Flow rate detection mechanism with a restriction element for mass flow meters

[0002] 1. Field of the Invention

[0003] The present invention relates to a flow rate detection mechanism for mass flow meters and more particularly to an improved design and mounting a restriction element.

[0004] 2. Description of Related Art

[0005] Flow rate detection mechanism of mass flow meters have been constructed in such a manner as to obtain a laminar flow pattern in a gas passage, and for this type of configuration, an etching plate is used or a plurality of capillary tubes are used at a bypass section, as described in Japanese Patent Publication No. Sho 59-41126.

[0006] As shown in FIG. 9, a flow rate detection mechanism is described in Japanese Patent Publication No. Hei 6-78926 and introduces gas from a passage 1P for detecting the gas flow rate and allows gas to flow between a flow rate throttle valve 2P and a tapered inner circumferential surface 4P of a hole formed on a housing 3P in order to obtain laminar gas flow. An inflow port 5P, provided at the tapered inner circumferential surface 4P which forms a laminar flow, diverts a part of the gas into a sensor tube, and ejects the gas at an outflow port 6P. The gas is distributed to a flow rate control section via the circumferential surface 4P downstream of the outflow port 5P and before the passage 7P. On the other hand, the remainder of gas is distributed to the flow rate control section via the circumferential surface 4P and passage 7P.

[0007] The flow rate detection mechanism of the mass flow controller described in U.S. Pat. No. 5,099,881 obtains laminar gas flow by allowing gas introduced from a passage 1P′ to flow into an annular passage 4P′ formed by a plug 2P′ and a holder 3P′ both having a tapered portion, as shown in FIG. 10. And from a through hole 5P′, provided halfway in the annular passage 4P′, part of the gas is diverted and introduced from an injection port 6P′ to a sensor section 7P′, and the flow rate of this gas is measured by the sensor section 7P′, discharged from an extracting port 8P′ to the downstream side of the passage 9P′. The remainder of gas is distributed to the flow rate control section via the annular passage 4P′ and passage 9P′.

[0008] In the conventional flow rate detection mechanisms as described above, it is important to stabilize measurement values by forming a stable laminar flow in the tapered inner circumferential surface 4P or annular passage 4P′ with a flow rate throttle valve 2P and plug 2P′, to achieve uniform pressure distribution, and to divide the passage for measuring the flow rate from a portion in which the stable laminar flow is formed. Such mechanism require high accuracy in manufacturing.

[0009] For example, in FIG. 9, the flow rate throttle valve 2P is fastened with a screw 8P in order to obtain stable laminar flow by accurately aligning the center axis of the flow rate throttle valve 2P to the center axis of the passage 1P. However, this configuration has defects in that many components are required and they require high care to reduce the defects in processing, and also generate metallic powders by friction with the screw 8P when the flow rate throttle valve 2P rotates. This is a problem for measuring a gas flow rate when, in particular, gas that requires purity is allowed to pass as is the case of the gas used for semiconductor manufacturing processes.

[0010] In an example shown in FIG. 10, in order to align the center axis of plug 2P′ to that of passage 1P′, the basic profile of plug 2P′ is ground with a lathe, and then the plug 2P′ must be fixed to the passage 1P′ by an extremely troublesome fabrication process. That is, with each of the conventional techniques described above, there are problems of high labor and costs in manufacturing a flow rate detection mechanism.

[0011] In addition, in the above-mentioned conventional techniques, the maximum flow rate of gas allowed to flow in passages 1P, 1P′ must be restricted to a level that would not generate turbulence in the gas flow. That is, in the example of FIG. 9, since even a little disturbance that occurs in the pressure distribution of the gas flowing on the tapered inner circumferential surface 4P directly affects the measurement results, gas is only allowed to flow at a flow rate that would not cause turbulence in the gas flowing on the tapered inner circumferential surface 4P.

[0012] In the example shown in FIG. 10, disturbance occurring in the laminar gas flow on the upstream side of the portion with the through hole 5P′ is able to be absorbed at an annular chamber 12P′ located on the outer circumference of the holder 3P′ to some extent, but any turbulence in the outer circumferential portion 13P′ of the plug 2P′ in free communication with the extracting port 8P′ has serious effects on measurement results.

[0013] In the flow rate detection mechanism, as in the case of FIG. 10, gas is not only restricted to flow at a flow rate that would not cause turbulence around plug 2P′ on the downstream side 13P′ of the annular passage 4P′, but also the center axes of the passage 9P′, holder 3P′, and plug 2P′ must be meticulously aligned in order to prevent any occurrence of turbulence at the outer circumferential portion 13P′ of plug 2P′. In addition, because the chamber 12P′, as shown in FIG. 10, is intended to absorb pressure fluctuations by its volumetric capacity, a gas collection portion 14P′ is generated in a passage causing degradation of replacement characteristics of gas when gas is changed over.

[0014] In all of the above-mentioned examples, the profiles of the flow throttle valve 2P and plug 2P′ that can form stable laminar flow are those that can suppress the maximum flow rate of gas allowed to flow in passages 1P, 1P′ to a specified limit, and it is a practical limit to allow gas to flow at a flow rate of about 20 L/s at flow throttle valve 2P and plug 2P′ about 25 mm long. Consequently, to allow gas to flow accurately at a greater flow rate, the precision of the flow rate detection mechanism must be increased and this not only increases the manufacturing cost, but also causes the overall profile of the mass flow controller to be outside the planned dimensions.

[0015] It is an object of this invention to provide a flow rate detection mechanism for a mass flow meter which can achieve stable laminar flow even when pressure on the inlet-side of the sensor section varies and at the same time can greatly improve gas replacement characteristics and enable fine adjustment of the gas flow rate, as well as achieve better affinity to a sensor.

[0016] The flow rate detection mechanism for mass flow meters comprises a cylindrical holder inserted into a hole inside a block, an annular groove on the outer circumferential portion of the inlet end of the holder, a through hole for allowing gas to flow into the annular groove from the inlet end of the holder, a resisting member inserted into the holder where in a bypass passage is formed between the resisting member and the holder, a gas introducing hole in free communication with the annular groove, a gas discharging hole in free communication downstream of the holder, a sensor passage tube connected to the gas introducing hole and the gas discharging hole, wherein the gas flowing from the inlet side of the holder collides against the resisting member and is divided, with part of the gas flowing into the through hole, and the remainder flowing into the bypass passage inside the holder.

[0017] Consequently, because an annular groove is in free communication with the gas introducing hole, a gas approaching section is provide d by the annular groove and at the same time the pressure distribution can also be alleviated. That is, the gas condition of the gas introducing hole is free from pressure fluctuation by achieving the laminar flow condition within the annular groove, and the flow rate can be measured in accordance with the difference between gas pressures upstream and downstream of the resisting member.

[0018] In addition, because the gas flow of the bypass passage which is restricted by the resisting member no longer has to be a laminar flow and measurement results are no longer adversely affected even when only a little turbulence is generated, there is no restriction to the profile of the resisting member or the positional relationship between the resisting member and the holder, and it no longer costs a large amount of money for forming the flow rate detection mechanism. That is, a flow rate detection mechanism for mass flow meters which can constantly carry out stable measurement can be offered at low cost. Furthermore, by simplifying the construction of the resisting member, maintenance, such as cleaning the flow rate detection mechanism of mass flow meters, can be made easy, while reducing the number of irregular surfaces reduces the contact area as well as the reduce gas collecting portions to improve the replacement characteristics, and at the same time, there is no problem of mixing impurities, such as metal powders, into the flowing gas.

[0019] When a tapered portion is formed on the inner circumferential portion of the holder, and on the outer circumferential portion of the inserted resisting member, wherein the two tapered portions are parallel, and the position of the resisting member is adjusted to enable free adjustment of the size of the resistance of the bypass passage, a wide variety of flow rates are able to be set by the holder and the resisting member, thereby enabling the reduction of the number of components and the production cost can further be reduced.

[0020] When the resisting member is formed by cylindrical rolling of a strip material with a plurality of ribs on the surface and a flat strip material via the ribs, a plurality of holes parallel to each other are formed in the cylindrical axis direction as the bypass passage, stable measurement can be carried out even with gas flowing at a large flow rate.

[0021] And when a resisting member partly ground in the longitudinal direction to allow gas to flow from the holder inlet side to the outlet side is inserted in the holder inside and the bypass passage is formed, resistance by the resisting member can be accurately set, and gas flowing at a small flow rate can be measured highly accurately.

[0022] The objects and features of the present invention, which are believed to be novel, are set forth with particularity in the appended claims. The present invention, both as to its organization and manner of operation, together with further objects and advantages, may best be understood by reference to the following description, taken in connection with the accompanying drawings.

[0023] FIG. 1 is a cross-sectional view showing one example of a flow rate detection mechanism of mass flow meters according to the present invention;

[0024] FIG. 2 is an exploded perspective view of the flow rate detection mechanism of mass flow meters;

[0025] FIG. 3 is a cross-sectional view showing the flow rate detection mechanism of mass flow meters;

[0026] FIG. 4 is a cross-sectional view showing one variation of the flow rate detection mechanism of mass flow meters;

[0027] FIG. 5 is a cross-sectional view showing another example of a resisting member which is part of the flow rate detection mechanism of mass flow meters;

[0028] FIG. 6 is an illustration showing a manufacturing process of the resisting member;

[0029] FIG. 7 is a cross-sectional view showing one variation of the resisting member;

[0030] FIG. 8 is a cross sectional view showing another variation of the resisting member;

[0031] FIG. 9 is a cross-sectional view of a conventional flow rate detection mechanism; and

[0032] FIG. 10 is a cross-sectional view of a conventional flow rate detection mechanism of mass flow controllers.

[0033] The following description is provided to enable any person skilled in the art to make and use the invention and sets forth the best modes contemplated by the inventors of carrying out their invention. Various modifications, however, will remain readily apparent to those skilled in the art, since the general principles of the present invention have been defined herein specifically to provide a flow rate detection mechanism of mass flow meters.

[0034] Referring now to the drawings, preferred embodiments according to the present invention will be described in detail hereafter. FIG. 1 is a cross-sectional view of a fluid flow rate detection mechanism 1 of a mass flow meter, and FIG. 2 is an expanded perspective view of the flow rate detection mechanism 1. FIG. 3 is a cross-sectional view, as seen from sectional view III of the flow rate detection mechanism 1 in FIG. 1.

[0035] As shown in FIG. 1, the mass flow meter related to the present invention has a nearly cylindrical holder 2 inserted into a conduit or hole H provided in a housing or block B in the flow rate detection mechanism 1 and is constructed to introduce gas flowing from the inlet 3 of the flow rate detection mechanism 1 into the holder 2. On the outer circumferential portion of the inlet end of the holder 2, an undercut or clearance 4 of an annular groove (hereinafter the inside of the annular groove is expressed as a clearance 4) is provided. In addition, on the clearance 4, a plurality of through holes or apertures 7 are provided for allowing gas to circulate into the clearance 4. In the present example, through holes 7 are provided, for example, in three pieces, but any number is acceptable.

[0036] The through hole 7 is formed at the center of the clearance in the width direction, but since the clearance 4 is intended to alleviate pressure fluctuations by forming an approaching or introduction section R for making the gas flow into a laminar flow pattern and is not intended to alleviate volumetric pressure fluctuations of gas flow in the width direction of the clearance 4. That is, as in the case of the conventional example shown in FIG. 9, it does not form a gas collecting portion 14′. The portions where gas tends to collect in the clearance 4 may be positively eliminated by forming the through hole 7 at the upstream end portion of the clearance 4.

[0037] Reference numeral 8 is a gas introducing port or hole in the block B which is in free communication with the downstream end portion of the clearance 4, while reference numeral 9 is a gas discharging port or hole formed diagonally in the block B to freely communicate to the inside of the hole H downstream of the holder 2. A sensor passage tube 10 is connected to the gas introducing hole 8 and gas discharging hole 9, and the flow rate is measured by allowing the gas flowing in this sensor passage tube 10 to pass the sensor portion 11. That is, it is configured in such a manner as to prevent gas collecting portions from being formed in any of the gas passages connected to the sensor section 11.

[0038] In addition, on an inner circumferential surface of the holder 2, a tapered portion 12 is formed, and at the outer circumferential portion of a restrictor or resisting member 13 inserted into the holder 2, a tapered portion 14, parallel to the tapered portion 12 of the holder, is formed. For the resisting member 13, it is essential to fix it in such a manner that the through hole 7 is located upstream of a major axis portion 13aof a nearly cylindrical portion of the resisting member or plug 13, and the gas flow flowing in the through hole 7 is intended to be free from any influence of any pressure distribution of the gas stream flowing around the major axis portion 13a.

[0039] The resisting member 13 has grooves 15 ground along a longitudinal direction of the outer circumference of the major axis portion 13aafter grinding the resisting member 13 into the basic profile (cylindrical major axis portion 13aand the tapered portion 14), for example, with a lathe. When the resisting member 13 is fixed to the holder 2, the resisting member 13 is held in place by an elastic deformation of a plurality of fasteners 16 with C-letter cross-section by inserting them into the groove 15. The fasteners 16 have a diameter that will provide an interference fit within the circumference of the grooves or bores 15 when they are released.

[0040] This invention does not intend to limit the method for fixing the resisting member 13 to the holder 2. For example, a method for providing three each of the grooves 15 and fasteners 16 is shown, but in the case of a large-diameter resisting member 13, any variation is possible including using four or more fasteners 16 for fixation.

[0041] By the above-mentioned configuration, gas flowing in from the inlet 3 of the flow rate detection mechanism 1 is made turbulent by colliding against the resisting member 13, and part of the gas is diverted or proportioned and passes through holes 7 and flow into the measuring passage P₁(that is, gas flowing in the horizontal direction is diverted to circulate in the vertical direction). When gas passes the through hole 7, the gas forms a laminar flow by passing the approaching section R where gas flows along the outer circumference of the holder 2 in the clearance 4 and at the same time the gas pressure fluctuations are alleviated. Then, when this gas circulates into the gas introducing hole 8, the gas pressure fluctuations are further alleviated and a stable gas stream is supplied to the sensor passage tube 10.

[0042] The gas passing through the sensor passage tube 10 (measuring passage P₁) flows out to the outlet 5 of the flow rate detection mechanism 1 via the gas discharging hole 9. In this event, even if a turbulence of a certain level is generated in the gas stream between the holder 2 and the resisting member 13, the influence generated by this pressure fluctuation is absorbed by the gas discharging hole and does not affect the gas stream passing the sensor passage tube 10.

[0043] Both the gas introducing hole 8 and the gas discharging hole 9 have cross-sectional areas greater than that of the sensor passage tube 10, and by increasing the volume, pressure fluctuation remaining in the gas stream is absorbed, but since there is no place for forming pools in the gas passage for the gas introducing hole 8 and the gas discharging hole 9, the gas replacement characteristics are good. In addition, when sufficient effects can be obtained with the clearance 4, the gas replacement characteristics can be improved by reducing the gas introducing hole 8 and the gas discharging hole 9. Furthermore, it is also conceivable to omit the gas introducing hole 8 and gas discharging hole 9 in the present invention as an alternative embodiment.

[0044] The flow rate detection mechanism of the mass flow meter according to the present invention is designed to keep the gas flowing in the clearance 4 and the pressure of gas flowing into the gas introducing hole 8 constant to obtain a stable laminar flow. Even if any fluctuations are generated in the gas flow rate flowing in from the inlet 3, it is possible to allow gas to stably flow at a rate proportional to the gas pressure difference generated between the inlet 3 and the outlet 5 of the flow rate detection mechanism 1, and a constantly stable flow rate measurement can be carried out.

[0045] On the other hand, the remainder of gas which collide against the resisting member 13 and become turbulent circulates into a bypass passage P₂between the resisting member 13 and the inner surface of the holder 2 and circulates into the flow rate control section, not illustrated, via the outlet 5. Further downstream of the downstream end of the holder 2, the gas flow smoothly joins the gas passing through the gas discharging hole 9, and circulates into the flow rate control section, not illustrated. In this event, the pressure difference between the inlet 3 and the outlet 5 is related to the flow rate of gas passing the bypass passage and the size of the resistance caused by the resisting member 13.

[0046] By allowing the gas passing the measurement passage P₁and the gas passing the bypass passage P₂to join downstream of the downstream end of the holder 2 and the resisting member 13, the influence of turbulence of the gas flow which might be generated by the resisting member 13 is prevented from appearing in the gas flowing in the measurement passage P₁. That is, if the pressure difference is of such a level that it holds a proportional relationship with the gas flow rate flowing in the bypass passage P₂, the measurement values will not be affected even if some turbulence is generated by the resisting member 13.

[0047] Consequently, because it is no longer necessary to form a laminar flow free of turbulence in the passage between the resisting member 13 and the holder 2 and the center axis of the resisting member 14 no longer has to be aligned with the holder 2, the resisting member 13 can be formed in an easier and simpler fabrication process. Since the profile of the resisting member 13 is simple, it is possible to avoid generation of gas collecting portions or metallic powders by the resisting member and at the same time, maintenance operations including cleaning can be carried out more easily.

[0048] In addition, it is possible to adjust the size of the resistance of the resisting member 13 by way of the positional relationship between the resisting member 13 and the holder 2 by forming tapers 12, 14 on the inner circumferential surface of the holder 2 and the resisting member 13 as is the case of this example. That is, different kinds of flow rate detection mechanisms 1 with a varied flow rate measuring range can be formed by the holder 2 and the resisting member 13, and a remarkable reduction in production cost can be made.

[0049] FIG. 1 discloses the position of the resisting member 13 in which the measurement flow rate is brought to a minimum, and shows the position of the resisting member 13 in which the measurement flow rate is brought to a maximum in the alternate long and short dash line. It is essential to position the upstream end portion of the resisting member 13 on the downstream side of the hole 7 to carry out a stable measurement free of the profile of the resisting member 13 when the measurement flow rate, shown with the alternate long and short dash line, is brought to the maximum. In addition, it is also essential to position the downstream end portion of the resisting member 13 upstream of the freely communicating position of the gas discharging hole 9 when the measurement flow rate is brought to the minimum and to allow gas passing through the gas hole 9 to enter the open portion downstream of the resisting member 13 in order to prevent the influence of turbulence caused by the position of the resisting member 13 with respect to the hole H.

[0050] FIG. 4 shows another example of the present invention, and in this figure, members given the same reference numbers in FIGS. 1 through 3 are the same or equivalent members, and a detailed description will be omitted. The flow rate detection mechanism 1 shown in this example has the length of the resisting member 13 and the holder 2 shortened. That is, using the flow rate detection mechanism 1 according to the present invention, it is possible to prevent influence of the turbulence caused by the resisting member 13 and to form the resisting member 14 in a still more compact form. Consequently, the size of the whole equipment can be reduced.

[0051] FIG. 4 shows the position of the resisting member 13 when the measurement flow rate is brought to the minimum, while the position of the resisting member 13 when the measurement flow rate is brought to the maximum is shown with the alternate long and short phantom dash line. That is, in the case when the measurement flow rate is brought to the minimum, the downstream end portion of the resisting member 13 is located upstream of the freely communicating position of the gas discharging hole 9, and the influence of the turbulence caused by the resisting member 13 can, thereby, be prevented from appearing in the measurements.

[0052] Again, also in the case when the measurement flow rate is brought to the maximum (when it is shown in the alternate long and short dash line), locating the upstream end portion of the resisting member 13 on the downstream side of the hole 7 enables stable measurements, irrespective of the profile of the resisting member 13. In this example, the displacement variable d of the resisting member 13 for changing the measurement flow rate is limited to, for example, around 2.5 mm.

[0053] FIG. 5 is a cross-sectional view showing another example of the present invention, where an example for measuring a large flow rate of gas is shown. In FIG. 5, the difference from the examples shown in FIGS. 1-4 is the profile of the holder 2 and the resisting member 13. Consequently, in order to avoid a duplicated explanation, members given the same reference numbers in the examples shown in FIGS. 1-4 are the same or equivalent members.

[0054] In FIG. 5, reference numeral 17 indicates a resisting or resistor member comprising laminar flow elements formed with a plurality of holes parallel to the longitudinal direction of the bypass passage P₂. This resisting member 17 is formed by cylindrical rolling up of a first flexible strip material or substrate 19 with a plurality of upstanding spaced ribs 18 on the surface and a second flexible flat cover strip 20 wound around a core material 21 and offset from the substrate 19 by the ribs 18, as shown, for example, in Figure 6.

[0055] The resistor member 17 forms a consecutive series of helically wound small flow passageways to provide laminar flow.

[0056] Consequently, by forming the bypass passage P₂by inserting the resisting member 17 into the holder 2, the resistance generated in the bypass passage P₂becomes extremely small. That is, by configuring the bypass passages in this example, even when a large volume of gas is allowed to flow at about 50 L/s with the resisting member, for example, about 25 cm long, it is possible to set the flow rate of gas flowing in the measuring passage P₁to a measurable range in the sensor section 11 (see FIG. 1). That is, a high flow rate of gas is able to be accurately measured. In this example, it is essential to locate the through hole 7 still more upstream of the upstream end of the resisting member 17 as in the case of examples shown in FIGS. 1-4 in order to achieve an accurate flow rate measurement.

[0057] FIG. 7 is a cross-sectional view showing still another example of the present invention, which is suited for measurement of the flow rate of gas flowing at a small flow rate. In FIG. 7, reference numeral 22 is a resisting member which is in a nearly cylindrical form in order to allow the outer circumference to fit inside the holder 2 and which has a portion 23 partly flat in the longitudinal direction. By the resisting member 22 shown in this example, the cross-sectional area of the bypass passage P₂can be accurately set by the flat portion 23, and the resistance caused by the resisting member 22 can be meticulously set. Consequently, the measurement accuracy when gas is allowed to flow at a small flow rate can be improved.

[0058] FIG. 8 shows a variation of the resisting member in which the resisting member 24 has a polygonal (for example, pentagonal) cross-section. That is, with each flat portion 25, a bypass passage P₂with an accurate cross-section is able to be formed, and the flow rate is able to be exactly set and can be increased as compared to that of the example shown in FIG. 7.

[0059] Furthermore, the resisting member of the present invention may be formed with etching plates piled up or a bypass passage P₂may be formed with capillaries.

[0060] As described above, with the flow rate detection mechanism of the mass flow meter according to this invention, gas pressure fluctuation is able to be alleviated by an annular clearance formed at the portion of the holder with a gas introducing hole, and the flow rate can be measured on the basis of the difference between the upstream and the downstream pressure of the resisting member. That is, it is no longer necessary to bring the gas flow to a laminar flow in a bypass passage restricted by the resisting member, even if turbulence occurs, it does not affect the measurement results. The degree of freedom is achieved in the profile of the resisting member, and there is no restriction to the positional relationship between the resisting member and the holder. That is, the cost required for formation of the flow rate detection mechanism can be reduced to a minimum and measurement can be stably carried out constantly.

[0061] In addition, by simplifying the construction of the resisting member, maintenance, such as cleaning of the flow rate detection mechanism of the mass flow meter, can be made easier, and it becomes possible to improve the replacement characteristics by reducing the contact area and reducing the gas pools, and there is no problem of mixing impurities, such as metal powders, into the circulating gas.

[0062] Those skilled in the art will appreciate that various adaptations and modifications of the just-described preferred embodiment can be configured without departing from the scope and spirit of the invention. Therefore, it is to be understood that, within the scope of the appended claims, the invention may be practiced other than as specifically described herein.