Optical Fiber Switch

In the drawing,

FIG. 1 shows a side view of the internal elements of a preferred embodiment of the switch assembly and a conceptual illustration of a magnetic coil surrounding the internal switch elements;

FIG. 2 shows a simplified cross-sectional view of the assembly taken at 2--2 of FIG. 1 illustrating a preferred embodiment in which multidimensional vee grooves for supporting sheathed fiber are responsible for high strain relief of the fibers and, in part, the precision alignment of the fibers;

FIG. 3 shows the internal structure of a base member and covering members of the assembly, including multidimensional vee grooves for supporting and aligning sheathed and unsheathed portions of the fibers and for acting as glue stops; a fixed and a switchable fiber is placed aside the base member as an aid to visualization of placement of the fibers into the members; and

FIG. 4 shows the internal surface of the base member before final etching for achieving the multidimensional vee grooves.

The reader should refer to FIGS. 1 through 3 during the following description. For convenience, the same designation numbers are used in each of the figures when referring to the same element. A side view of the internal elements of the switch assembly is shown in FIG. 1. FIG. 2 shows a cross-sectional view of the assembly taken at 2--2 of FIG. 1. FIG. 3 shows the internal construction of a base member 102 and cover members 128 and 130. The preferred assembly is a double pole-double throw switch, although clearly this is not a limitation of the invention. FIG. 3 illustrates this preferred embodiment by showing two sets of internal grooves in base and cover members 102, 128 and 130. Only a single set of grooves and fibers for a single switch are shown in FIG. 2 for simplicity. In the following discussion, reference is made only to a single switch element, it being understood that, in principle, any number of switch elements may be contained in a single assembly.

An electromagnetic coil that surrounds the internal elements for operating the switch is conceptually shown at 100 of FIG. 1. A base member 102 supports and partially aligns optical fibers that enter the assembly. On the right-hand side, a switchable fiber 104 enters the assembly and extends inwardly to the point 106. All but a small most inward portion 108 of the switchable fiber 104 in the assembly is enclosed in a protective sheath 110. The sheath is removed at portion 108 to facilitate optical connection with one of the fixed fibers 112 or 114 which enter the assembly from the left-hand side. The fixed fibers are also protected by sheaths 116 and 118 for part of the distance that the fibers extend into the assembly. The remaining portions 120 and 122 of the fixed fibers are unsheathed.

For the assembly to accept both sheathed and unsheathed portions of the fibers requires grooves with different dimensions along different portions of the grooves in the internal supporting surface of the base member 102. These grooves are referred to as multidimensional in this description. In FIG. 1, different dimensional sections of a vee groove are illustrated at 124 and 126, for example. The portion of the groove 124 supports the sheathed part of one of the fixed fibers 118 and is wider as well as deeper than that at 126, for example, which supports only the glass fiber itself. The cross-sectional view at 2--2 shown in FIG. 2 illustrates the vee grooves and their relation to the sheathed and unsheathed portions of the fibers more clearly. Notice that a fiber is contained entirely within its vee groove without extending above the groove. Portions of the sheathed and unsheathed fibers are glued into the grooves to provide strain support and rotational stability of the fibers. This is discussed in more detail below. A method of etching the multidimensional grooves is also discussed below.

A covering member 128 is placed over the most outward portion of the switchable fiber 104 in mating contact with the internal surface of base member 102. Similarly, a covering member 130 protects the most outward portions of fixed fibers 112 and 114. Since there is only a single incoming switchable fiber for a single switch element in the disclosed embodiment, no groove is required in member 128 to accept fiber 104. The surface of member 128 at 131 is therefore flat. A large groove 132 is etched in cover member 128 to allow space for the switchable fiber 104 to operate between its switched and nonswitched positions. The dimensions of groove 132 are not critical; unimpeded operation of fiber 104 is all that is required. Cover member 130 accepts and aligns fiber 112. It therefore contains a groove identical to that of the base member 102 which supports fiber 114.

Located on top of cover member 130 is a ferromagnetic strip 134 in overlapping configuration with a similar strip 136 glued on the upper part of the sheath of switchable fiber 104. Preferably, these strips are made of permalloy. An alternative approach to the use of strip 136 is to replace the sheath in this area of fiber 104 with a magnetic coating. The arrangement discussed so far, including strips 134 and 136, is sufficient to cause operation of the switch when a current of approximately 12 milliamperes is applied to coil 100. However, it has been found that by adding a second magnetic strip 138 located on cover member 128 in overlapping configuration with the other end of strip 136, a current of only approximately 7 milliamperes is required for operation. When operated, the cover member 130 acts as a stop for the switchable fiber. This provides accurate alignment of the switchable fiber 104 and the fixed fiber 112.

When current is removed from coil 100, the resiliency of switchable fiber 104 is sufficient to return the fiber to its idle position in optical connection with fiber 114. However, preferably a permanent magnet 140 is located on the outside surface of base member 102. This magnet aids the lock-in alignment of fibers 104 with 114 and reduces fiber bounce from approximately 20 milliseconds to about 4 milliseconds. The base member acts as a stop for the switchable fiber 104 in this idle position.

With reference now primarily to FIG. 3, during assembly of the switch, the optical fibers are inserted into their respective grooves with the internal ends of the fibers aligned with marks 142 located on the inside surfaces of base member 102 and cover member 130. The marks are etched onto the inside surface of the respective member during fabrication of the member. Glue is applied to the exposed fiber sheaths in the area of 124 and 144 on the base member 102 and 146 of cover member 130. The glue flows and wets the entire sheath in these areas. For the fixed fibers, the glue also wets the exposed glass in areas 126 and 148. This secures the glass to base member 102 and cover member 130 giving the glass inside the sheaths of the fixed fibers additional stability. Stability of the glass of the switchable fiber is not a problem because magnetic fields secure the switchable fiber firmly in its switch positions. Glue stops 150, 152 and 154 prevent the glue from wetting the fibers any further. These glue stops are larger dimensional portions of the vee grooves that act as glue reservoirs. The cover members 128 and 130 are now assembled to the base member 102. For this purpose, base member 102 and cover member 130 are each provided with a recess 156 and 158, respectively. These recesses are etched into the members in the shape of a four-sided pyramid. A small ball bearing is inserted into the recesses for alignment of the two members in the longitudinal and traverse directions. Alignment of cover member 128 with respect to base member 102 is not critical and no such recesses have been provided.

It has been found that the above-described arrangements are sufficient for alignment of the fibers and members to allow the use of single mode fiber. However, as an added measure should the need arise, longitudinal aligning grooves 160, 162 and 164 are provided in the members. These are small aligned grooves in the base and cover members that accept approximately half of the diameter of a small fiber for traverse alignment of the members.

A method of producing the multidimensional grooves in the base and cover members is now described. This method is described in more detail in copending U.S. application "Method of Micromachining Monocrystalline Structures", by R. T. Kraetsch and R. J. Pimpinella having Ser. No. 227,221 (now abandoned), filed Aug. 2, 1988. Due to the small size of the vee grooves in the switch design, it is not possible to create the different widths and depths required for the different sections of the grooves by the known technique of corner compensation with sacrificial silicon. In silicon cut along the crystallographic 100 plane, a pattern of any configuration will etch to a rectangle equal to the largest X and Y dimensions of the pattern if etched long enough. This is the process which results in destructive corner etching and for which corner compensation is conventionally applied. However, here corner etching is used to advantage. An initial etch pattern for the different dimensional sections of a groove is designed such that when a substrate with the initial pattern is etched for a predetermined period of time, the desired groove sections are created as a result of corner etching. Cross-sectional scale drawings are first used to determine the etch depth required at each different section of a groove. Then, using a top view scale drawing of the desired final pattern, the larger-sized groove sections are scaled back according to a depth versus horizontal etch rate to an initial mask design. Using this technique, the initial etch pattern for base member 102 is shown in FIG. 4. For an etch depth of 12 microns, the groove pattern corners at 166 will etch to the right 40 mils to form groove portion 124 in FIG. 3. Similarly, the corners at 168 will etch 40 mils to the left and to the right to form glue stop 152 in FIG. 3. Corners at 170 will etch left and corners 172 will etch right 40 mils to form groove 145 in FIG. 3. The corners at 174 will etch in both directions to form glue stop 154. The cover member 130 is produced in a similar manner. The initial pattern is aligned on the substrate so that the groove patterns are parallel with 1/2 of a degree to the flat (the 110 crystallographic plane). This prevents steps from being etched into the groove walls. The pattern is exposed with a standard positive photoresist over 2 microns of thermal SiO.sub.2. The underside of the substrate wafer must also be resist protected. After oxide etching and resist stripping, the wafer is etched in 90.degree. C. 20% KOH for about 2 hours, until the required depth and linear etch sizing have been reached. The wafer is stripped of the masking oxide and reoxidized so that the exposed silicon in the groove, where the fiber will rest, is coated with oxide.

It is understood that the above-described arrangements are merely illustrative of the application of principles of the invention and that other arrangements may be devised by workers skilled in the art without departing from the spirit and scope of the invention.