Thin-film magnetic head and method of manufacturing same

[0002] 1. Field of the Invention

[0003] The present invention relates to a composite thin-film magnetic head comprising a reproducing head and a recording head and to a method of manufacturing such a thin-film magnetic head.

[0004] 2. Description of the Related Art

[0005] Performance improvements in thin-film magnetic heads have been sought as surface recording density of hard disk drives has increased. Such thin-film magnetic heads include composite thin-film magnetic heads that have been widely used. A composite head is made of a layered structure including a recording head having an induction-type magnetic transducer for writing and a reproducing head having a magnetoresistive (MR) element for reading.

[0006] It is required to increase the track density on a magnetic recording medium in order to increase recording density among the performance characteristics of a recording head. To achieve this, it is required to implement a recording head of a narrow track structure wherein a track width, that is, the width of top and bottom poles sandwiching the recording gap layer on a side of the air bearing surface, is reduced down to microns or the submicron order. Semiconductor process techniques are utilized to implement such a structure.

[0007] Reference is now made to FIG. 21A to FIG. 24A and FIG. 21B to FIG. 24B to describe an example of a method of manufacturing a composite thin-film magnetic head as an example of a related-art method of manufacturing a thin-film magnetic head. FIG. 21A to FIG. 24A are cross sections each orthogonal to an air bearing surface. FIG. 21B to FIG. 24B are cross sections of a pole portion each parallel to the air bearing surface.

[0008] In the manufacturing method, as shown in FIG. 21A and FIG. 21B, an insulating layer 102 made of alumina (Al₂O₃), for example, having a thickness of about 5 to 10 μm is deposited on a substrate 101 made of aluminum oxide and titanium carbide (Al₂O₃—TiC), for example. On the insulating layer 102 a bottom shield layer 103 made of a magnetic material is formed for making a reproducing head.

[0009] Next, on the bottom shield layer 103, alumina, for example, is deposited to a thickness of 100 to 200 nm through sputtering to form a bottom shield gap film 104 as an insulating layer. On the bottom shield gap film 104 an MR element 105 for reproduction having a thickness of tens of nanometers is formed. Next, a pair of electrode layers 106 are formed on the bottom shield gap film 104. The electrode layers 106 are electrically connected to the MR element 105.

[0010] Next, a top shield gap film 107 is formed as an insulating layer on the bottom shield gap film 104 and the MR element 105. The MR element 105 is embedded in the shield gap films 104 and 107.

[0011] Next, on the top shield gap film 107, a top-shield-layer-cum-bottompole-layer (called a bottom pole layer in the following description) 108 having a thickness of about 3 μm is formed. The bottom pole layer 108 is made of a magnetic material and used for both a reproducing head and a recording head.

[0012] Next, as shown in FIG. 22A and FIG. 22B, on the bottom pole layer 108, a recording gap layer 109 made of an insulating film such as an alumina film whose thickness is 0.2 μm is formed. Next, a portion of the recording gap layer 109 is etched to form a contact hole 109ato make a magnetic path. On the recording gap layer 109 in the pole portion, a top pole tip 110 made of a magnetic material and having a thickness of 0.5 to 1.0 μm is formed for the recording head. At the same time, a magnetic layer 119 made of a magnetic material is formed for making the magnetic path in the contact hole 109afor making the magnetic path.

[0013] Next, as shown in FIG. 23A and FIG. 23B, the recording gap layer 109 and the bottom pole layer 108 are etched through ion milling, using the top pole tip 110 as a mask. As shown in FIG. 23B, the structure is called a trim structure wherein the sidewalls of the top pole (the top pole tip 110), the recording gap layer 109, and a part of the bottom pole layer 108 are formed vertically in a self-aligned manner.

[0014] Next, an insulating layer 111 made of an alumina film, for example, and having a thickness of about 3 μm is formed on the entire surface. The insulating layer 111 is then polished to the surfaces of the top pole tip 110 and the magnetic layer 119 and flattened.

[0015] Next, on the flattened insulating layer 111, a first layer 112 of a thin-film coil is made of copper (Cu), for example, for the induction-type recording head. Next, a photoresist layer 113 is formed into a specific shape on the insulating layer 111 and the first layer 112. Heat treatment is then performed at a specific temperature to flatten the surface of the photoresist layer 113. On the photoresist layer 113, a second layer 114 of the thin-film coil is then formed. Next, a photoresist layer 115 is formed into a specific shape on the photoresist layer 113 and the second layer 114. Heat treatment is then performed at a specific temperature to flatten the surface of the photoresist layer 115.

[0016] Next, as shown in FIG. 24A and FIG. 24B, a top pole layer 116 is formed for the recording head on the top pole tip 110, the photoresist layers 113 and 115, and the magnetic layer 119. The top pole layer 116 is made of a magnetic material such as Permalloy. Next, an overcoat layer 117 of alumina, for example, is formed to cover the top pole layer 116. Finally, lapping of the slider is performed to form the air bearing surface 118 of the thin-film magnetic head including the recording head and the reproducing head. The thin-film magnetic head is thus completed.

[0017] FIG. 25 is a top view of the thin-film magnetic head shown in FIG. 24A and FIG. 24B. The overcoat layer 117 and the other insulating layers and insulating films are omitted in FIG. 25.

[0018] In FIG. 24A, ‘TH’ indicates the throat height and ‘MR-H’ indicates the MR height. The throat height is the length (height) of pole portions, that is, portions of magnetic pole layers facing each other with a recording gap layer in between, the length between the air-bearing-surface-side end and the other end. The MR height is the length (height) between the air-bearing-surface-side end of the MR element and the other end. In FIG. 24B, ‘P2W’ indicates the pole width, that is, the track width of the recording head (hereinafter called the recording track width). In addition to the factors such as the throat height and the MR height, the apex angle as indicated with θ in FIG. 24A is one of the factors that determine the performance of a thin-film magnetic head. The apex is a hill-like raised portion of the coil covered with the photoresist layers 113 and 115. The apex angle is the angle formed between the top surface of the insulating layer 111 and the straight line drawn through the edges of the pole-side lateral walls of the apex.

[0019] In order to improve the performance of the thin-film magnetic head, it is important to precisely form throat height TH, MR height MR-H, apex angle θ, and track width P2W as shown in FIG. 24A and FIG. 24B.

[0020] To achieve high surface recording density, that is, to fabricate a recording head with a narrow track structure, it has been particularly required that track width P2W fall within the submicron order of 1.0 μm or less. It is therefore required to process the top pole of the submicron order through semiconductor process techniques.

[0021] A problem is that it is difficult to form the top pole layer of small dimensions on the apex.

[0022] As disclosed in Published Unexamined Japanese Patent Application Hei 7-262519 (1995), for example, frame plating may be used as a method for fabricating the top pole layer. In this case, a thin electrode film made of Permalloy, for example, is formed by sputtering, for example, to fully cover the apex. Next, a photoresist is applied to the top of the electrode film and patterned through a photolithography process to form a frame to be used for plating. The top pole layer is then formed by plating through the use of the electrode film previously formed as a seed layer.

[0023] However, there is a difference in height between the apex and the other part, such as 7 to 10 μm or more. The photoresist whose thickness is 3 to 4 μm is applied to cover the apex. If the photoresist thickness is required to be at least 3 μm over the apex, a photoresist film having a thickness of 8 to 10 μm or more, for example, is formed below the apex since the fluid photoresist goes downward.

[0024] To implement a recording track width of the submicron order as described above, it is required to form a frame pattern having a width of the submicron order through the use of a photoresist film. Therefore, it is required to form a fine pattern of the submicron order on top of the apex through the use of a photoresist film having a thickness of 8 to 10 μm or more. However, it is extremely difficult to form a photoresist pattern having such a thickness into a reduced pattern width, due to restrictions in a manufacturing process.

[0025] Furthermore, rays of light used for exposure of photolithography are reflected off the base electrode film as the seed layer. The photoresist is exposed to the reflected rays as well and the photoresist pattern may go out of shape. It is therefore impossible to obtain a sharp and precise photoresist pattern.

[0026] In the region on the slope of the apex, in particular, the rays reflected off the bottom electrode film include not only vertical reflected rays but also rays in slanting directions and rays in lateral directions from the slope of the apex. As a result, the photoresist is exposed to those reflected rays of light and the photoresist pattern more greatly goes out of shape.

[0027] As thus described, the problem of the prior art is that it is difficult to form the top pole layer with accuracy if the track width of the submicron order is required.

[0028] To overcome the problems thus described, a method has been taken, as shown in the foregoing related-art manufacturing steps illustrated in FIG. 22A to FIG. 24A and FIG. 22B to FIG. 24B. In this method, a track width of 1.0 μm or less is formed through the use of the top pole tip 110 effective for making a narrow track of the recording head. The top pole layer 116 to be a yoke portion connected to the top pole tip 110 is then fabricated (as disclosed in Published Unexamined Japanese Patent Application Sho 62-245509 [1987] and Published Unexamined Japanese Patent Application Sho 60-10409 [1985]). That is, the ordinary top pole layer is divided into the top pole tip 110 and the top pole layer 116 to be the yoke portion in this method. As a result, it is possible that the top pole tip 110 that defines the recording track width is formed into small dimensions to some degree on the flat top surface of the recording gap layer 109.

[0029] However, the following problems are still found in the thin-film magnetic head having a structure as shown in FIG. 24A and FIG. 24B.

[0030] In the thin-film magnetic head shown in FIG. 24A and FIG. 24B, the recording track width is defined by the top pole tip 110. Therefore, it is not necessary that the top pole layer 116 is processed into dimensions as small as those of the top pole tip 110. However, if the recording track width is extremely reduced, that is, down to 0.5 μm or less, in particular, processing accuracy for achieving the submicron-order width is required for the top pole layer 116, too. However, the top pole layer 116 is formed on top of the apex in the head shown in FIG. 24A and FIG. 24B. Therefore, it is difficult to reduce the top pole layer 116 in size, due to the reason described above. In addition, the top pole layer 116 is required to be greater than the top pole tip 110 in width since the top pole layer 116 is required to be magnetically connected to the top pole tip 110 smaller in width. Because of these reasons, the top pole layer 116 is greater than the top pole tip 110 in width in this thin-film magnetic head. In addition, the end face of the top pole layer 116 is exposed from the air bearing surface. As a result, writing may be performed by the thin-film magnetic head on a side of the top pole layer 116, too, and so-called ‘side write’ may result, that is, data is written in a region of a recording medium where data is not supposed to be written, or so-called ‘side erase’ may result, that is, data is erased in a region of a recording medium where data is not supposed to be written. Such a problem more frequently results when the coil is two-layer or three-layer to improve the performance of the recording head and the apex is thereby increased in height, compared to the case where the coil is one-layer.

[0031] In the thin-film magnetic head shown in FIG. 24A and FIG. 24B, the recording track width and the throat height are defined by the top pole tip 110. Therefore, if the recording track width is extremely reduced, that is, down to 0.5 μm or less, in particular, the size of the top pole tip 110 is thus extremely reduced. As a result, pattern edges may be rounded and it is difficult to form the top pole tip 110 with accuracy. Therefore, the thin-film magnetic head having the structure as shown in FIG. 24A and FIG. 24B has a problem that it is difficult to precisely define the recording track width if the recording track width is extremely reduced.

[0032] Furthermore, it is difficult to reduce the magnetic path (yoke) length of a prior-art magnetic head. That is, if the coil pitch is reduced, a head with a reduced yoke length is achieved and a recording head having an excellent high frequency characteristic is achieved, in particular. However, if the coil pitch is reduced to the limit, the distance between the zero throat height position (the position of an end of the pole portion farther from the air bearing surface) and the outermost end of the coil is a major factor that prevents a reduction in yoke length. Since the yoke length of a two-layer coil can be shorter than that of a single-layer coil, a two-layer coil is adopted to many of recording heads for high frequency application. However, in the prior-art magnetic head, a photoresist film having a thickness of about 2 μm is formed to provide an insulating film between coil layers after a first layer is formed. Consequently, a small and rounded apex is formed at the outermost end of the first layer of the coil. A second layer of the coil is then formed on the apex. The second layer is required to be formed on a flat portion since it is impossible to etch the seed layer of the coil in the sloped portion of the apex, and the coil is thereby shorted.

[0033] Therefore, if the coil thickness is 2 to 3 μm, the thickness of the insulating film between the layers of the coil is 2 μm, and the apex angle is 45 to 55 degrees, for example, the yoke length is required to be 6 to 8 μm which is twice as long as the distance between the outermost end of the coil and the neighborhood of the zero throat height position, that is, 3 to 4 μm (the distance between the innermost end of the coil and the portion where the top and bottom pole layers are in contact with each other is required to be 3 to 4 μm, too), in addition to the length of the portion corresponding to the coil. This length of the portion other than the portion corresponding to the coil is one of the factors that prevent a reduction in yoke length.

[0034] Assuming that a two-layer eleven-turn coil in which the line width is 1.5 μm and the space is 0.5 μm is fabricated, for example, the portion of the yoke length corresponding to the first layer 112 of the coil is 11.5 μm, if the first layer is made up of six turns and the second layer is made up of 5 turns, as shown in FIG. 24A and FIG. 24B. In addition to this length, the total of 6 to 8 μm, that is, the distance between each of the outermost and innermost ends of the first layer 112 of the coil and each of ends of the photoresist layer 113 for insulating the first layer 112, is required for the yoke length. Therefore, the yoke length is 17.5 to 19.5 μm. In the present patent application, the yoke length is the length of a portion of the pole layer except the pole portion and the contact portions, as indicated with L₀in FIG. 24A. As thus described, it is difficult in the prior art to further reduce the yoke length, which prevents improvements in high frequency characteristic.

[0035] In the prior-art thin-film magnetic head a very thin shield gap film having a wide area is located between the bottom shield layer and the top shield layer (bottom pole layer). Consequently, if ion milling is used in the manufacturing step that follows formation of the shield gap film, electric charges may be accumulated in the stacked layers, and punctures of the shield gap film may be caused by a static discharge. The yield of the thin-film magnetic heads is thereby reduced.

[0036] In the prior-art thin-film magnetic head the bottom and top shield layers are magnetically isolated from each other by the shield gap film. As a result, the effect of shielding the MR element is not sufficient. For example, Barkhausen noise is not sufficiently prevented.

[0037] In relation to this problem, thin-film magnetic heads wherein the bottom and top shield layers are magnetically connected to each other are disclosed in Published Unexamined Japanese Patent Application Hei 10-3621 (1998) and Published Unexamined Japanese Patent Application Hei 11-120507 (1999).

[0038] However, the thin-film coil is formed on top of the top shield layer, being insulated therefrom, and the top pole layer is formed on the apex in the thin-film magnetic heads disclosed in the above-mentioned publications, too. Therefore, the above-described problems found in the case where the top pole layer is formed on the apex are remain unsolved.

[0039] It is an object of the invention to provide a thin-film magnetic head and a method of manufacturing the same for precisely controlling a track width of a recording head and for achieving a reduction in yoke length of the recording head, and for enhancing the effect of shielding a magnetoresistive element of a reproducing head, and for improving the yield.

[0040] A thin-film magnetic head of the invention comprises: a medium facing surface that faces toward a recording medium; a magnetoresistive element an end of which is located in the medium facing surface; a first shield layer made of a magnetic layer and located to face a surface of the magnetoresistive element, the first shield layer being insulated from the magnetoresistive element; a second shield layer made of a magnetic layer and magnetically connected to the first shield layer and located to face toward a part of the first shield layer closest to the medium facing surface, the magnetoresistive element being placed between the second shield layer and the part of the first shield layer, the second shield layer having a surface facing toward the other surface of the magnetoresistive element, the surface of the second shield layer being insulated from the magnetoresistive element; a gap layer having a surface adjacent to the other surface of the second shield layer; a magnetic pole layer magnetically connected to the first shield layer and located to be adjacent to the other surface of the gap layer; and a thin-film coil at least a part of which is located on a side of the second shield layer and between the first shield layer and the pole layer, the at least part of the coil being insulated from the first and second shield layers and the pole layer.

[0041] A method of manufacturing a thin-film magnetic head of the invention includes the steps of: forming a first shield layer made of a magnetic layer; forming a magnetoresistive element an end of which is located in a medium facing surface that faces toward a recording medium, the magnetoresistive element having a surface facing toward the first shield layer, the surface of the magnetoresistive element being insulated from the first shield layer; forming a second shield layer made of a magnetic layer and magnetically connected to the first shield layer and located to face toward a part of the first shield layer closest to the medium facing surface, the magnetoresistive element being placed between the second shield layer and the part of the first shield layer, the second shield layer having a surface facing toward the other surface of the magnetoresistive element, the surface of the second shield layer being insulated from the magnetoresistive element; forming a gap layer having a surface adjacent to the other surface of the second shield layer; forming a magnetic pole layer magnetically connected to the first shield layer and located to be adjacent to the other surface of the gap layer; and forming a thin-film coil at least a part of which is located on a side of the second shield layer and between the first shield layer and the pole layer, the at least part of the coil being insulated from the first and second shield layers and the pole layer.

[0042] According to the thin-film magnetic head or the method of manufacturing the same of the invention, the first and second shield layers are magnetically connected to each other, and the magnetoresistive element is shield by these shield layers. The first and second shield layers make up a part of the magnetic path of the recording head. At least a part of the thin-film coil is located on a side of the second shield layer and between the first shield layer and the pole layer. It is thereby possible to form the pole layer on the flat surface.

[0043] According to the thin-film magnetic head or the method of the invention, the second shield layer may include a portion for defining a throat height. In this case, the portion for defining the throat height may have a shape of a straight line parallel to the medium facing surface. The portion for defining the throat height may have a length between an end thereof located in the medium facing surface and the other end, the length being greater than a length of the magnetoresistive element between the end thereof located in the medium facing surface and the other end.

[0044] According to the thin-film magnetic head or the method of the invention, the second shield layer may surround the at least part of the thin-film coil.

[0045] According to the thin-film magnetic head or the method of the invention, an insulating layer may be further provided. The insulating layer covers the at least part of the thin-film coil located on the side of the second shield layer, wherein a surface of the insulating layer facing toward the gap layer is flattened together with the surface of the second shield layer adjacent to the gap layer.

[0046] According to the thin-film magnetic head or the method of the invention, the pole layer may be made up of one layer.

[0047] According to the thin-film magnetic head or the method of the invention, the pole layer may include: a pole portion layer including a pole portion that defines the track width; and a yoke portion layer making up a yoke portion and connected to the pole portion layer.

[0048] According to the thin-film magnetic head or the method of the invention, an end face of the yoke portion layer facing toward the medium facing surface may be located at a distance from the medium facing surface.

[0049] According to the thin-film magnetic head or the method of the invention, the pole portion layer may have a length between an end thereof located in the medium facing surface and the other end, the length being greater than the length of the magnetoresistive element between the end thereof located in the medium facing surface and the other end.

[0050] According to the thin-film magnetic head or the method of the invention, the thin-film coil may include: a first layer located on a side of the second shield layer; and a second layer located on a side of the pole portion layer of the pole layer. In this case, first and second insulating layers may be further provided. The first insulating layer covers the first layer of the coil and has a surface facing toward the gap layer, the surface being flattened together with the surface of the second shield layer adjacent to the gap layer. The second insulating layer covers the second layer of the coil and has a surface facing toward the yoke portion layer, the surface being flattened together with a surface of the pole portion layer facing toward the yoke portion layer.

[0051] Other and further objects, features and advantages of the invention will appear more fully from the following description.

[0052] FIG. 1A and FIG. 1B are cross sections for illustrating a step in a method of manufacturing a thin-film magnetic head of a first embodiment of the invention.

[0053] FIG. 2A and FIG. 2B are cross sections for illustrating a step that follows FIG. 1A and FIG. 1B.

[0054] FIG. 3A and FIG. 3B are cross sections for illustrating a step that follows FIG. 2A and FIG. 2B.

[0055] FIG. 4A and FIG. 4B are cross sections for illustrating a step that follows FIG. 3A and FIG. 3B.

[0056] FIG. 5A and FIG. 5B are cross sections for illustrating a step that follows FIG. 4A and FIG. 4B.

[0057] FIG. 6A and FIG. 6B are cross sections of the thin-film magnetic head of the first embodiment.

[0058] FIG. 7 is an explanatory view for illustrating the relationship between a top view of the main part of the thin-film magnetic head of the first embodiment and a cross-sectional view thereof.

[0059] FIG. 8 is a perspective view of the main part of the thin-film magnetic head of the first embodiment, a part of which is cut away.

[0060] FIG. 9 is a perspective view of the main part of the thin-film magnetic head of the first embodiment, a part of which is cut away.

[0061] FIG. 10 is a top view of a thin-film magnetic head of a second embodiment of the invention.

[0062] FIG. 11 is a top view of a thin-film magnetic head of a third embodiment of the invention.

[0063] FIG. 12 is a top view of a thin-film magnetic head of a fourth embodiment of the invention.

[0064] FIG. 13 is a top view of a thin-film magnetic head of a fifth embodiment of the invention.

[0065] FIG. 14A and FIG. 14B are cross sections for illustrating a step in a method of manufacturing a thin-film magnetic head of a sixth embodiment of the invention.

[0066] FIG. 15A and FIG. 15B are cross sections for illustrating a step that follows FIG. 14A and FIG. 14B.

[0067] FIG. 16A and FIG. 16B are cross sections for illustrating a step that follows FIG. 15A and FIG. 15B.

[0068] FIG. 17A and FIG. 17B are cross sections for illustrating a step that follows FIG. 16A and FIG. 16B.

[0069] FIG. 18A and FIG. 18B are cross sections of the thin-film magnetic head of the sixth embodiment.

[0070] FIG. 19 is a top view of the thin-film magnetic head of the sixth embodiment.

[0071] FIG. 20 is a top view of a thin-film magnetic head of a seventh embodiment of the invention.

[0072] FIG. 21A and FIG. 21B are cross sections for illustrating a step in a method of manufacturing a thin-film magnetic head of related art.

[0073] FIG. 22A and FIG. 22B are cross sections for illustrating a step that follows FIG. 21A and FIG. 21B.

[0074] FIG. 23A and FIG. 23B are cross sections for illustrating a step that follows FIG. 22A and FIG. 22B.

[0075] FIG. 24A and FIG. 24B are cross sections for illustrating a step that follows FIG. 23A and FIG. 23B.

[0076] FIG. 25 is a top view of the related-art thin-film magnetic head.

[0077] Preferred embodiments of the invention will now be described in detail with reference to the accompanying drawings.

[0078] [First Embodiment]

[0079] Reference is now made to FIG. 1A to FIG. 6A, FIG. 1B to FIG. 6B, and FIG. 7 to FIG. 9 to describe a thin-film magnetic head and a method of manufacturing the same of a first embodiment of the invention. FIG. 1A to FIG. 6A are cross sections each orthogonal to an air bearing surface. FIG. 1B to FIG. 6B are cross sections of the pole portion each parallel to the air bearing surface.

[0080] In the manufacturing method, as shown in FIG. 1A and FIG. 1B, an insulating layer 2 made of alumina (Al₂O₃), for example, whose thickness is about 5 μm, is deposited on a substrate 1 made of aluminum oxide and titanium carbide (Al₂O₃—TiC), for example. On the insulating layer 2 a first shield layer 3 made of a magnetic material such as Permalloy and having a thickness of about 3 μm is formed. The first shield layer 3 is formed through plating selectively on the insulating layer 2 with a photoresist film as a mask, for example. Next, although not shown, an insulating layer of alumina, for example, having a thickness of 4 to 5 μm, for example, is formed over the entire surface. This insulating layer is polished through chemical mechanical polishing (CMP), for example, so that the first shield layer 3 is exposed, and the surface is flattened.

[0081] Next, as shown in FIG. 2A and FIG. 2B, on the first shield layer 3, a bottom shield gap film 4 having a thickness of about 20 to 40 nm, for example, is formed as an insulating film. On the bottom shield gap film 4, an MR element 5 for reproduction having a thickness of tens of nanometers is formed. An end of the MR element 5 is located in the air bearing surface 30 which is a medium facing surface that faces toward a recording medium. A (bottom) surface of the MR element 5 faces toward the first shield layer 3, being insulated from the first shield layer 3. The MR element 5 may be fabricated through selectively etching an MR film formed through sputtering. The MR element 5 may be an element made of a magnetosensitive film exhibiting a magnetoresistivity, such as an AMR element, a GMR element, or a tunnel magnetoresistive (TMR) element. Next, on the bottom shield gap film 4, a pair of electrode layers 6 having a thickness of tens of nanometers are formed. The electrode layers 6 are electrically connected to the MR element 5. Next, a top shield gap film 7 having a thickness of about 20 to 40 nm, for example, is formed as an insulating film on the bottom shield gap film 4, the MR element 5 and the electrode layers 6. The MR element 5 is embedded in the shield gap films 4 and 7. An insulation material used for the shield gap films 4 and 7 may be any of alumina, aluminum nitride, diamond-like carbon (DLC), and so on. The shield gap films 4 and 7 may be fabricated through sputtering or chemical vapor deposition (CVD). If the shield gap films 4 and 7 made of alumina films are fabricated through CVD, materials used are trimethyl aluminum (Al(CH₃)₃) and H₂O, for example. Through the use of CVD, it is possible to make the thin and precise shield gap films 4 and 7 with few pinholes.

[0082] In this embodiment the shield gap films 4 and 7 are not formed over the entire top surface of the first shield layer 3, but only in a region sufficient for insulating the MR element 5 and the electrode layers 6.

[0083] Next, a second shield layer 8amade of a magnetic material and having a thickness of about 2.5 to 3.5 μm, for example, is formed on the first shield layer 3 in a region facing toward a part of the first shield layer 3 closest to the air bearing surface 30, the MR element 5 being placed between the part of the first shield layer 3 and the second shield layer 8a.A (bottom) surface of the second shield layer 8afaces toward the other surface (the top surface) of the MR element 5, being insulated from the MR element 5. The second shield layer 8ais magnetically connected to the first shield layer 3 where the shield gap films 4 and 7 are not located.

[0084] The second shield layer 8ahas a portion that faces toward a top pole layer described later. This portion has an end located farther from the air bearing surface 30. The position of this end defines the throat height. That is, the portion of the second shield layer 8athat faces toward the top pole layer is the portion for defining the throat height. The zero throat height position, that is, the position of an end of the pole portion farther from the air bearing surface 30, is the position of the above-mentioned end of the portion of the second shield layer 8athat faces toward the top pole layer.

[0085] At the same time as the second shield layer 8ais formed, a magnetic layer 8bmade of a magnetic material having a thickness of about 2.5 to 3.5 μm, for example, is formed on the first shield layer 3 near the center of a thin-film coil described later. The magnetic layer 8bis provided for connecting the first shield layer 3 to the top pole layer described later.

[0086] The second shield layer 8aand the magnetic layer 8bmay be made of NiFe (80 weight % Ni and 20 weight % Fe), or NiFe (45 weight % Ni and 55 weight % Fe) as a high saturation flux density material and formed through plating, or may be made of a material such as FeN or FeZrN as a high saturation flux density material through sputtering. Alternatively, a material such as CoFe or a Co-base amorphous material as a high saturation flux density material may be used.

[0087] Next, as shown in FIG. 3A and FIG. 3B, an insulating film 9 of alumina, for example, is formed over the entire surface. The thickness of the insulating film 9 is about 0.3 to 0.6 μm.

[0088] Next, a photoresist is patterned through a photolithography process to form a frame 19 for making the thin-film coil through frame plating. Next, the thin-film coil 10 made of copper (Cu), for example, is formed by frame plating through the use of the frame 19. For example, the thickness of the coil 10 is about 1.0 to 2.0 μm and the pitch is 1.2 to 2.0 μm. The frame 19 is then removed. In the drawings numeral 10aindicates a portion for connecting the thin-film coil 10 to a conductive layer (lead) described later.

[0089] Next, as shown in FIG. 4A and FIG. 4B, an insulating layer 11 of alumina, for example, having a thickness of about 3 to 4 μm is formed over the entire surface. The insulating layer 11 is then polished through CMP, for example, until the second shield layer 8aand the magnetic layer 8bare exposed, an d the surface is flattened. Although the thin-film coil 10 is not exposed in FIG. 4A and FIG. 4B, the coil 10 may be exposed.

[0090] Next, a recording gap layer 12 made of an insulating material whose thickness is 0.2 to 0.3 μm, for example, is formed on the second shield layer 8aand the magnetic layer 8bexposed and the insulating layer 11. In general, the insulating material used for the recording gap layer 12 may be alumina, aluminum nitride, a silicon-dioxide-base material, a silicon-nitride-base material, or diamond-like carbon (DLC) and so on. The recording gap layer 12 may be fabricated through sputtering or CVD. If the recording gap layer 12 made of an alumina film is fabricated through CVD, materials used are trimethyl aluminum (AL(CH₃)₃) and H₂O, for example. Through the use of CVD, it is possible to make the thin and precise recording gap layer 1220 with few pin holes.

[0091] Next, a portion of the recording gap layer 12 located on top of the magnetic layer 8bis etched to form a contact hole for making the magnetic path. Portions of the recording gap layer 12 and the insulating layer 11 located on top of the connecting portion 10aof the coil 10 are etched to form a contact hole.

[0092] Next, as shown in FIG. 5A and FIG. 5B, on the recording gap layer 12, the top pole layer 13 having a thickness of about 2.0 to 3.0 μm, for example, is formed in a region extending from the air bearing surface 30 to the portion on top of the magnetic layer 8b.In addition, the conductive layer 16 having a thickness of about 2.0 to 3.0 μm, for example, is formed. The conductive layer 16 is connected to the portion 10aof the thin-film coil 10. The top pole layer 13 is connected to the magnetic layer 8bthrough the contact hole formed in the portion on top of the magnetic layer 8b.

[0093] The top pole layer 13 may be made of NiFe (80 weight % Ni and 20 weight % Fe), or NiFe (45 weight % Ni and 55 weight % Fe) as a high saturation flux density material and formed through plating, or may be made of a material such as FeN or FeZrN as a high saturation flux density material through sputtering. Alternatively, a material such as CoFe or a Co-base amorphous material as a high saturation flux density material may be used. In order to improve the high frequency characteristic, the top pole layer 13 may be made up of layers of inorganic insulating films and magnetic layers of Permalloy, for example.

[0094] Next, the recording gap layer 12 is selectively etched through dry etching, using the top pole layer 13 as a mask. The dry etching may be reactive ion etching (RIE) using a chlorine-base gas such as BCl₂or C1₂, or a fluorine-base gas such as CF₄or SF₆, for example. Next, the second shield layer 8ais selectively etched by about 0.3 to 0.6 μm through argon ion milling, for example. A trim structure as shown in FIG. 5B is thus formed. The trim structure suppresses an increase in the effective track width due to expansion of a magnetic flux generated during writing in a narrow track.

[0095] Next, as shown in FIG. 6A and FIG. 6B, an overcoat layer 17 of alumina, for example, having a thickness of 20 to 40 μm is formed over the entire surface. The surface of the overcoat layer 17 is then flattened and pads (not shown) for electrodes are formed on the overcoat layer 17. Finally, lapping of the slider including the foregoing layers is performed to form the air bearing surface 30 of the thin-film magnetic head including the recording head and the reproducing head. The thin-film magnetic head of the embodiment is thus completed.

[0096] In this embodiment the top pole layer 13 corresponds to the magnetic pole layer of the invention. The magnetic path of the recording head is made up of the first shield layer 3, the second shield layer 8a,the magnetic layer 8band the top pole layer 13. Therefore, the first shield layer 3 and the second shield layer 8afunction as both the shield layer of the reproducing head and the magnetic layer making up the magnetic path of the recording head.

[0097] FIG. 7 is an explanatory view for illustrating the relationship between a top view (an upper view of FIG. 7) of the main part of the thin-film magnetic head of the embodiment and a cross-sectional view (a lower view of FIG. 7) thereof. The overcoat layer 17 and the other insulating layers and films are omitted in FIG. 7. In FIG. 7 ‘TH’ indicates the throat height, ‘THO’ indicates the zero throat height position, and ‘MR-H’ indicates the MR height.

[0098] FIG. 8 is a perspective view of portions of the thin-film magnetic head of the embodiment including the layers from the first shield layer 3 to the second shield layer 8a,the insulating film 9 and the coil 10, a part of which is cut away. In FIG. 8 numeral 8A indicates a portion of the second shield layer 8aetched to make the trim structure.

[0099] FIG. 9 is a perspective view of the portions of the head shown in FIG. 8 to which the recording gap layer 12 and the top pole layer 13 are added, a part of which is cut away.

[0100] As described so far, the thin-film magnetic head of the embodiment comprises: the medium facing surface (air bearing surface 30) facing toward a recording medium; the MR element 5 an end of which is located in the air bearing surface 30; the first shield layer 3 made of the magnetic layer; and the second shield layer 8amade of the magnetic layer and magnetically connected to the first shield layer 3. The first shield layer 3 is located to face toward a (bottom) surface of the MR element 5, the first shield layer 3 being insulated from the MR element 5. The second shield layer 8ais located in a region facing toward a part of the first shield layer 3 closest to the air bearing surface 30, the MR element 5 being placed between the part of the first shield layer 3 and the second shield layer 8a.A (bottom) surface of the second shield layer 8afaces toward the other surface (the top surface) of the MR element 5, being insulated from the MR element 5. The MR element 5, the first shield layer 3 and the second shield layer 8amake up the reproducing head of the thin-film magnetic head.

[0101] The thin-film magnetic head of the embodiment further comprises the recording gap layer 12, the top pole layer 13 and the thin-film coil 10. A (bottom) surface of the recording gap layer 12 is located to be adjacent to the other surface (top surface) of the second shield layer 8a.The top pole layer 13 is located to be adjacent to the other surface (top surface) of the recording gap layer 12, and is magnetically connected to the first shield layer 3 through the magnetic layer 8b.A part of the thin-film coil 10 is located on a side of the second shield layer 8aand located between the first shield layer 3 and the top pole layer 13, the part of the coil 10 being insulated from the first shield layer 3, the second shield layer 8aand the top pole layer 13. The recording gap layer 12, the top pole layer 13 and the thin-film coil 10, in addition to the first shield layer 3, the second shield layer 8aand the magnetic layer 8bmentioned above, make up the recording head of the thin-film magnetic head. That is, the first shield layer 3, the second shield layer 8aand the magnetic layer 8bhave the function of the bottom pole layer of the recording head. Of these layers the second shield layer 8aincludes the pole portion.

[0102] In this embodiment throat height TH is the length of the portion of the second shield layer 8athat defines the throat height, the length between an end of this portion located in the air bearing surface 30 and the other end. (This length may be simply called the length of the second shield layer 8ain the following description.) Throat height TH is greater than MR height MR-H, that is, the length of the MR element 5 between an end thereof located in the air bearing surface 30 and the other end. The length of the second shield layer 8ais preferably 150 to 600 percent of MR height MR-H, and more preferably 300 to 500 percent. In other words, if MR height MR-H is 0.5 μm, for example, the length of the second shield layer 8ais preferably 0.75 to 3.0 μm, and more preferably 1.5 to 2.5 μm.

[0103] In the embodiment the portion of the second shield layer 8athat faces toward the top pole layer 13 has an end located opposite to the air bearing surface 30, this end having the shape of a straight line parallel to the air bearing surface 30. The other part of the second shield layer 8ahas an end located opposite to the air bearing surface 30, this end being in the shape of an arc that approximates to the shape of the perimeter of the thin-film coil 10. Since the portion of the second shield layer 8athat faces toward the top pole layer 13 has the end having the above-described shape in this embodiment, it is possible to precisely control the throat height and the zero throat height position.

[0104] In the embodiment the track width is defined by the top pole layer 13. As shown in FIG. 7, the top pole layer 13 has a first portion 13A, a second portion 13B and a third portion 13C in the order in which the closest to the air bearing surface 30 comes first. The first portion 13A has a width equal to the recording track width. The second portion 13B is greater than the first portion 13A in width. The third portion 13C is greater than the second portion 13B in width.

[0105] The width of the third portion 13C gradually decreases as the distance from the air bearing surface 30 decreases. It is preferred that each of lateral edges of a portion of the third portion 13C having a varying width forms an angle of 30 to 60 degrees with respect to the direction orthogonal to the air bearing surface 30, each of the lateral edges being located at each end of the width of the third portion 13C. The width of the second portion 13B gradually decreases, too, as the distance from the air bearing surface 30 decreases.

[0106] In the top pole layer 13 there are edges linking lateral edges of the first portion 13A orthogonal to the air bearing surface 30 to lateral edges of the second portion 13B located at ends of the width of the second portion 13B. These edges linking the lateral edges of the first portion 13A to the lateral edges of the second portion 13B are parallel to the air bearing surface 30. Similarly, the top pole layer 13 has edges linking the lateral edges of the second portion 13B to the lateral edges of the third portion 13C. These edges linking the lateral edges of the second portion 13B to the lateral edges of the third portion 13C are parallel to the air bearing surface 30.

[0107] In the top pole layer 13 the interface between the first portion 13A and the second portion 13B is located near the zero MR height position (the position of an end of the MR element 5 opposite to the air bearing surface 30).

[0108] In the top pole layer 13 the interface between the second portion 13B and the third portion 13C (the position near the stepped portions between the portion 13B and the portion 13C shown in FIG. 7) is located closer to the air bearing surface 30 (that is, on the left side of FIG. 7) than zero throat height position THO, that is, the position of an end of the portion of the second shield layer 8athat faces toward the top pole layer 13, the end being opposite to the air bearing surface 30 (on the right side of FIG. 7). As a result, in this embodiment, width Wl of the top pole layer 13 at zero throat height position THO is greater than recording track width W2, that is, the width of the first portion 13A.

[0109] According to the embodiment thus described, the first shield layer 3 and the second shield layer 8aare magnetically connected to each other, and the MR element 5 is shielded by these shield layers. As a result, the effect of shielding the MR element 5 in the reproducing head is made greater, compared to the case in which the MR element 5 is shielded by two shield layers that are magnetically isolated. It is therefore possible to reduce Barkhausen noise, for example.

[0110] According to the embodiment, it is not necessary to form a shield gap film having a wide area between the two shield layers. As a result, it is possible to prevent punctures of the shield gap film and to improve the yield of the thin-film magnetic heads.

[0111] According to the embodiment, a part of the thin-film coil 10 is located between the first shield layer 3 and the top pole layer 13 and on a side of the second shield layer 8a.The top surface of the insulating layer 11 covering the coil 10 is flattened, together with the top surface of the second shield layer 8a.As a result, the top pole layer 13 that defines the recording track width is formed on the flat surface. Therefore, according to the embodiment, it is possible to form the top pole layer 13 with accuracy and to precisely control the recording track width even if the recording track width is reduced down to the half-micron or quarter-micron order.

[0112] According to the embodiment, the second shield layer 8ahas the portion that defines the throat height. As a result, it is possible to control the track width with accuracy by the top pole layer 13 even if the throat height is low.

[0113] As in this embodiment, it is possible to form the top pole layer on a flat surface even if the top shield layer (bottom pole layer) is divided into the first layer facing the thin-film coil and the second layer including the pole portion, and a part of the coil is located on a side of the second layer in the configuration in which the top shield layer of the reproducing head also functions as the bottom pole layer of the recording head, as in the prior-art thin-film magnetic head. In the thin-film magnetic head of the embodiment of the invention, a layer corresponding to the first layer of the top shield layer of the thin-film magnetic head having the above-mentioned configuration is not required. Therefore, according to the embodiment, the number of manufacturing steps is smaller, compared to that of the thin-film magnetic head having the above-mentioned configuration, and the entire thickness of the thin-film magnetic head is made smaller.

[0114] According to the embodiment, the width of the top pole layer 13 in the zero throat height position is greater than the recording track width. It is thereby possible to prevent a magnetic flux from saturating near the zero throat height position. In addition, the width of the top pole layer 13 gradually decreases as the distance from the air bearing surface 30 decreases. Therefore, it is impossible that the cross-sectional area of the magnetic path abruptly decreases. Saturation of a magnetic flux halfway through the magnetic path is thereby prevented. According to the embodiment, it is thereby possible to utilize the magnetomotive force generated by the thin-film coil 10 for writing with efficiency and to improve the overwrite property.

[0115] According to the embodiment, the top pole layer 13 that defines the recording track width is formed on the flat surface. As a result, it is possible to prevent an increase in the width of the first portion 13A that defines the recording track width when the width of the top pole layer 13 in the zero throat height position is made greater than the recording track width as described above. If the top pole layer is formed on the apex, the width of the portion of the top pole layer that defines the recording track width is likely to increase, too, when the width of the top pole layer in the zero throat height position is made greater than the recording track width.

[0116] In the embodiment an end of the second portion 13B of the top pole layer 13 on a side of the air bearing surface 30 is parallel to the air bearing surface 30. The first portion 13A of the top pole layer 13 is coupled to this end of the second portion 13B. Therefore, a photomask used for making the top pole layer 13 through photolithography has a shape including a side corresponding to the end of the second portion 13B on the side of the air bearing surface 30 and an additional concave or convex portion corresponding to the first portion 13A. Whether the portion corresponding to the first portion 13A is concave or convex depends on whether a negative photomask or a positive photomask is used. The top pole layer 13 is formed on the flat surface through the use of the photomask in the above-described shape. It is thereby possible to precisely control the width of the first portion 13A, that is, the recording track width.

[0117] According to the embodiment, the throat height is defined by the second shield layer 8a.The length of the second shield layer 8ais greater than MR height MR-H, that is, the length of the MR element 5 between the end thereof located in the air bearing surface 30 and the other end. As a result, the areas of the first shield layer 3 and the second shield layer 8atouching each other are made greater. It is thereby possible to prevent a magnetic flux from saturating in those areas.

[0118] The greater the length of the second shield layer 8athan MR height MR-H, the greater are the areas of the first shield layer 3 and the second shield layer 8atouching each other. Therefore, if the difference between the length of the second shield layer 8aand MR height MR-H is small, the effect of preventing saturation of the flux is reduced, and the degree of an improvement in overwrite property is reduced. On the other hand, if the length of the second shield layer 8ais too great, the yoke length is made greater and the overwrite property is reduced, conversely. Therefore, there is a range of the preferred length of the second shield layer 8a.To be specific, the length of the second shield layer 8ais preferably 150 to 600 percent of MR height MR-H, and more preferably 300 to 500 percent, as mentioned above.

[0119] According to the embodiment as thus described, it is possible to control the recording track width with accuracy and to prevent a magnetic flux from saturating halfway through the magnetic path even if the recording track width is reduced.

[0120] In the embodiment the thin-film coil 10 is located on a side of the second shield layer 8aand formed on the flat insulating film 9. It is thereby possible to form the thin-film coil 10 of small dimensions with accuracy. Furthermore, according to the embodiment, it is possible that an end of the coil 10 is placed near the zero throat height position, that is, near the end of the second shield layer 8aopposite to the air bearing surface 30, since no apex exists.

[0121] As thus described, according to the embodiment, the yoke length is reduced by about 30 to 40 percent of that of a prior-art head, for example. As a result, it is possible to utilize a magnetomotive force generated by the thin-film coil 10 for writing with efficiency. It is therefore possible to provide a thin-film magnetic head having a recording head with an excellent high frequency characteristic, an excellent nonlinear transition shift (NLTS) characteristic and an excellent overwrite property.

[0122] According to the embodiment, a reduction in yoke length is achieved. As a result, it is possible to greatly reduce the entire length of the thin-film coil 10 without changing the number of turns of the coil. The resistance of the coil 10 is thereby reduced. It is therefore possible to reduce the thickness of the coil 10.

[0123] According to the embodiment, the insulating film 9 is provided between the first shield layer 3 and the thin-film coil 10. The insulating film 9 is thin and made of an inorganic material that achieves sufficient insulation strength. High insulation strength is thereby obtained between the first shield layer 3 and the coil 10.

[0124] In the embodiment the thin-film coil 10 is covered with the insulating layer 11 made of an inorganic insulation material. It is thereby possible to prevent the pole portion from protruding toward a recording medium due to expansion resulting from heat generated around the coil 10 when the thin-film magnetic head is used.

[0125] [Second Embodiment]

[0126] Reference is now made to FIG. 10 to describe a thin-film magnetic head and a method of manufacturing the same of a second embodiment of the invention. FIG. 10 is a top view of the main part of the thin-film magnetic head of the embodiment, wherein an overcoat layer and the other insulating layers and films are omitted.

[0127] In the second embodiment the first shield layer 3 has an area greater than that of the first embodiment. To be specific, the first shield layer 3 has an area greater than the area of the entire thin-film coil 10. In addition, the second shield layer 8ais formed to surround the coil 10 in the second embodiment. In this embodiment throat height TH is the length of a portion of the second shield layer 8athat defines the throat height, the length between an end of this portion located in the air bearing surface 30 and the other end. As in the first embodiment, throat height TH is greater than MR height MR-H, that is, the length of the MR element 5 between an end thereof located in the air bearing surface 30 and the other end.

[0128] According to the second embodiment, it is possible to flatten the insulating layer 11 with further accuracy since the second shield layer 8ahas the geometry described above.

[0129] The top pole layer 13 of the second embodiment has the first portion 13A, the second portion 13B and the third portion 13C in the order in which the closest to the air bearing surface 30 comes first. The first portion 13A and the second portion 13B have geometries similar to those of the first embodiment. The width of the third portion 13C varies in the following manner. The width thereof gradually increases from an end of the third portion 13C closer to the air bearing surface 30, forming an angle of 30 to 60 degrees,for example, with respect to the direction orthogonal to the air bearing surface 30. The width then increases, forming a greater angle, and finally becomes constant.

[0130] The remainder of the configuration, functions and effects of the embodiment are similar to those of the first embodiment.

[0131] [Third Embodiment]

[0132] Reference is now made to FIG. 11 to describe a thin-film magnetic head and a method of manufacturing the same of a third embodiment of the invention. FIG. 11 is a top view of the main part of the thin-film magnetic head of the embodiment, wherein an overcoat layer and the other insulating layers and films are omitted.

[0133] In the third embodiment the second shield layer 8ahas a T-shape in which a portion closer to the air bearing surface 30 is smaller than the other portion in width. An end of the second shield layer 8aopposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30, and is located at zero throat height position THO.

[0134] According to the embodiment, since the second shield layer 8ahas the geometry as described above, it is possible to reduce the width of the second shield layer 8ain the air bearing surface 30 and to prevent an increase in effective track width. In addition, the width of the second shield layer 8adecreases toward the air bearing surface 30 in a step-by-step manner. It is thereby possible to prevent a magnetic flux from saturating in the second shield layer 8a.Furthermore, it is possible to precisely control the throat height and the zero throat height position since the end of the second shield layer 8aopposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30.

[0135] The remainder of the configuration, functions and effects of the embodiment are similar to those of the first embodiment.

[0136] [Fourth Embodiment]

[0137] Reference is now made to FIG. 12 to describe a thin-film magnetic head and a method of manufacturing the same of a fourth embodiment of the invention. FIG. 12 is a top view of the main part of the thin-film magnetic head of the embodiment, wherein an overcoat layer and the other insulating layers and films are omitted.

[0138] In the fourth embodiment the second shield layer 8ahas: a center portion 8a,that faces toward the top pole layer 13 and defines the throat height; and side portions 8a₂and 8a₃placed at ends of the width of the center portion 8a₁. An end of the center portion 8a₁opposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30, and is located at zero throat height position THO. The length of each of the side portions 8a₂and 8a₃between an end located in the air bearing surface 30 and the other end is equal to the throat height at the interface between the center portion 8a₁and each of the side portions 8a₂and 8a₃. The length increases as the distance from the interface becomes greater, and finally becomes constant.

[0139] The top pole layer 13 of this embodiment has the first portion 13A and a second portion 13D, the first portion 13A being closer to the air bearing surface 30. The width of the first portion 13A is equal to the recording track width. The width of the second portion 13D is equal to the recording track width at the interface with the first portion 13A, and gradually increases as the distance from the air bearing surface 30 increases. It is preferred that each of the lateral edges of the portion of the second portion 13D having the increasing width forms an angle of 30 to 60 degrees with respect to the direction orthogonal to the air bearing surface 30. The interface between the first portion 13A and the second portion 13D is located closer to the air bearing surface 30 than zero throat height position TH0. Therefore, width W1 of the top pole layer 13 at zero throat height position TH0 is greater than recording track width W2, that is, the width of the first portion 13A. It is preferred that the interface between the first portion 13A and the second portion 13D is located at a distance of 0 to 1.0 μm from the zero MR height position toward the direction opposite to the air bearing surface 30.

[0140] According to the embodiment, the end of the center portion 8a₁of the second shield layer 8aopposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30. As a result, it is possible to precisely control the throat height and the zero throat height position. In addition, the length of each of the side portions 8a₂and 8a₃of the second shield layer 8abetween the end located in the air bearing surface 30 and the other end is greater than the length of the center portion 8a₁, except the interface between the center portion 8a₁, and each of the side portions 8a₂and 8a₃. As a result, the volume of the second shield layer 8aand the areas of the first shield layer 3 and the second shield layer 8atouching each other are made greater, compared to the case in which the entire second shield layer 8ahas a constant length. It is thereby possible to prevent a magnetic flux from saturating in the portion connecting the first shield layer 3 to the second shield layer 8aeven when the throat height is small.

[0141] According to the embodiment, the width of the second portion 13D gradually decreases as the distance from the air bearing surface 30 decreases. It is thereby possible to prevent a magnetic flux from saturating in the top pole layer 13.

[0142] The remainder of the configuration, functions and effects of the embodiment are similar to those of the first embodiment.

[0143] [Fifth Embodiment]

[0144] Reference is now made to FIG. 13 to describe a thin-film magnetic head and a method of manufacturing the same of a fifth embodiment of the invention. FIG. 13 is a top view of the main part of the thin-film magnetic head of the embodiment, wherein an overcoat layer and the other insulating layers and films are omitted.

[0145] In the fifth embodiment the second shield layer 8ahas: the center portion 8a₁that faces toward the top pole layer 13 and defines the throat height; and the side portions 8a₂and 8a₃placed at ends of the width of the center portion 8a₁. An end of the center portion 8a₁opposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30, and is located at zero throat height position TH0. The length of each of the side portions 8a₂and 8a₃between an end located in the air bearing surface 30 and the other end is equal to the throat height at the interface between the center portion 8a₁and each of the side portions 8a₂and 8a₃. The length increases as the distance from the interface becomes greater, and finally becomes constant. The portion of each of the side portions 8a₂and 8a₃having the varying width between the end located in the air bearing surface 30 and the other end has the end opposite to the air bearing surface 30 located along each of the ends of the third portion 13C of the top pole layer 13 located at each end of the width of the third portion 13C.

[0146] According to the embodiment, the end of the center portion 8a₁of the second shield layer 8aopposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30. As a result, it is possible to precisely control the throat height and the zero throat height position. In addition, the length of each of the side portions 8a₂and 8a₃of the second shield layer 8abetween the end located in the air bearing surface 30 and the other end is greater than the length of the center portion 8a₁, except the interface between the center portion 8a₁and each of the side portions 8a₂and 8a₃. As a result, the volume of the second shield layer 8aand the areas of the first shield layer 3 and the second shield layer 8atouching each other are made greater, compared to the case in which the entire second shield layer 8ahas a constant length. It is thereby possible to prevent a magnetic flux from saturating in the portion connecting the first shield layer 3 to the second shield layer 8aeven when the throat height is low.

[0147] The remainder of the configuration, functions and effects of the embodiment are similar to those of the first embodiment.

[0148] [Sixth Embodiment]

[0149] Reference is now made to FIG. 14A to FIG. 18A, FIG. 14B to FIG. 18B, and FIG. 19 to describe a thin-film magnetic head and a method of manufacturing the same of a sixth embodiment of the invention. FIG. 14A to FIG. 18A are cross sections each orthogonal to an air bearing surface. FIG. 14B to FIG. 18B are cross sections of the pole portion each parallel to the air bearing surface.

[0150] The steps of the manufacturing method of the sixth embodiment that are taken until the second shield layer 8aand the magnetic layer 8bare formed are the same as those of the first embodiment, as shown in FIG. 14A and FIG. 14B.

[0151] In the following step of the sixth embodiment, as shown in FIG. 15A and FIG. 15B, the insulating film 9 of alumina, for example, is formed over the entire surface. The thickness of the insulating film 9 is about 0.3 to 0.6 μm.

[0152] Next, a photoresist is patterned through a photolithography process to form the frame 19 for making the thin-film coil through frame plating. Next, a first layer 31 of the thin-film coil made of copper, for example, is formed by frame plating through the use of the frame 19. For example, the thickness of the first layer 31 is about 1.0 to 2.0 μm and the pitch is 1.2 to 2.0 μm. The frame 19 is then removed. In the drawings numeral 31aindicates a portion for connecting the first layer 31 to a second layer of the coil described later.

[0153] Next, as shown in FIG. 16A and FIG. 16B, an insulating layer 32 of alumina, for example, having a thickness of about 3 to 4 μm is formed over the entire surface. The insulating layer 32 is then polished through CMP, for example, until the second shield layer 8aand the magnetic layer 8bare exposed, and the surface is flattened. Although the first layer 31 of the coil is not exposed in FIG. 16A and FIG. 16B, the first layer 31 may be exposed.

[0154] Next, as shown in FIG. 17A and FIG. 17B, the recording gap layer 12 made of an insulating material whose thickness is 0.2 to 0.3 μm, for example, is formed on the second shield layer 8aand the magnetic layer 8bexposed and the insulating layer 32. Next, a portion of the recording gap layer 12 located on top of the magnetic layer 8bis etched to form a contact hole for making the magnetic path.

[0155] Next, on the recording gap layer 12, a pole portion layer 41ahaving a thickness of 2 to 3 μm, for example, is formed. The pole portion layer 41aincludes a pole portion of a top pole layer 41 that defines the recording track width. In addition, a magnetic layer 41bhaving a thickness of 2 to 3 μm is formed in the contact hole provided in the portion on top of the magnetic layer 8b.In this embodiment the top pole layer 41 is made up of the pole portion layer 41a,the magnetic layer 41b,and a yoke portion layer described later. The magnetic layer 41bis provided for connecting the magnetic layer 8bto the yoke portion layer described later. In this embodiment the length of the pole portion layer 41abetween an end thereof located in the air bearing surface 30 and the other end is greater than the length of the MR element 5 between an end thereof located in the air bearing surface 30 and the other end. Furthermore, this length of the pole portion layer 41ais equal to or greater than the length of the portion of the second shield layer 8athat defines the throat height, the length between an end located in the air bearing surface 30 and the other end.

[0156] The pole portion layer 41aand the magnetic layer 41bof the top pole layer 41 may be made of NiFe (80 weight % Ni and 20 weight % Fe), or NiFe (45 weight % Ni and 55 weight % Fe) as a high saturation flux density material and formed through plating, or may be made of a material such as FeN or FeZrN as a high saturation flux density material through sputtering. Alternatively, a material such as CoFe or a Co-base amorphous material as a high saturation flux density material may be used.

[0157] Next, the recording gap layer 12 is selectively etched through dry etching, using the pole portion layer 41aas a mask. The dry etching may be reactive ion etching (RIE) using a chlorine-base gas such as BCl₂or C1₂, or a fluorine-base gas such as CF₄or SF₆, for example. Next, the second shield layer 8ais selectively etched by about 0.3 to 0.6 μm through argon ion milling, for example. A trim structure as shown in FIG. 17B is thus formed.

[0158] Next, an insulating film 33 of alumina, for example, having a thickness of about 0.3 to 0.6 μm is formed over the entire surface. Next, portions of the insulating film 33, the recording gap layer 12 and the insulating layer 32 located on top of the connecting portion 31aare etched to form a contact hole. Next, a second layer 34 of the thin-film coil made of copper, for example, is formed by frame plating. For example, the thickness of the second layer 34 is about 1.0 to 2.0 μm and the pitch is 1.2 to 2.0 μm. In the drawings numeral 34aindicates a portion for connecting the second layer 34 to the first layer 31 of the coil through the above-mentioned contact hole.

[0159] Next, as shown in FIG. 18A and FIG. 18B, an insulating layer 35 of alumina, for example, having a thickness of about 3 to 4 μm is formed over the entire surface. The insulating layer 35 is then polished through CMP, for example, so that the pole portion layer 41aand the magnetic layer 41bof the top pole layer 41 are exposed, and the surface is flattened. Although the second layer 34 is not exposed in FIG. 18A, the second layer 34 may be exposed. If the second layer 34 is exposed, another insulating layer is formed to cover the second layer 34 and the insulating layer 35.

[0160] Next, a yoke portion layer 41chaving a thickness of about 2 to 3 μm, for example, is formed on the pole portion layer 41aand the magnetic layer 41bof the top pole layer 41 and the insulating layer 35 that are flattened. The yoke portion layer 41cprovided for the recording head is made of a magnetic material and forms a yoke portion of the top pole layer 41. The yoke portion layer 41cis in contact with and magnetically coupled to the first shield layer 3 through the magnetic layer 41band the magnetic layer 8b.The yoke portion layer 41cmay be made of NiFe (80 weight % Ni and 20 weight % Fe), or NiFe (45 weight % Ni and 55 weight % Fe) as a high saturation flux density material and formed through plating or may be made of a material such as FeN or FeZrN as a high saturation flux density material through sputtering. Alternatively, a material such as CoFe or a Co-base amorphous material as a high saturation flux density material may be used. To improve the high frequency characteristic, the yoke portion layer 41cmay be made of a number of layers of inorganic insulating films and magnetic layers of Permalloy, for example.

[0161] In this embodiment an end face of the yoke portion layer 41cfacing toward the air bearing surface 30 is located at a distance from the air bearing surface 30 (that is, on the right side of FIG. 18A). In this embodiment, in particular, the distance between the air bearing surface 30 and the end of the yoke portion layer 41cfacing toward the air bearing surface 30 is greater than the length of the MR element 5 between an end thereof located in the air bearing surface 30 and the other end.

[0162] Next, an overcoat layer 37 of alumina, for example, having a thickness of 20 to 40 μm is formed over the entire surface. The surface of the overcoat layer 37 is then flattened and pads (not shown) for electrodes are formed on the overcoat layer 37. Finally, lapping of the slider including the foregoing layers is performed to form the air bearing surface 30 of the thin-film magnetic head including the recording head and the reproducing head. The thin-film magnetic head of the embodiment is thus completed.

[0163] In this embodiment the top pole layer 41 made up of the pole portion layer 41a,the magnetic layer 41band the yoke portion layer 41ccorresponds to the magnetic layer of the invention.

[0164] FIG. 19 is a top view of the main part of the thin-film magnetic head of the embodiment, wherein the overcoat layer and the other insulating layers and films are omitted. In FIG. 19 ‘TH’ indicates the throat height, ‘TH0’ indicates the zero throat height position, and ‘MR-H’ indicates the MR height.

[0165] In this embodiment the first layer 31 of the coil is located on a side of the second shield layer 8a.In this embodiment throat height TH is the length of the portion of the second shield layer 8athat defines the throat height, the length between an end of this portion located in the air bearing surface 30 and the other end. (This length may be simply called the length of the second shield layer 8ain the following description.) As in the first embodiment, throat height TH is greater than MR height MR-H, that is, the length of the MR element 5 between an end thereof located in the air bearing surface 30 and the other end. The length of the second shield layer 8ais preferably 150 to 600 percent of MR height MR-H, and more preferably 300 to 500 percent. In other words, if MR height MR-H is 0.5 μm, for example, the length of the second shield layer 8ais preferably 0.75 to 3.0 μm, and more preferably 1.5 to 2.5 μm.

[0166] In the embodiment the track width is defined by the pole portion layer 41aof the top pole layer 41. As shown in FIG. 19, the pole portion layer 41ahas a first portion 41a₁, a second portion 41a₂and a third portion 41a₃in the order in which the closest to the air bearing surface 30 comes first. The first portion 41a₁has a width equal to the recording track width. The second portion 41a₂is greater than the first portion 41a₁in width. The width of the third portion 41a₃is equal to the width of the second portion 41a₂at the interface between the third portion 41a₃and the second portion 41a₂. The width of the third portion 41a₃increases from this interface with an increase in the distance from the air bearing surface 30, and the width finally becomes constant.

[0167] The pole portion layer 41ahas edges linking lateral edges of the first portion 41a₁orthogonal to the air bearing surface 30 to lateral edges of the second portion 41a₂orthogonal to the air bearing surface 30. These edges linking the lateral edges of the first portion 41a₁to the lateral edges of the second portion 41a₂are parallel to the air bearing surface 30.

[0168] In the pole portion layer 41athe interface between the first portion 41a₁and the second portion 41a₂is located near the zero MR height position.

[0169] In the pole portion layer 41athe interface between the second portion 41a₂and the third portion 41a₃is located closer to the air bearing surface 30 than zero throat height position TH0, that is, the position of an end of the portion of the second shield layer 8athat faces toward the pole portion layer 41a,the end opposite to the air bearing surface 30. As a result, in this embodiment, width Wl of the pole portion layer 41aat zero throat height position TH0 is greater than recording track width W2, that is, the width of the first portion 41a_l.

[0170] The yoke portion layer 41cof the top pole layer 41 has a first portion 41c₁and a second portion 41C₂in the order in which the closest to the air bearing surface 30 comes first. The first portion 41c₁, has a width nearly equal to the greatest width of the third portion 41a₃of the pole portion layer 41a.The width of the second portion 41c₂is equal to the width of the first portion 41c₁at the interface between the first portion 41c₁and the second portion 41c₂. The width of the second portion 41c₂increases from this interface with an increase in the distance from the air bearing surface 30, and the width finally becomes constant. The first portion 41c₁is located so as to be laid nearly over the second portion 41a₂and the third portion 41a₃of the pole portion layer 41a.

[0171] According to the embodiment thus described, the throat height is defined by the second shield layer 8a.The first layer 31 of the thin-film coil is located on the first shield layer 3 and on a side of the second shield layer 8a.The top surface of the insulating layer 32 covering the first layer 31 is flattened, together with the top surface of the second shield layer 8a.In addition, the top pole layer 41 is divided into the pole portion layer 41aand the yoke portion layer 41c.As a result, the pole portion layer 41aof the top pole layer 41 that defines the recording track width is formed on the flat surface. Therefore, according to the embodiment, it is possible to form the pole portion layer 41awith accuracy and to precisely control the recording track width even if the recording track width is reduced down to the half-micron or quarter-micron order.

[0172] According to the embodiment, the width of the pole portion layer 41aat the zero throat height position is greater than the recording track width. It is thereby possible to prevent a magnetic flux from saturating in the pole portion layer 41ain the neighborhood of the zero throat height position. In addition, the width of the pole portion layer 41agradually decreases toward the air bearing surface 30. Therefore, it is impossible that the cross-sectional area of the magnetic path abruptly decreases. Saturation of a magnetic flux halfway through the magnetic path is thereby prevented. Furthermore, since the width of the pole portion layer 41aat the zero throat height position is greater than the recording track width, the areas of the pole portion layer 41aand the yoke portion layer 41ctouching each other are increased. It is thereby possible to prevent a magnetic flux from saturating in the portions of the pole portion layer 41aand the yoke portion layer 41ctouching each other. According to the embodiment, it is thereby possible to utilize the magnetomotive force generated by the layers 31 and 34 of the coil for writing with efficiency and to improve the overwrite property.

[0173] According to the embodiment, the pole portion layer 41athat defines the recording track width is formed on the flat surface. As a result, it is possible to prevent an increase in the width of the first portion 41a₁that defines the recording track width when the width of the pole portion layer 41aat the zero throat height position is made greater than the recording track width as described above.

[0174] In the embodiment an end of the second portion 41a₂of the pole portion layer 41aon a side of the air bearing surface 30 is parallel to the air bearing surface 30. The first portion 41a₁of the pole portion layer 41ais connected to this end of the second portion 41a₂. Therefore, a photomask used for making the pole portion layer 41athrough photolithography has a shape including a side corresponding to the end of the second portion 41a₂on the side of the air bearing surface 30 and an additional concave or convex portion corresponding to the first portion 41a_l. The pole portion layer 41ais formed on the flat surface through the use of the photomask in the above-described shape. It is thereby possible to precisely control the width of the first portion 41a_l, that is, the recording track width.

[0175] In the embodiment the second layer 34 of the thin-film coil is located on a side of the pole portion layer 41aof the top pole layer 41. The top surface of the insulating layer 35 covering the second layer 34 is flattened, together with the top surface of the pole portion layer 41a.As a result, the yoke portion layer 41cof the top pole layer 41 is formed on the flat surface, too. It is thereby possible to form the yoke portion layer 41cof small dimensions. So-called ‘side write’ and ‘side erase’ are thus prevented.

[0176] In the embodiment an end face of the yoke portion layer 41cfacing toward the air bearing surface 30 is located at a distance from the air bearing surface 30. As a result, it is impossible that the yoke portion layer 41cis exposed from the air bearing surface 30 even if the throat height is low. Side write and side erase are thereby prevented.

[0177] According to the embodiment, the length of the pole portion layer 41abetween an end thereof facing toward the air bearing surface 30 and the other end is greater than the MR height, that is, the length of the MR element 5 between the end thereof located in the air bearing surface 30 and the other end. In addition, the end face of the yoke portion layer 41cfacing toward the air bearing surface 30 is located at a distance from the air bearing surface 30. Therefore, portions of the pole portion layer 41aand the yoke portion layer 41ctouch each other in the region farther from the air bearing surface 30 than the zero MR height position, too. As a result, according to the embodiment, side write and side erase are prevented since the end face of the yoke portion layer 41cfacing toward the air bearing surface 30 is located at a distance from the air bearing surface 30. At the same time, it is possible to prevent an abrupt decrease in the cross-sectional area of the magnetic path in the top pole layer 41 and to prevent a magnetic flux from saturating halfway through the magnetic path.

[0178] In the embodiment the distance between the air bearing surface 30 and the end of the yoke portion layer 41cfacing toward the air bearing surface 30 is equal to or greater than the MR height, that is, the length of the MR element 5 between an end thereof located in the air bearing surface 30 and the other end. It is thereby possible to prevent side write and side erase more effectively.

[0179] According to the embodiment, the insulating film 33 made of an inorganic material is provided between the first layer 31 and the second layer 34 of the thin-film coil, in addition to the recording gap layer 12. High insulation strength is thereby obtained between the first layer 31 and the second layer 34 of the coil. In addition, it is possible to reduce flux leakage from the layers 31 and 34 of the coil.

[0180] The remainder of the configuration, functions and effects of the embodiment are similar to those of the first embodiment.

[0181] [Seventh Embodiment]

[0182] Reference is now made to FIG. 20 to describe a thin-film magnetic head and a method of manufacturing the same of a seventh embodiment of the invention. FIG. 20 is a top view of the main part of the thin-film magnetic head of the embodiment, wherein an overcoat layer and the other insulating layers and films are omitted.

[0183] In the seventh embodiment the second shield layer 8ahas a shape in which a portion closest to the air bearing surface 30 is smaller than the other portion in width. The width of this portion decreases toward the air bearing surface 30. An end of the second shield layer 8aopposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30, and is located at zero throat height position TH0.

[0184] According to the embodiment, since the second shield layer 8ahas the geometry as described above, it is possible to reduce the width of the second shield layer 8ain the air bearing surface 30 and to prevent an increase in effective track width. In addition, the width of the second shield layer 8agradually decreases toward the air bearing surface 30. It is thereby possible to prevent a magnetic flux from saturating in the second shield layer 8a.Furthermore, it is possible to control the throat height and the zero throat height position with accuracy since the end of the second shield layer 8aopposite to the air bearing surface 30 has the shape of a straight line parallel to the air bearing surface 30.

[0185] The remainder of the configuration, functions and effects of the embodiment are similar to those of the sixth embodiment.

[0186] The present invention is not limited to the foregoing embodiments but may be practiced in still other ways. In the foregoing embodiments, for example, the thin-film magnetic head is disclosed, comprising the MR element for reading formed on the base body and the induction-type magnetic transducer for writing stacked on the MR element. Alternatively, the MR element may be stacked on the magnetic transducer.

[0187] That is, the induction-type magnetic transducer for writing may be formed on the base body and the MR element for reading may be stacked on the transducer. Such a structure may be achieved by forming a magnetic film functioning as the top pole layer of the foregoing embodiments as a bottom pole layer on the base body, and forming a shield layer functioning as the bottom pole layer of the embodiments as a top pole layer facing the bottom pole layer with a recording gap film in between.

[0188] According to the thin-film magnetic head or the method of manufacturing the same of the invention thus described, the first and second shield layers are magnetically connected to each other, and the magnetoresistive element is shielded by these shield layers. As a result, the effect of shielding the magnetoresistive element in the reproducing head is enhanced. According to the invention, it is not necessary to form an insulating film having a wide area between the two shield layers. It is thereby possible to prevent punctures of the insulating film and to improve the yield of the thin-film magnetic heads. According to the invention, at least a part of the thin-film coil is located on a side of the second shield layer and between the first shield layer and the magnetic pole layer. As a result, the magnetic pole layer is formed on the flat surface with accuracy. It is thereby possible to precisely control the track width of the recording head. According to the invention, an end of at least a part of the thin-film coil is located near an end of the second shield layer. It is thereby possible to reduce the yoke length.

[0189] According to the thin-film magnetic head or the method of manufacturing the same of the invention, the second shield layer has the portion for defining the throat height. It is thereby possible to control the track width with accuracy by the pole layer even is the throat height is low.

[0190] According to the thin-film magnetic head or the method of the invention, the portion of the second shield layer that defines the throat height may have a shape of a straight line parallel to the medium facing surface. In this case, it is possible to define the throat height with more accuracy.

[0191] According to the thin-film magnetic head or the method of the invention, the portion of the second shield layer that defines the throat height has the length between an end thereof located in the medium facing surface and the other end, the length being greater than the length of the magnetoresistive element between an end thereof located in the medium facing surface and the other end. As a result, it is possible to prevent saturation of a magnetic flux in the portion where the first shield layer is connected to the second shield layer.

[0192] According to the thin-film magnetic head or the method of the invention, the insulating layer may be further provided. The insulating layer covers the at least part of the thin-film coil located on the side of the second shield layer. A surface of the insulating layer facing toward the gap layer is flattened together with the surface of the second shield layer adjacent to the gap layer. In this case, in particular, the magnetic pole layer is formed on the flat surface with accuracy.

[0193] According to the thin-film magnetic head or the method of the invention, the magnetic pole layer may include the pole portion layer and the yoke portion layer. The pole portion layer includes the pole portion for defining the track width. The yoke portion layer is connected to the pole portion layer and makes up the yoke portion. In addition, an end face of the yoke portion layer facing toward the medium facing surface may be located at a distance from the medium facing surface. In this case, it is possible to prevent writing of data in a region where data is not supposed to be written and erasing of data where data is not supposed to be written.

[0194] According to the thin-film magnetic head or the method of the invention, the pole portion layer may have a length between an end thereof located in the medium facing surface and the other end, the length being greater than the length of the magnetoresistive element between the end thereof located in the medium facing surface and the other end. In this case, it is possible to prevent a magnetic flux from saturating in the portion where the pole portion layer is connected to the yoke portion layer.

[0195] According to the thin-film magnetic head or the method of the invention, the thin-film coil may include: the first layer located on a side of the second shield layer; and the second layer located on a side of the pole portion layer of the magnetic pole layer. In addition, the first insulating layer and the second insulating layer may be further provided. The first insulating layer covers the first layer of the coil and has a surface facing toward the gap layer, the surface being flattened together with the surface of the second shield layer adjacent to the gap layer. The second insulating layer covers the second layer of the coil and has a surface facing toward the yoke portion layer, the surface being flattened together with a surface of the pole portion layer of the magnetic pole layer facing toward the yoke portion layer. In this case, it is possible to form each of the pole portion layer and the yoke portion layer of the magnetic pole layer with accuracy on the flat surface.

[0196] Obviously many modifications and variations of the present invention are possible in the light of the above teachings. It is therefore to be understood that within the scope of the appended claims the invention may be practiced otherwise than as specifically described.