Automatic Wafer Prober Having a Probe Scrub Routine

The present invention relates in general to automatic wafer probers and, more particularly, one including an automatic probe tip scrub routine.

Heretofore, automatic wafer probers have included a means for allowing the operator to gain access to the probe tips with an emery cloth for cleaning of the tips by hand. However, great care must be exercised by the operator so as not to bend the tips or otherwise damage the probe tips during the cleaning operation. If one of the probe tips is damaged the entire probe card, carrying as many as 20 probes, must be replaced.

The principal object of the present invention is the provision of an improved automatic wafer prober having a probe tip cleaning routine.

In one feature of the present invention, the wafer prober automatically interrupts its probing sequence and steps the probes off of the wafer onto an abrasive element for scrubbing clean the probe tips. Thereafter, it returns to its probing sequence.

In another feature of the present invention, the abrasive element is fixedly secured to the wafer chuck and includes a flat for registration with a flat of the wafer to facilitate alignment of the wafer on the chuck.

In another feature of the present invention, the abrasive element is positioned on the wafer chuck so that the upper surface of the abrasive element is slightly below the upper surface of the wafer under test, whereby damage to the probe tips is reduced in use.

FIG. 1 is a schematic diagram, partly in block diagram form, of a wafer prober of the type to be employed in the preferred embodiment of the present invention,

FIG. 2 is a plan view of a wafer to be probed showing the position of the die on the wafer to be probed,

FIG. 3 is a schematic block diagram of a prober/tester system incorporating features of the present invention,

FIG. 4 is an enlarged detail view of a switch portion of the structure of FIG. 3,

FIG. 5 is a plan view of the keyboard of an input/output terminal delineated by line 5--5 of FIG. 3,

FIG. 6, A-W, is a logic flow diagram for a computer program employed in the prober of the present invention,

FIG. 7 is a plan view of a wafer and wafer chuck taken along line 7--7 of FIG. 1, and

FIG. 8 is an enlarged sectional view of a portion of the structure of FIG. 7 taken along line 8--8 and being partially broken away to show the fastener.

Referring now to FIGS. 1 and 3, there is shown an automatic wafer prober 11 for electronically testing discrete semiconductive devices, such as integrated circuits, light emitting diodes, etc. while still in the wafer form. Automatic wafer probers 11 are well known commercially available machines such as that described in U.S. Pat. No. 3,996,517, the disclosure of which is hereby incorporated by reference as though fully set forth hereat. They normally mark the defective electronic device or die in some manner usually with a solenoid operated inker of some variety. The marked die is later discarded or sorted for grading in accordance with the color of the ink.

The usual sequence of events is for a vacuum chuck 12, on which the wafer 10 to be tested is mounted, to be raised up in the vertical or Z axis direction under the influence of a pneumatic cylinder or solenoid 13. The individual die to be tested is electrically connected through a number of spring loaded needle like probes 14 to a die tester 15. A surface sensor, not shown, makes contact with the wafer's surface, and via digital logic circuitry provides a signal for the tester 15 to begin its test sequence. The test sequences are developed in the tester 15 which is external to the prober 11 and through electrical connections to the probes 14, on their support ring 16, it applies the test signal to the die under test and monitors the die response to the test sequence. If a defective die is found it is marked by an electrical signal being fed back to the prober 11 from the tester 15 to actuate an inking probe to mark the die accordingly. If a defective die is found it is discarded in a later processing step which cuts up the wafer and separates the numerous dies formed on its surface.

Upon completion of the test of a die, an end of test (EOT) signal is passed from the tester 15 to the prober 11 causing the vacuum chuck 12 to drop to its lower limit allowing indexing of the wafer in the X and Y direction to the next die on the wafer at which point the next test sequence is initiated. X and Y stepping motors 17 translate the chuck 12 in the row and column direction respectively, to bring the next die under the pattern of the probing needles 14. Also, the chuck 12 is rotatable around the Z axis, i.e., in the .theta. direction by means of a motor 19. A microscope (not shown) is disposed over the ring of probes 14 and permits the operator to observe the wafer 10 for initial alignment of the die test pattern relative to the individual probe pattern.

The prober 11 includes a controller 22 which interfaces the tester to the prober 11. The controller 22 includes a keyboard input/output terminal 23 which permits the operator to input data to and to output data from the prober 11. Also, a display and data collection system 24, which may include a printer, is interfaced to the tester 15 via the intermediary of the controller 22, such that the test results may be collected and displayed, as by wafer mapping. The controller 22 includes a central processing unit (CPU) such as a model 8080 commercially available from Intel of Santa Clara, Calif. In addition, the controller 22 includes suitable memories, X, Y, Z, and .theta. drive units for driving the stepping motors 17 and 19, the solenoid or pneumatic motor 13, a program or logic for controlling the various functions of the prober and tester, and a keyboard interface for interfacing the keyboard 23 to the controller and prober. A suitable prober 11 is a SP1 commercially available from Pacific Western Systems, Inc. of Mountain View, Calif. A suitable keyboard 23 is a model ADM3A commercially available from Lear Siegler of Anaheim, Calif.

Referring now to FIG. 2 there is shown a conventional semiconductive wafer 10 having rows and columns of die formed thereon and having an alignment flat 26 for registration with a flat on the chuck 12 so as to align the rows and columns of die to the chuck 12. In a given probe sequence for probing the wafer 10, it is often desirable to test only certain ones of the die as opposed to all of the die on the wafer and the prober system of the present invention is adapted for testing any arbitrary pattern of die in the column and row die matrix on the wafer 10.

Referring now to FIGS. 2-5 a method for programming an arbitrary probe step sequence in the automatic wafer prober system consisting of the prober 11, controller 22, and keyboard 23 will be described in greater detail. The prober 11 includes on its front panel a number of switches for feeding information to the controller 22 which then in connection with its central processing unit, associated memory and the logic programmed in the controller 22, processes the infromation and commands the prober to perform certain functions such as to move in the X, Y, Z and .theta. directions by producting a train of output drive pulses to the respective stepping drive motors, such as drive motors 17 and 19.

To program the prober/control machine with a desired probe step sequence, the operator sets a MODE switch 29 on the front panel of the prober to the LEARN position. The MODE switch has three positions, namely AUTO, LEARN, and MANUAL. The operator also sets a RUN switch 31 to PROG AUTO. Run switch 31 has three positions, namely PROG AUTO, LOAD, and E.S. AUTO. This switch setting will allow a probe step control LEARN sequence in the controller 22 to be initiated at the keyboard 23. In response to the operator hitting key COMND 34 and then key PROG=51 the program in the controller 22 will cause the display 32 on the keyboard 23 to display "NEW TEST ID=XXX".

Next, the operator hits the ENTER key 33 on the keyboard 23. The controller 22 in response, then causes the display 32 to print "ENTER 12 DIGIT IDENTIFIER . . . . " Next, the operator enters a 12 digit alpha-numeric identifier using the ASC II feature and/or the numbers. The ASC II feature is the key 34 titled COMND ASC II. Hitting this key 34 permits non-numeric entries. If an internal flag is set indicating that such an entry is permissable and if key 34 is pressed, then the next two number keys 35 hit are considered to be a single ASC II character. Thus, by pressing the proper numerical keys 35 in accordance with a predetermined code a desired alpha-numeric identifier is entered into the memory of the controller 22.

The operator then hits the ENTER key 33. This then causes the program to display on display 32 of the keyboard 23 a predetermined reference position which is arbitrarily selected to be R=128, C=128, which means that the reference position is arbitrarily identified as row 128 and column 128 of the matrix of die to be probed.

The program acting through the central processing unit of the controller causes X and Y counters in the CPU to be reset at the reference location, namely, R128, C128. The CPU's X and Y counters monitor the X and Y coordinates of the probes 14 relative to the die in the die matrix on the wafer 10. The counters can count the individual pulses or steps made by the respective stepping motors 17 for both the X and Y directions. However, these counts would get relatively high and require a substantial amount of memory and thus the program utilized the die size data inputted to the CPU via the digital X and Y switchs 36 and 37 to divide the stepping motor pulses so as to reduce the count data to row and column data.

Next, the operator presses the ENTER key 33 and the program in the controller causes "SET X+Y DIGIT SWITCHES AND POSITION AT REFERENCE DIE . . . HIT ENTER WHEN READY . . . " to be displayed. The operator then follows this instruction displayed on the display 32 of the keyboard 23 by setting X and Y digit switches 36 and 37, respectively, on the front panel of the prober 11 to the X and Y dimensions, respectively, on the front panel of the prober 11 to the X and Y dimensions, respectively, in mils of the die on the wafer 10. The digit switches 36 and 37 are BCD coded rotary switches ranging from 000.0 mils to 999.5 mils each. Further following the displayed instructions, the operator then manipulates the probes relative to the wafer to set the probes 14 over the pattern of probe pads on a reference die 38 on the wafer 10.

To manipulate the probes relative to the wafer, the prober 11 includes switches on its front panel. The switches are shown in FIG. 4. More particularly, there is a toggle switch 39 having three positions, namely, STEP, SLOW SCAN, and SCAN. Above and below the toggle switch 39 are BACK and FORWARD switches 41 and 42, respectively, and to the left and right of the toggle switch 39 are LEFT and RIGHT switches 43 and 44, respectively, for causing the chuck 12 to move to the left and right relative to the probes 14.

Thus, the operator by utilizing switches 39-44, manipulates the chuck 12 relative to the pattern of probes 14 to set the probes over the reference die 38.

Next, the operator hits ENTER key 33 which gives the next instruction on the keyboard display 32 as "STEP TO START DIE AND HIT STORE ON PROBER". The operator then utilizes the switches 39-44 on the probe 11 to manipulate the probes 14 over a die on the wafer which the operator wishes to identify as the start die 45, i.e., the first die to be tested in the probe step sequence. Upon reaching the start die 45 the operator hits a STORE key 50 on the front panel of the prober 11. In traversing the matrix of die from the reference die 38 to the start die 45, the CPU of the controller 22 has been counting the row and columns steps to the start die 45 and upon pressing of the STORE key 50, those coordinates are stored in the memory of the CPU.

Next, the operator manipulates the row direction switches 43 or 44 to step the probes to the last die to be probed of any contiguous block of die to be probed on the same row from either direction, i.e., either left or right. Upon reaching the last die of that block, the operator hits the STORE key 50. This causes the CPU to store the X and Y coordinates of the end column assuming the same row.

Next, the operator by use of the manipulative switches 41-44 steps the probes to the next die to be tested and hits STORE key 50, the operator then steps to the last die of any contiguous block on the same row from either direction left or right and again hits the STORE key 50. This stores the X and Y coordinates of the first and last die of the contiguous block to be tested in that row. These latter steps are then repeated for all of the remaining die to be tested on the wafer 10. Upon completion of stepping through the probe step sequence the operator hits the COMND key 34 followed by pressing the LAST key 46. This files the coordinates for the probe step sequence in the random access memory of the controller 22.

The operator can try out the probe step sequence he has just programmed by positioning the probes to the reference die 38 and hitting the LOAD key 51 on the keyboard 23 followed by hitting the ZERO key 47 three times and then hitting the ENTER key 33. The CPU then pulls out the 12 digit identifier and displays that on the display 32 of the keyboard 23. The operator may then hit the ENTER key 33 again which will then cause the CPU to display the digit switch settings 36 and 37, respectivley. The operator then goes back to the prober 11 and switches the three position MODE switch 29 to AUTO and the three position RUN switch 31 to PROG AUTO and hits a START button 48 on the prober. This initiates the probe step sequence previously filed in the random access memory of the controller 22.

In order that the operator can observe the sequence in relatively slow motion, the operator holds a STOP button 49 depressed on the front panel of the prober 11 which causes the motion of the prober to stop after reaching each successive die in the probe step sequence. After the probes have stopped, the operator merely presses the START button 48 and the prober will go to the next die in the sequence.

If the operator is satisfied with the probe step sequence, the operator saves the program by positioning the MODE switch 29 in the AUTO position and the RUN switch 31 in LOAD position and then on the keyboard 23 hits the COMND key followed by hitting the STORE key 33 which then enters the program previously stored in the random access memory of the CPU into an electrical programmable read only memory (EPROM) portion of the memory of the CPU. While the data is being transferred from the random access memory to the read only memory, the keyboard display 32 displays "WRITING EPROMS". The CPU checks the data from the RAM with the data written into the EPROM for errors. If it finds no errors it displays on the display 32 of the keyboard 23 "WRITE COMPLETED".

Once written into the read only memory of the controller 22, that particular probe step sequence can be recalled for testing a batch of wafers by entering the proper 3 digit test identifier and calling up the program.

Referring now to FIGS. 7 and 8 there is shown the wafer chuck 12 with the wafer 10 in aligned position thereon. A scrub block 61 of an abrasive material, such as ceramic, is fixedly secured as by a screw 62 and holder member 63 to the side of the chuck 12. The scrub block is affixed to the holder member 63, as of brass, via an adhesive cement at 64. The scrub block 61 includes a flat 65 facing the chuck 12 for registration with a flat 66 of the wafer for alignment of the wafer 10 on the chuck 12.

After the start of the probing sequence of die on the wafer 10, the prober system counts the number of die probed. When the number of probed die equals the preselected number before scrub, the probe sequence is automatically interrupted by the prober system and the probes are stepped off of the wafer 10 onto the upper scrubbing surface of the scrub block 61. The upper surface of the scrub block 61 is preferably positioned slightly below or even with the upper surface of the wafer 10 being probed. Once stepped onto the scrub block 61, the probe tips are stepped down (actually the wafer and chuck are stepped up) onto the scrub block 61 a few times, i.e., one to three times, for abrading oxide and other foreign matter from the probe tips. The stepping action on the scrub block 61 is essentially the same as the stepping action on the die being probed. As the probe tips are stepped down on the scrub block 61, they deflect along the scrubbing surface of the scrub block 61, thereby producing a scrubbing or rubbing action which cleans the probe tips without damaging the tips.

Once the scrubbing steps are completed the prober causes the probes to return to the interrupted probe sequence.

The operator enters the information for the scrub routine into the prober system by pressing the ENTER key 33 on keyboard 23 and the program in the controller 22 causes the CRT to display, "STEP TO SCRUB AREA . . . HIT ENTER WHEN READY". The operator manipulates the stepping switches 41-44 to step the prober over the scrub block 61. Then the operator presses the ENTER key 33.

Next the operator presses the COMND key 34 together with a FUNC A key 67 and the CRT display displays "SCRUB EVERY 0000". The operator then presses the numerical keys until the desired number is displayed where the "0000" had been displayed. Any even number of 10 between 10 and 2500 can be set by the operator and this is the number of die to be probed before the probing sequence is interrupted for performance of the scrub routine for cleaning of the probe tips. Next the operator presses the ENTER key 33 and the display displays "ENTERED". The scrub routine information is now entered and the operator merely presses the START key to start the automatic probing sequence, which is periodically interrupted by the scrub routine.

The advantage to the method and apparatus of the present invention is that the probe tips are cleaned automatically and in a manner so as not to damage the probe tips. In addition, the number of die to be probed before scrubbing of the probe tips is readily selected in accordance with the expected rate at which the probe tips will be fouled when probing the particular die under test. The flow chart for the program for programming the probe step sequence is shown in FIG. 6 and the listing for the program is disclosed in Appendix I, below. ##SPC1## ##SPC2## ##SPC3## /