductor laser diode in one experiment example of the fourth embodiment.

[0041] FIG. 14 shows in plot form the boundary between the phase separation region and the region without phase separation at various growth temperatures.

[0042] FIG. 15 shows the content choice region of Ga content and Al content in InGaAlN to avoid phase separation at a growth temperature below approximately 1000° C.

[0043] FIG. 16 shows the content choice line of Ga content and Al content in InGaAlN to avoid phase separation at a growth temperature below approximately 1000° C. which, at the same time, creates a lattice constant of InGaAlN substantially equivalent to that of GaN.

[0044] FIGS. 17A and 17B show representations of bipolar and FET transistors constructed in accordance with the materials system of the present invention.

[0045] FIG. 18 shows an implementation of the present invention as a phototransistor.

[0046] FIG. 19 shows an implementation of the present invention as a photodiode.

[0047] FIG. 20 shows in cross-sectional view a semiconductor structure according to a fifth embodiment of the invention.

[0048] FIG. 21 shows an exemplary series of the fabrication steps for a semiconductor structure in accordance with a fifth embodiment of the invention.

[0049] FIG. 22 shows in cross-sectional view a semiconductor structure according to a sixth embodiment.

[0050] FIG. 23 shows an exemplary series of the fabrication steps for a semiconductor structure in accordance with the sixth embodiment of the invention.

[0051] FIG. 24 shows in plot form the boundary between the phase separation region and the region without phase separation at various growth temperatures.

[0052] FIG. 25 shows the content choice region of Ga content and As content in InGaNAs to avoid phase separation at a growth temperature below approximately 1000° C.

[0053] FIG. 26 shows the content choice line of Ga content and As content in InGaNAs to avoid phase separation at a growth temperature below approximately 1000° C. which, at the same time, creates a lattice constant of InGaNAs substantially equivalent to that of GaN.

[0054] FIGS. 27A and 27B show representations of bipolar and FET transistors constructed in accordance with the materials system of the present invention.

[0055] FIG. 28 shows an implementation of the present invention as a phototransistor.

[0056] FIG. 29 shows an implementation of the present invention as a photodiode.

[0057] FIG. 30 shows in cross-sectional view a semiconductor structure according to a seventh embodiment of the invention.

[0058] FIG. 31 shows an exemplary series of the fabrication steps for a semiconductor structure in accordance with a seventh embodiment of the invention.

[0059] FIG. 32 shows in cross-sectional view a semiconductor structure according to a eighth embodiment.

[0060] FIG. 33 shows an exemplary series of the fabrication steps for a semiconductor structure in accordance with the eighth embodiment of the invention.

[0061] FIG. 34 shows in plot form the boundary between the phase separation region and the region without phase separation at various growth temperatures.

[0062] FIG. 35 shows the content choice region of In content and As content in AlInNAs to avoid phase separation at a growth temperature below approximately 1000° C.

[0063] FIGS. 36A and 36B show representations of bipolar and FET transistors constructed in accordance with the materials system of the present invention.

[0064] FIG. 37 shows an implementation of the present invention as a phototransistor.

[0065] FIG. 38 shows an implementation of the present invention as a photodiode.

[0066] In general, the present invention utilizes group III-nitride quaternary and pentenary material systems and methods which may generally be described by the formula In_1−x−yGa_xAl_yN_1−zAs_z, where the mole fractions x, y and z are not all zero. It will be appreciated that, where one of x, y or z is zero, a quaternary system results. However, if none of x, y or z are zero, and the sum of x and y does not total one, a pentenary material system results.

[0067] In the first through fourth embodiments of the invention, a GaAlNAs material system is formed by setting the mole fractions of gallium and aluminum (or the x and y values, above) to equal one—although the particular mole fractions or physical structures are different among the various embodiments. The fifth and sixth embodiments comprise an InGaNAs material system, while the seventh and eighth embodiments utilize an AlInNAs material system. As with the earlier embodiments, the particular mole fractions or structural features vary but comply with the general formulation described above. It will also be appreciated that pentenary materials systems exist which follow the general formulation of the present invention and for which x, y and z are each non-zero and x and y do not sum to one. Each of the embodiments is described in greater detail hereinafter.

[0068] Referring first to FIG. 2, shown therein in cross-sectional view is a semiconductor structure according to a first embodiment of the invention. For purposes of illustration, the semicoductor structure shown in many of the Figures will be a laser diode, although the present invention has appliction to a number of device types. With particular reference to FIG. 2, an n-type GaN substrate 100 is provided and an n-type GaN first cladding layer 105 (typically 0.5 μm thick) is formed thereon. Thereafter, a second cladding layer 110, typically of an n-type Ga_0.75Al_0.25N_0.979As_0.021material which may be on the order of 1.5 μm thick, is formed thereon, followed by a multiple quantum well active layer 115 which in an exemplary arrangement may comprise three quantum well layers of Ga_0.95Al_0.05N_0.996As_0.004material on the order of 35 Å thick together with four barrier layers of Ga_0.85Al_0.15N_0.987As_0.013material on the order of 35 Å A thick, arranged as three pairs. Next, a third cladding layer 120 of a p-type Ga_0.75Al_0.25N_0.979As_0.021(typically on the order of 1.5 μm thick) is formed, followed by a p-type GaN fifth cladding layer 125 (on the order of 0.5 μm thick). A SiO₂layer 130 having one stripe like window region 135 (3.0 μm width) is formed on the p-type GaN fourth cladding layer 125. A first electrode 140 is formed on the n-type GaN substrate 100, while a second electrode 145 is formed on the SiO₂layer 130 and the window region 135.

[0069] In order to emit violet light with a wavelength range of 380 nm from the active layer 115, the Al content, x, and the As content, y, of all the layers generally satisfies the condition 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy nearly equals to a constant value, which may be on the order of 3.18 for at least the first embodiment. To avoid defects due to phase separation, the lattice constants of the various constituent layers are matched to each other by setting the Al content, x, and the As content, y, in each of the layers to meet the condition 3.18(1−x)(1−y)+3.99(1−x)y+3.11 x(1−y)+4xy nearly equals to a constant value, again, for the first embodiment on the order of 3.18±0.05 so that the equivalent lattice constants of each layers become nearly equal to the lattice constant of GaN.

[0070] By proper selection of materials, the band gap energy of the n-type second cladding layer 110 and the p-type third cladding layer 120 are larger than that of the 3 pairs of multiple quantum well active layers 115. This confines the injected carriers from the n-type second cladding layer 110 and p-type third cladding layer 120 within the active layer 115, where the carriers recombine to lead to the emission of ultraviolet light. In addition, the refractive index of the n-type second cladding layer 110 and the p-type third cladding layer 120 are smaller than that of the multiple quantum well active layer 115, which confines the optical field in the transverse direction.

[0071] Because the injected current from the electrode 145 is confined to flow through the window region 135, the region in the active layer 115 under the widow region 135 is activated strongly. This causes the local modal gain in the active layer under the window region 6A to be higher than the local modal gain in the active layer under the SiO₂layer. Therefore, a gain guided waveguide, leading to a lasing oscillation, is formed in the structure of the first embodiment.

[0072] FIG. 3 shows a plot of the emitted light versus drive current for a laser diode constructed in accordance with the first embodiment. The laser diode is driven with a pulsed current with a duty cycle of 1%. The threshold current density is found to be 6.0 kA/cm².

[0073] FIGS. 4A-4D show, in sequence, a summary of the fabrication steps necessary to construct an exemplary laser diode according to the first embodiment. Since the structure which results from FIGS. 4A-4D will resemble that shown in FIG. 2, like reference numerals will be used for elements whenever possible. With reference first to FIG. 4A, an n-type GaN substrate 100 is provided, on which is grown an n-type GaN first cladding layer 105. The first cladding layer 105 is typically on the order of 0.5 μm thick. Thereafter, an n-type Ga_0.75Al_0.25N_0.979As_0.021second cladding layer 110 is formed, typically on the order of 1.5 μm thick.

[0074] Next, a multiple quantum well active layer 115 is formed by creating three quantum wells comprised of three layers of Ga_0.95Al_0.05N_0.996As_0.004material each on the order of 35 Å thick, together with four barrier layers of Ga_0.85Al_0.15N_0.987As_0.013material on the order of 35 Å thick. A third cladding layer 120 of p-type Ga_0.75Al_0.25N_0.979As_0.021material, on the order of 1.5 μm thick, is then formed, after which is formed a fourth cladding layer 125 of a p-type GaN on the order of 0.5 μm thick. Each of the layers is typically formed by either the Metal Organic Chemical Vapor Deposition (MOCVD) method or the Molecular Beam Epitaxy (MBE) method.

[0075] Then, as shown in FIG. 4B, a silicon dioxide (SiO₂) layer 130 is formed on the p-type GaN fourth cladding layer 125, for example by the Chemical Vapor Deposition (CVD) method. Using photolithography and etching or any other suitable method, a window region 135 is formed as shown in FIG. 4C. The window region 135 may be stripe-like in at least some embodiments. Finally, as shown in FIG. 4D, a first electrode 140 and a second electrode 145 are formed on the n-type GaN substrate 100 and on the SiO₂layer 130, respectively, by evaporation or any other suitable process.

[0076] Referring next to FIG. 5, a second embodiment of a semiconductor structure in accordance with the present invention may be better appreciated. As with the first embodiment, an exemplary application of the second embodiment is the creation of a laser diode. The structure of the second embodiment permits a waveguide with a real refractive index guide to be built into the structure. This provides a low threshold current laser diode which can operate with a fundamental transverse mode.

[0077] Continuing with reference to FIG. 5, for ease of reference, like elements will be indicated with like reference numerals. On an n-type GaN substrate 100, a first cladding layer 105 is formed of an n-type GaN on the order of 0.5 μm thick. Successively, an n-type second cladding layer 110 is formed of Ga_0.75Al_0.25N_0.979As_0.021material on the order of 1.5 μm thick. Thereafter, a multiple quantum well active layer 115 is formed comprising three well layers of Ga_0.95Al_0.05N_0.996As_0.004material on the order of 35 Å thick together with four barrier layers of Ga_0.85Al_0.15N_0.987As_0.013material, also on the order of 35 Å thick. Next, a third, p-type cladding layer 120 formed of Ga_0.75Al_0.25N_0.979As_0.021material on the order of 1.5 μm thick is formed. Thereafter, a p-type GaN fourth cladding layer 125 on the order of 0.5 nm thick is formed over the ridge structure 500 of the third cladding layer 120. The third and fourth cladding layers are then partially removed to create a ridge structure 500. A silicon dioxide (SiO₂) layer 130 is then formed over the fourth cladding layer 125 as well as the remaining exposed portion of the third cladding layer 120. A window region 135, which may be stripe-like on the order of 2.0 μm width, is formed through the SiO₂layer above the fourth and third cladding layers 125 and 120, respectively. As with the first embodiment, a first electrode 140 is formed on the n-type GaN substrate 100 and a second electrode 145 is formed on the SiO₂layer 130 and the window region 135.

[0078] As with the first embodiment, in order to emit ultra violet light with a wavelength in the range of 350 nm from the active layer 115, the Al content, x, and the As content, y, of the well layer is set to be 0.05, 0.004, respectively. Likewise, in order to match the lattice constants of each of the constituent layers to avoid defects due to phase separation, the Al content, x, and the As content, y, of all the layers satisfies the condition 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy nearly equals to a constant value, which may for example be 3.18±0.05. Likewise, the band gap energy of the cladding layers is maintained larger than the band gap energy for the active layer, allowing the emission of ultraviolet light. Similarly the refractive index of the materials is as discussed in connection with the first embodiment, permitting the optical field to be confined in the transverse direction.

[0079] Similar to the operation of the first embodiment, the region of the active layer 115 under the window region 135 is activated strongly because of the constraints on the injected current by the SiO₂layer. The result, again, is that the local modal gain in the active layer under the window region 135 is higher than the local modal gain in the active layer under the SiO₂layer 130. This, combined with the relatively higher effective refractive index in the transverse direction inside the ridge stripe region compared to that outside the ridge stripe region, provides an effective refractive index step. This results in a structure which has, built in, a waveguide formed by a real refractive index guide. Therefore, the design of the second embodiment provides a low threshold current laser diode which can operate with a fundamental transverse mode.

[0080] FIG. 6 shows in graph form the emitted light versus drive current characteristics of a laser diode in accordance with the second embodiment. The laser diode is driven with a cw current. The threshold current is found to be 38.5 mA.

[0081] Referring next to FIGS. 7A-7E, a summary of the key fabrication steps is shown for an exemplary device of a semiconductor laser diode in accordance with the second embodiment.

[0082] Referring first to FIGS. 7A and 7B, the formation of the first and second cladding layers 105 and 110 on an n-type GaN substrate 100, together with the three-pair multiple quantum well active layer 115 are the same as for the first embodiment. Thereafter, the third and fourth cladding layers 120 and 125 are formed and then partially removed—typically by etching—to create a ridge structure 500. As before, in an exemplary embodiment the various layers are formed successively by either the MOCVD or the MBE method.

[0083] Then, as shown in FIGS. 7C-7E, a silicon dioxide layer 130 is formed over the fifth and third cladding layers 125 and 120, respectively, typically by the CVD method, after which a window region 135 is formed as with the first embodiment. Electrodes 140 and 145 are then evaporated or otherwise bonded to the structure.

[0084] Referring next to FIG. 8, a third embodiment of the present invention may be better appreciated. The third embodiment provides slightly different mole fractions to permit the emission of blue light, but is otherwise similar to the first embodiment. Thus, an n-type GaN substrate 100 continues to be used, together with an n-type GaN first cladding layer 105. However, the second cladding layer 810 is typically of n-type Ga_0.58Al_0.42N_0.983As_0.017material on the order of 1.5 μm thick, while the three-pair quantum well active layer 815 typically includes three barrier layers of Ga_0.78Al_0.22N_0.999As_0.001material together with four barrier layers of Ga_0.73Al_0.27N_0.995As_0.005material. The third cladding layer 820 is typically a p-type Ga_0.58Al_0.42N_0.983As_0.017material, while the fourth cladding layer 125 is, like the first embodiment, a p-type GaN material. The thicknesses of each layer are substantially the same as for the first embodiment. A SiO₂layer 130, window region 135, and first and second electrodes 140 and 145 complete the structure.

[0085] In order to emit ultra violet light in a wavelength range of 310 from the active layer 24, the Al content and the As content within the well layer 815 is set to be 0.22 and 0.001, respectively. In order to match the lattice constants of the constituent layers to avoid generation of phase separation-induced defects, the Al content, x, and the As content, y, of each of the layers is set to satisfy the condition 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy nearly equals to a constant value. For exemplary purposes of the third embodiment, the constant value may be on the order of 3.17±0.05.

[0086] Although the third embodiment emits ultra violet light whereas the first embodiment emits violet light, the band gap energies of cladding layers continue to be set higher than the band gap energy of the three pairs of the multiple quantum well active layer 815. As before, this permits carrier confinement and recombination in the active layer 815. Also as with the first embodiment, the refractive index of the second and third cladding layers is, by design, smaller than that of the active layer, causing the optical field to be confined in the transverse direction. Likewise, the strong current injection under the window region 135 yields comparatively higher local modal gain in the active layer relative to the portion of the active layer under the SiO₂layer 130, again resulting in a guided waveguide which leads to a lasing oscillation.

[0087] FIG. 9 shows a plot of the emitted light versus drive current characteristics of the laser diode in accordance with the third embodiment. The laser diode is driven with a pulsed current with a duty cycle of 1%. The threshold current density is found to be 5.7 kA/cm².

[0088] FIGS. 10A-10D show a series of the fabrication steps of a semiconductor laser diode in one example of the third embodiment. It will be appreciated that the fabrication steps are the same as those described in connection with FIGS. 4A-4D, and therefore are not further described.

[0089] Referring next to FIG. 11, a fourth embodiment of the present invention may be better appreciated. The fourth embodiment, like the third embodiment, is designed to emit ultra violet light and therefore has the same Al and As content as the third embodiment. However, like the second embodiment, the fourth embodiment is configured to provide a ridge structure to serve as a waveguide. Because the Al and As content is similar to that of FIG. 8, similar elements will be described with the reference numerals used in FIG. 8.

[0090] Continuing to refer to FIG. 11, the structure of the fourth embodiment can be seen to have a GaN substrate 100 on which is a formed a first cladding layer 105 followed by a second cladding layer 810. A three-pair multiple quantum well active layer 815 is formed thereabove, followed by a third cladding layer 820. A fourth cladding layer 125, silicon dioxide layer 130, windows 135 and electrodes 140 and 145 are all formed as before. The materials, including the Al content and As content, remain as shown for FIG. 8, or 0.22 and 0.001, respectively. Likewise the Al content, x, and the As content, y, of the layers is set to satisfy the condition 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy nearly equals to a constant value on the order of 3.17, as with the third embodiment. The band gap energy, refractive index and modal gain for current injection are all substantially as discussed in connection with the third embodiment and are not further discussed.

[0091] FIG. 12 plots drive current versus emitted light of a laser diode constructed in accordance with the fourth embodiment. The laser diode is driven with a cw current. The threshold current is found to be 33.0 mA.

[0092] FIG. 13 shows a summary of the fabrication steps of a semiconductor laser diode in accordance with the fourth embodiment. The steps are essentially identical to those discussed in connection with FIGS. 7A-7E and are not further discussed.

[0093] Referring next to FIG. 14, the selection of the Al content, x, and the As content, y, and the relationship therebetween for the constituent GaAlNAs layers may be better understood. In particular, the relative Al and As contents are required to satisfy, approximately, the relationship 0<x<1, 0<y<1, 0.26x+37y <=1.

[0094] In GaAlNAs material system, the lattice constant of GaN, AlN, GaAs and AlAs are different from each other. For example, the lattice mismatch between GaN and GaAs, between AlN and AlAs, and between GaN and AlN, are 25.4%, 28.6%, and 2.3%, respectively. Therefore, an internal strain energy is accumulated in GaAlNAs layer, even if the equivalent lattice constant is the same as that of the substrate due to the fact that equivalent bond length are different from each other between GaN, AlN, GaAs and AlAs. FIG. 14 shows the boundary of phase separation region plotted against various growth temperatures. The lines in FIG. 14 show the boundary between the compositionally unstable (phase separation) region and stable region with respect to various temperatures. In those cases where phase separation occurs, Ga atoms, Al atoms, N atoms, and As atoms in the GaAlNAs layers are not distributed uniformly according to the atomic content in each constituent layer. Stated differently, the band gap energy distribution of the phase separated layer also becomes inhomogeneous in the layer. The region of the relatively small band gap region in the phase separated layer acts as an optical absorption center, or causes an optical scattering for the waveguided light. This means that the phase separation phenomena should be avoided to obtain a high efficiency light emitting device.

[0095] Referring still to FIG. 14, it can be seen that the phase separation region varies with temperature. The lines in FIG. 14 show the boundary between the compositionally unstable region—that is, resulting in phase separation—and the stable region with respect to various temperatures. The region surrounded with the GaAs—GaN line, AlAs—AlN line and the boundary line shows the phase separation content region. It has been discovered that the ternary alloys AlNAs and GaNAs have a large phase separation region due to the large lattice mismatch between AlN and AlAs, and between GaN and GaAs. On the other hand, it has been found that the ternary alloys GaAlN and GaAlAs have no phase separation region at crystal growth temperatures around 1000° C., due to the small lattice mismatch between AlN and GaN, and between AlAs and GaAs.

[0096] It has therefore been discovered that an GaAlNAs material system can be provided in which the usual crystal growth temperature is in the approximate range of around 600° C. to around 1000° C. Likewise, it has been discovered that phase separation of the Al content and As content of GaAlNAs does not occur in significant amounts at processing temperatures between on the order of 600° C. and on the order of 1000° C. Finally, by combining the two, the content choice region of Al content and As content in GaAlNAs to avoid phase separation at a crystal growth temperature below around 1000° C. is found to be the shadow region in FIG. 15, with the line separating the two regions being approximately defined by the relationship 0.26x+37y=1.

[0097] Therefore, for each of the four structural embodiments disclosed hereinabove, the phase separation phenomena can be avoided in an GaAlNAs material system by operating at a crystal growth temperature between on the order of 600° C. and around 1000° C., when the Ga content, x, and the As content, y, of the all constituent layers of the laser diodes are made to satisfy approximately the relationship of 0<x<1, 0<y<1, 0.26x+37y<=1. The result is the substantially uniform distribution of Ga atoms, Al atoms, N atoms and As atoms in each constituent layer according to the atomic mole fraction.

[0098] FIG. 16 shows the content choice line of Al content, x, and As content, y, in an GaAlNAs system to avoid the phase separation phenomenon at growth temperatures below around 1000° C. and still ensure a reasonable lattice match to GaN. The line in FIG. 16 shows the exemplary line of 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy=3.18. Therefore, by ensuring that the Al content and As content of the constituent GaAlNAs layers of a laser diode formed on a GaN substrate have a relationship of 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy nearly equals to 3.18, 0<x<1, 0<y<1, and 0.26x+37y<=1, a laser diode on a GaN substrate with low defect density and no or very little phase separation can be obtained.

[0099] In addition, other semiconductor structures can be fabricated with the materials system discussed above. Group-III nitride materials, especially GaN and AlN, are promising for use in electronic devices which can operate under high-power and high-temperature conditions—for example, microwave power transistors. This results, in part, from their wide band gap (3.5 eV for GaN and 6.2 eV for AlN), high breakdown electronic field, and high saturation velocity. By comparison, the band gaps of AlAs, GaAs, and Si are 2.16 eV, 1.42 eV, and 1.12 eV, respectively. This has led to significant research in the use of AlGaN/GaN materials for such field effect transistors (FETs). However, as noted previously hereinabove, the different lattice constants of AlGaN and GaN cause the generate of significant defects, limiting the mobility of electrons in the resultant structure and the utility of such materials systems for FET use.

[0100] The present invention substantially overcomes these limitations, in that the GaAlNAs/GaN material of the present invention has a lattice constant equal to GaN. As discussed hereinabove, a quaternary materials system of Ga_1−xAl_xN_1−yAs_y, where the Al content (x) and As content (y) satisfy the relationships 0<x<1, 0<y<1, 0.26x+37Y<=1, 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy equals to 3.18, not only has a band gap greater than 3.5 eV, but also has a lattice constant substantially equal to GaN. This permits fabrication of semiconductor structures such as FETs which have substantially uniform atomic content distribution in the various layers. Therefore, by using a GaAlNAs/GaN material system in accordance with the present invention, whose Al mole fraction, x and As mole fraction, y satisfy the above relationships, high-power and high-temperature transistors with low defect density can be realized.

[0101] Referring to FIG. 17A, there is shown therein an exemplary embodiment of a heterojunction field effect transistor(HFET) using GaAlNAs/GaN material in accordance with the present invention. On a GaN substrate 520, a 0.5 μm i-GaN layer 525 is formed, followed by a thin, approximately 10 nm GaN conducting channel layer 530 and a 10 nm GaAlNAs layer 535. Source and drain electrodes 540A-B, and gate electrode 545 are formed in a conventional manner. In the structure, the Al content, x, and As content, y, of the GaAlNAs layer are set to be 0.25 and 0.021, respectively. In this case, the value of x and y satisfy the relationship of 0<x<1, 0<y<1, 0.26x+37Y<=1, 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy=3.18. This results in an GaAlNAs layer substantially without phase separation and with a lattice constant equal to GaN, In turn, this permits high electron velocities to be achieved because the two dimensional electron gas formed in the heterointerface of GaAlNAs and GaN layer is not scattered by any fluctuation in atomic content of the GaAlNAs layer (such as would be caused in the presence of defects). Moreover, the band gap of the GaAlNAs is larger than 4 eV so that reliable high-temperature operation can be achieved by using the structure shown in FIG. 17A.

[0102] Similarly, FIG. 17B shows an embodiment of a heterojunction bipolar transistor(HBT) in accordance with the present invention. On the GaN substrate 550, a 400 nm thick n-type GaAlNAs collector layer 555 is formed, followed by a 50 nm thick p-type GaN base layer 560, and a 300 nm thick n-type GaAlNAs emitter layer 565. Base electrode 570, collector electrode 575 and emitter electrode 580 are formed conventionally. As with FIG. 17A, for the exemplary embodiment of FIG. 17B the Al and As contents x and y of the GaAlNAs layer are set to be 0.25, 0.021, respectively, and x and y are required to satisfy the same relationships as discussed above. As with FIG. 17A, an GaAlNAs layer without significant phase separation and with a lattice constant equal to GaN is realized, resulting in a very high quality heterojunction of GaAlNAs/GaN. In addition, the band gap of the GaAlNAs emitter layer (4 eV) is larger than that of GaN base layer (3.5 eV) so that holes generated in the p-type base layer are well confined in that base layer. This results because of the larger valence band discontinuity between GaN and GaAlNAs than would occur in a GaN homojunction bipolar transistor. This has the benefit of obtaining a large current amplification of collector current relative to base current. Moreover, as mentioned above, the bandgap of the GaAlNAs and the GaN layer is large so that the transistor can be used reliably in high-temperature applications.

[0103] Referring next to FIG. 18, there is shown therein an implementation of the present invention as a phototransistor. In this regard, GaN and AlGaN are attractive materials for photo detectors in ultraviolet(UV) range, since both GaN and AlN have a wide band gap (3.5 eV for GaN which corresponds to the light wavelength of 200 nm, 6.2 eV for AlN which corresponds to the light wavelength of 350 nm). Due to the direct band gap and the availability of AlGaN in the entire AlN alloy composition range, AlGaN/GaN based UV photo detectors have the advantage of high quantum efficiency, as well as tunability of high cut-off wavelength. However, the lattice constant of AlGaN is sufficiently different from GaN that defects tend to be formed, which leads increased leakage current. Ga_1−xAl_xN_1−yAs_y, where the Al content (x) and As content (y) satisfy the relationships 0<x<1, 0<y<1, 0.26x+37y<=1, offers not only a band gap larger than 2.8 eV, but also can be fabricated in layers with equal atomic content distribution, so that GaAlNAs material also can be used for UV photo detector applications. Moreover, the Ga_1−xAl_xN_1−yAs_yquaternary material whose Al content, x and As content, y satisfy the relationship of 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy=3.18 has a lattice constant equal to GaN and a bandgap larger than 3.5 eV. Therefore, by using GaAlNAs/GaN material whose Al content, x and As content, y satisfy the above relationship, UV photo detectors with low defect density can be realized. In the event that detection of other frequencies is desired, for example blue light, only slight modification is required.

[0104] As shown in FIG. 18, the semiconductor device of the present invention can be implemented as a heterojunction phototransistor (HPT) using GaAlNAs/GaN material. On the GaN substrate 700, a GaAlNAs collector layer 705 is formed on the order of 500 nm thick n-type, followed by the formation of a 200 nm thick p-type GaN base layer 710. Thereafter, a GaAlNAs emitter layer 715 on the order of 500 nm thick is formed. On the emitter layer, a ring shaped electrode 720 is formed to permit light to impinge on the base layer.

[0105] In an exemplary structure, the Al content, x and As content, y of the GaAlNAs layer are set to be 0.25 and 0.021, respectively. In this case, the value of x and y satisfy the relationship of 0<x<1, 0<y<1, 0.26x+37Y<=1, 3.18(1−x)(1−y)+3.99(1−x)y+3.11x(1−y)+4xy=3.18, so that an GaAlNAs layer can be formed with substantially avoids phase separation while having a lattice constant equal to GaN, thus permitting the formation of a high quality heterojunction of GaAlNAs/GaN. The band gap of the GaAlNAs emitter layer (4 eV which corresponds to the light wavelength of 307 nm) is larger than that of GaN base layer (3.5 eV which corresponds to the light wavelength of 350 nm). The light impinges on the emitter side. For the embodiment shown, impinging light in the wavelength range between 307 nm and 350 nm is transparent to the emitter layer, so that the light in that range is absorbed in the GaN base layer and generates electron and hole pairs. The holes generated by the optical absorption in the p-type base layer are well confined in the base layer because the valence band discontinuity between GaN and GaAlNAs is larger than that for a conventional GaN homojunction photo transistor. This leads to the induction of a larger emitter current, which offers better electronic neutralization in the base region than in the case of the homojunction photo transistor. Therefore, UV photo detectors with high quantum efficiency and high sensitivity, and the resultant high conversion efficiency from input light to collector current, are obtained. In the event that other frequencies are to be detected, the GaN base layer may be replaced with, for example for blue light, InGaN.

[0106] In addition to the phototransistor of FIG. 18, it is also possible to implement a photodiode in accordance with the present invention. Referring to FIG. 19, an n-type substrate 900 is provided, on which is formed an n-type layer 910 of Ga_1−xAl_xN_1−yAs_yquaternary material or equivalent, which conforms to the relationships discussed above in connection with FIG. 18. An active layer 915 is thereafter formed, and above that is formed a layer 920 of p-type Ga_1−xAl_xN_1−yAs_yquaternary material. Then, a p-type second cladding layer 925 is formed above the layer 920, and a window 930 is formed therein to expose a portion of the layer 920. The window 930 provides a port by which light can impinge on the layer 920, causing the creation of holes. A pair of electrodes 935 and 940 may be fabricated in a conventional manner, with the electrode 935 typically being a ring electrode around the window 930. It will be appreciated that the band gap of the second cladding layer 925 is preferably larger than the band gap of the layer 920, which is in turn preferably larger than the band gap of the active layer 915; such an approach provides sensitivity to the widest range of wavelength of light. If the event a narrower range is desired, a material with a lower band gap than the layer 920 may be used for the layer 925. In addition, it is also not necessary to include the layer 925 in all embodiments, as the layers 910, 915 and 920 provide, in at least some instances, an adequate photosensitive pn-junction.

[0107] Referring to FIG. 20, shown therein in cross-sectional view is a semiconductor structure according to a fifth embodiment of the invention. For purposes of illustration, the semiconductor structure shown in many of the Figures will be a laser diode, although the present invention has application to a number of device types. With particular reference to FIG. 20, an n-type GaN substrate 200 is provided and an n-type GaN first cladding layer 205 (typically 0.5 μm thick) is formed thereon. Thereafter, a second cladding layer 210, typically of an n-type In_0.033Ga_0.967N_0.99As_0.01material which may be on the order of 1.5 μm thick, is formed thereon, followed by a multiple quantum well active layer 215 which in an exemplary arrangement may comprise three quantum well layers of In_0.001Ga_0.999N_0.976As_0.024material on the order of 35 Å thick together with four barrier layers of /In_0.022Ga_0.978N_0.985As_0.015material on the order of 35 Å thick, arranged as three pairs. Next, a third cladding layer 220 of a p-type In_0.033Ga_0.967N_0.99As_0.01(typically on the order of 1.5 μm thick) is formed, followed by a p-type GaN fifth cladding layer 225 (on the order of 0.5 μm thick). A SiO₂layer 230 having one stripe like window region 235 (3.0 μm width) is formed on the p-type GaN fourth cladding layer 225. A first electrode 240 is formed on the n-type GaN substrate 200, while a second electrode 245 is formed on the SiO₂layer 230 and the window region 235.

[0108] In order to emit blue light with a wavelength range of 420 nm from the active layer 215, the Ga content, x, and the As content, y, of all the layers generally satisfies the condition 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy nearly equals to a constant value, which may be on the order of 3.18 for at least the fifth embodiment. To avoid defects due to phase separation, the lattice constants of the various constituent layers are matched to each other by setting the Ga content, x, and the As content, y, in each of the layers to meet the condition 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy nearly equals to a constant value, again, for the fifth embodiment on the order of order of 3.18±0.05 so that the equivalent lattice constants of each layers become nearly equal to the lattice constant of GaN.

[0109] By proper selection of materials, the band gap energy of the n-type second cladding layer 210 and the p-type third cladding layer 220 are larger than that of the three pairs of multiple quantum well active layers 215. This confines the injected carriers from the n-type second cladding layer 210 and p-type third cladding layer 220 within the active layer 215, where the carriers recombine to lead to the emission of blue light. In addition, the refractive index of the n-type second cladding layer 210 and the p-type third cladding layer 220 are smaller than that of the multiple quantum well active layer 215, which confines the optical field in the transverse direction.

[0110] Because the injected current from the electrode 245 is confined to flow through the window region 235, the region in the active layer 215 under the widow region 235 is activated strongly. This causes the local modal gain in the active layer under the window region to be higher than the local modal gain in the active layer under the SiO₂layer. Therefore, a gain guided waveguide is formed in the structure of the fifth embodiment, leading to a lasing oscillation.

[0111] FIGS. 21A-21D show, in sequence, a summary of the fabrication steps necessary to construct an exemplary laser diode according to the fifth embodiment. Since the structure which results from FIGS. 21A-21D will resemble that shown in FIG. 20, like reference numerals will be used for elements whenever possible. With reference first to FIG. 21A, an n-type GaN substrate 200 is provided, on which is grown an n-type GaN first cladding layer 205. The first cladding layer 205 is typically on the order of 0.5 μm thick. Thereafter, an n-type In_0.033Ga_0.967N_0.99As_0.01second cladding layer 210 is formed, typically on the order of 1.5 μm thick.

[0112] Next, a multiple quantum well active layer 215 is formed by creating three quantum wells comprised of three layers of In_0.001Ga_0.999N_0.976As_0.024material each on the order of 35 Å thick, together with four barrier layers of In_0.022Ga_0.978N_0.985As_0.015material on the order of 35 Å thick. A third cladding layer 220 of p-type In_0.033Ga_0.967N_0.99As_0.01material, on the order of 1.5 μm thick, is then formed, after which is formed a fourth cladding layer 225 of a p-type GaN on the order of 0.5 μm thick. Each of the layers is typically formed by either the Metal Organic Chemical Vapor Deposition (MOCVD) method or the Molecular Beam Epitaxy (MBE) method.

[0113] Then, as shown in FIG. 21B, a silicon dioxide (SiO₂) layer 230 is formed on the p-type GaN fourth cladding layer 225, for example by the Chemical Vapor Deposition (CVD) method. Using photolithography and etching or any other suitable method, a window region 235 is formed as shown in FIG. 21C. The window region 235 may be stripe-like in at least some embodiments. Finally, as shown in FIG. 21D, a first electrode 240 and a second electrode 245 are formed on the n-type GaN substrate 200 and on the SiO₂layer 230, respectively, by evaporation or any other suitable process.

[0114] Referring next to FIG. 22, a sixth embodiment of a semiconductor structure in accordance with the present invention may be better appreciated. As with the fifth embodiment, an exemplary application of the sixth embodiment is the creation of a laser diode. The structure of the sixth embodiment permits a waveguide mechanism to be built into the structure with a real refractive index guide. This provides a low threshold current laser diode which can operate with a fundamental transverse mode.

[0115] Continuing with reference to FIG. 22, for ease of reference, like elements will be indicated with like reference numerals. On an n-type GaN substrate 200, a first cladding layer 205 is formed of an n-type GaN on the order of 0.5 μm thick. Successively, an n-type second cladding layer 210 is formed of In_0.033Ga_0.967N_0.99As_0.01material on the order of 1.5 μm thick. Thereafter, a multiple quantum well active layer 215 is formed comprising three well layers of In_0.001Ga_0.999No_0.976As_0.024material on the order of 35 Å thick together with four barrier layers of In_0.022Ga_0.978N_0.985As_0.015material, also on the order of 35 Å thick. Next, a third, p-type cladding layer 220 formed of In_0.033Ga_0.967N_0.99As_0.01material on the order of 1.5 μm thick is formed. Thereafter, a p-type GaN fourth cladding layer 225 on the order of 0.5 μm thick is formed over the ridge structure 1500 of the third cladding layer 220. The third and fourth cladding layers are then partially removed to create a ridge structure 1500. A silicon dioxide (SiO₂) layer 230 is then formed over the fourth cladding layer 225 as well as the remaining exposed portion of the third cladding layer 220. A window region 235, which may be stripe-like on the order of 2.0 μm width, is formed through the SiO₂layer above the fourth and third cladding layers 225 and 220, respectively. As with the fifth embodiment, a first electrode 240 is formed on the n-type GaN substrate 200 and a second electrode 245 is formed on the SiO₂layer 230 and the window region 235.

[0116] As with the fifth embodiment, in order to emit blue light with a wavelength in the range of 420 nm from the active layer 215, the Ga content, x, and the As content, y, of the well layer is set to be 0.999, 0.024, respectively. Likewise, in order to match the lattice constants of each of the constituent layers to avoid defects due to phase separation, the Ga content, x, and the As content, y, of all the layers satisfies the condition 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy nearly equals to a constant value, which may for example be 3.18±0.05. Likewise, the band gap energy of the cladding layers is maintained larger than the band gap energy for the active layer, allowing the emission of blue light. Similarly the refractive index of the materials is as discussed in connection with the fifth embodiment, permitting the optical field to be confined in the transverse direction.

[0117] Similar to the operation of the fifth embodiment, the region of the active layer 215 under the window region 235 is activated strongly because of the constraints on the injected current by the SiO₂layer. The result, again, is that the local modal gain in the active layer under the window region 235 is higher than the local modal gain in the active layer under the SiO₂layer 230. This, combined with the relatively higher effective refractive index in the transverse direction inside the ridge stripe region compared to that outside the ridge stripe region, provides an effective refractive index step. This results in a structure which has, built in, a waveguide formed by a real refractive index guide. Therefore, the design of the sixth embodiment provides a low threshold current laser diode which can operate with a fundamental transverse mode.

[0118] Referring next to FIGS. 23A-23E, a summary of the key fabrication steps is shown for an exemplary device of a semiconductor laser diode in accordance with the sixth embodiment.

[0119] Referring first to FIG. 23A and 23B, the formation of the first and second cladding layers 205 and 210 on an n-type GaN substrate 200, together with the three-pair multiple quantum well active layer 215 are the same as for the fifth embodiment. Thereafter, the third and fourth cladding layers 220 and 225 are formed and then partially removed—typically by etching—to create a ridge structure 1500. As before, in an exemplary embodiment the various layers are formed successively by either the MOCVD or the MBE method.

[0120] Then, as shown in FIG. 23C-23E, a silicon dioxide layer 230 is formed over the fifth and third cladding layers 225 and 220, respectively, typically by the CVD method, after which a window region 235 is formed as with the fifth embodiment. Electrodes 240 and 245 are then evaporated or otherwise bonded to the structure.

[0121] Referring next to FIG. 24, the selection of the Ga content, x, and the As content, y, and the relationship therebetween for the constituent InGaNAs layers may be better understood. In particular, the relative Ga and As contents are required to satisfy, approximately, the relationship 0<x<1, 0<y<1, x/0.2+y/0.9<=1, or 1.25x−8.33y>=1.

[0122] In an InGaNAs material system, the lattice constant of GaN, InN, GaAs and InAs are different from each other. For example, the lattice mismatch between GaN and GaAs, between InN and InAs, and between GaN and InN, are 25.4%, 17.3%, and 10.2%, respectively. Therefore, an internal strain energy is accumulated in InGaNAs layer, even if the equivalent lattice constant is the same as that of the substrate due to the fact that equivalent bond length are different from each other between GaN, InN, GaAs and InAs. FIG. 24 shows the boundary of phase separation region plotted against various growth temperatures. The lines in FIG. 24 show the boundary between the compositionally unstable (phase separation) region and stable region with respect to various temperatures. In those cases where phase separation occurs, Ga atoms, In atoms, N atoms, and As atoms in the InGaNAs layers are not distributed uniformly according to the atomic content in each constituent layer. Stated differently, the band gap energy distribution of the phase separated layer also becomes inhomogeneous in the layer. The region of the relatively small band gap region in the phase separated layer acts as an optical absorption center, or causes an optical scattering for the waveguided light. This means that the phase separation phenomena should be avoided to obtain a high efficiency light emitting device.

[0123] Referring still to FIG. 24, it can be seen that the phase separation region varies with temperature. The lines in FIG. 24 show the boundary between the compositionally unstable region—that is, resulting in phase separation—and the stable region with respect to various temperatures. The region surrounded with the InAs—InN line, GaAs—GaN line, and the boundary line shows the phase separation content region. It has been discovered that the ternary alloys InNAs, InGaN, and GaNAs have a large phase separation region due to the large lattice mismatch between InN and InAs, between InN and GaN, and between GaN and GaAs. On the other hand, it has been found that the ternary alloys InGaAs have no phase separation region at crystal growth temperatures around 1000° C., due to the small lattice mismatch between InAs and GaAs.

[0124] It has therefore been discovered that an InGaNAs material system can be provided in which the usual crystal growth temperature is in the approximate range of around 600° C. to around 1000° C. Likewise, it has been discovered that phase separation of the Ga content and As content of InGaNAs does not occur in significant amounts at processing temperatures between on the order of 600° C. and on the order of 1000° C. Finally, by combining the two, the content choice region of Ga content and As content in InGaNAs to avoid phase separation at a crystal growth temperature below around 1000° C. is found to be the shadow region in FIG. 25, with the line separating the two regions being approximately defined by the relationship x/0.2+y/0.9=1 and 1.25x−8.33y=1.

[0125] Therefore, for each of the two structural embodiments disclosed hereinabove, the phase separation phenomena can be avoided in an InGaNAs material system by operating at a crystal growth temperature between on the order of 600° C. and around 1000° C., when the Ga content, x, and the As content, y, of the all constituent layers of the laser diodes are made to satisfy approximately the relationship of 0<=x<=1, 0<=y<=1, x/0.2+y/0.9<=1 or 1.25x−8.33y>=1. The result is the substantially uniform distribution of Ga atoms, In atoms, N atoms and As atoms in each constituent layer according to the atomic mole fraction.

[0126] FIG. 26 shows the content choice line of Ga content, x, and As content, y, in an InGaNAs system to avoid the phase separation phenomenon at growth temperatures below around 1000° C. and still ensure a reasonable lattice match to GaN. The line in FIG. 26 shows the exemplary line of 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy=3.2. Therefore, by ensuring that the Ga content and As content of the constituent InGaNAs layers of a laser diode formed on a GaN substrate have a relationship of 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy nearly equals to 3.18, 0<=x<=1, 0<=y<=1, and x/0.2+y/0.9<=1 or 1.25x−8.33y>=1, a laser diode on a GaN substrate with low defect density and no or very little phase separation can be obtained.

[0127] In addition, other semiconductor structures can be fabricated with the materials system discussed above. Group-III nitride materials, especially GaN and AlN, are promising for use in electronic devices which can operate under high-power and high-temperature conditions—for example, microwave power transistors. This results, in part, from their wide band gap (3.5 eV for GaN and 6.2 eV for AlN), high breakdown electronic field, and high saturation velocity. By comparison, the band gaps of AlAs, GaAs, and Si are 2.16 eV, 1.42 eV, and 1.12 eV, respectively. This has led to significant research in the use of AlGaN/GaN materials for such field effect transistors (FETs). However, as noted previously hereinabove, the different lattice constants of AlGaN and GaN cause the generate of significant defects, limiting the mobility of electrons in the resultant structure and the utility of such materials systems for FET use.

[0128] The present invention substantially overcomes these limitations, in that the InGaNAs/GaN material of the present invention has a lattice constant equal to GaN. As discussed hereinabove, a quaternary materials system of In_1−xGa_xN_1−yAs_y, where the Ga content (x) and As content (y) satisfy the relationships 0<=x <=1, 0<=y<=1, 1.25x−8.33y>=1, 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy equals to 3.18, not only has a band gap greater than 2.8 eV, but also has a lattice constant substantially equal to GaN. This permits fabrication of semiconductor structures such as FETs which have substantially uniform atomic content distribution in the various layers. Therefore, by using a InGaNAs/GaN material system in accordance with the present invention, whose Ga mole fraction, x and As mole fraction, y satisfy the above relationships, high-power and hightemperature transistors with low defect density can be realized.

[0129] Referring to FIG. 27A, there is shown therein an exemplary embodiment of a heterojunction field effect transistor(HFET) using InGaNAs/GaN material in accordance with the present invention. On a GaN substrate 1520, a 0.5 μm i-InGaNAs layer 1525 is formed, followed by a thin, approximately 10 nm InGaNAs conducting channel layer 1530 and a 10 nm GaN layer 1535. Source and drain electrodes 1540A-B, and gate electrode 1545 are formed in a conventional manner.In the structure, the Ga content, x, and As content, y, of the InGaNAs layer are set to be 0.999 and 0.024, respectively. In this case, the value of x and y satisfy the relationship of 0<=x<=1, 0<=y<=1, 1.25x−8.33y>=1, 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy nearly equals to 3.18. This results in an InGaNAs layer substantially without phase separation and with a lattice constant equal to GaN, In turn, this permits high electron velocities to be achieved because the two dimensional electron gas formed in the heterointerface of InGaNAs and GaN layer is not scattered by any fluctuation in atomic content of the InGaNAs layer (such as would be caused in the presence of defects). Moreover, the band gap of the InGaNAs is larger than 2.8 eV so that reliable high temperature operation can be achieved by using the structure shown in FIG. 27A.

[0130] Similarly, FIG. 27B shows an embodiment of a heterojunction bipolar transistor(HBT) in accordance with the present invention. On the GaN substrate 1550, a 400 nm thick n-type GaN collector layer 1555 is formed, followed by a 50 nm thick p-type InGaNAs base layer 1560, and a 300 nm thick n-type GaN emitter layer 1565. Base electrode 1570, collector electrode 1575 and emitter electrode 1580 are formed conventionally. As with FIG. 27A, for the exemplary embodiment of FIG. 27B the Ga and As contents x and y of the InGaNAs layer are set to be 0.999, 0.024, respectively, and x and y are required to satisfy the same relationships as discussed above. As with FIG. 27A, an InGaNAs layer without significant phase separation and with a lattice constant equal to GaN is realized, resulting in a very high quality heterojunction of InGaNAs/GaN. In addition, the band gap of the GaN emitter layer (3.5 eV) is larger than that of InGaNAs base layer (2.9 eV) so that holes generated in the p-type base layer are well confined in that base layer. This results because of the larger valence band discontinuity between GaN and InGaNAs than would occur in a GaN homojunction bipolar transistor. This has the benefit of obtaining a large current amplification of collector current relative to base current. Moreover, as mentioned above, the bandgap of the InGaNAs and the GaN layer is large so that the transistor can be used reliably in high-temperature applications.

[0131] Referring next to FIG. 28, there is shown therein an implementation of the present invention as a phototransistor. In this regard, GaN and InGaN are attractive materials for photo detectors in visible light range, since both GaN and InN have a wide band gap (3.5 eV for GaN which corresponds to the light wavelength of 350 nm, 1.9 eV for InN which corresponds to the light wavelength of 650 nm). Due to the direct band gap and the availability of InGaN in the entire InN alloy composition range, InGaN/GaN based visible light photo detectors have the advantage of high quantum efficiency, as well as tunability of high cut-off wavelength. However, the lattice constant of InGaN is sufficiently different from GaN that defects tend to be formed, which leads increased leakage current. In_1−xGa_xN_1−yAs_y, where the Ga content (x) and As content (y) satisfy the relationships 0<=x<=1, 0<=y<=1, 1.25x−8.33y>=1, offers not only a band gap larger than 2.8 eV, but also can be fabricated in layers with equal atomic content distribution, so that InGaNAs material also can be used for visible light photo detector applications. Moreover, the In_1−xGa_xN_1−yAs_yquaternary material whose Ga content, x and As content, y satisfy the relationship of 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy nearly equals to 3.18 has a lattice constant nearly equal to GaN and a bandgap larger than 2.8 eV. Therefore, by using InGaNAs/GaN material whose Ga content, x and As content, y satisfy the above relationship, UV to blue light photo detectors with low defect density can be realized. In the event that detection of other frequencies is desired, only slight modification is required.

[0132] As shown in FIG. 28, the semiconductor device of the present invention can be implemented as a heterojunction phototransistor(HPT) using InGaNAs/GaN material. On the GaN substrate 1700, a GaN collector layer 1705 is formed on the order of 500 nm thick n-type, followed by the formation of a 200 nm thick p-type InGaNAs base layer 1710. Thereafter, a InGaNAs emitter layer 1715 on the order of 500 nm thick is formed. On the emitter layer, a ring shaped electrode 1720 is formed to permit light to impinge on the base layer.

[0133] In an exemplary structure, the Ga content, x and As content, y of the InGaNAs layer are set to be 0.999 and 0.024, respectively. In this case, the value of x and y satisfy the relationship of 0<=x<=1, 0<=y<=1, 1.25x−8.33y>=1, 3.54(1−x)(1−y)+4.28(1−x)y+3.18x(1−y)+4xy nearly equals to 3.18, so that an InGaNAs layer can be formed with substantially avoids phase separation while having a lattice constant equal to GaN, thus permitting the formation of a high quality heterojunction of InGaNAs/GaN. The band gap of the GaN emitter layer (3.5 eV which corresponds to the light wavelength of 350 nm) is larger than that of InGaNAs base layer (2.9 eV which corresponds to the light wavelength of 420 nm). The light impinges on the emitter side. For the embodiment shown, impinging light in the wavelength range between 350 nm and 420 nm is transparent to the emitter layer, so that the light in that range is absorbed in the InGaNAs base layer and generates electron and hole pairs. The holes generated by the optical absorption in the p-type base layer are well confined in the base layer because the valence band discontinuity between GaN and InGaNAs is larger than that for a conventional GaN homojunction photo transistor. This leads to the induction of a larger emitter current, which offers better electronic neutralization in the base region than in the case of the homojunction photo transistor. Therefore, blue light photo detectors with high quantum efficiency and high sensitivity, and the resultant high conversion efficiency from input light to collector current, are obtained.

[0134] In addition to the phototransistor of FIG. 28, it is also possible to implement a photodiode in accordance with the present invention. Referring to FIG. 29, an n-type substrate 1900 is provided, on which is formed an n-type layer 1910 of In_1−xGa_xN_1−yAs_yquaternary material or equivalent, which conforms to the relationships discussed above in connection with FIG. 28. An active layer 1915 is thereafter formed, and above that is formed a layer 1920 of p-type In_1−xGa_xN_1−yAs_yquaternary material. Then, a p-type second cladding layer 1925 is formed above the layer 1920, and a window 1930 is formed therein to expose a portion of the layer 1920. The window 1930 provides a port by which light can impinge on the layer 1920, causing the creation of holes. A pair of electrodes 1935 and 1940 may be fabricated in a conventional manner, with the electrode 1935 typically being a ring electrode around the window 1930. It will be appreciated that the band gap of the second cladding layer 1925 is preferably larger than the band gap of the layer 1920, which is in turn preferably larger than the band gap of the active layer 1915; such an approach provides sensitivity to the widest range of wavelength of light. If the event a narrower range is desired, a material with a lower band gap than the layer 1920 may be used for the layer 1925. In addition, it is also not necessary to include the layer 1925 in all embodiments, as the layers 1910, 1915 and 1920 provide, in at least some instances, an adequate photosensitive pn-junction.

[0135] Referring to FIG. 30, shown therein in cross-sectional view is a semiconductor structure according to a seventh embodiment of the invention. For purposes of illustration, the semiconductor structure shown in many of the Figures will be a laser diode, although the present invention has application to a number of device types. With particular reference to FIG. 30, an n-type GaN substrate 300 is provided and an n-type GaN first cladding layer 305 (typically 0.5 μm thick) is formed thereon. Thereafter, a second cladding layer 310, typically of an n-type Al_0.99In_0.01N_0.99As_0.01material which may be on the order of 1.5 μm thick, is formed thereon, followed by a multiple quantum well active layer 315 which in an exemplary arrangement may comprise three quantum well layers of Al_0.95In_0.05N_0.99As_0.01material on the order of 35 Å thick together with four barrier layers of Al_0.95In_0.05N_0.985As_0.015material on the order of 35 Å thick, arranged as three pairs. Next, a third cladding layer 320 of a p-type Al_0.99In_0.01N_0.99As_0.01(typically on the order of 1.5 μm thick) is formed, followed by a p-type GaN fifth cladding layer 325 (on the order of 0.5 μm thick). A SiO₂layer 330 having one stripe like window region 335 (3.0 μm width) is formed on the p-type GaN fourth cladding layer 325. A first electrode 340 is formed on the n-type GaN substrate 300, while a second electrode 345 is formed on the SiO₂layer 330 and the window region 335.

[0136] In order to emit ultra violet light with a wavelength range of 210 nm from the active layer 315, the In content, x, and the As content, y, of all the layers generally satisfies the condition 3.11(1−x)(1−y)+4(1−x)y+3.54x(1−y)+4.28xy nearly equals to a constant value, which may be on the order of 3.14 for at least the seventh embodiment. To avoid defects due to phase separation, the lattice constants of the various constituent layers are matched to each other by setting the In content, x, and the As content, y, in each of the layers to meet the condition 3.11(1−x)(1−y)+4(1−x)y+3.54x(1−y)+4.28xy nearly equals to a constant value, again, for the seventh embodiment on the order of 3.14±0.05 so that the equivalent lattice constants of each layers become nearly equal to the lattice constant of GaN.

[0137] By proper selection of materials, the band gap energy of the n-type second cladding layer 310 and the p-type third cladding layer 320 are larger than that of the 3 pairs of multiple quantum well active layers 315. This confines the injected carriers from the n-type second cladding layer 310 and p-type third cladding layer 320 within the active layer 315, where the carriers recombine to lead to the emission of ultra violet light. In addition, the refractive index of the n-type second cladding layer 310 and the p-type third cladding layer 320 are smaller than that of the multiple quantum well active layer 315, which confines the optical field in the transverse direction.

[0138] Because the injected current from the electrode 345 is confined to flow through the window region 335, the region in the active layer 315 under the widow region 335 is activated strongly. This causes the local modal gain in the active layer under the window region to be higher than the local modal gain in the active layer under the SiO₂layer. Therefore, a gain guided waveguide mechanism is formed by the structure of the first embodiment, leading to a lasing oscillation.

[0139] FIGS. 31A-31D show, in sequence, a summary of the fabrication steps necessary to construct an exemplary laser diode according to the seventh embodiment. Since the structure which results from FIGS. 31A-31D will resemble that shown in FIG. 30, like reference numerals will be used for elements whenever possible. With reference first to FIG. 31A, an n-type GaN substrate 300 is provided, on which is grown an n-type GaN first cladding layer 305. The first cladding layer 305 is typically on the order of 0.5 μm thick. Thereafter, an n-type Al_0.99In_0.01N_0.99As_0.01second cladding layer 310 is formed, typically on the order of 1.5 μm thick.

[0140] Next, a multiple quantum well active layer 315 is formed by creating three quantum wells comprised of three layers of Al_0.95In_0.05N_0.99As_0.01material each on the order of 35 Å thick, together with four barrier layers of Al_0.95In_0.05N_0.985AS_0.015material on the order of 35 Å thick. A third cladding layer 320 of p-type Al_0.99In_0.01N_0.99As_0.01material, on the order of 1.5 μm thick, is then formed, after which is formed a fourth cladding layer 325 of a p-type GaN on the order of 0.5 μm thick. Each of the layers is typically formed by either the Metal Organic Chemical Vapor Deposition (MOCVD) method or the Molecular Beam Epitaxy (MBE) method.

[0141] Then, as shown in FIG. 31B, a silicon dioxide (SiO₂) layer 330 is formed on the p-type GaN fourth cladding layer 325, for example by the Chemical Vapor Deposition (CVD) method. Using photolithography and etching or any other suitable method, a window region 335 is formed as shown in FIG. 31C. The window region 335 may be stripe-like in at least some embodiments. Finally, as shown in FIG. 31D, a first electrode 340 and a second electrode 345 are formed on the n-type GaN substrate 300 and on the SiO₂layer 330, respectively, by evaporation or any other suitable process.

[0142] Referring next to FIG. 32, a eighth embodiment of a semiconductor structure in accordance with the present invention may be better appreciated. As with the seventh embodiment, an exemplary application of the eighth embodiment is the creation of a laser diode. The structure of the eighth embodiment permits a waveguide mechanism to be built into the structure with a real refractive index guide. This provides a low threshold current laser diode which can operate with a fundamental transverse mode.

[0143] Continuing with reference to FIG. 32, for ease of reference, like elements will be indicated with like reference numerals. On an n-type GaN substrate 300, a first cladding layer 305 is formed of an n-type GaN on the order of 0.5 μm thick. Successively, an n-type second cladding layer 310 is formed of Al_0.99In_0.01N_0.99As_0.01material on the order of 1.5 μm thick. Thereafter, a multiple quantum well active layer 315 is formed comprising three well layers of Al_0.95In_0.05N_0.99As_0.01material on the order of 35 Å thick together with four barrier layers of Al_0.95In_0.05N_0.985As_0.015material, also on the order of 35 Å thick. Next, a third, p-type cladding layer 320 formed of Al_0.99In_0.01N_0.99As_0.01material on the order of 1.5 μm thick is formed. Thereafter, a p-type GaN fourth cladding layer 325 on the order of 0.5 μm thick is formed over the ridge structure 2500 of the third cladding layer 320. The third and fourth cladding layers are then partially removed to create a ridge structure 2500.

[0144] A silicon dioxide (SiO₂) layer 330 is then formed over the fourth cladding layer 325 as well as the remaining exposed portion of the third cladding layer 320. A window region 335, which may be stripe-like on the order of 2.0 μm width, is formed through the SiO₂layer above the fourth and third cladding layers 325 and 320, respectively. As with the seventh embodiment, a first electrode 340 is formed on the n-type GaN substrate 300 and a second electrode 345 is formed on the SiO₂layer 330 and the window region 335.

[0145] As with the seventh embodiment, in order to emit ultra violet light with a wavelength in the range of 210 nm from the active layer 315, the In content, x, and the As content, y, of the well layer is set to be 0.05, 0.01, respectively. Likewise, in order to match the lattice constants of each of the constituent layers to avoid defects due to phase separation, the In content, x, and the As content, y, of all the layers satisfies the condition 3.11(1−x)(1−y)+4(1−x)y+3.54x(1−y)+4.28xy nearly equals to a constant value, which may for example be 3.14±0.05. Likewise, the band gap energy of the cladding layers is maintained larger than the band gap energy for the active layer, allowing the emission of blue light. Similarly the refractive index of the materials is as discussed in connection with the seventh embodiment, permitting the optical field to be confined in the transverse direction.

[0146] Similar to the operation of the seventh embodiment, the region of the active layer 315 under the window region 335 is activated strongly because of the constraints on the injected current by the SiO₂layer. The result, again, is that the local modal gain in the active layer under the window region 335 is higher than the local modal gain in the active layer under the SiO₂layer 330. This, combined with the relatively higher effective refractive index in the transverse direction inside the ridge stripe region compared to that outside the ridge stripe region, provides an effective refractive index step. This results in a structure which has, built in, a waveguide mechanism of a real refractive index guide. Therefore, the design of the eighth embodiment provides a low threshold current laser diode which can operate with a fundamental transverse mode.

[0147] Referring next to FIGS. 33A-33E, a summary of the key fabrication steps is shown for an exemplary device of a semiconductor laser diode in accordance with the sixth embodiment.

[0148] Referring first to FIGS. 33A and 33B, the formation of the first and second cladding layers 305 and 310 on an n-type GaN substrate 300, together with the three-pair multiple quantum well active layer 315 are the same as for the seventh embodiment. Thereafter, the third and fourth cladding layers 320 and 325 are formed and then partially removed—typically by etching—to create a ridge structure 2500. As before, in an exemplary embodiment the various layers are formed successively by either the MOCVD or the MBE method.

[0149] Then, as shown in FIGS. 33C-33E, a silicon dioxide layer 330 is formed over the fifth and third cladding layers 325 and 320, respectively, typically by the CVD method, after which a window region 335 is formed as with the seventh embodiment. Electrodes 340 and 345 are then evaporated or otherwise bonded to the structure.

[0150] Referring next to FIG. 34, the selection of the In content, x, and the As content, y, and the relationship therebetween for the constituent InAlNAs layers may be better understood. In particular, the relative In and As contents are required to satisfy, approximately, the relationship 0<=x<=1, 0<=y<=1, x/0.1+y/0.02<=1, or x/0.9−2.22y>=1.

[0151] In InAlNAs material system, the lattice constant of AlN, InN, AlAs and InAs are different from each other. For example, the lattice mismatch between AlN and AlAs, between InN and InAs, and between AlN and InN, are 22.2%, 17.3%, and 12.1%, respectively. Therefore, an internal strain energy is accumulated in InAlNAs layer, even if the equivalent lattice constant is the same as that of the substrate due to the fact that equivalent bond length are different from each other between AlN, InN, AlAs and InAs. FIG. 34 shows the boundary of phase separation region plotted against various growth temperatures. The lines in FIG. 34 show the boundary between the compositionally unstable (phase separation) region and stable region with respect to various temperatures. In those cases where phase separation occurs, Al atoms, In atoms, N atoms, and As atoms in the InAlNAs layers are not distributed uniformly according to the atomic content in each constituent layer. Stated differently, the band gap energy distribution of the phase separated layer also becomes inhomogeneous in the layer. The region of the relatively small band gap region in the phase separated layer acts as an optical absorption center, or causes an optical scattering for the waveguided light. This means that the phase separation phenomena should be avoided to obtain a high efficiency light emitting device.

[0152] Referring still to FIG. 34, it can be seen that the phase separation region varies with temperature. The lines in FIG. 34 show the boundary between the compositionally unstable region—that is, resulting in phase separation—and the stable region with respect to various temperatures. The region surrounded with the InAs—InN line, AlAs—AlN line, and the boundary line shows the phase separation content region. It has been discovered that the ternary alloys InNAs, InAlN, and AlNAs have a large phase separation region due to the large lattice mismatch between InN and InAs, between InN and AlN, and between AlN and AlAs. On the other hand, it has been found that the ternary alloys InAlAs have no phase separation region at crystal growth temperatures around 1000° C., due to the small lattice mismatch between InAs and AlAs.

[0153] It has therefore been discovered that an AlInNAs material system can be provided in which the usual crystal growth temperature is in the approximate range of around 600° C. to around 1000° C. Likewise, it has been discovered that phase separation of the Al content and As content of AlInNAs does not occur in significant amounts at processing temperatures between on the order of 600° C. and on the order of 1000° C. Finally, by combining the two, the content choice region of Al content and As content in AlInNAs to avoid phase separation at a crystal growth temperature below around 1000° C. is found to be the shadow region in FIG. 35, with the line separating the two regions being approximately defined by the relationship x/0.1+y/0.02=1 and x/0.9−2.22y=1.

[0154] Therefore, for each of the two structural embodiments disclosed hereinabove, the phase separation phenomena can be avoided in an AlInNAs material system by operating at a crystal growth temperature between on the order of 600° C. and around 1000° C., when the In content, x, and the As content, y, of the all constituent layers of the laser diodes are made to satisfy approximately the relationship of 0<=x<=1, 0<=y<=1, x/0.1+y/0.02<=1 or x/0.9−2.22y>=1. The result is the substantially uniform distribution of Al atoms, In atoms, N atoms and As atoms in each constituent layer according to the atomic mole fraction.

[0155] In addition, other semiconductor structures can be fabricated with the materials system discussed above. Group-II nitride materials, especially GaN and AlN, are promising for use in electronic devices which can operate under high-power and high-temperature conditions—for example, microwave power transistors. This results, in part, from their wide band gap (3.5 eV for GaN and 6.2 eV for AlN), high breakdown electronic field, and high saturation velocity. By comparison, the band gaps of AlAs, GaAs, and Si are 2.16 eV, 1.42 eV, and 1.12 eV, respectively. This has led to significant research in the use of AlGaN/GaN materials for such field effect transistors (FETs). However, as noted previously hereinabove, the different lattice constants of AlGaN and GaN cause the generate of significant defects, limiting the mobility of electrons in the resultant structure and the utility of such materials systems for FET use.

[0156] The present invention substantially overcomes these limitations, in that the AlInNAs/AlN material of the present invention has a lattice constant nearly equal to AlN. As discussed hereinabove, a quaternary materials system of Al_1−xIn_xN_1−yAs_y, where the In content (x) and As content (y) satisfy the relationships 0<=x<=1, 0<=y<=1, x/0.1+y/0.02<=1, 3.11(1−x)(1−y)+4(1x)y+3.54x(1−y)+4.28xy nearly equals to 3.18, not only has a band gap greater than 5.5 eV, but also has a lattice constant substantially equal to AlN. This permits fabrication of semiconductor structures such as FETs which have substantially uniform atomic content distribution in the various layers. Therefore, by using a AlInNAs/AlN material system in accordance with the present invention, whose In mole fraction, x and As mole fraction, y satisfy the above relationships, high-power and high temperature transistors with low defect density can be realized.

[0157] Referring to FIG. 36A, there is shown therein an exemplary embodiment of a heterojunction field effect transistor(HFET) using AlInNAs/AlN material in accordance with the present invention. On a AlN substrate 2520, a 0.5 μm i-AlInNAs layer 2525 is formed, followed by a thin, approximately 10 nm AlInNAs conducting channel layer 2530 and a 10 nm AlN layer 2535. Source and drain electrodes 2540A-B, and gate electrode 2545 are formed in a conventional manner.In the structure, the In content, x, and As content, y, of the AlInNAs layer are set to be 0.05 and 0.01, respectively. In this case, the value of x and y satisfy the relationship of 0<=x<=1, 0<=y<=1, x/0.1+y/0.02<=1, 3.11(1−x)(1y)+4(1−x)y+3.54x(1−y)+4.28xy nearly equals to 3.11. This results in an AlInNAs layer substantially without phase separation and with a lattice constant nearly equal to AlN, In turn, this permits high electron velocities to be achieved because the two dimensional electron gas formed in the heterointerface of AlInNAs and AlN layer is not scattered by any fluctuation in atomic content of the AlInNAs layer (such as would be caused in the presence of defects). Moreover, the band gap of the AlInNAs is larger than 5.5 eV so that reliable high-temperature operation can be achieved by using the structure shown in FIG. 36A.

[0158] Similarly, FIG. 36B shows an embodiment of a heterojunction bipolar transistor(HBT) in accordance with the present invention. On the AlN substrate 2550, a 400 nm thick n-type AlN collector layer 2555 is formed, followed by a 50 nm thick p-type AlInNAs base layer 2560, and a 300 nm thick n-type AlN emitter layer 2565. Base electrode 2570, collector electrode 2575 and emitter electrode 2580 are formed conventionally. As with FIG. 36A, for the exemplary embodiment of FIG. 36B the In and As contents x and y of the AlInNAs layer are set to be 0.05, 0.01, respectively, and x and y are required to satisfy the same relationships as discussed above. As with FIG. 36A, an AlInNAs layer without significant phase separation and with a lattice constant nearly equal to AlN is realized, resulting in a very high quality heterojunction of AlInNAs/GaN. In addition, the band gap of the AlN emitter layer (6.2 eV) is larger than that of AlInNAs base layer (5.8 eV) so that holes generated in the p-type base layer are well confined in that base layer. This results because of the larger valence band discontinuity between AlN and AlInNAs than would occur in a AlN homojunction bipolar transistor. This has the benefit of obtaining a large current amplification of collector current relative to base current. Moreover, as mentioned above, the bandgap of the AlInNAs and the AlN layer is large so that the transistor can be used reliably in high-temperature applications.

[0159] Referring next to FIG. 37, there is shown therein an implementation of the present invention as a phototransistor. In this regard, GaN and AlN are attractive materials for photo detectors in ultra violet light range, since both GaN and AlN have a wide band gap (3.5 eV for GaN which corresponds to the light wavelength of 350 nm, 6.2 eV for AlN which corresponds to the light wavelength of 200 nm). Due to the direct band gap and the availability of AlGaN in the entire AlN alloy composition range, AlGaN/GaN based visible light photo detectors have the advantage of high quantum efficiency, as well as tunability of high cut-off wavelength. However, the lattice constant of AlGaN is sufficiently different from GaN that defects tend to be formed, which leads increased leakage current. Al_1−xIn_xN_1−yAs_y, where the In content (x) and As content (y) satisfy the relationships 0<=x<=1, 0<=y<=1, x/0.1+y/0.02<=1, offers not only a band gap larger than 5.5 eV, but also can be fabricated in layers with equal atomic content distribution, so that AlInNAs material also can be used for visible light photo detector applications. Moreover, the Al_1−xIn_xN_1−yAs_yquaternary material whose In content, x and As content, y satisfy the relationship of 3.11(1−x)(1−y)+4(1−x)y+3.54x(1−y)+4.28xy nearly equals to 3.11 has a lattice constant nearly equal to AlN and a bandgap larger than 5.5 eV. Therefore, by using AlInNAs/AlN material whose In content, x and As content, y satisfy the above relationship, UV light photo detectors with low defect density can be realized. In the event that detection of other frequencies is desired, only slight modification is required.

[0160] As shown in FIG. 37, the semiconductor device of the present invention can be implemented as a heterojunction phototransistor(HPT) using AlInNAs/AlN material. On the AlN substrate 2700, a AlN collector layer 2705 is formed on the order of 500 nm thick n-type, followed by the formation of a 200 nm thick p-type AlInNAs base layer 2710. Thereafter, a AlN emitter layer 2715 on the order of 500 nm thick is formed. On the emitter layer, a ring shaped electrode 2720 is formed to permit light to impinge on the base layer.

[0161] In an exemplary structure, the In content, x and As contnet, y of the AlInNAs layer are set to be 0.05 and 0.01, respectively. In this case, the value of x and y satisfy the relationship of 0<=x<=1, 0<=y<=1, x/0.1+y/0.02<=1, 3.11(1−x)(1−y)+4(1−x)y+3.54x(1−y)+4.28xy nearly equals to 3.11, so that an AlInNAs layer can be formed with substantially avoids phase separation while having a lattice constant equal to AlN, thus permitting the formation of a high quality heterojunction of AlInNAs/AlN. The band gap of the AlN emitter layer (6.2 eV which corresponds to the light wavelength of 200 nm) is larger than that of AlInNAs base layer (5.8 eV which corresponds to the light wavelength of 210 nm). The light impinges on the emitter side. For the embodiment shown, impinging light in the wavelength range between 200 nm and 210 nm is transparent to the emitter layer, so that the light in that range is absorbed in the AlInNAs base layer and generates electron and hole pairs. The holes generated by the optical absorption in the p-type base layer are well confined in the base layer because the valence band discontinuity between AlN and AlInNAs is larger than that for a conventional AlN homojunction photo transistor. This leads to the induction of a larger emitter current, which offers better electronic neutralization in the base region than in the case of the homojunction photo transistor. Therefore, blue light photo detectors with high quantum efficiency and high sensitivity, and the resultant high conversion efficiency from input light to collector current, are obtained.

[0162] In addition to the phototransistor of FIG. 37, it is also possible to implement a photodiode in accordance with the present invention. Referring to FIG. 38, an n-type substrate 2900 is provided, on which is formed an n-type layer 2910 of Al_1−xIn_xN_1−yAs_yquaternary material or equivalent, which conforms to the relationships discussed above in connection with FIG. 37. An active layer 2915 is thereafter formed, and above that is formed a layer 2920 of p-type A_1−xIn_xN_1−yAs_yquaternary material. Then, a p-type second cladding layer 2925 is formed above the layer 2920, and a window 2930 is formed therein to expose a portion of the layer 2920.The window 2930 provides a port by which light can impinge on the layer 2920, causing the creation of holes. A pair of electrodes 2935 and 2940 may be fabricated in a conventional manner, with the electrode 2935 typically being a ring electrode around the window 2930. It will be appreciated that the band gap of the second cladding layer 2925 is preferably larger than the band gap of the layer 2920, which is in turn preferably larger than the band gap of the active layer 2915; such an approach provides sensitivity to the widest range of wavelength of light. If the event a narrower range is desired, a material with a lower band gap than the layer 2920 may be used for the layer 2925. In addition, it is also not necessary to include the layer 2925 in all embodiments, as the layers 2910, 2915 and 2920 provide, in at least some instances, an adequate photosensitive pn-junction.

[0163] Having fully described a preferred embodiment of the invention and various alternatives, those skilled in the art will recognize, given the teachings herein, that numerous alternatives and equivalents exist which do not depart from the invention. It is therefore intended that the invention not be limited by the foregoing description, but only by the appended claims.