Method and apparatus for detection of concentration of hydrogen peroxide vapor

[0002] 1. Field of the Invention

[0003] The present invention relates to detection of a concentration of hydrogen peroxide vapor in a treatment vessel, and more particularly to a method and apparatus for detection of the concentration of hydrogen peroxide vapor by means of a semiconductor gas sensor, in a system for such treatments as sterilization and disinfection, by bringing an object for treatment into contact with hydrogen peroxide vapor in a treatment vessel, with at least the pressure kept at a constant level.

[0004] 2. Description of the Prior Art

[0005] Since hydrogen peroxide vapor decomposes itself into harmless oxygen and water when coming into contact with a solid and generates nascent oxygen with sterilization and other effects, it can be used as a sterilizing agent and disinfectant and offers a wide range of application possibilities. It is currently used in sterilizing and disinfection treatments of such objects as pharmaceutical basic materials, pharmaceutical end products, and food packaging, in the pharmaceutical, medical supply and equipment manufacturing, and food industries. In such treatments, hydrogen peroxide vapor in a specific concentration is supplied under a certain pressure, generally under atmospheric pressure, into a treatment vessel storing therein objects to be treated, for example, packaging materials placed therein, to sterilize and disinfect those objects by bring them into contact with hydrogen peroxide vapor.

[0006] The problem is, however, that the concentration of hydrogen peroxide vapor drops with time in the treatment vessel because it is decomposed and consumed when the vapor is in contact with the object to be treated and the inner wall of the vessel itself. Sterilization and disinfection with hydrogen peroxide utilizes nascent oxygen which is generated from a decomposition of hydrogen peroxide. Sterilization and disinfection thus becomes ineffective when the concentration of hydrogen peroxide vapor falls below a certain level. Yet, it would be quite wasteful to supply too much hydrogen peroxide vapor into the vessel and keep the concentration higher than necessary for sterilization and disinfection. In addition, disposal of excess hydrogen peroxide vapor would add a cost burden, because it would be necessary to enlarge facilities for treating the excess vapor before releasing it into the atmosphere.

[0007] To perform sterilization and disinfection efficiently, the concentration of hydrogen peroxide vapor in a treatment vessel has to be controlled and maintained in a proper range. If such concentration control is to be exercised properly, it is essential to detect precisely and in real time the concentration of hydrogen peroxide in the vessel.

[0008] Among the known methods of directly detecting the concentration of hydrogen peroxide are the controlled potential electrolysis, test-paper photoelectric photometry, and detection tube methods. None of these allows real-time detection of the concentration of hydrogen peroxide vapor, however. Accordingly, none of these is suitable for detection of the concentration of hydrogen peroxide vapor in such treatments as sterilization and disinfection.

[0009] The controlled potential electrolysis method uses a concentration detector comprising a working electrode and a counter electrode arranged in a region for containing the electrolytic solution, isolated from the outside by a partition. As the hydrogen peroxide vapor penetrates the partition and diffuses into the region for containing the electrolytic solution, it is adsorbed on the working electrode comprising an electrochemical catalyst, and causes an oxidation or reduction reaction to generate electric current between the electrodes, which is measured, thereby detecting the concentration of hydrogen peroxide vapor. The problem with this method is that the hydrogen peroxide vapor, that is, the gas to be detected which has diffused into the electrolytic solution-containing region, will be adsorbed by and remain in the electrolytic solution after detection is over (i.e., after the sterilization operation is completed with the hydrogen peroxide vapor removed from within the treatment vessel) and the hydrogen peroxide by the working electrode will not be removed for a long time. That is especially the case where the concentration of hydrogen peroxide vapor applied is high enough for effective sterilization and disinfection, not lower than 500 ppm, for example. The use of the vapor in very low concentrations, 10 ppm, for example, does not present this problem. With the working electrode in such condition, the concentration detector is very low in sensitivity to the change in the concentration of hydrogen peroxide and cannot determine the concentration of hydrogen peroxide in real time and accurately.

[0010] The test-paper photoelectric photometry method is carried out by a concentration detector with test paper incorporated therein, the test paper which is given a special treatment with a chemical so as to color upon contact with the hydrogen peroxide vapor. By measuring the intensity of the coloring of the test-paper, the concentration of hydrogen peroxide vapor is detected. The test paper contains, in addition to the coloring chemical, a certain amount of water to facilitate the coloring. The trouble is that when it comes into contact with the moisture contained in the test paper, the hydrogen peroxide vapor is dissolved in the water, resulting in a changed concentration of hydrogen peroxide vapor around the concentration detector, which makes accurate detection virtually impossible. Meanwhile, the object to be treated is often put into the treatment vessel and dried, because if moisture is on the object to be treated in sterilization and disinfection, the hydrogen peroxide vapor is dissolved, thereby reducing the effectiveness of hydrogen peroxide vapor sterilization of the object to be treated. But if the object is dried in the vessel, the test paper in the concentration detector mounted therein will be dried as well and the moisture contained in the test paper evaporates out of the test paper. Thus, accurate detection of the hydrogen peroxide vapor is virtually impossible with such test paper. Furthermore, there is a concern that the chemical contained in the test paper can stain the object to be treated when it evaporates. As pointed out, the test paper photoelectric photometry method is not suited and can not be adopted as method for detection of the concentration of hydrogen peroxide vapor in sterilizations and disinfections that have to be performed in a low-humidity atmosphere.

[0011] The detection tube method utilizes a concentration detector with a glass tube filled with a detector agent which undergoes a chemical reaction and changes in color on contact with hydrogen peroxide vapor in the tube. The idea is that as the hydrogen peroxide vapor is led into the glass tube through the mouth of the tube, the detector agent changes in color. The length of the color change is measured by a scale on the glass tube to determine the concentration of hydrogen peroxide vapor. But this method does not permit continuous detection of concentration and can not determine the concentration of hydrogen peroxide vapor real-time.

[0012] Having determined that the semiconductor sensor widely used for the detection of the concentration of H₂, CO, alcohol, and other chemicals could be applied to detection of hydrogen peroxide vapor, the present inventors have developed a method for detection of hydrogen peroxide (this shall be called prior art in the present specification) comprising providing a semiconductor gas sensor inside a treatment vessel with a concentration indicator outside, so that the output of the semiconductor gas sensor was converted into the concentration of hydrogen peroxide vapor and the measurement was indicated on the concentration indicator.

[0013] The aforesaid semiconductor gas sensor generally comprises a sensor element made of sintered metal oxide, electrodes embedded therein, and a means for heating the sensor element (indirect or direct heating type). The principle of this prior art method is this: when the gas constituents are adsorbed on the surface of such oxide particles as n-type semiconductor oxide and p-type semiconductor oxide, the free electrons around the surface move to change the electro-conductivity. This change in electro-conductivity is detected. If the hydrogen peroxide is chemically adsorbed by the oxide semiconductor element in the treatment vessel, the free electrons move in the element, increasing the electro-conductivity of the element. This reaction takes place in a very short time. That is, the sensor output quickly reflects the change in concentration.

[0014] Meanwhile, the concentration indicator, to which the output signals are constantly input from the semiconductor gas sensor, indicates the hydrogen peroxide vapor concentration, a converted value of the output of the semiconductor gas sensor. The conversion rate is set beforehand on the basis of data from an experiment representing the relation between the sensor output and the concentration of the hydrogen peroxide vapor. The experiment is conducted in accordance with the following procedure: the aqueous solution of hydrogen peroxide having the same properties as the one to be used in sterilization and disinfection is injected by micro syringe into a closed experiment vessel (heat-resistant vessel) filled with a clean atmosphere and is completely evaporated by heating instantly by a heater or the like. With the temperature and humidity inside the experiment vessel maintained at constant level, measurements are taken of the output of the semiconductor gas sensor mounted in the experiment vessel. That is, the decrease in resistance is converted into the increase in voltage as in an electric circuit. The quantity of aqueous hydrogen peroxide injected is varied, and the outputs of the sensor are measured at different levels of the amounts as injected, and thus the relation between the output of the sensor and the concentration of hydrogen peroxide is obtained. The concentration of hydrogen peroxide in the experiment vessel can be calculated from the volume of the experiment vessel and the concentration and quantity of the aqueous solution of hydrogen peroxide injected. The correlation thus obtained is always constant, and from this correlation can be obtained a constant conversion rate.

[0015] By this prior art, as described, the output of the semiconductor gas sensor can be converted at a constant conversion rate and shown on a concentration indicator. Thus, the concentration of hydrogen peroxide vapor in the treatment vessel can be known on a real-time basis. That is to say, the concentration of hydrogen peroxide vapor can be well controlled, and sterilization and disinfection operations can be carried out efficiently.

[0016] It was found, however, that the concentration determined by this prior art method could differ from the actual level of the hydrogen peroxide vapor in the treatment vessel and that no accurate measurement could be made of the concentration of the hydrogen peroxide vapor by the semiconductor gas sensor.

[0017] In an effort to solve this problem, the inventors conducted various experiments and researches. It was discovered that even if the concentration of hydrogen peroxide vapor was kept at a constant level in the treatment vessel, the output of the sensor changes with changes in the temperature or humidity in the treatment vessel. The conversion rate for turning the output of the sensor into the hydrogen peroxide concentration was one based on the data worked out with the temperature and humidity maintained at a constant level in the experiment vessel as described. It was found that, in the actual sterilization and disinfection treatments in which temperatures and humidities are varied, the value obtained by converting the sensor output at the aforesaid conversion rate could be different from the actual hydrogen peroxide vapor concentration. The prior art method could not control the concentration correctly in such treatments as sterilization and disinfection, which in practice are performed under varying temperature or humidity conditions.

[0018] It is an object of the present invention to provide a method for the detection of a concentration of hydrogen peroxide vapor which always permits accurate detection on a real-time basis of the concentration of hydrogen peroxide vapor in the treatment vessel (in-vessel concentration) under varying in-vessel temperature or humidity conditions, thus ensuring efficient and effective sterilization and disinfection treatments. It is another object of the present invention to provide an apparatus for carrying out the above-mentioned method properly.

[0019] The method for detection of the concentration of hydrogen peroxide vapor according to the present invention is one which determines the in-vessel concentration by means of a semiconductor sensor in a treatment system so arranged that the object to be treated comes in contact with hydrogen peroxide vapor. To achieve the aforesaid objects, the present invention proposes detecting and indicating the concentration of hydrogen peroxide vapor especially in three different ways using three different types of apparatuses:

[0020] VARIABLE HUMIDRTY. The first way or the first method is applicable to treatments such as sterilization and disinfection which are performed in a treatment vessel with the pressure therein (in-vessel pressure) fixed, usually at atmospheric pressure, and the temperature therein (in-vessel temperature) maintained at a constant level but with the humidity therein (in-vessel humidity) varying. The output of the semiconductor gas sensor is arithmetically revised in relation to the in-vessel humidity on the basis of predetermined correlation data (humidity variable data) between the output of the semiconductor gas sensor and the concentration of hydrogen peroxide vapor in which the humidity is a parameter. The value thus revised is indicated on the concentration indicator as concentration of hydrogen peroxide vapor.

[0021] VARIABLE TEMPERATURE. The second method is for use in treatments such as sterilization and disinfection which are performed in an treatment vessel with the in-vessel pressure fixed, usually at the atmospheric pressure, and the in-vessel humidity maintained at a constant level, but with the in-vessel temperature varying. The output of the semiconductor gas sensor is arithmetically revised in relation to the in-vessel temperature on the basis of predetermined correlation data (temperature variable data) between the output of the semiconductor gas sensor and the concentration of hydrogen peroxide vapor in which the temperature is a parameter. The value thus revised is indicated on the concentration indicator as concentration of hydrogen peroxide vapor.

[0022] VARIABLE TEMPERATURE AND HUMIDIlY. The third method is practiced in treatments such as sterilization and disinfection which are performed in an treatment vessel with the in-vessel pressure maintained at a constant level, usually the atmospheric pressure, but with the in-vessel temperature and humidity varying. The output of the semiconductor gas sensor is arithmetically revised in relation to the in-vessel temperature and humidity on predetermined correlation data (temperature-humidity variable data) between the output of the semiconductor gas sensor and the concentration of hydrogen peroxide vapor in which the temperature and the humidity are parameters. The value thus revised is indicated on the concentration indicator as concentration of hydrogen peroxide vapor.

[0023] The apparatus for detection of the concentration of hydrogen peroxide vapor in the first method (first type apparatus) comprises a semiconductor gas sensor to detect the in-vessel concentration, a humidity detector to detect the in-vessel humidity, an arithmetic unit to arithmetically revise the output of the semiconductor gas sensor on the basis of predetermined humidity variable data in relation to the in-vessel humidity detected by the humidity detector, and a concentration indicator to show the revised value obtained by the arithmetic unit as concentration of the hydrogen peroxide vapor.

[0024] The apparatus for detection of the concentration of hydrogen peroxide vapor in the second method (second apparatus type) comprises a semiconductor gas sensor to detect the in-vessel concentration, a temperature detector to detect the in-vessel temperature, an arithmetic unit to arithmetically revise the output of the semiconductor gas sensor on the basis of predetermined temperature variable data in relation to the in-vessel temperature detected by the temperature detector, and a concentration indicator to display the value obtained by the arithmetic unit as concentration of the hydrogen peroxide vapor.

[0025] The apparatus for detection of the concentration of hydrogen peroxide vapor in the third method (third apparatus type) comprises a semiconductor gas sensor to detect the in-vessel concentration, a temperature detector to detect the in-vessel temperature, a humidity detector to detect the in-vessel humidity, an arithmetic unit to arithmetically revise the output of the semiconductor gas sensor on the basis of predetermined temperature-humidity variable data in relation to the in-vessel temperature and the in-vessel humidity detected by the respective detectors, and a concentration indicator to display the arithmetically corrected value obtained by the arithmetic unit as concentration of the hydrogen peroxide vapor.

[0026] FIG. 1 is a schematic diagram showing an example of a sterilization system equipped with the first type apparatus.

[0027] FIG. 2 is a two-way logarithmic graph showing a general example of the output-concentration conversion data with a constant humidity and a constant temperature.

[0028] FIG. 3 is a two-way logarithmic graph showing a general example of the humidity variable data.

[0029] FIG. 4 is a two-way logarithmic graph showing a specific example of the humidity variable data.

[0030] FIG. 5 is a schematic diagram showing an example of a sterilization system provided with the second type apparatus.

[0031] FIG. 6 is a two-way logarithmic graph showing a general example of the temperature variable data.

[0032] FIG. 7 is a two-way logarithmic graph showing a specific example of the temperature variable data.

[0033] FIG. 8 is a schematic diagram showing an example of a sterilization system provided with the third type apparatus.

[0034] FIG. 9 is a two-way logarithmic graph showing a general example of the temperature-humidity variable data.

[0035] FIG. 10 is a two-way logarithmic graph showing a specific example of the temperature-humidity variable data.

[0036] The construction of the present invention will now be described in detail with reference to FIGS. 1 to 4 (first type apparatus), FIGS. 5 to 7 (second type apparatus), and FIGS. 8 to 10 (third type apparatus). These embodiments are concerned with examples where the present invention is applied to a sterilization and disinfection of such materials as pharmaceutical basic materials.

[0037] FIGS. 1 to 4 show an embodiment of the first method and the first type apparatus. The system for treatment with hydrogen peroxide vapor shown in FIG. 1 comprises a treatment vessel 2 in which a object 1 to be treated as, for example, pharmaceutical basic materials is to be placed for sterilization, a hydrogen peroxide vapor generator 4 to produce hydrogen peroxide vapor 3, a supply line 5 to continuously supply hydrogen peroxide vapor 3 from the hydrogen peroxide vapor generator 4 to the treatment vessel 2, an exhaust line 6 to discharge into the atmosphere an exhaust gas 3acontaining excessive hydrogen peroxide vapor from the treatment vessel 2, and a detection apparatus 7awhich detects and indicates the concentration of hydrogen peroxide vapor in the treatment vessel 2 or the in-vessel concentration dx on a real-time basis. It is so arranged that the object 1 to be treated is brought into contact with hydrogen peroxide vapor 3 for sterilization in the treatment vessel 2 under the conditions with the humidity in the vessel (in-vessel humidity) varying but the pressure in the vessel (in-vessel pressure) and the temperature in the vessel (in-vessel temperature) both kept at a constant level.

[0038] The hydrogen peroxide vapor generator 4 is so designed as to heat and vaporize an aqueous solution of hydrogen peroxide 8 (concentration 31 percent by weight and specific gravity 1.1, for example) supplied from an aqueous hydrogen peroxide solution supply source 8aand mix the vaporized solution with a carrier air 9 to produce hydrogen peroxide vapor 3 as shown in FIG. 1. It is noted that the in-vessel concentration dx can be freely adjusted by regulating the rate of the flow of hydrogen peroxide vapor from the supply line 5 to the treatment vessel 2 or controlling the amount of hydrogen peroxide vapor generated at the hydrogen peroxide vapor generator 4. The exhaust line 6, not shown in the figure, is provided with an exhaust gas treatment unit where hydrogen peroxide contained in the exhaust gas 3ais rendered harmless with such a hydrogen peroxide decomposer as activated charcoal (to be diluted to the extent that the gas is harmless and can be released into the atmosphere—generally or preferably not higher than 1 ppm).

[0039] In the aforesaid sterilization treatment, the in-vessel pressure is generally maintained at atmospheric pressure and with the temperature kept at a constant point t_Fin a range between 20 and 50° C. The in-vessel humidity hx varies between 0.1 and 15 mg/l depending on the humidity of the carrier air 9 and the quantity 4 of the aqueous hydrogen peroxide solution 8 supplied to the hydrogen peroxide vapor generator for vaporization.

[0040] The apparatus for detection of the concentration of hydrogen peroxide vapor in the present embodiment or the first type apparatus 7acomprises, as shown in FIG. 1, a semiconductor gas sensor 71 to detect the in-vessel concentration dx, a humidity detector 72 to detect the in-vessel humidity hx, an arithmetic unit 74awhere the detection signals are constantly input from the semiconductor gas sensor 71 and the humidity detector 72 and checked against the pre-stored humidity variable data Qx, and a concentration indicator 75 to display the concentration by the input signals from the arithmetic unit 74a.

[0041] The first type apparatus is so constructed that the sterilization in the present treatment system is carried out under the aforesaid conditions, i.e., with the in-vessel pressure fixed—atmospheric pressure—and the in-vessel temperature tr maintained at a constant level but with the in-vessel humidity hx varying and that the arithmetic unit 74aarithmetically revises the output of the semiconductor gas sensor 71 (the sensor output gx), in relation to the in-vessel humidity hx detected by the humidity detector 72, on the basis of the humidity variable data Qx, i. e., the correlation data between the output of the semiconductor gas sensor 71 and the concentration of hydrogen peroxide vapor in which the humidity is a parameter and then the concentration indicator 75 displays the arithmetically revised value as concentration of hydrogen peroxide vapor.

[0042] The semiconductor gas sensor 71 comprises a sensor element made of a sintered metal oxide which changes in electro-conductivity on contact with hydrogen peroxide vapor 3, electrodes embedded therein, and a means for heating the sensor element (indirect or direct heating type). That is, the principle is this: when the gas constituents are adsorbed on the surface of such oxide particles as n-type semiconductor oxides (e.g., SnO₂, ZnO, V₂O₅, γ-Fe₂O₃, TiO₂, and CdO) and p-type semiconductor oxides (e.g., NiO, Cr₂O₃, Cu₂O, MnO₂, and MnO) which form a sensor element, the free electrons near the surface move to change the electro-conductivity. This change in electro-conductivity is detected and utilized. The increase in electro-conductivity on contact with hydrogen peroxide vapor 3 or the drop in resistance is converted into the increase in voltage as in an electric circuit and is output. The sensor element is heated to accelerate the rate of adsorption of the object gas and oxygen to and desorption from the surface of the semiconductor to raise the gas detection response speed. The heating temperature is set generally or preferably at 200 to 400° C. The semiconductor sensor 71 used in the first type apparatus 7amay be a commercially available gas leakage detection sensor (for instance, Model 812, available from Figaro Giken Co., Ltd. of Japan) designed to detect alcohol and organic solvent gases. Gas sensor Model #812 has a sensor element made of sintered SnO₂and may be heated to 350° C. by a nichrome wire heater arranged inside.

[0043] The humidity variable data Qx can generally be worked out in the following procedure: The same semiconductor gas sensor as the aforesaid gas sensor 71 is mounted in a suitable experiment vessel to which the aforementioned hydrogen peroxide vapor generator 4 is connected. To the hydrogen peroxide vapor generator 4 is injected by micro-syringe a specific quantity of aqueous solution of hydrogen peroxide (concentration 31 percent by weight, specific gravity 1.11), which is then completely evaporated by heating instantly by heater and mixed with a carrier air 9 to produce hydrogen peroxide vapor. A measurement is then taken of the output (data output) Gx of the semiconductor gas sensor mounted in the experiment vessel with the in-vessel humidity (data humidity) Hx, and the in-vessel temperature (data temperature) Tx maintained at a constant level under the atmospheric pressure. The concentration of hydrogen peroxide vapor (data concentration) Dx in this experiment vessel can be calculated accurately on the basis of the flow rate of the carrier air 9, the concentration, specific gravity and quantity injected of the aqueous hydrogen peroxide solution 8, because the vapor is produced by completely evaporating the aqueous hydrogen peroxide solution 8 injected into the hydrogen peroxide vapor generator 4.

[0044] With the flow rate of the carrier 9 maintained at a constant level, an amount of the aqueous hydrogen peroxide solution 8 as injected is varied in a plurality of stages (L stages). At each stage of injection, the aforesaid procedure (a series of steps from injection of the aqueous hydrogen peroxide solution 8 to detection of the data output) is repeated under the same conditions as stated above. Thus the correlation data (output-concentration conversion data) Px between data outputs G₁, G₂. . . G_Land data concentrations D₁, D₂. . . D_Lat a specific data humidity Hx and a specific data temperature Tx is obtained. If this correlation between data outputs G₁, G₂. . . G_Land data concentrations D₁, D₂. . . D_Lin the output-concentration conversion data Px is presented in a two-way logarithmic graph with the data output Gx on the axis of ordinates and the data concentration Dx on the axis of abscissas on the logarithmic scale, Px will be linear with an almost fixed gradient as shown in FIG. 2. The range within which an amount of the aqueous hydrogen peroxide solution as injected is varied is so selected that the range (D₁≦D_x≦D_L) of varying of the data concentration Dx to be calculated therefrom agrees with or includes the predicted range (d₁≦d_x≦d_L) of variability of the in-vessel concentration dx in the present treatment, that is to say, D₁≦d₁, D_L≧d_L.

[0045] In the next step, by changing the humidity of the carrier air 9, the data humidity Hx is sequentially changed at a minute value interval in a plurality of stages (N stages) with the data temperature Tx maintained at a constant temperature T_Fidentical with the constantly maintained in-vessel temperature t_Fand with the varying range (H₁≦Hx≦H_N) of the data humidity Hx tallying with or including the predicted range of variability of the in-vessel humidity hx (h₁≦hx≦h_N), that is H₁≦h₁, H_N≦h_N. At different data humidities H₁, H₂. . . H_Nis worked out the output-concentration conversion data P₁, P₂. . . P_Nin the same manner as shown above, from which the humidity variable data Qx are obtained.

[0046] In other words, the humidity variable data Qx is made up of N items of the output-concentration conversion data P₁, P₂. . . with the humidity varying within a specific humidity range (H₁≦Hx≦H_N) at a specific temperature (Tx=T_F=t_f=constant). The correlation between the data output G₁, G₂. . . and the data concentration D₁, D₂. . . at each of the output-concentration data P₁, P₂. . . P_Nmaking up the humidity variable data Qx is shown in the aforesaid two-way logarithmic graph. As shown in FIG. 3, the gradient is roughly linear. It is noted that the gradients of the respective output-concentration conversion data P₁, P₂. . . P_Nare generally not identical and that the humidity variable data Qx are represented by N items of different straight lines with different gradients as shown in FIG. 3. The respective straight lines indicate the output-concentration conversion data P₁, P₂. . . P_Nat the respective data humidities H₁, H₂. . . H_N. In FIG. 3 only the output-concentration conversion data P₁, P_E, and P_Nat the data humidities H₁, H_E, and H_N(H₁<H_E<H_N) are presented, for the sake of convenience.

[0047] As a concrete example, FIG. 4 shows, for instance, part of the humidity variable data Qx to be stored in the arithmetic unit 74ain the case in which sterilization is carried out in the aforementioned treatment system with an in-vessel pressure of atmospheric pressure, an in-vessel temperature of 30° C., an in-vessel humidity of 0.1 to 15 mg/liter and an in-vessel concentration of 200 to 2,000 ppm. That is a presentation in an two-way logarithmic graph of the output-concentration conversion data P₁, P₂, P₃, P₄, and P₅at a data humidity Hx of 0.43 mg/liter, 0.67 mg/liter, 3.5 mg/liter, 5.1 mg/liter, and 10.4 mg/liter. Measurements were made under the following conditions and using the following procedures: the experiment vessel was a plastic vessel with a capacity of 136 liters; the aqueous solution of hydrogen peroxide injected into the hydrogen peroxide vapor generator 4 was an aqueous hydrogen peroxide solution with a concentration of 31% and a specific gravity of 1.11; the semiconductor gas sensor mounted in the experiment vessel was a Model 812 obtained from Figaro Giken Go., Ltd. of Japan. With the in-vessel pressure maintained at atmospheric pressure and the temperature maintained at 30° C., the humidity in the experiment vessel was changed in five stages: 0.43 mg/liter, 0.67 mg/liter, 3.5 mg/liter, 5.1 mg/liter, and 10.4 mg/liter. At each humidity level, the concentration of hydrogen peroxide vapor in the experiment vessel was changed within the range between 200 and 2,000 ppm and the output of the semiconductor gas sensor was measured. The measurements were then plotted in a two-way logarithmic graph.

[0048] Detection and indication of the in-vessel concentration dx by the first type apparatus 7aare effected according to the first method by the arithmetic unit 74awith the humidity variable data Qx stored therein and the concentration indicator 75 as follows:

[0049] The in-vessel humidity hx is first detected by the humidity detector 72. From the humidity variable data Qx is selected the output-concentration conversion data P_Eobtained at the data humidity H_Ecorresponding to the detected humidity h_E. From this output-concentration conversion data P_E, the data concentration D_Ain correlation with the data output G_Acorresponding to the sensor output g_Ais picked out, as shown in FIG. 3. The value (arithmetically revised) corresponding to this data concentration D_Ais displayed as the concentration of hydrogen peroxide vapor d_Aon the indicator 75. Thus, the in-vessel concentration d_Acan be determined accurately.

[0050] Unless the in-vessel humidity hx is fixed, it can happen that the sensor output g_Awill not change even when the in-vessel concentration dx changes. In such cases, too, a correct output-concentration conversion data is selected in accordance with change in the in-vessel humidity hx, and an accurate in-vessel concentration dx is indicated on the concentration indicator 75. If, for example, the in-vessel humidity hx changes from h_Eto h₁(or h_N), this will be detected by the humidity detector 72, and the output-concentration conversion data P₁(or P_N) obtained at the data humidity H₁(or H_N) corresponding to the detected humidity h₁(or h_N) will be selected anew. From this output-concentration conversion data P₁(or P_N) will be picked out the data concentration D₁(or D_N) in correlation with the data output G_Acorresponding to the sensor output g_A, as shown in FIG. 3. The value corresponding to this data concentration D₁(or D_N) will be indicated on the concentration indicator 75 as the concentration of hydrogen peroxide vapor d₁(or d_N). In this manner, the change of the in-vessel concentration dx from d_Ato d₁(or d_N) is accurately reflected on the concentration indictor 75.

[0051] Conversely, it can happen that when the in-vessel humidity hx changes instead while the in-vessel concentration dx remains unchanged, the sensor output gx can change. In such a case, too, the correct output-concentration conversion data will be picked out in accordance with change in the in-vessel humidity hx, with the concentration reading remaining unchanged on the concentration indicator 75. For instance, if the sensor output gx shifts from g_Ato g₁(or g_N) with the in-vessel humidity hx changing from h_Eto h₁(or h_N), there will be picked out a new the output-concentration data P₁(or P_N) obtained at the data humidity H₁(or H_N) corresponding to the humidity h₁(or h_N) detected by the humidity detector 72. From this output-concentration conversion data P₁(or P_N) is picked out the data concentration D_Ain correlation with the data output G₁(or G_N) corresponding to the sensor output g₁(or g_N) as shown in FIG. 3. The value corresponding to this data concentration D_Ais indicated as the concentration of hydrogen peroxide vapor d_Aon the concentration indicator 75. Thus, that the in-vessel concentration d_Ahas not changed will be accurately reflected on the concentration indicator 75.

[0052] This conversion of the sensor output gx into the hydrogen peroxide vapor concentration on the basis of the humidity variable data Qx is carried out through a comparison calculation between the sensor output gx and the detected humidity hx and the humidity variable data Qx stored in the operator 74a, where a value equal or most approximate to the in-vessel concentration dx is picked out in an arithmetic calculation. Therefore, the difference between the arithmetically calculated value and the in-vessel concentration dx can be minimized by working out a further accurate humidity variable data Qx, i.e., by increasing, to the largest possible extent, the number N of the output-concentration conversion data P₁, P₂. . . P_Nwhich make up the humidity variable data Qx and the detection number L of the data output and the data concentration at the respective output-concentration conversion data P₁, P₂. . . P_N.

[0053] In the meantime, the hydrogen peroxide vapor in the treatment vessel 2 is chemically adsorbed on the oxide semiconductor element in the semiconductor gas sensor 71. Then, the free electrons are moved in the element, increasing the electro-conductivity. The reaction starts very fast, and thus the sensor output gx quickly reflects the change in the in-vessel concentration dx.

[0054] This shows that the first method using the first type apparatus 7apermits direct and real-time accurate detection of the in-vessel concentration dx even under the conditions where the in-vessel humidity hx fluctuates. Thus, the in-vessel concentration dx can be controlled with ease and properly, and the sterilization and disinfection of such objects 1 to be treated as pharmaceutical basic materials can be carried out efficiently and effectively.

[0055] FIGS. 5 to 7 illustrate an embodiment of the second method and the second type apparatus. The system for treatment with hydrogen peroxide vapor shown in FIG. 5 comprises a treatment vessel 2, a hydrogen peroxide vapor generator 4, a supply line 5, an exhaust line 6, and a hydrogen peroxide vapor concentration detection apparatus 7b, and is identical in arrangement with that in Example 1 except for the sterilization conditions (in-vessel pressure, in-vessel temperature, and in-vessel humidity) and the construction of the hydrogen peroxide vapor concentration detection apparatus 7b. That is to say, this treatment system is so arranged that the object 1 to be treated, such as pharmaceutical basic material, is brought into contact with hydrogen peroxide vapor 3 for sterilization in the treatment vessel 2 under the conditions that the in-vessel temperature tx varies, but with the in-vessel pressure and the in-vessel humidity both fixed. Generally, the in-vessel pressure is kept at atmospheric pressure and the in-vessel humidity is fixed at a constant point h_Ebetween 0.1 and 15 mg/liter. The in-vessel temperature tx can fluctuate between 20 and 50° C. depending on the treatment conditions.

[0056] The apparatus for detection of the concentration of hydrogen peroxide vapor in the present embodiment (the second type apparatus) 7bcomprises, as shown in FIG. 5, a semiconductor gas sensor 71 to detect the in-vessel concentration dx, a temperature detector 73 to detect the in-vessel temperature tx, an arithmetic unit 74bwhere the detection signals are constantly input from the semiconductor gas sensor 71 and the temperature detector 73 and checked against the pre-stored temperature variable data Rx in a comparison calculation, and a concentration indicator 75 to display the concentration by the input signals from the arithemetic unit 74b. The second type apparatus is constructed so that where the sterilization in the present treatment system is carried out under the aforesaid conditions (in-vessel pressure fixed at atmospheric pressure and in-vessel humidity h_Emaintained at a constant level but with the in-vessel temperature tx varying), arithmetic unit 74barithmetically revises the output of semiconductor gas sensor 71 (the sensor output gx) in relation to the in-vessel temperature tx detected by temperature detector 73 on the basis of the temperature variable data Rx, i.e., the correlation data between the output of semiconductor gas sensor 71 and the concentration of hydrogen peroxide vapor in which the temperature is a parameter and then the concentration indicator 75 shows the arithmetically revised value as concentration of hydrogen peroxide vapor. Semiconductor gas sensor 71 and concentration indicator 75 are the same ones as those used in the first type apparatus 7a.

[0057] The temperature variable data Rx can generally be worked out in the same way as the humidity variable data Qx: The data temperature Tx is sequentially changed at a minute value interval in a plurality of stages (M stages) with the data humidity Hx maintained at a constant level H_Eidentical with the constantly maintained in-vessel humidity h_Eand with the varying range of the data temperature Tx (T₁≦Tx≦T_M) tallying with or including the predicted range of variability of the in-vessel temperature tx (t₁≦tx≦t_M) (generally 20° C.≦tx≦50° C), that is, T₁≦t₁, T_M≧t_M. At different data temperatures T₁, T₂. . . T_Mthe output-concentration conversion data P₁, P₂. . . P_Mis worked out in the same manner as shown above, from which the temperature variable data Rx are obtained. In other words, M items of the output-concentration conversion data P₁, P₂. . . P_Mwill be the temperature variable data Rx in the event that the temperature varies within a specified temperature range (T₁≦Tx≦T_M) at a specific humidity condition (Hx=H_E=h_E=constant). The correlation between the data output G₁, G₂. . . G_Mand the data concentration D₁, D₂. . . D_Mat each of the output-concentration data P₁, P₂. . . P_Mmaking up the temperature variable data Rx is shown in the aforesaid two-way logarithmic graph. As shown in FIG. 6, the gradient is roughly linear. It is noted that the gradients of the respective output-concentration conversion data P₁, P₂. . . P_Mare generally not identical and that the temperature variable data Rx are represented by M items of different straight lines with different gradients as shown in FIG. 6. The respective straight lines indicate the output-concentration conversion data P₁, P₂. . . P_Mat the respective data temperatures T₁, T₂. . . T_M. In FIG. 6, only the output-concentration conversion data P₁, P_F, and P_Mobtained at the data temperatures T₁, T_F, and T_M(T₁<T_F<T_M) are presented, for the sake of convenience.

[0058] As a concrete example, FIG. 7 shows part of the temperature variable data Rx to be stored in the arithmetic unit 74bin the case where sterilization is carried out in the aforementioned treatment system under the conditions: the in-vessel pressure of atmospheric pressure, an in-vessel humidity of 0.67 mg/liter, an in-vessel temperature of 20 to 50° C., and an in-vessel concentration of 200 to 2,000 ppm. That is, a presentation in an two-way logarithmic graph of the output-concentration conversion data P₁, P₂. . . P_Mat a data temperature Tx of 30° C., 40° C., and 50° C. Measurements were made under the following conditions and using the following procedures: the experiment vessel was a plastic vessel with a capacity of 136 liters; the aqueous solution of hydrogen peroxide injected into the hydrogen peroxide vapor generator 4 was aqueous hydrogen peroxide with a concentration of 31% and a specific gravity of 1.11; and the semiconductor gas sensor mounted in the experiment vessel was a Model 812 from Figaro Giken Go., Ltd. of Japan. With the in-vessel pressure at atmospheric pressure and the humidity maintained at 0.67 mg/liter, the temperature in the experiment vessel was changed in three stages of 30° C., 40° C., and 50° C. At each temperature, the concentration of hydrogen peroxide vapor in the experiment vessel was changed in the range between 200 and 2,000 ppm and the output of the semiconductor gas sensor was measured. The measurements were then plotted in a two-way logarithmic graph.

[0059] Detection and indication of the in-vessel concentration dx by the second type apparatus 7bare effected according to the second method by the arithmetic unit 74bwith the obtained temperature variable data Rx stored therein and the concentration indicator 75 as follows:

[0060] The in-vessel temperature tx is first detected by the temperature detector 73. From the temperature variable data Rx is selected the output-concentration conversion data P_Fobtained at the data temperature T_Fcorresponding to the detected temperature t_F. From this output-concentration conversion data P_Fis picked out the data concentration D_Ain correlation with the data output G_Acorresponding to the sensor output g_Aas shown in FIG. 6. The value (revised) corresponding to this data concentration D_Ais indicated as the concentration of hydrogen peroxide vapor d_Aon the concentration indicator 75. As shown, the in-vessel concentration d_Acan be determined accurately.

[0061] Unless the in-vessel temperature tx is fixed, it can happen that the sensor output g_Awill not change even when concentration dx changes. Even in such cases, a correct output-concentration conversion data is selected in accordance with the change in the in-vessel temperature tx, and an accurate in-vessel concentration dx is indicated on the concentration indicator 75. If, for example, the in-vessel temperature tx changes from t_Fto t₁(or t_M), this will be detected by the temperature detector 73, and the output-concentration conversion data p₁(or P_M) obtained at the data temperature T₁(or T_M) corresponding to the detected temperature t₁(or t_M) will be selected anew. From this output-concentration conversion data P₁(or P_M) the data concentration D₁(or D_M) in correlation with the data output G_Acorresponding to the sensor output g_Awill be picked out, as shown in FIG. 6. The value corresponding to this data concentration D₁(or D_M) will be indicated on the concentration indicator 75 as the concentration of hydrogen peroxide vapor d₁(or d_M). That is, the change of the in-vessel concentration dx from d_Ato d₁(or d_M) is accurately reflected on the concentration indictor 75.

[0062] Conversely, when the in-vessel temperature tx changes while the in-vessel concentration dx remains unchanged, it can happen that the sensor output gx changes. In such a case, too, the correct output-concentration conversion data will be picked out in accordance with the change in the in-vessel temperature tx, with the concentration reading remaining unchanged on the concentration indicator 75. If, for example, the in-vessel temperature tx changes from t_Fto t₁(or t_M) with the sensor output gx shifting from g_Ato g₁(or g_M), there will be picked out anew the output-concentration data P₁(or P_M) obtained at the data temperature T₁(or T_M) corresponding to the temperature t₁(or t_M) detected by the temperature detector 73. The data concentration D_Ais obtained from this output-concentration conversion data p₁(or p_M) in correlation with the data output G₁(or G_M) corresponding to the sensor output g₁(or g_M), as shown in FIG. 6. The value corresponding to this data concentration D_Ais displayed as the concentration of hydrogen peroxide vapor d_Aon concentration indicator 75. Thus, the fact that the in-vessel concentration d_Ahas not changed will be accurately reflected on concentration indicator 75.

[0063] This conversion of the sensor output gx into the hydrogen peroxide vapor concentration on the basis of the temperature variable data Rx is carried out through a comparison between the sensor output gx and the detected temperature tx, and the temperature variable data Rx stored in arithmetic unit 74b, where a value equal or most approximate to the in-vessel concentration dx is obtained in an arithmetic calculation. Therefore, the difference between the arithmetically calculated value and the in-vessel concentration dx can be minimized by working out a further accurate temperature variable data Rx, i.e., by increasing, to the largest possible extent, the number N of the output-concentration conversion data P₁, P₂. . . P_Nwhich make up the temperature variable data Rx and the number L of detecting the data output and the data concentration at the respective output-concentration conversion data P₁, P₂. . . P_N.

[0064] This demonstrates that as in the first method, the second method using the second type apparatus 7bpermits direct and real-time accurate detection of the in-vessel concentration dx even under conditions in which the in-vessel temperature tx fluctuates. Thus, the in-vessel concentration dx can be controlled with ease, and sterilization and disinfection of objects 1 to be treated, such as pharmaceutical basic materials, can be carried out efficiently and effectively.

[0065] An embodiment of the third method and the third type apparatus is shown in FIGS. 8 to 10. The system for treatment with hydrogen peroxide vapor shown in FIG. 8 is equipped with a treatment vessel 2, a hydrogen peroxide vapor generator 4, a supply line 5, an exhaust line 6, and a hydrogen peroxide vapor concentration detection apparatus 7c. It is identical in arrangement with the system in the foregoing examples except for the sterilization conditions (in-vessel pressure, in-vessel temperature, and in-vessel humidity) and the construction of the hydrogen peroxide vapor concentration detection apparatus 7c. That is to say, this treatment system is so arranged that the object 1 to be treated, for instance, a pharmaceutical basic material, is brought into contact with hydrogen peroxide vapor 3 for sterilization in treatment vessel 2 under conditions such that the in-vessel pressure is maintained at a constant level, but the humidity hx and the temperature tx are varying. Generally, the in-vessel pressure is fixed at atmospheric pressure, but the in-vessel humidity changes between 0.1 and 15 mg/liter and the in-vessel temperature tx fluctuates within a range between 20 and 50° C., depending on the treatment conditions.

[0066] The apparatus for detection of the concentration of hydrogen peroxide vapor in the present embodiment or the third type apparatus 7ccomprises, as shown in FIG. 8, a semiconductor gas sensor 71 to detect the in-vessel concentration dx, a humidity detector 72 to detect the in-vessel humidity hx, a temperature detector 73 to detect the in-vessel temperature tx, an arithmetic unit 74cwhere the detection signals are constantly input from the semiconductor gas sensor 71 and the two detectors 72 and 73 and checked against the pre-stored temperature-humidity variable data Sx in a comparative calculation, and a concentration indicator 75 to display the concentration by the signals input from the arithmetic unit 74c. The third type apparatus is constructed so that, where sterilization in the present treatment system is carried out under the aforesaid conditions, that is, with the in-vessel pressure maintained at a constant level atmospheric pressure but with the humidity hx and the temperature tx varying, the arithmetic unit 74carithmetically revises the output of the semiconductor gas sensor 71 (the sensor output gx) in relation to the in-vessel humidity hx and the in-vessel temperature tx detected by the respective detectors 72 and 73, on the basis of the temperature-humidity variable data Sx, which is the correlation data between the output of the semiconductor gas sensor 71 and the concentration of hydrogen peroxide vapor in which the humidity and the temperature are parameters and then the concentration indicator 75 shows the arithmetically revised value as concentration of hydrogen peroxide vapor. The semiconductor gas sensor 71, the two detectors 72 and 73, and the concentration indicator 75 are the same ones as those used in the first and second type apparatuses 7aand 7b.

[0067] The temperature-humidity variable data Sx, which is stored in the arithmetic unit 74cand is composed of a group of temperature variable data or humidity variable data, is obtained by working out each temperature variable data or humidity variable data in the same way as mentioned earlier. That is, the temperature-humidity variable data Sx comprising a group of temperature variable data is obtained in the following procedure: First, the data humidity Hx is sequentially changed at a minute interval in a plurality of stages (N stages) within a range (H₁≦Hx≦H_M) tallying with or including the predicted range of variability of the in-vessel humidity hx (h₁≦hx≦h_M), that is H₁≦h₁, H_M≧h_M. The temperature variable data R₁, R₂. . . R_Nare worked out at different data humidities data H₁, H₂. . . H_N. The respective temperature variable data R₁, R₂. . . R_Ncan be obtained in the same procedure as that for the aforesaid temperature variable data Rx: The data temperature Tx is changed at a proper minute interval in a number of stages (M stages) within a range (T₁≦Tx≦T_M) tallying with or including the predicted range of variability of the in-vessel temperature tx (t₁≦tx≦t_M), that is T₁≦t₁, T_M≧t_M. At different data T₁, T₂. . . T_Ntemperatures the output-concentration conversion data P₁, P₂. . . P_Nare worked out. The N items of temperature variable data R₁, R₂. . . R_Neach of them comprising M items of out-concentration conversion data P₁, P₂. . . P_N, make up the temperature-humidity variable data Sx with temperature and humidity changing within the specific ranges (T₁≦Tx≦T_Mand H₁≦Hx≦H_M). The respective temperature variable data R₁, R₂. . . R_Nwhich make up the temperature-humidity variable data Sx are presented in the aforesaid two-way logarithmic graph. As shown in FIG. 9, the data are represented by M items of different straight lines with different gradients like the aforementioned temperature variable data Rx. The respective straight lines indicate the output-concentration conversion data P₁, P₂. . . P_Mat the respective data temperatures T₁, T₂. . . T_M. In FIG. 9, only the temperature variable data R₁, R_E, R_Mare presented, with the data humidities being H₁, H_E, and H_N(H₁<H_E<H_N). Only the output-concentration conversion data P₁, P_F, and P_M, with the data temperatures being T₁, T_E, and T_N(T₁<T_E<T_N), are shown with regard to the respective temperature variable data R₁, R_E, and R_N.

[0068] The temperature-humidity variable data can also be obtained by the following procedure: The data temperature Tx is sequentially changed at a minute value interval in a number of stages (M stages) within a range (T₁≦Tx≦T_M) tallying with or including the predicted range of variability of the in-vessel temperature tx (t₁≦tx≦t_M), that is T₁≦t₁, T_M≧t_M. At different data temperatures T₁, T₂. . . T_M, the humidity variable data Q₁, Q₂. . . Q_Mare worked out. The respective humidity variable data Q₁, Q₂. . . Q_Mcan be obtained in the same procedure as that for the aforesaid humidity variable data Qx: The data humidity Hx is sequentially changed at a minute value interval in a number of stages (N stages) within a range (H₁≦Hx≦H_M) tallying with or including the predicted range of variability of the in-vessel humidity hx (h₁≦hx≦h_M), that is H₁≦h₁, H_M≧h_M. At respective data humidities, H₁, H₂. . . H_Mare worked out, the output-concentration conversion data P₁, P₂. . . P_M, from which the respective humidity variable data Q₁, Q₂. . . Q_Mare obtained. M items of the humidity data Q₁, Q₂. . . Q_M, each of them comprising N items of output-concentration conversion data P₁, P₂. . . P_M, make up the temperature-humidity variable data Sx with the temperature and humidity changing within the specific ranges (T₁≦Tx≦T_Mand H₁≦Hx≦H_M). Those temperature-humidity variable data are identical, in arithmetic operation by the arithmetic unit, to those obtained in the aforesaid procedure. In the following description, the temperature-humidity variable data Sx obtained in the aforementioned procedure will be used.

[0069] As an example, FIG. 10 shows part of the temperature-humidity variable data Sx to be stored in the arithmetic unit 74cfor sterilization which is carried out in the aforementioned treatment system under the conditions: The in-vessel pressure at atmospheric pressure, an in-vessel humidity of 0.1 to 15 mg/liter, an in-vessel temperature of 20 to 50° C. ,and an in-vessel concentration of 200 to 2,000 ppm. That is a presentation in a two-way logarithmic graph of the humidity variable data Q₁, Q₂at a data humidity Hx of 0.67 mg/liter, 3.5 mg/liter, each of the humidity variable data Q₁, Q₂comprising output-concentration conversion data P₁, P₂, and P₃at a data temperature of 30° C., 40° C., and 50° C. Measurements were taken under the following conditions and in the following procedures: the experiment vessel was a plastic vessel with a capacity of 136 liters; the aqueous solution of hydrogen peroxide injected into hydrogen peroxide vapor generator 4 was an aqueous hydrogen peroxide solution with a concentration of 31% and a specific gravity of 1.11; the semiconductor gas sensor mounted in the experiment vessel was a Model 812 from Figaro Giken Co., Ltd. of Japan. With the in-vessel pressure at atmospheric pressure and the humidity maintained at 0.67 mg/liter, the temperature in the experiment vessel was changed in three stages: 30° C., 40° C., and 50° C. At each temperature, the concentration of hydrogen peroxide vapor in the experiment vessel was changed in the range between 200 and 2,000 ppm and the output of the semiconductor gas sensor was measured. Also, the temperature in the experiment vessel was changed in three stages of 30° C., 40° C., and 50° C. with the in-vessel pressure fixed at the atmospheric pressure and the humidity maintained at 3.5 mg/liter. At each temperature, the concentration of hydrogen peroxide vapor in the experiment vessel was changed within the range between 200 and 2,000 ppm, with measurements taken of the output of the semiconductor gas sensor. Those measurements were then plotted in a two-way logarithmic graph.

[0070] Detection and indication of the in-vessel concentration dx in the third type apparatus 7care effected according to the third method by the arithmetic unit 74cin which the temperature-humidity variable data Sx obtained as above is stored and the concentration indicator 75 as follows:

[0071] The in-vessel humidity hx and the in-vessel temperature tx are first detected by the respective detector 72 and 73. From the temperature-humidity variable data Sx is obtained the temperature variable data R_Eworked out at the data humidity H_Ecorresponding to the detected humidity h_E. From the selected temperature variable data R_Eis then picked up the output-concentration conversion data P_Fobtained at the data temperature T_Fcorresponding to the detected temperature t_F. From this output-concentration conversion data P_Fis picked out the data concentration D_Ain correlation with the data output G_Acorresponding to the sensor output g_A, as shown in FIG. 9. The value (the revised value) corresponding to this data concentration D_Ais indicated as the concentration of hydrogen peroxide vapor d_Aon the concentration indicator 75. Thus, the in-vessel concentration d_Acan be shown accurately.

[0072] It can happen that even when the in-vessel concentration dx changes, the sensor output g_Awill not change if the in-vessel humidity hx and/or the in-vessel temperature tx change. In such cases, too, a correct temperature variable data and an output-concentration conversion data are obtained in accordance with the change in the in-vessel humidity hx and the in-vessel temperature tx. Also, an accurate in-vessel concentration dx is indicated on the concentration indicator 75. If, for example, the in-vessel humidity hx changes from h_Eto h₁(or h_N) and the in-vessel temperature tx from t_Fto data R₁(or R_N) these will be detected by the respective detectors 72 and 73, and the temperature variable data R₁(or R_N) that were obtained at the data humidity H₁(or H_N) corresponding to the detected humidity h₁(or h_N) will be selected anew. From this temperature variable data R₁(or R_N), furthermore, there will be selected the output-concentration conversion data R₁(or R_N) obtained at the data temperature T₁(or T_M) corresponding to the detected temperature t₁(or t_M). From this output-concentration conversion data P₁(or P_M) the data concentration DI (or DN) will be picked out in correlation with the data output GA corresponding to the sensor output g_A, as shown in FIG. 9. The value corresponding to this data concentration D₁(or D_N) will be displayed on the concentration indicator 75 as the concentration of hydrogen peroxide vapor d₁(or d_N). That is, the change of the in-vessel concentration dx from d_Ato d₁(or d_N) is accurately reflected on the concentration indictor 75.

[0073] Conversely, it can happen that even when the in-vessel concentration dx remains unchanged, the sensor output gx changes if the in-vessel humidity hx and/or the in-vessel temperature tx change. In such a case, too, the correct temperature variable data and the correct output-concentration conversion data will be selected in accordance with the changes in-vessel humidity hx and in-vessel temperature tx, with the concentration reading remaining unchanged on the concentration indicator 75. If, for example, the in-vessel humidity hx changes from h_Eto h₁(or h_N) and the in-vessel temperature tx from t_Fto t₁(or t_M) with the sensor output gx shifting from g_Ato g₁(or g_M), there will be picked out a new temperature variable data R₁(or R_N) obtained at the data humidity H₁(or H_N) corresponding to the detected humidity h₁(or h_N). From this temperature variable data R₁(or R_N) will furthermore be picked out the output-concentration conversion data P₁(or P_M) obtained at the date temperature T₁(or T_M) corresponding to the detected temperature t₁(or t_M). From this output-concentration conversion data P₁(or P_M) the data concentration D_Ain correlation with the data output G₁(or G_M) corresponding to the sensor output g₁(or g_M) is picked out, as shown in FIG. 9. The value corresponding to this data concentration D_Ais indicated as the concentration of hydrogen peroxide vapor d_Aon the concentration indicator 75. Thus, the reading on the concentration indictor 75 definitely shows that the in-vessel concentration d_Ahas not changed but remains at d_Awhile the sensor output gx changes from g_Ato g₁(or g_M).

[0074] This conversion of the sensor output gx into the hydrogen peroxide vapor concentration on the basis of the temperature-humidity, variable data Sx is carried out by comparing the sensor output gx and humidity hx and the detected temperature tx with the variable data Sx stored in the arithmetic unit 74c, a value equal or most approximate to the in-vessel concentration dx is selected. Therefore, a difference between the value and the in-vessel concentration dx can be minimized by working out a further accurate temperature-humidity variable data Sx or by increasing, to the largest possible extent, the number N of the temperature variable data R₁, R₂. . . R_Nwhich make up the temperature-humidity variable data Sx and the number M of the output-concentration conversion data P₁, P₂. . . P_Mforming the respective temperature variable data R₁, R₂. . . R_N, as well as the number L of detection of the data output and the data concentration at the respective output-concentration conversion data P₁, P₂. . . P_M.

[0075] As illustrated, the third method using the third type apparatus 7cpermits direct and real-time accurate detection of the in-vessel concentration dx even under the conditions where the in-vessel humidity hx and/ or the in-vessel temperature tx fluctuate. Thus, the in-vessel concentration dx can be controlled with ease, and sterilization and disinfection of objects 1 to be treated, such as pharmaceutical basic materials, can be carried out efficiently and effectively.

[0076] It is to be understood that while specific embodiments of the invention have been shown and described, the invention is not limited thereto and modifications or variations may be made without departing from the spirit and scope of the present invention. In other words, the present invention is applicable not only to the sterilization system as has been described but can be well used in any treatment arrangement for any treatment by supplying hydrogen peroxide vapor into a treatment vessel under the conditions with at least the in-vessel pressure maintained at a constant level irrespective of the treatment conditions and setup. For example, the present invention can also be applied to sterilization and disinfection of installations and furniture in such facilities, for instance, as: medical facilities including sickrooms, consultation rooms, waiting rooms, operation theatres, food processing facilities including kitchens, public facilities including experimental and research laboratories, movie houses, and theaters, transportation means and facilities including warehouses, interior items such as beds, desks, and chairs in buses, trains, ships, and aircraft, with the facilities themselves serving as the treatment vessel.

[0077] The in-vessel pressure is not limited to atmospheric pressure as long as it can be kept at a constant level. In case a large area is sterilized or disinfected, (such as a theater serving as the treatment vessel, for example), it is desirable that the hydrogen peroxide gas should be dispersed by a gas diffuser like an axial fan, as necessary. That would spread the hydrogen peroxide gas to every corner of the treatment vessel or such facilities as a theater and make the treatment more effective.

[0078] If the humidity detector 72 reacts to the hydrogen peroxide vapor 3 and can not make an accurate detection of the in-vessel humidity in the first type apparatus 7aor the third type apparatus 7c, measurements may be taken of the humidity in the carrier line by installing a humidity detector therein and the line air humidity may be taken as in-vessel humidity.

[0079] As is evident from the foregoing description, the method of detecting the concentration of the hydrogen peroxide vapor using a semiconductor gas sensor according to the present invention can directly detect or monitor the concentration of hydrogen peroxide vapor in the treatment vessel with ease and accuracy, thus allowing effective and proper sterilization and disinfection using the hydrogen peroxide vapor. The apparatus for detection of the concentration of the hydrogen peroxide vapor according to the present invention can carry out that method properly.