SiGe Photodetector With High Efficiency

This application claims the priority of German Application Serial No. 197 14 0548 filed Apr. 5, 1997, which is incorporated herein by reference.

The invention relates to a photodetector which can be operated n at least two wavelength ranges and a method of making the same. The invention is used for photovoltaic detectors and solar cells.

Photodetectors operating in the two-wavelength mode have been disclosed for III/V compound semiconductor materials (Friedmann et al. in Compound Semiconductor, page 27, November/December 1996). Photodetectors of this type have a relatively low efficiency. Moreover, the spectral sensitivity is merely determined by a single semiconductor material.

Therefore, it is the object of the present invention to provide a photodetector with high efficiency which can be operated at least in two wavelength ranges.

The above object generally is achieved according to a first aspect of the invention by a photodetector, which can be operated in at least two wavelength ranges, and which comprises a semiconductor body comprised of Si and SiGe semiconductor material layers, with the semiconductor body including at least first and second photodetectors arranged one on top of the other and responsive to different respective wavelength ranges.

The invention has the advantage that two detectors with different respective wavelength ranges are arranged one on top of the other and a higher efficiency is generated by adding the photocurrents. In this case, the first detector is comprised of a Schottky diode on a lightly doped silicon substrate and the second detector is comprised of an Si/SiGe pn-diode. Because of the light incident on the first detector, photons with shorter wavelengths (e.g., .lambda.<0.9 .mu.m) generate electron-hole pairs in the depletion region of the Schottky diode, which are transported to the contacts while the voltage is applied, and which cause an electronic current flow. Longer-waved photons (e.g., 1 .mu.m<.lambda.<2 .mu.m) are absorbed by the second detector after having passed through the first detector. Here, the absorption layer can be realized by a suitable SiGe multilayer structure, e.g., a multiply stacked Si/SiGe quantum well structure, or a short-periodic SiGe superlattice. The absorption mechanisms and the operating mode of the above-cited detectors are disclosed in articles by H. Presting et al., Applied Physics Letters 69, p. 2376 (1996) and Applied Physics Letters 63, p. 491 (1993). For a broadband incident spectrum, e.g., when a solar cell is used, photons of different wavelengths generate the two individual photon flows I.sub.A and I.sub.B in both detectors, which two photon flows add up to form one overall photon flow I. For reasons of impedance matching, the individual photon flows must be of the same magnitude. The absorption coefficient of the epitaxially grown SiGe layer should therefore be larger by approximately two magnitudes than the absorption coefficient of the silicon substrate.

It is a further advantage of the invention that the second detector is configured to have an integrated resonator which increases the efficiency of the second detector.

Furthermore, it is advantageous that, for the reflection light passing through both detectors, a Si/SiGe Bragg reflector is applied on the absorbing multilayer structure of the second detector, which Bragg detector again increases the efficiency of the overall detector.

According to a further aspect of the invention, a method of making a photodetector of the type discussed above comprises the steps of:

providing a lightly p-doped Si substrate;

epitaxially growing a semiconductor layer sequence on a first major surface of the substrate, with the layer sequence including a p-doped Si layer having a doping concentration of 10.sup.13 cm.sup.-3 and a layer thickness of 100 nm, an undoped or lightly p-doped multilayer structure, configured as Ge/Si/Ge quantum well potential structure with a layer thickness of 200 nm, and an n-doped Si layer having a doping concentration of 10.sup.18 to 10.sup.19 cm.sup.-3 and a layer thickness of 100 nm;

structuring the multilayer structure and the n-doped Si layer to form a mesa on a surface of the p-doped Si layer; applying a metal Schottky contact to a major surface of the substrate opposite the first major surface; and,

applying respective ohmic metal contacts on an outer surface of the p-doped Si layer and on the n-doped Si layer to form a first detector as a Schottky diode in the substrate and a second defects as a SiGe pn-diode.

According to a further embodiment of the method according to the invention, a photodetector of the type mentioned above if produced according to the steps of:

providing a lightly p-doped Si substrate;

epitaxially growing a semiconductor layer sequence on a first major surface of the substrate, with the layer sequence including a p-doped SiGe layer having a doping concentration of 10.sup.17 cm.sup.-3 and a layer thickness of 1000 nm, an undoped or lightly p-doped multilayer structure, configured as a SiGe superlattice with a layer thickness of 100 nm, and a n-doped Si layer having a doping concentration of 10.sup.18 to 10.sup.19 cm.sup.-3 and a layer thickness of 100 nm;

structuring the multilayer structure and the n-doped si layer to form a mesa on a surface of the p-doped SiGe layer;

applying a metal Schottky contact to a major outer surface of the substrate opposite the first major surface; and,

applying respective ohmic metal contacts on the surface of the p-doped SiGe layer and on the n-doped Si layer to form a first detector as a Schottky diode in the substrate and a second detector as a SiGe pn-diode.

The invention is explained in greater detail by way of embodiments with reference to schematic drawings.

FIG. 1 is a schematic diagram of a dual detector photodetector according to a first embodiment of the invention.

FIG. 2 is a schematic diagram of a dual detector photodetector according to a further embodiment of the invention.

In a first embodiment according to FIG. 1, a semiconductor layer sequence comprised of layer 2-4 is epitaxially grown, e.g., by means of molecular beam epitaxy, on a major surface of a Si 1 substrate, e.g., on a <100>-Si substrate, which is polished on both sides and which is lightly p-doped, and which has a doping concentration of 10.sup.15 cm.sup.-3 and a specific resistance of 50 .OMEGA.cm.

The layer 2 is a p-doped layer made from Si having a doping concentration of 10.sup.17 cm.sup.-3 of e.g., boron atoms, and a layer thickness of 100 nm. The layer 3 is an undoped or lightly p-doped multilayer structure 3, which is configured as a Ge/Si/Ge quantum well potential structure, with a layer thickness of 200 nm and a doping concentration of 10.sup.16 cm.sup.-3 of, e.g., boron atoms. Finally the layer 4 is an n-doped layer 4 made from Si having a doping concentration of 10.sup.18 to 10.sup.19 cm.sup.-3 of, e.g., Sb atoms, and a layer thickness of 100 nm.

By means of standard semiconductor process techniques, a mesa patterning out of the layers on top of the outer major surface of layer 2, i.e., the layers 3 and 4, and metallization for the contacts of the diodes which are to be produced are carried out. The Schottky contacts S1, S2 made from, e.g., aluminum, are applied on the back side, of the substrate layer 1, i.e., the outer major surface of the substrate, so that the substrate 1 forms the Si Schottky diode of the first detector A. The Si/SiGe pn-diode is made from the layers 2, 3, 4 of the Si/SiGe layer sequence and forms the second detector B. The bottom ohmic contact P1, is applied on the outer major surface of the p-doped Si layer 2 and the top ohmic contact P2 on the outer surface of the n-doped Si layer 4. The p-doped layer 2 forms the bottom contact layer of the Si/SiGe pn-diode B and simultaneously acts as the resonator of the second detector B.

Because of the selection of a suitable Ge/Si/Ge quantum well potential structure as an absorbing layer of the second detector B, a peak wavelength of, e.g., 1.3 .mu.m can be set.

In a second embodiment, the p-doped layer 2 of the semiconductor layer sequence according to FIG. 1 is grown as a SiGe buffer layer for a SiGe superlattice structure as the absorbing layer or multilayer structure 3 of the second detector B. The p-doped Si.sub.1-x Ge.sub.x layer 2, for example, with a mean Ge content of x=0.25, has a doping concentration of 10.sup.17 boron atoms per cm.sup.3 and a layer thickness of 1000 nm. On top of the SiGe buffer layer 2, a multilayer structure 3 is grown which is configured as a SiGe superlattice and which is comprised of an alternating layer sequence of, e.g., 5, monolayers of Si and Ge, each having an overall layer thickness of approximately 200 nm. The Ge content of the buffer layer 2 corresponds to the mean Ge content of the SiGe superlattice and, in this case, x=0.5. The SiGe buffer layer 2 forms the bottom contact layer of the Si/SiGe pn-diode B and simultaneously acts as a resonator of the second detector B. When short-periodic SiGe superlattice layers are selected as the absorption layer 3 for detector B, a SiGe buffer layer 2 is first grown on the silicon substrate 1 for stress relaxation. Due to the refractive index jump between the SiGe layer 2 and the silicon substrate 1, this layer acts as a Fabry-Perot resonator for detector B if the layer thickness is selected appropriately. This resonator increases the efficiency and changes the absorption maximum (peak wavelength) of detector B. Here, the layer thickness of the SiGe buffer layer 2 is linked with the peak wavelength of the absorption by way of the Fabry-Perot relationship. A resonator of this type is disclosed for silicon detectors in an article by S. Murtaza et al., Proc. of 52.sup.nd Annual Device Research Conf., p. IV A-3, University of Colorado, Boulder (1994). Because of the selection of the SiGe superlattice as the absorbing layer 3 of the second detector B, a peak wavelength of, e.g., 1.55 .mu.m is set.

In a third embodiment as shown in FIG. 2, an Si/SiGe Bragg reflector 5 is additionally grown on the SiGe multilayer structure 3 for the reflection of the light which was not absorbed by either of the two detectors A or B. The Bragg reflector is comprised of, e.g., an N-fold grown periodic layer sequence of n-doped Si and SiGe layers 5, 6, respectively. A Si/SiGe Bragg reflector of this type is described in the publication by R. Kuchibhotla et al., Applied Physics Letters, 62, p. 2215 (1993). In the present embodiment, the Bragg reflector is grown from, e.g., an N=10-fold grown layer sequence comprised of Si layers 5 having a thickness of approximately 100 nm and Si.sub.1-y Ge.sub.y layers 6 of equal thickness with a Ge content of 0.2.gtoreq.y.gtoreq.0.4 and an n-doping of 10.sup.18 to 10.sup.19 cm.sup.-3. The reflection of the light takes place at the SiGe layer of the covering layer of the Bragg reflector. The peak reflection of the reflector is set to the peak absorption of the detector through a precise selection of the SiGe composition. The additional mounting of a Bragg reflector accomplishes a further increase of the efficiency of detector B.

The invention now being fully described, it will be apparent to one of ordinary skill in the art that many changes and modifications can be made thereto without departing from the spirit or scope of the invention as set forth herein.