Membrane Type Integrated Inductor and the Process Thereof

This invention relates to the structure and process of an integrated circuit, particularly to the structure and process of a membrane type integrated inductor. The lay out of the inductor on the membrane with the backside etch technique may improve the power loss caused by the dielectric substrate of the substrate of the conventional integrated inductor, lower the parasitic capacitance, simplify the manufacture process and heighten the productivity.

A suspended inductor proposed to lower the loss and increase the inductivity applies an ananisotropic V-groove etching, as is known in the prior art and an isotropic etching. With reference to FIG. 2A to FIG. 2E, a conventional manufacture process of the integrated inductor is applied to lay out an inductor 21 enclosed by SiO.sub.2 on a substrate 20 as shown in FIG. 2A. Five open windows 211 to 215 are etched out on the front SiO.sub.2 layer 21 by means of the photolithography as shown in FIG. 2B; a V-groove etching is applied to etch the front of the substrate into V-grooves 221 to 225 with the appropriate depth about 200 .mu.m as shown in FIG. 2D; and an isotropic etching is applied to etch out a suspended inductor in such a way that the five grooves 211 to 215 are communicative with one another, the substrate below the position where the inductor locates forms a hollow groove and the bottom of the substrate is closed as shown in FIG. 2E. By means of this suspended structure, the effect of the parasitic capacitance is partially improved. However, for the process of the etch is more complicate and hard to control, the yield percentage will be lowered. And, the etch of the five windows 211 to 215 will bring about a problem that more volume of the substrate will be occupied.

In view of the above, one object of this invention is to provide a membrane type integrated inductor and the process thereof to obviate the defects of the conventional integrated inductor. The inductor of low loss and high quality factor may lower the parasitic capacitance, increase the resonance frequency, decrease the volume of the substrate required for the lay out of the inductor. For it is simple in process and easy in production, the yield percentage may be increased.

To achieve the above object, a membrane type integrated inductor and the process thereof of this invention is provided, wherein the membrane type integrated inductor comprises: a membrane dielectric layer on the upper plane of the substrate and an integrated inductor laid out on the membrane dielectric layer, while the process thereof comprises the following steps: forming a membrane dielectric layer on a substrate; an integrated inductor being laid out on the above membrane dielectric layer with the known manufacturing technique of integrated inductor; defining an open window on the backside of the substrate with photolithography and etching to the membrane dielectric layer below the inductor with a backside etch; and forming a membrane type integrated inductor.

For the objects, features and advantages of this invention to be more apparent and understood, a preferred embodiment will be detailedly described in accompany with the drawing as follows:

FIG. 1A is a top view schematically showing the structure of the conventional integrated inductor;

FIG. 1B is a sectional view showing the structure as shown in FIG. 1A;

FIG. 2A is a sectional view schematically showing part of the process of a conventional integrated inductor;

FIG. 2B is a top view schematically showing a part of the manufacturing process of the conventional suspended integrated inductor;

FIG. 2C is a sectional view showing a part of the sectional structure as shown in FIG. 2B;

FIG. 2D and FIG. 2E are sectional views schematically showing a part of the manufacturing process of the conventional integrated in ductor;

FIG. 3A is a sectional view schematically showing a part of the manufacturing process of a preferred embodiment (1) according to this invention;

FIG. 3B is a top sectional view schematically showing a part of the manufacturing process of a preferred embodiment (1) according to this invention;

FIG. 3C is a sectional view schematically showing a part of the manufacturing process of a preferred embodiment (1) according to this invention;

FIG. 3D is a top sectional view schematically showing a preferred embodiment (1) of a membrane type integrated inductor of this invention wherein the dotted line indicates the etched open window defined by the backside etch of the substrate;

FIG. 3E is a bottom view schematically showing a preferred embodiment (1) of a membrane type integrated inductor according to this invention;

FIG. 4A is a sectional view showing part of the manufacturing process of another preferred embodiment (2) of this invention;

FIG. 4B is a top sectional view showing a part of the manufacturing process of another preferred embodiment (2) of this invention;

FIG. 4C is a sectional view showing a part of the manufacturing process of another preferred embodiment (2) of this invention;

FIG. 4D is a top sectional view showing another preferred embodiment (2) of a membrane type integrated inductor of this invention wherein the dotted line indicates the etched open window defined by the backside etch of the substrate; and

FIG. 4E is a bottom view showing another embodiment (2) of a membrane type integrated inductor according to this invention;

10 . . . substrate

11 . . . insulating layer

12 . . . conventional air bridge integrated inductor

121 . . . air bridge line

122, 123 . . . microstrip line

20 . . . substrate

21 . . . Conventional encase integrated inductor

211 to 215 . . . etched open windows

216 . . . wound conductor of the integrated inductor

221 to 225 . . . five V-grooveas

23 . . . hollow groove

30 . . . substrate

31 . . . membrane dielectric layer

32 . . . Conventional air bridge integrated line

321 . . . air bridge line

322, 323 . . . microstrip line

33 . . . the etched open window on the backside of the substrate

34 . . . the membrane dielectric layer below the inductor

40 . . . substrate

41 . . . compound membrane dielectric layer

411, 412 . . . membrane SiO.sub.2 layer

42 . . . conventional air bridge integrated line

421 . . . air bridge line

422, 423 . . . microstrip line

43 . . . the etched open window on the backside of the substrate

44 . . . compound membrane dielectric layer below the inductor

preferred embodiment (1)

As shown in FIG. 3A, a membrane dielectric layer is formed on a silicon substrate 30. In this embodiment, a CVD or thermal oxidation is applied to form on the silicon substrate an oxide menbrane dielectric layer 31 having a thickness of which is from 0.5 .mu.m to 20 .mu.m and is preferably from 1 .mu.m to 3 .mu.m. An integrated inductor 32 is laid on the oxide membrane dielectric layer 31 by means of the conventional process of the integrated inductor. Further as shown in FIG. 3B, a photolithography technique using an infrared aligner or a double sided aligner to align and expose to define an etched area 33. The membrane layer 31 is used as etching stop to proceed an anisotropic backside etch. For example, KOH is applied to etch the substrate 30. In this way, a preferred embodiment of the process according to this invention is accomplished to obtain a membrane type integrated inductor as shown in FIG. 3C.

preferred embodiment (2)

As shown in FIG. 4A, a membrane dielectric layer is formed on silicon substrate 40. In this embodiment, a CVD or thermal oxidation is applied to from on the silicon substrate 40 an silicon dioxide membrane layer 11 having a thickness of which is from 0.5 .mu.m to 20 .mu.m. Then, a PECVD or LPCVD is applied to or on the silicon dioxide layer 411 a silicon nitride layer 412 the thickness of which is from 0.5 .mu.m to 20 .mu.m. The silicon dioxde layer 411 and the silicon nitride layer 412 form a compound membrane dielectric layer 41. A conventional manufacturing process of a integrated inductor is applied to lay out an integrated inductor 42 on the compound membrane dielectric layer 41. Further with reference to FIG. 4B, a photolithography for example an infrared aligner or double sided aligner is utilized in aligning and exposing to define the etched area 43. The membrane layer 41 is used as an etching stop to proceed an anisotropic backside etch. For example, KOH is applied to etch the substrate 40. In this way, a preferred embodiment (2) according to this invention is accomplished to obtain a membrane type integrated inductor as shown in FIG. 4C.

Thus, the membrane type integrated inductor formed by way of the backside etching may substantially lower the power loss, and avoid the high parasitic capacitancy. Meantime, the use of simple backside etch renders the process easy to control and helpful to heighten the yield percentage. In comparison with the conventional suspended inductor, this invention without the need to etch out five open windows on the front face effectively decreases the required volume for the layout of the inductor and the magnetic line through the conductive silicon substrate, and lower the loss. Therefore, it satisfies what the present VLSI field requires to decrease the volume which the parts occupy.

The preferred embodiments as disclosed above are not to limit this invention. For example, the membrane may be made by the use of other materials such as SiC, diamond, quasi-diamond, poly silicon, single crystal silicon, GaAs etc. Any change made by those persons skilled in this art without, deviation from the spirit arid scope of this invention is deemed as covered by the accompanied claims.