Piezoelectric transducer and actuator using said piezoelectric transducer

[0002] This application is based on patent application No. 10-119901 filed in Japan, the contents of which are hereby incorporated by reference.

[0003] 1. Field of the Invention

[0004] The present invention relates to the structure and process of forming of piezoelectric transducer, and an actuator using the piezoelectric transducer.

[0005] 2. Description of Related Art

[0006] Actuators utilizing piezoelectric transducers are highly efficient in converting electrical energy to motive energy, and generating large amounts of motive energy though being compact and lightweight. In addition, the motive energy generated by the piezoelectric transducer can be easily regulated. All of these characteristics make actuators utilizing piezoelectric transducers ideal for use in positioning and moving driven members in cameras, test instruments and other precision equipment.

[0007] The piezoelectric transducer which serves as the drive source used in this kind of actuator is comprised of a plurality of piezoelectric elements laminated together. This configuration allows the largest possible physical displacement in the direction of piezoelectric element thickness to be obtained in response to an applied voltage.

[0008] FIG. 22(a) is an oblique view showing the external structure of the piezoelectric transducer comprised of a plurality of piezoelectric elements laminated together. A piezoelectric transducer 100 is comprised of a plurality of individual piezoelectric elements 101 each being about 100 micrometers thick and provided on one surface with an electrode 102. Every other electrode 102 (between facing piezoelectric elements) is connected to a line 103 as the positive terminal while the remaining electrodes 102 are connected to the line 104 as the negative terminal as shown in FIG. 22(b). Since the thickness of the piezoelectric transducer changes as a voltage is applied between the positive and negative terminals, the changes in the thickness or displacement can be transmitted through an appropriate means to drive or position the driven member.

[0009] FIG. 23 is a cross-sectional view showing the actuator using the piezoelectric transducer comprised of a plurality of piezoelectric element units as described above. FIG. 24 is a cross sectional view showing the friction coupling of the actuator.

[0010] In FIG. 23, the reference numeral 111 denotes a frame, 112, 113, 114 are support blocks and 115 is a drive shaft. The drive shaft 115 is supported by the support block 113 and the support block 114 to allow axial movement. One end of the piezoelectric transducer 100 is affixed to the support block 112 and affixed at the other end to the drive shaft 115. The drive shaft 115 is supported to allow axial displacement (direction of arrow a and its opposite direction) in response to displacement in the direction of thickness of the piezoelectric transducer 100.

[0011] The drive shaft 115 passes through a slider block 116. An aperture 116ais formed, as shown in FIG. 24, in the lower part of the slider block 116 through which the drive shaft 115 passes and the lower half of the drive shaft 115 is thus exposed. In this aperture 116a, a pad 117 is fitted to engage with the lower half of the drive shaft 115, and a protrusion 117ais formed in the lower section in the pad 117 (See FIG. 24). The protrusion 117a of the pad 117 is pressed upwards by a plate spring 118 and an upward force F is thus applied on the pad 117 to contact the drive shaft 115.

[0012] A table 120 for placement of objects is secured to the slider block 116 with machine screws 121.

[0013] In the above arrangement, the drive shaft 115 and slider block containing the pad 117 are press-contacted by the force F of the plate spring 118 and friction coupled.

[0014] The operation is described next. First of all, when a sawtooth waveform pulse having a gentle rising part and a steep falling part is applied to the piezoelectric transducer 100, the gentle rising part of the drive pulse causes the piezoelectric transducer 100 to elongate, displacing in the direction of thickness, and the drive shaft 115 coupled to the piezoelectric transducer 100 also displaces slowly in the direction of the arrow “a”. The slider block 116 at this time friction coupled to the drive shaft 115 moves in the direction of the arrow “a” along with the drive shaft 15 due to the friction coupling force.

[0015] The steep falling part of the drive pulse causes the piezoelectric transducer 100 to contract, displacing in the direction of thickness, and the drive shaft 115 coupled to the piezoelectric transducer 100 also displaces swiftly in the opposite direction of the arrow “a”. The slider block 116 at this time friction coupled to the drive shaft 115 is effectively stopped in the current position and does not move, due to the cancelling out of the friction coupling force by the inertia of the slider block 116. The slider block 116 and the table attached to the slider block 116 can be moved consecutively in the direction of the arrow “a” by means of consecutive application of drive pulses to the piezoelectric transducer 100.

[0016] In order to move the slider block 116 and the table 120 in the opposite of the previous direction (opposite direction of arrow “a”), the sawtooth drive pulse waveform applied to the piezoelectric transducer 100 is changed and a drive pulse consisting of a steep rising part and a gentle falling part can then be applied to achieve movement in the opposite direction.

[0017] The above description also effectively takes into account that a sliding motion is added to the friction coupled surfaces between the slider block 116 and the drive shaft 115 whether moving in the direction of the arrow “a” or the opposite direction and objects moving in direction of the arrow “a” are also included due to the difference in drive times.

[0018] Among other configurations of the piezoelectric transducer is a piezoelectric transducer formed in hollow tubular shape of a single layer. FIG. 25 is a cross sectional view showing one configuration of the hollow tubular shaped single layer piezoelectric transducer 134. In FIG. 25, an electrode 136 and an electrode 137 are formed on the outer surface of the single layer, hollow tubular piezoelectric transducer 134, and an electrode 138 is formed on the inner surface of the hollow cylinder.

[0019] The single layer, hollow tubular piezoelectric transducer 134 is supported by support members 132, 133 installed on the right and left of a mount 131. A slider 135 is friction coupled to the hollow tubular piezoelectric transducer 134 by an appropriate amount of frictional force. A plug 133ais installed to fit in with one end of the piezoelectric transducer 134 and this plug 133ascrews into the support member 133 so that the piezoelectric transducer 134 is secured and supported by the mount 131.

[0020] In this configuration, a first electrode section comprised of an electrode 136 and an electrode 138; and a second electrode section comprised of an electrode 137 and an electrode 138, are both polarized beforehand in the same radial direction. When sawtooth wave pulses of mutually reverse polarities are applied to the first electrode section and the second electrode section while in this state, an elongation displacement occurs at the first electrode section and a contraction displacement occurs at the second electrode section during the gentle rising part of the sawtooth waveform pulse, and the slider 135 can move in the direction of the arrow “a”. Further, on the steep falling part of the sawtooth waveform pulse a sudden contraction displacement occurs at the first electrode section and a sudden elongation displacement occurs at the second electrode section however the inertia of the slider 135 cancels out the force of the frictional coupling with the piezoelectric transducer 134 and there is no sliding movement on their surfaces. Thus by transmitting the movement of the slider 135 to the drive section of a transducer by a suitable means, the positioning and driving of a drive member can be achieved.

[0021] The piezoelectric transducer of the conventional art configured as related above with a plurality of laminations of piezoelectric elements was fabricated by means of a complex process consisting of a process to install electrodes in the respective surfaces of the individual piezoelectric elements, a process to bond or adhere the laminations, and a process to wire the electrodes of each layer. These complex processes had the drawback of a high manufacturing cost.

[0022] Further, even though the hollow tubular shaped single layer piezoelectric transducer had the characteristic of comparatively high mechanical strength, increasing the intensity of the electrical field was required in order to increase the displacement generated by the piezoelectric element. Accordingly, when there are limitations on the voltage that can be applied to the piezoelectric element, the thickness of the piezoelectric transducer had to be reduced to raise the intensity of the electrical field. In other words, the problem arose that when increasing the displacement generated by the piezoelectric transducer was attempted, the mechanical strength of the piezoelectric transducer declined.

[0023] In view of the above mentioned problems it is therefore a purpose of the current invention to provide a piezoelectric transducer having a new laminated structure, simple to fabricate and yielding a large motive power.

[0024] Another object of this invention is to provide a piezoelectric transducer comprising a new laminated structure having adequate mechanical strength even if the thickness of the piezoelectric element is reduced in order to generate a large displacement by increasing the intensity of the electrical field.

[0025] Yet another object of this invention is to provide a new process of forming a piezoelectric transducer comprising a new laminated structure, simple to fabricate, thus allowing a drastic reduction in the complex fabrication required in the conventional art such as a process to install electrodes in the respective surfaces of the individual piezoelectric elements, a process to bond or adhere the laminations, and a process to wire the electrodes of each layer.

[0026] Other objects of the invention will become clear by the detailed description of the invention while referring to the accompanying drawings.

[0027] FIG. 1 is an oblique view of the exterior of the piezoelectric transducer of the first embodiment of this invention.

[0028] FIG. 2 is a cross sectional view showing the piezoelectric transducer of FIG. 1.

[0029] FIG. 3 is an oblique view showing the fabrication process of the piezoelectric transducer of FIG. 1.

[0030] FIG. 4 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of FIG.

[0031] FIG. 5 is an oblique view showing the structure of the piezoelectric transducer of the second embodiment.

[0032] FIG. 6 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of FIG. 5.

[0033] FIG. 7 is an oblique view showing the structure of the piezoelectric transducer of the third embodiment.

[0034] FIG. 8 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of FIG. 7.

[0035] FIG. 9 is an oblique view showing the structure of the piezoelectric transducer of the fourth embodiment. FIG. 10 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of FIG. 9.

[0036] FIG. 11 is an oblique view showing the fabrication process of the piezoelectric transducer of the fifth embodiment.

[0037] FIG. 12 is an oblique view showing the piezoelectric transducer of FIG. 11.

[0038] FIG. 13 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of FIG. 12.

[0039] FIG. 14 is an oblique view showing the structure of the laminated piezoelectric element of the sixth embodiment.

[0040] FIG. 15 is an oblique view showing the structure of the piezoelectric transducer comprised of a folded piezoelectric element of FIG. 14.

[0041] FIG. 16 is an oblique view showing another configuration of the piezoelectric transducer comprised of a folded piezoelectric element.

[0042] FIG. 17 is a cross sectional view illustrating the laminated structure of the piezoelectric element in FIG. 16.

[0043] FIG. 18 is an oblique view showing another configuration of the piezoelectric transducer comprised of a folded piezoelectric element.

[0044] FIG. 19 is an oblique view shown another configuration of the laminated piezoelectric element.

[0045] FIG. 20 is an oblique view showing the structure of the laminated piezoelectric element of the seventh embodiment.

[0046] FIG. 21 is an oblique view of the exterior of the piezoelectric transducer of the seventh embodiment.

[0047] FIG. 22(a) is an oblique view showing the structure of the piezoelectric transducer of the conventional art comprising a plurality of laminated piezoelectric elements.

[0048] FIG. 22(b) is a side view showing the wiring of the piezoelectric transducer of the conventional art comprising a plurality of laminated piezoelectric elements.

[0049] FIG. 23 is a cross sectional view showing the actuator using the piezoelectric transducer of the conventional art comprising a plurality of laminated piezoelectric elements.

[0050] FIG. 24 is a cross sectional view showing the structure of the frictional coupling of the actuator of the conventional art in FIG. 23.

[0051] FIG. 25 is a cross sectional view showing a typical structure of the hollow tubular shaped single layer piezoelectric transducer of the conventional art.

[0052] The embodiments of the present invention will next be described in detail while referring to the accompanying drawings.

[0053] First Embodiment

[0054] The piezoelectric transducer of the first embodiment of this invention is described while using FIG. 1 through FIG. 3. FIG. 1 is an oblique view showing an external view of the piezoelectric transducer. FIG. 2 is a cross sectional view showing the piezoelectric transducer of FIG. 1. FIG. 3 is an oblique view showing the fabrication process of the piezoelectric transducer of FIG. 1.

[0055] The piezoelectric transducer as shown in FIG. 3 is first formed with two electrodes 11aand 12aon the respective surfaces of the two thin piezoelectric elements 11 and 12, next the surface of the second piezoelectric element 12 formed without the electrode, is aligned opposite with and laminated on the surface of the first piezoelectric element 11 having the surface electrode 11a, and then formed in a tubular shape as shown in FIG. 1 and FIG. 2.

[0056] As shown in FIG. 1, when laid on each other, the end of the second piezoelectric element 12 positioned on the upper side is formed with a notch 12bin order to expose the electrode 11aof the first piezoelectric element 11 positioned on the lower side. This notch 12ballows a wire lead to be connected to the electrode 11aon the lower side of the piezoelectric element 11.

[0057] The piezoelectric elements laminated on each other and wound to form a tubular shape are then normalized (baked), wire leads connected to the electrodes 11aand 12a, and when a specific high DC current is applied for polarization, the fabrication of a piezoelectric transducer 10 is complete.

[0058] As piezoelectric materials, PZT (PbZrO₃·PbTiO₃) can be used as the main constituents of the piezoelectric elements 11 and 12. Further, it is possible to use inorganic piezoelectric materials as the main constituents of the piezoelectric elements 11 and 12, wherein the inorganic piezoelectric materials can be formed in prescribed shape by baking. A ceramic powder of this type is mixed with solvents, dispersants and plasticizers, and then a blade or similar tool is used to draw out the material to a specified thickness with a uniform surface. When the solvent is dried, a soft material referred to as a green sheet can be obtained. An electrode is formed on the surface of this green sheet by a means such as lithography, a desired shape formed and when normalized (baked) to a specific temperature, a piezoelectric transducer as described above can be obtained.

[0059] FIG. 4 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of FIG. 1. Here, the reference numeral 14 denotes a mount, 15, 16, 17 are a support blocks, and 18 is a drive shaft. The drive shaft 18 is supported by the support block 16 and the support block 17 to move in the axial direction (direction of arrow “a” or opposite direction) by the axial displacement occurring in the piezoelectric transducer 10.

[0060] Here, the reference numeral 10 denotes a piezoelectric transducer formed in a tubular shape of two laminated thin piezoelectric elements as described above. One end of the piezoelectric transducer 10 is secured by bonding to the support block 15 and the other end is secured by bonding to the drive shaft 18.

[0061] The reference numeral 19 denotes a slider block. This slider block 19 is frictionally coupled by an appropriate amount of frictional force to the drive shaft 18. The frictional coupling is comprised of the same structure as previously described for the example of the conventional art in FIG. 24. In other words, the drive shaft 18 runs through the slider block 19 and an aperture 19ais formed in the lower section of the slider block 19 through which the drive shaft 18 runs and exposes the lower half of the drive shaft 18. Further, a pad 20 is insertably fitted to make contact in the lower half of the drive shaft 18 in the aperture 19a. This pad 20 is pressed upwards by a plate spring not shown in the drawing, the drive shaft 18, slider block 19 and the pad 20 are press-contacted by the force of the spring lever and frictionally coupled by an appropriate amount of frictional force. Further, the slider block 19 is coupled to a driven member such as a table not shown in the drawing.

[0062] This operation is the same for that previously described for the actuator in the example of the conventional art in FIG. 23. When a sawtooth waveform pulse at a frequency of 10 kHz is applied to the electrodes 11aand 12aof the piezoelectric transducer 10, a reciprocating vibration is generated axially at differing speeds in the piezoelectric transducer 10 and the same reciprocating vibration is also generated for the drive shaft 18. By this process, the slider block friction coupled to the drive shaft 18 is moved in the low speed direction of vibration by means of an asymmetrical reciprocal vibration while sliding along the drive shaft and a driven member such as a table coupled to a slider block can therefore be moved.

[0063] Second Embodiment

[0064] The piezoelectric transducer of the second embodiment has functions and configuration that can be substituted for the hollow tubular shaped single layer piezoelectric transducer shown in FIG. 25 as an example of the conventional art.

[0065] FIG. 5 is an oblique view showing the structure of the piezoelectric transducer of the second embodiment. This piezoelectric transducer comprises a lamination of two thin piezoelectric elements 31 and 32 and a portion is wound as shown in the drawing. The finished shape is a hollow tubular shape formed from a plurality of completely wound layers.

[0066] A common electrode 31ais formed on the entire surface of the first thin piezoelectric elements 31, and a first electrode 32aand a second electrode 32bare formed at a specified interval D on the surface of the second thin piezoelectric element 32. Next, the non-electrode side of the second piezoelectric element 32 is positioned opposite and laminated on the common electrode 31aof the first thin piezoelectric elements 31 and winding performed in a plurality of wound layers to comprise the hollow tubular shaped piezoelectric transducer 30.

[0067] As shown in FIG. 5, a notch 32cis formed on the end of the second piezoelectric element 32 positioned on the upper side during alignment for lamination in order to expose the end of the common electrode 31aof the first piezoelectric element 31 positioned on the lower side. A wire lead can then be connected to the common electrode 31aof the first piezoelectric element 31 on the lower side during alignment for lamination.

[0068] The piezoelectric elements configured in a wound tubular shape are normalized (baked), and wire leads connected to the first electrode 32a, the second electrode 32bas well as the common electrode 31a, and when a specified high DC current is applied across the first electrode 32aand common electrode 31aand also across the second electrode 32band the common electrode 31a, polarization occurs and the fabrication of the piezoelectric transducer 30 is complete.

[0069] The material and the fabrication process of the piezoelectric elements 31 and 32 is the same as previously described for the configuration of the first embodiment so the detailed description is omitted here.

[0070] FIG. 6 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer shown in FIG. 5. In FIG. 6, the reference numeral 34 denotes a mount, 35, 36 are support blocks and both ends of the above mentioned hollow, tubular shaped piezoelectric transducer 30 are fixedly supported by the support blocks 35 and 36. The technique used for securing and supporting the piezoelectric transducer 30 to the support blocks 35 and 36 is by fitting a plug into the end of the piezoelectric transducer 30 as shown in the previous example in FIG. 25, and screwing the plug into the support member, however other methods can be employed when suitable. A slider 37 is friction coupled on the hollow, tubular shaped piezoelectric transducer 30 by an appropriate amount of frictional force.

[0071] In this configuration, when a sawtooth waveform pulse is applied across the common electrode 31a of the surface of the first piezoelectric element 31 and a first electrode 32a of the second piezoelectric element 32 forming a first electrode section, and a sawtooth waveform pulse of reverse polarity is applied across the common electrode 31aof the first piezoelectric element 31 and an electrode 32bof the second piezoelectric element 32 forming a second electrode section, at the gentle rising part of the sawtooth waveform pulse, an elongation displacement is generated at the first electrode section and a contraction displacement is generated at the second electrode section, and the slider 37 can then move in the direction of the arrow “a”.

[0072] On the steep falling part of the sawtooth waveform pulse, a sudden contraction displacement occurs at the first electrode section and a sudden elongation displacement occurs at the second electrode section however the inertia of the slider 37 cancels out the force of the frictional coupling with the hollow, tubular piezoelectric transducer 30 and there is no sliding movement on their surfaces. Thus by transmitting the movement of the slider 37 to the driven member of a transducer by a suitable means, the positioning and driving of a drive member can be achieved.

[0073] This configuration has the advantages that an adhesive bond between the piezoelectric transducer and the drive shaft is unnecessary, assembly is simple, a large mechanical strength is obtained by the fixed support at both ends of the piezoelectric transducer and further that vibration is not prone to occur in a direction perpendicular to the axis. Additional advantages are that increasing the intensity of the electrical field is easy since each electrode in the laminated structure is thin and generating a large displacement is easy to achieve.

[0074] Third Embodiment

[0075] The piezoelectric transducer of the third embodiment has a structure similar to that previously described for the second embodiment however the structure of the third embodiment is capable of generating a larger axial displacement.

[0076] FIG. 7 is an oblique view showing the structure of the piezoelectric transducer of the third embodiment. Here, the piezoelectric transducer has a laminated structure comprised of two thin piezoelectric elements 41 and 42 and a portion of the structure in a wound state is shown in FIG. 7. The finished shape is a hollow tubular shape formed from a plurality of completely wound layers.

[0077] A common electrode 41ais formed on the entire surface of the first thin piezoelectric element 41, and a first electrode 42aand a second electrode 42bare formed at a specified interval D on the surface of the second thin piezoelectric element 42. Next, the non-electrode side of the second piezoelectric element 42 is positioned opposite and laminated on the common electrode 41aof the first thin piezoelectric elements 41 and winding performed in a plurality of wound layers to comprise the hollow tubular shaped piezoelectric transducer 40.

[0078] As shown in FIG. 7, a notch 42cis formed on the end of the second piezoelectric element 42 positioned on the upper side during alignment for lamination in order to expose the end of the common electrode 41aof the first piezoelectric element 41 positioned on the lower side. A wire lead can then be connected to the common electrode 41aof the first piezoelectric element 41 on the lower side during alignment for lamination.

[0079] Further, the widths hi of the first electrode 42aand the second electrode 42bon the surface of the second thin piezoelectric element 42, are the tubular lengths in the axial direction of the first and second electrodes 42a, 42bwhen the piezoelectric element 41 and 42 were laminated and wound into a hollow tubular shape so that the widths hi can be formed with an electrode width larger than in the configuration of the second embodiment. Also, an extension 42eis formed at the center section 42dwhere the first and second electrodes 42a, 42bof the second piezoelectric element 42 are not formed, and a large size frictional coupling 42fis formed at the center of the piezoelectric transducer 40 when the piezoelectric elements are wound in the hollow tube shape as shown in FIG. 8. The frictional coupling 42fis the section coupled by frictional force with the slider 47.

[0080] The piezoelectric elements configured in a wound tubular shape are normalized (baked), wire leads connected to the electrode 41a, 42aand 42b, and when a specified direct current high voltage is applied across the first electrode 42aand the common electrode 41aand also across the second electrode 42band the common electrode 41a, polarization is accomplished and the fabrication of the piezoelectric transducer 40 is complete.

[0081] The material and the fabrication process of the piezoelectric elements 41 and 42 is the same as previously described for the configuration of the first embodiment so the detailed description is omitted here.

[0082] FIG. 8 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of the third embodiment. In FIG. 8, the reference numeral 44 denotes a mount, 45, 46 are support blocks and both ends of the above mentioned hollow, tubular shaped piezoelectric transducer 40 are fixedly supported by the support blocks 45 and 46. The technique used for securing and supporting the piezoelectric transducer 40 to the support blocks 45 and 46 is by fitting a plug into the end of the piezoelectric transducer 40 as shown in the previous example in FIG. 25, and screwing the plug into the support member, however other methods can be employed when suitable. A slider 47 is friction coupled by an appropriate amount of frictional force to a large diameter friction coupling 42fformed in the center section of the piezoelectric transducer 40.

[0083] In this configuration, when a sawtooth waveform pulse is applied across the common electrode 41a on the surface of the first piezoelectric element 41 and a first electrode 42aof the second piezoelectric element 42 forming a first electrode section, and a sawtooth waveform pulse of reverse polarity is applied across the common electrode 41aof the first piezoelectric element 41 and a second electrode 42bof the second piezoelectric element 42 forming a second electrode section, during the gentle rising part of the sawtooth waveform pulse, an elongation displacement is generated at the first electrode section and a contraction displacement is generated at the second electrode section, and the slider 47 can then move in the direction of the arrow “a”.

[0084] On the steep falling part of the sawtooth waveform pulse a sudden contraction displacement occurs at the first electrode section and a sudden elongation displacement occurs at the second electrode section however the inertia of the slider 47 cancels out the force of the frictional coupling 42fwith the hollow, tubular piezoelectric transducer element 40 and there is no sliding movement on their surfaces. Thus by transmitting the movement of the slider 47 to the driven member by a suitable means, the positioning and driving of a driven member can be achieved.

[0085] This configuration, besides the same items mentioned for the second embodiment has the advantages that an adhesive bond between the piezoelectric transducer and the drive shaft is unnecessary, assembly is simple, a large mechanical strength is obtained by the fixed support at both ends of the piezoelectric transducer and a further benefit that vibration is not prone to occur in a direction perpendicular to the axis. Additional advantages are that increasing the intensity of the electrical field is easy since each electrode in the laminated structure is thin and generating a large displacement is easy to achieve.

[0086] A still further advantage of this configuration is that a greater width hi can be obtained for the electrodes 42aand 42bthan in the second embodiment of this invention, so that the drive is faster since a larger displacement can be obtained from application of the drive pulse voltage.

[0087] Fourth Embodiment

[0088] The piezoelectric transducer of the fourth embodiment is the hollow tubular piezoelectric transducer as previously described for the second embodiment however the structure is bent in the center so that an elliptical vibration can be generated in the bent section.

[0089] FIG. 9 is an oblique view showing the structure of the piezoelectric transducer of the fourth embodiment. Here, the piezoelectric transducer has a structure the same as previously described for the second embodiment, and a common electrode 51ais formed on the entire surface of the first thin piezoelectric element 51, and a first electrode 52aand a second electrode 52bare formed at a specified interval on the surface of the second thin piezoelectric element 52. Next, the non-electrode side of the second piezoelectric element 52 is positioned opposite and laminated on the common electrode 51aof the first thin piezoelectric elements 51 and winding performed in a plurality of wound layers to comprise the hollow tubular shaped piezoelectric transducer 50.

[0090] As shown in FIG. 9, a notch 52cis formed on the end of the second piezoelectric element 52 positioned on the upper side during alignment for lamination in order to expose the end of the common electrode 51aof the first piezoelectric element 51 positioned on the lower side. A wire lead can then be connected to the common electrode 51aof the first piezoelectric element 51 on the lower side during alignment for lamination.

[0091] Next, the piezoelectric element is bent near the center at a bend section 53 to form the shape shown in FIG. 9 and then normalized (baked), and when wire leads connected to the common electrode 51a, a first electrode 52aand a second electrode 52b, a specific high DC current is applied and polarization occurs, the fabrication of a piezoelectric transducer 50 is complete. A suitable means such as press-contact is then used in the bend section 53 to achieve friction coupling to drive the driven member 57 not shown in the drawing (See FIG. 10).

[0092] The material and the fabrication process of the piezoelectric elements 51 and 52 is the same as previously described for the configuration of the first embodiment so the detailed description is omitted here.

[0093] FIG. 10 is a cross sectional view showing the structure of the actuator used in the piezoelectric transducer of the fourth embodiment. In FIG. 10, the reference numeral 54 denotes a mount, 55, 56 are support blocks and both ends of the above mentioned hollow, tubular shaped piezoelectric transducer 50 are fixedly supported by the support blocks 55 and 56.

[0094] In this configuration, when a sine wave voltage of a certain phase is applied across the common electrode 51a on the surface of the first piezoelectric element 41 and a first electrode 52a of the second piezoelectric element 52 forming a first electrode section, and a sine wave voltage of a certain phase of a respectively different polarity is applied across the common electrode 51aof the first piezoelectric element 52 and a second electrode 52bof the second piezoelectric element 52 forming a second electrode section, an elliptical vibration is generated in the bend section 53 of the piezoelectric transducer 50 so that driving of the driven member 57 is accomplished by friction coupling to the bend section 53.

[0095] The configuration of the fourth embodiment, just the same as previously described for the second embodiment besides requiring no bond coupling between the drive shaft and the piezoelectric transducer and having a simple assembly process, also has a large mechanical strength by way of the fixed support at both ends of the piezoelectric transducer and the further benefit that vibration is not prone to occur in a direction perpendicular to the axis. Further advantages are that increasing the intensity of the electrical field is simple since each electrode in the laminated structure is thin and generating a large displacement is easy to achieve.

[0096] Fifth Embodiment

[0097] The piezoelectric transducer of the fifth embodiment is the configuration described for the fourth embodiment achieved in two dimensions.

[0098] FIG. 11 is an oblique view showing the fabrication process of the piezoelectric transducer of the fifth embodiment in which a common electrode 61a is installed on the entire surface of the square-shaped first piezoelectric element 61, and the four electrodes consisting of a first electrode 62a, a second electrode 62b, a third electrode 62cand a fourth electrode 62dmutually facing respectively in 90 degree directions are formed on the surface of the second piezoelectric element 62.

[0099] Next, the non-electrode side of the second piezoelectric element 62 is made to face and laminated on the common electrode 61aof the first piezoelectric element 61 and formed four elements 63a-63d. Notches are provided between each of the elements 63a, 63b, 63cand 63d. Each of these elements 63a, 63b, 63cand 63dis respectively wound to form four hollow tubular piezoelectric elements 63a, 63b, 63cand 63dat respective 90 degree angles on the same plane. These four hollow tubular piezoelectric elements 63a, 63b, 63cand 63dare joined together at a center section 63eof the piezoelectric transducer 60.

[0100] Next, each of the four hollow tubular piezoelectric elements 63a, 63b, 63cand 63djoined together at the center section 63e, are bent at a specified angle from the center section 63eas shown in FIG. 12. The resulting structure is normalized (baked). Wire leads are connected to the first electrode 62athrough fourth electrode 62d, a specified high direct current voltage applied to cause polarization and the fabrication of the piezoelectric transducer 60 is now complete. A driven member 67 not shown in the figure, (See FIG. 13) is friction coupled by a suitable means such as press-contact.

[0101] The material and the fabrication process of the piezoelectric elements 61 and 62 is the same as previously described for the configuration of the first embodiment so the detailed description is omitted here.

[0102] In this configuration, the four hollow tubular piezoelectric elements 63a, 63b, 63cand 63dare positioned at 90 degree angles from each other on the same surface. In other words, the piezoelectric elements 63aand 63care positioned along the plane of the X axis and the piezoelectric elements 63band 63dare positioned along the plane of the Y axis so that an actuator functioning on the X and Y axes can be obtained.

[0103] FIG. 13 is a cross sectional view showing the structure of the XY axis actuator used in the piezoelectric transducer of the fifth embodiment and shows a cross section taken along the X axis. The configuration is exactly the same however for the Y axis direction. In FIG. 13, the reference numeral 64 denotes a mount, and a support blocks 65, 66 are installed at the ends of the X axis. The ends of the piezoelectric elements 63aand 63cof the piezoelectric transducer 60 are fixedly supported by the support blocks 65, 66. Further, the support blocks 65, 66 are installed on the mount 64, at the ends of the Y axis (not shown in drawing) and fixedly support the ends of the piezoelectric elements 63band 63d.

[0104] In order to obtain movement along the X axis by drive of piezoelectric elements 63aand 63c, when a sine waveform voltage of a certain phase is applied to a first electrode section comprised of the common electrode 61aand first electrode 62aof a piezoelectric element 63a, and a sine waveform voltage of a correspondingly different phase is applied to a third electrode section comprised of the third electrode 62cand the common electrode 61aof a piezoelectric element 63c, a vibration is generated in the center section 63e of the piezoelectric transducer 60 so that the driven member 67 frictionally coupled to the center section 63eis driven in the direction of the X axis.

[0105] In order to obtain movement along the Y axis per drive of piezoelectric elements 63band 63d, when a sine waveform voltage of a certain phase is applied to a second electrode section comprised of the common electrode 61aand the second electrode 62bof a piezoelectric element 63b, and a sine waveform voltage of a correspondingly different phase is applied to a fourth electrode section comprised of the fourth electrode 62dand the common electrode 61aof a piezoelectric element 63d, a vibration is generated in the center section 63eof the piezoelectric transducer 60 so that the driven member 67 frictionally coupled to the center section 63eis driven in the direction of the Y axis.

[0106] The configuration of the fifth embodiment, just the same as previously described for the second embodiment, besides requiring no bond coupling between the drive shaft and the piezoelectric transducer and having a simple assembly process, also has a large mechanical strength by way of the fixed support at both ends of the piezoelectric transducer and the further benefit that vibration is not prone to occur in a direction perpendicular to the axis. Further advantages are that increasing the intensity of the electrical field is simple since each electrode in the laminated structure is thin and generating a large displacement is easy to achieve.

[0107] Sixth Embodiment

[0108] In contrast to the first through fifth embodiments in which the first thin piezoelectric element and the second thin piezoelectric element were laminated together and then wound, the piezoelectric transducer of the sixth embodiment has a structure in which the first thin piezoelectric element and the second thin piezoelectric element were laminated and then folded.

[0109] In other words, an oblique view in FIG. 14 shows the laminated structure of the first thin piezoelectric element and the second thin piezoelectric element. In FIG. 14, a common electrode 71ais formed on the upper surface of the first thin piezoelectric element 71 and further, an electrode 71b is formed on the lower surface of the piezoelectric element 71. An electrode 72ais formed on the upper surface of the second thin piezoelectric element 72. The non-electrode side of the piezoelectric element 72 faces the common electrode 71aof piezoelectric element 71 and is laminated and bonded on the piezoelectric element 71.

[0110] FIG. 15 is an oblique view showing the structure of the piezoelectric transducer 70 comprised of laminated and then folded piezoelectric elements. The laminated piezoelectric elements are consecutively folded so that the surface is alternately positioned on the inside and outside of the laminated piece. The upper surface electrode 72aof the piezoelectric element 72 and the lower electrode 71bof the piezoelectric element 71 are then electrically connected to comprise the first electrode 73 (=72a+71b). The resulting structure is normalized (baked). Wire leads are connected to the first electrode 73 and the common electrode 71a, a specified high direct current voltage applied to cause polarization and the fabrication of the piezoelectric transducer 70 as shown in FIG. 15 is now complete.

[0111] The material and the fabrication process of the piezoelectric elements 71 and 72 is the same as previously described for the configuration of the first embodiment so the detailed description is omitted here.

[0112] The piezoelectric transducer 70 of the shape shown in FIG. 15 can be substituted and used in place of the piezoelectric transducer 10 as previously described for the first embodiment.

[0113] In other words, when a sawtooth waveform pulse of some several hundred kilohertz is applied across the common electrode 71aand the first electrode 73 (72aand 71b) of the piezoelectric transducer 70, a reciprocating vibration of varying speeds is generated axially in the piezoelectric transducer 70, and just the same as explained for the first embodiment, a drive shaft (not shown in the drawing) secured tothepiezoelectrictransducer70 is madeto vibrate. A slider block friction coupled to the drive shaft is moved in the direction of the slower vibration by the asymmetrical motion from the reciprocating vibration of the drive shaft, and the driven member such as a table linked to the slider block can be moved.

[0114] FIG. 16 is also an oblique view showing the structure of the piezoelectric transducer 75 comprised of a thin first piezoelectric element and a thin second piezoelectric element which are laminated and then folded.

[0115] In the configuration of this embodiment, a common electrode 76ais formed on the upper surface of the thin first piezoelectric element 76, and an electrode 76cand an electrode 76dare formed separated by a specified gap D on the lower surface of the piezoelectric element 76 as shown in the cross sectional view of the piezoelectric element in FIG. 17. Further, an electrode 77aand an electrode 77bare formed separated by a specified gap D on the upper surface of the thin second piezoelectric element 77.

[0116] The non-electrode side of the second piezoelectric element 77 faces the common electrode 76aof the first piezoelectric element 76 and is laminated and bonded on the piezoelectric element 76 (see FIG. 17) these laminated piezoelectric elements are consecutively folded so that their surface is alternately positioned on the inside and outside of the laminated piece (see FIG. 16). The upper surface electrode 77aof the second piezoelectric element 77 and the lower electrode 76cof the first piezoelectric element 76 are then electrically connected to comprise the first electrode 78 (=77a+76c), and the electrode 77bof the second piezoelectric element 77 and the lower surface electrode 76dof the piezoelectric element 76 are electrically connected to comprise the second electrode 79(=77b+76d).

[0117] These piezoelectric elements are normalized (baked) and wire leads connected to the first electrode 78, common electrode 76aand second electrode 79. A specified high DC current is applied across the first electrode 78 and common electrode 76a, and also across the second electrode 79 and common electrode 76ato cause polarization, and the fabrication of the piezoelectric transducer 75 as shown in FIG. 16 is now complete.

[0118] The piezoelectric transducer 75 of the shape shown in FIG. 16 can be substituted and used instead of the previously described piezoelectric transducer 30 of the second embodiment. The operation and applications are identical to those of the second embodiment so a description is omitted here.

[0119] FIG. 18 is also an oblique view showing the structure of the piezoelectric transducer 80 comprised of a thin first piezoelectric element and a thin second piezoelectric element which are laminated and then folded comprising a structure similar to those in FIG. 16 and FIG. 17.

[0120] In the configuration of this embodiment, a common electrode 76ais formed on the upper surface of the thin first piezoelectric element 76, and an electrode 76cand an electrode 76dare formed separated by a specified gap D on the lower surface of the piezoelectric element 76. An electrode 77aand an electrode 77bare formed separated by a specified gap D on the upper surface of the thin second piezoelectric element 77. This configuration is similar to the previous configurations in FIG. 16 and FIG. 17.

[0121] However, the configuration shown in FIG. 18 differs from those in FIG. 16 and FIG. 17. That is, the width h1 for the electrodes 76cand electrode 76dformed separated by a specified gap D on the lower surface of the first piezoelectric element 76 and the width hi between the electrodes 77aand 77bformed separated by a specified distance h1 on the upper surface of the second piezoelectric element 77 is broader than the constitution shown in FIG. 16. Another difference is that an extension 77eis formed on the center section 77dof the second piezoelectric element 77 so that when the piezoelectric element is folded, a frictional coupling 77fwith a large thickness can be formed in the center of the piezoelectric transducer 80. The frictional coupling 77fis frictionally coupled to the slider not shown in the drawing.

[0122] The piezoelectric transducer 80 of the shape shown in FIG. 18 can be substituted and used instead of the previously described piezoelectric transducer 40 of the third embodiment. Though not shown in FIG. 18, a slider such as denoted by reference numeral 47 (configuration of third embodiment) of FIG. 8, is friction coupled to the friction coupling 77fby an appropriate amount of frictional force, and an elongation or contraction displacement of the piezoelectric transducer 80 causes frictional coupling by the friction coupling 77fso the slider can move in a specified direction. The operation and applications are identical to those of the third embodiment and detailed description is omitted here.

[0123] FIG. 19 is an oblique view showing another structure of the piezoelectric element as shown in FIG. 14. That is, one thin piezoelectric element sheet is folded over on itself. In FIG. 19, an electrode 85ais formed on the front surface of that one thin piezoelectric element sheet 85 and an electrode 85bis formed on the rear face and this structure folded over at section 86. In a configuration of this type, just as previously explained for the configuration in FIG. 15, there is no need for a process to form an electrical connection between the upper surface electrode 72 of the piezoelectric element 72 and the lower surface electrode 71bof the piezoelectric element 71.

[0124] The configuration shown in FIG. 19 can of course be adapted to the piezoelectric transducers shown in FIG. 16 and FIG. 18 and is further adaptable to the piezoelectric transducers shown in FIG. 1 and FIG. 5.

[0125] Seventh Embodiment

[0126] The piezoelectric transducer of the seventh embodiment has a hollow tubular shape transducer.

[0127] In FIG. 20, electrodes 92 and 93 are formed on the both side surfaces of the piezoelectric element 91, and an insulating sheet 94 is laminated and bonded on the electrode 93. Then, laminated sheet is wound to form a tubular shape as shown in FIG. 21.

[0128] The piezoelectric element formed in tubular shape is then normalized (baked), and wire leads connected to the electrodes 92 and 93, and when specific high DC voltage is applied for polarization, the fabrication of a piezoelectric transducer 10 is completed.

[0129] The material and the fabrication process of the piezoelectric element 91 is the same as previously described for the configuration of the first embodiment so the detailed description is omitted here.

[0130] In the above description, after the piezoelectric transducer of this invention, configured of a plurality of laminated sheets of thin piezoelectric elements has been wound in a tubular shape or folded, electrodes can be installed on the respective surfaces of each piezoelectric element, the elements laminated together and bonded, and a drastic reduction made in the former complicated process of installing wiring to the electrodes of each layer, so that not only can the cost of the fabrication process be greatly lowered but high mechanical strength is obtained even if the thickness of the individual piezoelectric elements are reduced in order to increase the intensity of the electrical field thus achieving a remarkable effect of the invention.

[0131] Further, a large motive power at a low voltage can be obtained from the actuator utilizing the piezoelectric transducer of this invention and an actuator having a high mechanical strength can also be provided.