ATOMIC LAYER DEPOSITED NANOLAMINATES OF HfO2/ZrO2 FILMS AS GATE DIELECTRICS

[0001] The present application is a Divisional of U.S. application Ser. No. 11/148,505 filed on Jun. 9, 2005 that is a Divisional of U.S. application Ser. No. 10/209,581, filed Jul. 30, 2002, now U.S. Pat. No. 6,921,702, both applications are incorporated herein by reference.

[0002] This application is related to the following, co-pending, commonly assigned applications, incorporated herein by reference:

[0003] U.S. application Ser. No. 10/163,481, entitled: “Atomic Layer-Deposited HfAlO₃ Films for Gate Dielectrics;”

[0004] U.S. Pat. No. 7,045,430, entitled: “Atomic Layer-Deposited LaAlO₃ Films for Gate Dielectrics;”

[0005] U.S. application Ser. No. 10/137,058, entitled: “Atomic Layer Deposition and Conversion;”

[0006] U.S. application Ser. No. 09/945,535, entitled: “Highly Reliable Amorphous High-K Gate Oxide ZrO₂;”

[0007] U.S. application Ser. No. 10/137,168, entitled: “Methods, Systems, and Apparatus for Atomic-Layer Deposition of Aluminum Oxides in Integrated Circuits;” and

[0008] U.S. Pat. No. 6,852,167, entitled: “Methods, Systems, and Apparatus for Uniform Chemical-Vapor Depositions.”

[0009] The invention relates to semiconductor devices and device fabrication. Specifically, the invention relates to gate dielectric layers of transistor devices and their method of fabrication.

[0010] The semiconductor device industry has a market driven need to improve speed performance, improve its low static (off-state) power requirements, and adapt to a wide range of power supply and output voltage requirements for it silicon based microelectronic products. In particular, in the fabrication of transistors, there is continuous pressure to reduce the size of devices such as transistors. The ultimate goal is to fabricate increasingly smaller and more reliable integrated circuits (ICs) for use in products such as processor chips, mobile telephones, or memory devices such as DRAMs. The smaller devices are frequently powered by batteries, where there is also pressure to reduce the size of the batteries, and to extend the time between battery charges. This forces the industry to not only design smaller transistors, but to design them to operate reliably with lower power supplies.

[0011] Currently, the semiconductor industry relies on the ability to reduce or scale the dimensions of its basic devices, primarily, the silicon based metal-oxide-semiconductor field effect transistor (MOSFET). A common configuration of such a transistor is shown in FIG. 1. While the following discussion uses FIG. 1 to illustrate a transistor from the prior art, one skilled in the art will recognize that the present invention could be incorporated into the transistor shown in FIG. 1 to form a novel transistor according to the invention. The transistor 100 is fabricated in a substrate 110 that is typically silicon, but could be fabricated from other semiconductor materials as well. The transistor 100 has a first source/drain region 120 and a second source/drain region 130. A body region 132 is located between the first source/drain region and the second source/drain region, where the body region 132 defines a channel of the transistor with a channel length 134. A gate dielectric, or gate oxide 140 is located on the body region 132 with a gate 150 located over the gate dielectric. Although the gate dielectric can be formed from materials other than oxides, the gate dielectric is typically an oxide, and is commonly referred to as a gate oxide. The gate may be fabricated from polycrystalline silicon (polysilicon), or other conducting materials such as metal may be used.

[0012] In fabricating transistors to be smaller in size and reliably operate on lower power supplies, one important design criteria is the gate dielectric 140. The mainstay for forming the gate dielectric has been silicon dioxide, SiO₂. A thermally grown amorphous SiO₂ layer provides an electrically and thermodynamically stable material, where the interface of the SiO₂ layer with underlying Si provides a high quality interface as well as superior electrical isolation properties. In typical processing, use of SiO₂ on Si has provided defect charge densities on the order of 10¹⁰/cm², midgap interface state densities of approximately 10¹⁰/cm² eV, and breakdown voltages in the range of 15 MV/cm. With such qualities, there would be no apparent need to use a material other than SiO₂, but increased scaling and other requirements for gate dielectrics create the need to find other dielectric materials to be used for a gate dielectric.

[0013] What is needed is an alternate dielectric material for forming a gate dielectric that has a high dielectric constant relative to SiO₂, and is thermodynamically stable with respect to silicon such that forming the dielectric on a silicon layer will not result in SiO₂ formation, or diffusion of material, such as dopants, into the gate dielectric from the underlying silicon layer.

[0014] FIG. 1 shows a common configuration of a transistor in which an embodiment of a gate dielectric can be formed, according to the teaching of the present invention.

[0015] FIG. 2A shows an embodiment of an atomic layer deposition system for processing a layer of HfO₂ and a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention.

[0016] FIG. 2B shows an embodiment of a gas-distribution fixture of an atomic layer deposition chamber for processing a layer of HfO₂ and a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention.

[0017] FIG. 3 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention.

[0018] FIG. 4 illustrates a flow diagram of elements for another embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ by atomic layer deposition, according to the teachings of the present invention.

[0019] FIG. 5 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and thermal evaporation/plasma oxidation, according to the teachings of the present invention.

[0020] FIG. 6 shows an embodiment of an electron beam evaporation process for forming a layer of zirconium on a layer of HfO₂ to process a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention.

[0021] FIG. 7A shows an embodiment of a zirconium layer deposited on a layer of HfO₂, according to the teachings of the present invention.

[0022] FIG. 7B shows an embodiment of a partially oxidized zirconium layer deposited on a layer of HfO₂, according to the teachings of the present invention.

[0023] FIG. 7C shows an embodiment of a ZrO₂ substantially completely oxidized and formed on a layer of HfO₂ to form a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention.

[0024] FIG. 8 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and chemical vapor deposition, according to the teachings of the present invention.

[0025] FIG. 9 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and pulsed-laser deposition, according to the teachings of the present invention.

[0026] FIG. 10 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and jet-vapor deposition, according to the teachings of the present invention.

[0027] FIG. 11 shows an embodiment of a configuration of a transistor capable of being fabricated, according to the teachings of the present invention.

[0028] FIG. 12 shows an embodiment of a personal computer incorporating devices, according to the teachings of the present invention.

[0029] FIG. 13 illustrates a schematic view of an embodiment of a central processing unit incorporating devices, according to the teachings of the present invention.

[0030] FIG. 14 illustrates a schematic view of an embodiment of a DRAM memory device, according to the teachings of the present invention.

[0031] In the following detailed description of the invention, reference is made to the accompanying drawings which form a part hereof, and in which is shown, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and structural, logical, and electrical changes may be made without departing from the scope of the present invention.

[0032] The terms wafer and substrate used in the following description include any structure having an exposed surface with which to form the integrated circuit (IC) structure of the invention. The term substrate is understood to include semiconductor wafers. The term substrate is also used to refer to semiconductor structures during processing, and may include other layers that have been fabricated thereupon. Both wafer and substrate include doped and undoped semiconductors, epitaxial semiconductor layers supported by a base semiconductor or insulator, as well as other semiconductor structures well known to one skilled in the art. The term conductor is understood to include semiconductors, and the term insulator or dielectric is defined to include any material that is less electrically conductive than the materials referred to as conductors.

[0033] The term “horizontal” as used in this application is defined as a plane parallel to the conventional plane or surface of a wafer or substrate, regardless of the orientation of the wafer or substrate. The term “vertical” refers to a direction perpendicular to the horizontal as defined above. Prepositions, such as “on”, “side” (as in “sidewall”), “higher”, “lower”, “over” and “under” are defined with respect to the conventional plane or surface being on the top surface of the wafer or substrate, regardless of the orientation of the wafer or substrate. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is defined only by the appended claims, along with the full scope of equivalents to which such claims are entitled.

[0034] A gate dielectric 140 of FIG. 1, when operating in a transistor, has both a physical gate dielectric thickness and an equivalent oxide thickness (t_eq). The equivalent oxide thickness quantifies the electrical properties, such as capacitance, of a gate dielectric 140 in terms of a representative physical thickness. t_eq is defined as the thickness of a theoretical SiO₂ layer that would be required to have the same capacitance density as a given dielectric, ignoring leakage current and reliability considerations.

[0035] A SiO₂ layer of thickness, t, deposited on a Si surface as a gate dielectric will have a t_eq larger than its thickness, t. This t_eq results from the capacitance in the surface channel on which the SiO₂ is deposited due to the formation of a depletion/inversion region. This depletion/inversion region can result in t_eq being from 3 to 6 Angstroms (Å) larger than the SiO₂ thickness, t. Thus, with the semiconductor industry driving to someday scale the gate dielectric equivalent oxide thickness to under 10 Å, the physical thickness requirement for a SiO₂ layer used for a gate dielectric would be need to be approximately 4 to 7 Å.

[0036] Additional requirements on a SiO₂ layer would depend on the gate electrode used in conjunction with the SiO₂ gate dielectric. Using a conventional polysilicon gate would result in an additional increase in t_eq for the SiO₂ layer. This additional thickness could be eliminated by using a metal gate electrode, though metal gates are not currently used in complementary metal-oxide-semiconductor field effect transistor (CMOS) technology. Thus, future devices would be designed towards a physical SiO₂ gate dielectric layer of about 5 Å or less. Such a small thickness requirement for a SiO₂ oxide layer creates additional problems.

[0037] Silicon dioxide is used as a gate dielectric, in part, due to its electrical isolation properties in a SiO₂—Si based structure. This electrical isolation is due to the relatively large band gap of SiO₂ (8.9 eV) making it a good insulator from electrical conduction. Signification reductions in its band gap would eliminate it as a material for a gate dielectric. As the thickness of a SiO₂ layer decreases, the number of atomic layers, or monolayers of the material in the thickness decreases. At a certain thickness, the number of monolayers will be sufficiently small that the SiO₂ layer will not have a complete arrangement of atoms as in a larger or bulk layer. As a result of incomplete formation relative to a bulk structure, a thin SiO₂ layer of only one or two monolayers will not form a full band gap. The lack of a full band gap in a SiO₂ gate dielectric would cause an effective short between an underlying Si channel and an overlying polysilicon gate. This undesirable property sets a limit on the physical thickness to which a SiO₂ layer can be scaled. The minimum thickness due to this monolayer effect is thought to be about 7-8 Å. Therefore, for future devices to have a t_eq less than about 10 Å, other dielectrics than SiO₂ need to be considered for use as a gate dielectric.

[0038] For a typical dielectric layer used as a gate dielectric, the capacitance is determined as one for a parallel plate capacitance: C=_κ∈0A/t, where κ is the dielectric constant, ∈₀ is the permittivity of free space, A is the area of the capacitor, and t is the thickness of the dielectric. The thickness, t, of a material is related to t_eq for a given capacitance with the dielectric constant of SiO₂, κ_ox=3.9, associated with t_eq, as
t=(κ/κ_ox)t_eq=(κ/3.9)t_eq.
Thus, materials with a dielectric constant greater than that of SiO₂, 3.9, will have a physical thickness that can be considerably larger than a desired t_eq, while providing the desired equivalent oxide thickness. For example, an alternate dielectric material with a dielectric constant of 10 could have a thickness of about 25.6 Å to provide a t_eq of 10 Å, not including any depletion/inversion layer effects. Thus, the reduced equivalent oxide thickness of transistors can be realized by using dielectric materials with higher dielectric constants than SiO₂.

[0039] The thinner equivalent oxide thickness required for lower transistor operating voltages and smaller transistor dimensions may be realized by a significant number of materials, but additional fabricating requirements makes determining a suitable replacement for SiO₂ difficult. The current view for the microelectronics industry is still for Si based devices. This requires that the gate dielectric employed be grown on a silicon substrate or silicon layer, which places significant restraints on the substitute dielectric material. During the formation of the dielectric on the silicon layer, there exists the possibility that a small layer of SiO₂ could be formed in addition to the desired dielectric. The result would effectively be a dielectric layer consisting of two sublayers in parallel with each other and the silicon layer on which the dielectric is formed. In such a case, the resulting capacitance would be that of two dielectrics in series. As a result, the t_eq of the dielectric layer would be the sum of the SiO₂ thickness and a multiplicative factor of the thickness of the dielectric being formed, written as
t_eq=t_SiO2+(κ_ox/κ)t.
Thus, if a SiO₂ layer is formed in the process, the t_eq is again limited by a SiO₂ layer. In the event that a barrier layer is formed between the silicon layer and the desired dielectric in which the barrier layer prevents the formation of a SiO₂ layer, the t_eq would be limited by the layer with the lowest dielectric constant. However, whether a single dielectric layer with a high dielectric constant or a barrier layer with a higher dielectric constant than SiO₂ is employed, the layer interfacing with the silicon layer must provide a high quality interface to maintain a high channel carrier mobility.

[0040] In a recent article by G. D. Wilk et al., Journal of Applied Physics, vol. 89: no. 10, pp. 5243-5275 (2001), material properties of high dielectric materials for gate dielectrics were discussed. Among the information disclosed was the viability of Al₂O₃ as a substitute for SiO₂. Al₂O₃ was disclosed has having favourable properties for use as a gate dielectric such as high band gap, thermodynamic stability on Si up to high temperatures, and an amorphous structure. In addition, Wilk disclosed that forming a layer of Al₂O₃ on silicon does not result in a SiO₂ interfacial layer. However, the dielectric constant of Al₂O₃ is only 9, where thin layers may have a dielectric constant of about 8 to about 10. Though the dielectric constant of Al₂O₃ is in an improvement over SiO₂, a higher dielectric constant for a gate dielectric is desirable. Other dielectrics and their properties discussed by Wilk include

		Dielectric	Band gap
	Material	Constant (κ)	Eg (eV)	Crystal Structure(s)
	SiO2	3.9	8.9	Amorphous
	Si3N4	7	5.1	Amorphous
	Al2O3	9	8.7	Amorphous
	Y2O3	15	5.6	Cubic
	La2O3	30	4.3	Hexagonal, Cubic
	Ta2O5	26	4.5	Orthorhombic
	TiO2	80	3.5	Tetrag. (rutile,
				anatase)
	HfO2	25	5.7	Mono., Tetrag., Cubic
	ZrO2	25	7.8	Mono., Tetrag., Cubic

[0041] One of the advantages using SiO₂ as a gate dielectric has been that the formation of the SiO₂ layer results in an amorphous gate dielectric. Having an amorphous structure for a gate dielectric is advantageous because grain boundaries in polycrystalline gate dielectrics provide high leakage paths. Additionally, grain size and orientation changes throughout a polycrystalline gate dielectric can cause variations in the film's dielectric constant. The abovementioned material properties including crystal structure are for the materials in a bulk form. The materials having the advantage of a high dielectric constants relative to SiO₂ also have the disadvantage of a crystalline form, at least in a bulk configuration. The best candidates for replacing SiO₂ as a gate dielectric are those with high dielectric constant, which can be fabricated as a thin layer with an amorphous form.

[0042] In one embodiment, a method of forming a gate dielectric on a transistor body region includes the formation of HfO₂/ZrO₂ nanolaminates by atomic layer deposition (ALD) of HfO₂ using a HfI₄ precursor followed by the formation of ZrO₂ on the HfO₂ layer. Various embodiments include forming the ZrO₂ layer by thermal evaporation followed by krypton/oxygen mixed plasma oxidation, pulsed-laser deposition, or jet-vapor deposition.

[0043] A gate dielectric formed as nanolaminates of HfO₂/ZrO₂ has a larger dielectric constant than silicon dioxide, a relatively small leakage current, and good stability with respect to a silicon based substrate. Embodiments according to the teachings of the present invention include forming transistors, memory devices, and electronic systems having dielectric layers containing nanolaminates of HfO₂/ZrO₂.

[0044] Other embodiments include structures for transistors, memory devices, and electronic systems with gate dielectrics containing nanolaminates of HfO₂/ZrO₂ Such gate dielectrics provide a significantly thinner equivalent oxide thickness compared with a silicon oxide gate having the same physical thickness. Alternatively, such gate dielectrics provide a significantly thicker physical thickness than a silicon oxide gate dielectric having the same equivalent oxide thickness.

[0045] In an embodiment according to the teachings of the present invention, a gate dielectric includes thin layers of HfO₂ and ZrO₂ forming a nanolaminate. The term “nanolaminate” means a composite film of ultra thin layers of two or more materials in a layered stack, where the layers are alternating layers of materials of the composite film. Typically, nanolaminates have thicknesses of an order of magnitude in the nanometer range. Each individual material layer of the nanolaminate can have thicknesses as low as a monolayer of the material. A nanolaminate of HfO₂ and ZrO₂ includes at least one thin layer of HfO₂, and one thin layer of ZrO₂, and is typically written as a nanolaminate of HfO₂/ZrO₂. In one embodiment, nanolaminates of HfO₂/ZrO₂ are grown using atomic layer deposition (ALD), also known as atomic layer epitaxy (ALE).

[0046] ALD was developed in the early 1970's as a modification of chemical vapor deposition (CVD) and is also called “alternatively pulsed-CVD.” In ALD, gaseous precursors are introduced one at a time to the substrate surface mounted within a reaction chamber (or reactor). This introduction of the gaseous precursors takes the form of pulses of each gaseous precursor. Between the pulses, the reaction chamber is purged with a gas, which in many cases is an inert gas, or evacuated.

[0047] In a chemisorption-saturated ALD (CS-ALD) process, during the first pulsing phase, reaction with the substrate occurs with the precursor saturatively chemisorbed at the substrate surface. Subsequent pulsing with a purging gas removes precursor excess from the reaction chamber.

[0048] The second pulsing phase introduces another precursor on the substrate where the growth reaction of the desired film takes place. Subsequent to the film growth reaction, reaction byproducts and precursor excess are purged from the reaction chamber. With favourable precursor chemistry where the precursors adsorb and react with each other on the substrate aggressively, one ALD cycle can be preformed in less than one second in properly designed flow type reaction chambers. Typically, precursor pulse times range from about 0.5 sec to about 2 to 3 seconds.

[0049] In ALD, the saturation of all the reaction and purging phases makes the growth self-limiting. This self-limiting growth results in large area uniformity and conformality, which has important applications for such cases as planar substrates, deep trenches, and in the processing of porous silicon and high surface area silica and alumina powders. Significantly, ALD provides for controlling film thickness in a straightforward, simple manner by controlling the number of growth cycles.

[0050] ALD was originally developed to manufacture luminescent and dielectric films needed in electroluminescent displays. Significant efforts have been made to apply ALD to the growth of doped zinc sulfide and alkaline earth metal sulfide films. Additionally, ALD has been studied for the growth of different epitaxial II-V and II-VI films, nonepitaxial crystalline or amorphous oxide and nitride films and multilayer structures of these. There also has been considerable interest towards the ALD growth of silicon and germanium films, but due to the difficult precursor chemistry, this has not been very successful.

[0051] The precursors used in an ALD process may be gaseous, liquid or solid. However, liquid or solid precursors must be volatile. The vapor pressure must be high enough for effective mass transportation. Also, solid and some liquid precursors need to be heated inside the reaction chamber and introduced through heated tubes to the substrates. The necessary vapor pressure must be reached at a temperature below the substrate temperature to avoid the condensation of the precursors on the substrate. Due to the self-limiting growth mechanisms of ALD, relatively low vapor pressure solid precursors can be used though evaporation rates may somewhat vary during the process because of changes in their surface area.

[0052] There are several other requirements for precursors used in ALD. The precursors must be thermally stable at the substrate temperature because their decomposition would destroy the surface control and accordingly the advantages of the ALD method which relies on the reactant of the precursor at the substrate surface. Of course, a slight decomposition, if slow compared to the ALD growth, can be tolerated.

[0053] The precursors have to chemisorb on or react with the surface, though the interaction between the precursor and the surface as well as the mechanism for the adsorption is different for different precursors. The molecules at the substrate surface must react aggressively with the second precursor to form the desired solid film. Additionally, precursors should not react with the film to cause etching, and precursors should not dissolve in the film. Using highly reactive precursors in ALD contrasts with the selection of precursors for conventional CVD.

[0054] The by-products in the reaction must be gaseous in order to allow their easy removal from the reaction chamber. Further, the by-products should not react or adsorb on the surface.

[0055] In a reaction sequence ALD (RS-ALD) process, the self-limiting process sequence involves sequential surface chemical reactions. RS-ALD relies on chemistry between a reactive surface and a reactive molecular precursor. In an RS-ALD process, molecular precursors are pulsed into the ALD reaction chamber separately. The metal precursor reaction at the substrate is typically followed by an inert gas pulse to remove excess precursor and by-products from the reaction chamber prior to pulsing the next precursor of the fabrication sequence.

[0056] By RS-ALD, films can be layered in equal metered sequences that are all identical in chemical kinetics, deposition per cycle, composition, and thickness. RS-ALD sequences generally deposit less than a full layer per cycle. Typically, a deposition or growth rate of about 0.25 to about 2.00 Å per RS-ALD cycle can be realized.

[0057] The advantages of RS-ALD include continuity at an interface, conformality over a substrate, use of low temperature and mildly oxidizing processes, growth thickness dependent solely on the number of cycles performed, and ability to engineer multilayer laminate films with resolution of one to two monolayers. RS-ALD allows for deposition control on the order on monolayers and the ability to deposit monolayers of amorphous films.

[0058] RS-ALD processes provide for the formation of nanolaminates. These nanolaminates can be engineered in various forms. In one form, the transition between material layers of the nanolaminate can be made abrupt. In another form, the transition between material layers of the nanolaminate can be constructed with a graded composition. The graded composition can be formed by RS-ALD due its control of the deposition thickness per cycle.

[0059] In an embodiment, a layer of HfO₂ is formed on a substrate mounted in a reaction chamber using ALD in a repetitive sequence including pulsing a hafnium containing precursor into the reaction chamber followed by pulsing a purging gas, and then pulsing a first oxygen containing precursor into the chamber. In one embodiment using ALD, a layer of HfO₂ is formed using HfI₄ as a hafnium containing precursor, water vapor as a first oxygen containing precursor, and nitrogen as a purging gas and carrier gas. After forming a HfO₂ layer, a ZrO₂ layer is formed on the HfO₂ layer.

[0060] In one embodiment, the layer of ZrO₂ is formed by ALD. In particular, a repetitive sequence includes using ZrI₄ as a zirconium containing precursor along with a vapor solution of HO₂—H₂O₂ as a second oxygen containing precursor, and nitrogen as a purging gas and carrier gas. In another embodiment, the ZrO₂ layer is formed by depositing a layer of zirconium on the HfO₂ layer by thermal evaporation, and oxidizing the zirconium layer using a krypton(Kr)/oxygen(O₂) mixed plasma to form a HfO₂/ZrO₂ composite layer. In another embodiment, the ZrO₂ layer is formed by pulsed-laser deposition. In yet another embodiment, the ZrO₂ layer is formed by jet-vapor deposition.

[0061] In one embodiment, precursor gases, in particular HfI₄, are used to form the HfO₂ layer for the HfO₂/ZrO₂ nanolaminate films used as a gate dielectric on a transistor body. Alternately, solid or liquid precursors can be used in an appropriately designed reaction chamber. ALD formation of other materials is disclosed in co-pending, commonly assigned U.S. patent application: entitled “Atomic Layer Deposition and Conversion,” attorney docket no. 303.802US1, Ser. No. 10/137,058, and “Methods, Systems, and Apparatus for Atomic-Layer Deposition of Aluminum Oxides in Integrated Circuits,” attorney docket no. 1303.048US1, Ser. No. 10/137,168.

[0062] FIG. 2A shows an embodiment of an atomic layer deposition system for processing layers of HfO₂ and nanolaminates of HfO₂/ZrO₂ according to the teachings of the present invention. The elements depicted are those elements necessary for discussion of the present invention such that those skilled in the art may practice the present invention without undue experimentation. A further discussion of the ALD reaction chamber can be found in co-pending, commonly assigned U.S. patent application: entitled “Methods, Systems, and Apparatus for Uniform Chemical-Vapor Depositions,” attorney docket no. 303.717US1, Ser. No. 09/797,324, incorporated herein by reference.

[0063] In FIG. 2A, a substrate 210 is located inside a reaction chamber 220 of ALD system 200. Also located within the reaction chamber 220 is a heating element 230 which is thermally coupled to substrate 210 to control the substrate temperature. A gas-distribution fixture 240 introduces precursor gases to the substrate 210. Each precursor gas originates from individual gas sources 251-254 whose flow is controlled by mass-flow controllers 256-259, respectively. The gas sources 251-254 provide a precursor gas either by storing the precursor as a gas or by providing a location and apparatus for evaporating a solid or liquid material to form the selected precursor gas.

[0064] Also included in the ALD system are purging gas sources 261, 262, each of which is coupled to mass-flow controllers 266, 267, respectively. The gas sources 251-254 and the purging gas sources 261-262 are coupled by their associated mass-flow controllers to a common gas line or conduit 270 which is coupled to the gas-distribution fixture 240 inside the reaction chamber 220. Gas conduit 270 is also coupled to vacuum pump, or exhaust pump, 281 by mass-flow controller 286 to remove excess precursor gases, purging gases, and by-product gases at the end of a purging sequence from the gas conduit.

[0065] Vacuum pump, or exhaust pump, 282 is coupled by mass-flow controller 287 to remove excess precursor gases, purging gases, and by-product gases at the end of a purging sequence from the reaction chamber 220. For convenience, control displays, mounting apparatus, temperature sensing devices, substrate maneuvering apparatus, and necessary electrical connections as are known to those skilled in the art are not shown in FIG. 2A.

[0066] FIG. 2B shows an embodiment of a gas-distribution fixture of an atomic layer deposition chamber for processing layers of HfO₂ and nanolaminates of HfO₂/ZrO₂, according to the teachings of the present invention. Gas-distribution fixture 240 includes a gas-distribution member 242, and a gas inlet 244. Gas inlet 244 couples the gas-distribution member 242 to the gas conduit 270 of FIG. 2A. Gas-distribution member 242 includes gas-distribution holes, or orifices, 246 and gas-distribution channels 248. In the exemplary embodiment, holes 246 are substantially circular with a common diameter in the range of 15-20 microns, gas-distribution channels 248 have a common width in the range of 20-45 microns. The surface 249 of the gas distribution member having gas-distribution holes 246 is substantially planar and parallel to the substrate 210 of FIG. 2A. However, other embodiments use other surface forms as well as shapes and sizes of holes and channels. The distribution and size of holes may also affect deposition thickness and thus might be used to assist thickness control. Holes 246 are coupled through gas-distribution channels 248 to gas inlet 244. Though the ALD system 200 is well suited for practicing the present invention, other ALD systems commercially available can be used.

[0067] The use, construction and fundamental operation of reaction chambers for deposition of films are understood by those of ordinary skill in the art of semiconductor fabrication. The present invention man be practiced on a variety of such reaction chambers without undue experimentation. Furthermore, one of ordinary skill in the art will comprehend the necessary detection, measurement, and control techniques in the art of semiconductor fabrication upon reading the disclosure.

[0068] FIG. 3 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention. This embodiment of a method for forming a HfO₂/ZrO₂ nanolaminate includes forming a layer of hafnium oxide on a substrate in a reaction chamber by atomic layer deposition using a HfI₄ precursor, at block 305, and forming a layer of zirconium oxide on the layer of hafnium oxide to form a HfO₂/ZrO₂ composite, at block 310. By strictly controlling the processing of the HfO₂ layer and the ZrO₂ layer, the HfO₂/ZrO₂ composite formed is a HfO₂/ZrO₂ nanolaminate. In one embodiment, the HfO₂/ZrO₂ nanolaminate is composed of one HfO₂ layer and one layer ZrO₂ layer. In another embodiment, the HfO₂/ZrO₂ nanolaminate includes multiple layers of the HfO₂/ZrO₂ composite, where the initial layer disposed on a substrate is a HfO₂ layer. After this initial HfO₂ layer, there are alternating layers of HfO₂ and ZrO₂, with the terminating layer being a ZrO₂ layer in one embodiment and HfO₂ layer in another embodiment.

[0069] Forming the HfO₂ layer on a substrate by atomic layer deposition involves using a deposition sequence including pulsing the HfI₄ precursor into the reaction chamber, followed by pulsing a purging gas, pulsing a first oxygen containing precursor, and pulsing the purging gas. In one embodiment, the first oxygen precursor is water vapor. Each precursor is pulsed for a short time ranging from 0.5 seconds to two or three seconds. A purging gas such as nitrogen is pulsed for a longer period such as five to fifteen seconds to insure that all excess precursor gases and by-products are removed from the reaction chamber. Pulsing times are selected to enable the controlled growth of the HfO₂ layer on a one to two monolayer basis. For a fixed ALD sequence or cycle, including fixed pulsing times and substrate temperatures, the HfO₂ layer growth rate is at a relatively fixed rate, where a desired thickness of the HfO₂ layer is obtained by performing the ALD sequence for a predetermined number of cycles.

[0070] FIG. 4 illustrates a flow diagram of elements for another embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ by atomic layer deposition, according to the teachings of the present invention. In this embodiment, a method for forming a dielectric film includes forming a layer of HfO₂ on a substrate in a reaction chamber by atomic layer deposition using a HfI₄ precursor, and forming a layer of ZrO₂ on the HfO₂ layer by atomic layer deposition to form a HfO₂/ZrO₂ composite. Using the ALD process provides for the formation of the HfO₂/ZrO₂ composite as a nanolaminate. An embodiment of this method can be implemented with the atomic layer deposition system of FIGS. 2A, B.

[0071] At block 405, a substrate is prepared. The substrate used for forming a transistor is typically a silicon or silicon containing material. In other embodiments, germanium, gallium arsenide, silicon-on-sapphire substrates, or other suitable substrates may be used. This preparation process includes cleaning of the substrate 210 and forming layers and regions of the substrate, such as drains and sources of a metal oxide semiconductor (MOS) transistor, prior to forming a gate dielectric. The sequencing of the formation of the regions of the transistor being processed follows typical sequencing that is generally performed in the fabrication of a MOS transistor as is well known to those skilled in the art. Included in the processing prior to forming a gate dielectric is the masking of substrate regions to be protected during the gate dielectric formation, as is typically performed in MOS fabrication. In this embodiment, the unmasked region includes a body region of a transistor, however one skilled in the art will recognize that other semiconductor device structures may utilize this process. Additionally, the substrate 210 in its ready for processing form is conveyed into a position in reaction chamber 220 for ALD processing.

[0072] At block 410, a precursor containing hafnium is pulsed into reaction chamber 220. In particular, HfI₄ is used as a source material. The HfI₄ is pulsed into reaction chamber 220 through the gas-distribution fixture 240 onto substrate 210. The flow of the HfI₄ is controlled by mass-flow controller 256 from gas source 251. In one embodiment, the substrate temperature is maintained between about 225° C. and about 500° C. In another embodiment, the substrate temperature is maintained between about 250° C. and about 325° C. The lower temperature allows for forming a dielectric film suited for use as a gate dielectric, since an amorphous layer tends to more readily form at lower processing temperatures. The HfI₄ reacts with the surface of the substrate 210 in the desired region defined by the unmasked areas of the substrate 210.

[0073] At block 415, a first purging gas is pulsed into the reaction chamber 220. In particular, pure nitrogen with a purity greater than 99.99% is used as a purging gas for HfI₄. The nitrogen flow is controlled by mass-flow controller 266 from the purging gas source 261 into the gas conduit 270. Using the pure nitrogen purge avoids overlap of the precursor pulses and possible gas phase reactions. A nitrogen gas can also be used as a carrier gas for the precursors. Following the purge, a first oxygen containing precursor is pulsed into the reaction chamber 220, at block 420. For the hafnium sequence using HfI₄ as the precursor, water vapor is selected as the precursor acting as an oxidizing reactant to form a HfO₂ on the substrate 210. Alternately, a vapor solution of H₂O—H₂O₂ can be used as the oxygen containing precursor. The water vapor is pulsed into the reaction chamber 220 through gas conduit 270 from gas source 252 by mass-flow controller 257. The water vapor aggressively reacts at the surface of substrate 210.

[0074] Following the pulsing of oxidizing reactant water vapor, the first purging gas is injected into the reaction chamber 220, at block 425. In the HfI₄/water vapor sequence, pure nitrogen gas is used to purge the reaction chamber after pulsing each precursor gas. Excess precursor gas, and reaction by-products are removed from the system by the purge gas in conjunction with the exhausting of the reaction chamber 220 using vacuum pump 282 through mass-flow controller 287, and exhausting of the gas conduit 270 by the vacuum pump 281 through mass-flow controller 286.

[0075] During the HfI₄/water vapor sequence, the substrate is held between about 250° C. and about 325° C. by the heating element 230. In other embodiments the substrate is held between about 225° C. and 500° C. The HfI₄ pulse time ranges from about 1.0 sec to about 2.0 sec. After the HfI₄ pulse, the hafnium sequence continues with a purge pulse followed by a water vapor pulse followed by a purge pulse. In one embodiment, performing a purge pulse followed by a water vapor pulse followed by a purge pulse takes about 2 seconds. In another embodiment, each pulse in the hafnium sequence has a 2 second pulse period. In another embodiment, the pulse periods for the precursors are 2 seconds, while the purge gas pulse period ranges from five second to twenty seconds.

[0076] At block 430, a determination is made as to whether a desired thickness of the HfO₂ layer has been formed. The thickness of a HfO₂ film after one cycle is determined by a fixed growth rate for the pulsing periods and precursors used in the hafnium sequence, set at a value such as N nm/cycle. For a desired HfO₂ film thickness, t, in an application such as forming a gate dielectric of a MOS transistor, the ALD process should be repeated for t/N cycles. The desired thickness should be attained after t/N cycles. If less than t/N cycles have been completed, the process starts over at block 410 with the pulsing of the precursor containing hafnium, which in the embodiment discussed above is a HfI₄ gas. If t/N cycles have completed, no further ALD processing of HfO₂ is required and the HfO₂ layer is ready to be formed as a composite with a ZrO₂ layer.

[0077] At block 435, a precursor containing zirconium is pulsed into the reaction chamber 220. In one embodiment, ZrI₄ is used as the zirconium containing precursor. In another embodiment, ZrCl₄ is used as the zirconium containing precursor. The ZrI₄ is evaporated from a containment area held at about 250° C. in gas source 253. It is pulsed to the surface of the substrate 210 through gas-distribution fixture 240 from gas source 253 by mass-flow controller 258. The ZrI₄ is introduced onto the HfO₂ layer that was formed during the HfI₄/water vapor sequence.

[0078] At block 440, a second purging gas is introduced into the system. For a ZrI₄ precursor, nitrogen gas is used as a purging and carrier gas. The nitrogen flow is controlled by mass-flow controller 267 from the purging gas source 262 into the gas conduit 270 and subsequently into the reaction chamber 220. Following the nitrogen purge, at block 445, a second oxygen containing precursor is pulsed into the reaction chamber 220. For the zirconium sequence using ZrI₄ as the precursor, a vapor solution of H₂O—H₂O₂ is selected as the precursor acting as an oxidizing reactant to interact with the zirconium deposited on the HfO₂ layer on the substrate 210. The H₂O—H₂O₂ vapor solution is pulsed into the reaction chamber 220 through gas conduit 270 from gas source 254, held at about room temperature, by mass-flow controller 259. The H₂O—H₂O₂ vapor solution aggressively reacts at the surface of substrate 210 to form a ZrO₂ layer.

[0079] Following the pulsing of the H₂O—H₂O₂ vapor solution acting as an oxidizing reactant, the nitrogen purging gas is injected into the reaction chamber 200, at block 450. In the ZrI₄/H₂O—H₂O₂ vapor solution sequence, nitrogen gas is used to purge the reaction chamber after pulsing each precursor gas. In another embodiment, argon gas is used as the purging gas. Excess precursor gas, and reaction by-products are removed from the system by the purge gas in conjunction with the exhausting of the reaction chamber 220 using vacuum pump 282 through mass-flow controller 287, and exhausting of the gas conduit 270 by the vacuum pump 281 through mass-flow controller 286.

[0080] During the ZrI₄/H₂O—H₂O₂ vapor solution sequence, the substrate is held between about 250° C. and about 325° C. by the heating element 230. In other embodiments, the substrate is held between about 275° C. and about 500° C. In one embodiment, the process pressure is maintained at about 250 Pa during the zirconium sequence. Pulse times for the ZrI₄ and the H₂O—H₂O₂ vapor solution were about 2 sec for both precursors, with purging pulse times of about 2 secs.

[0081] At 455, similar to the HfO₂ layer formation, a determination is made as to whether the ZrO₂ layer has the desired thickness by determining if a desired number of zirconium cycles have been performed. If the number of zirconium cycles performed is less than the number needed to form the desired thickness, the zirconium containing precursor is pulsed into the reaction chamber, at block 435, and the process continues. If the desired number of zirconium cycles has been performed, this completes not only the ZrI₄/H₂O—H₂O₂ vapor solution sequence, but it also completes a hafnium sequence/zirconium sequence cycle forming a HfO₂/ZrO₂ nanolaminate.

[0082] Upon completing the formation of the HfO₂/ZrO₂ nanolaminate, the nanolaminate can be annealed. The annealing can be performed at a temperature between about 300° C. and about 800° C. in an inert or nitrogen atmosphere.

[0083] At block 460, after forming the HfO₂/ZrO₂ nanolaminate, processing the device containing the HfO₂/ZrO₂ nanolaminate is completed. In one embodiment, completing the device includes completing the formation of a transistor. Alternately, completing the process includes completing the construction of a memory device having a array with access transistors formed with gate dielectrics containing HfO₂/ZrO₂ nanolaminates. Further, in another embodiment, completing the process includes the formation of an electronic system including an information handling device that uses electronic devices with transistors formed with gate dielectrics containing HfO₂/ZrO₂ nanolaminates. Typically, information handling devices such as computers include many memory devices, having many access transistors.

[0084] In one embodiment, a HfO₂/ZrO₂ nanolaminate includes one HfO₂ layer and one HfO₂/ZrO₂ layer. The completed HfO₂/ZrO₂ nanolaminate has a thickness in which the thickness of the HfO₂ layer is about one-half the thickness of the completed HfO₂/ZrO₂ nanolaminate. In another embodiment, a completed HfO₂/ZrO₂ nanolaminate includes multiple alternating layers of HfO₂ and ZrO₂, which requires that at block 455, once a given ZrO₂ layer has been formed with a desired thickness, a hafnium sequence is then started at block 410. This process, proceeding from completing the zirconium sequence at block 455 to starting the hafnium sequence at block 410, continues until the desired number of alternating layers of HfO₂ and ZrO₂ have been formed. The HfO₂/ZrO₂ nanolaminate formation begins with forming a HfO₂ layer, but may end with forming ZrO₂ layer or a HfO₂ layer. ALD provides for the engineering of a HfO₂/ZrO₂ nanolaminate. For example, nanolaminates can be formed with n number of HfO₂/ZrO₂ composite layers where the HfO₂ layer is formed with x number of hafnium cycles and y number of zirconium cycles. Alternately, nanolaminates can be formed with n number of HfO₂/ZrO₂ composite layers where the first composite layer has a HfO₂ layer formed with x₁ number of hafnium cycles and y₁ number of zirconium cycles, a second composite layer has a HfO₂ layer formed with x₂ number of hafnium cycles and y₂ number of zirconium cycles, extended to the n^th composite layer having a HfO₂ layer formed with x_n number of hafnium cycles and y_n number of zirconium cycles. Such tailoring of the HfO₂/ZrO₂ nanolaminate provides for forming dielectric films with a designed physical thickness, t, and equivalent oxide thickness, t_eq.

[0085] In the hafnium sequence and in the zirconium sequence, pulsing each precursor into the reaction chamber is controlled for a predetermined period, the predetermined period being individually controlled for each precursor pulsed into the reaction chamber. Additionally, the substrate is maintained at a selected temperature for forming each layer, where the selected temperature set independently for forming each layer.

[0086] In a recent article by O. Sneh et al., Thin Solid Films, vol. 402, pp. 248-261 (2002), atomic layer deposition of thin films was discussed. The article noted that the growth rate for HfO₂ is, typically, about 0.8 Å/cycle. Similarly, in a recent article by K. Kukli et al., Journal of the Electrochemical Society, vol. 148, no. 12, pp. F227-F232 (2001), dealing with ZrO₂ formed by ALD using ZrI₄, it was noted that at about a growth temperature of about 300° C., ZrO₂ growth rate was about 0.075 nm/cycle. Thus, in the embodiments for forming HfO₂/ZrO₂ nanolaminates using ALD for all composite layers, each material layer can be grown at about 0.75-0.80 Å/cycle.

[0087] FIG. 5 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and thermal evaporation/plasma oxidation, according to the teachings of the present invention. In one embodiment, a nanolaminate of HfO₂/ZrO₂ is formed by a method that includes forming a layer of hafnium oxide on a substrate in a reaction chamber by atomic layer deposition using a HfI₄ precursor, at block 505, forming a layer of zirconium on the layer of hafnium oxide by thermal evaporation, at block 510, and oxidizing the zirconium layer using a krypton(Kr)/oxygen(O₂) mixed plasma to form a HfO₂/ZrO₂ composite, at block 515. The HfO₂/ZrO₂ composite is a nanolaminate, whose thickness can be controlled by precisely controlling the ALD formation of HfO₂, and thermal deposition of zirconium. In one embodiment, the thermal evaporation of zirconium is performed using electron beam evaporation.

[0088] FIG. 6 shows an embodiment of an electron beam evaporation process for forming a layer of zirconium on a layer of HfO₂ to process a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention. In the embodiment of FIG. 6, a substrate 610 is located inside a deposition chamber 660. The substrate in this embodiment is masked by a first masking structure 670 and a second masking structure 671. In this embodiment, the unmasked region 633 includes a body region of a transistor on which a layer of HfO₂ is formed. However one skilled in the art will recognize that other semiconductor device structures may utilize this process. Also located within the deposition chamber 660 is an electron gun 663 and a target 661. The electron gun 663 provides an electron beam 664 directed at target 661 containing a source material for forming ZrO₂ on the unmasked region HfO₂ layer 633 of the substrate 610. The electron gun 663 includes a rate monitor for controlling the rate of evaporation of the material in the target 661 at which the electron beam 664 is directed. For convenience, control displays and necessary electrical connections as are known to those skilled in the art are not shown in FIG. 6.

[0089] During the evaporation process, the electron gun 663 generates an electron beam 664 that hits target 661. In one embodiment, target 661 contains a zirconium metal source, which is evaporated due to the impact of the electron beam 664. The evaporated material 668 is then distributed throughout the chamber 660. A layer of zirconium is grown forming a film 640 on the surface of the HfO₂ layer 633 on substrate 610, which is maintained at a temperature between 150° C. and 200° C. The growth rate can vary with a typical rate of 0.1 Å/s. After depositing a zirconium layer on the HfO₂ layer 633, the zirconium layer is oxidized.

[0090] The evaporation chamber 660 can be included as part of an overall processing system including ALD system 200 of FIG. 2. To avoid contamination of the surface of the HfO₂ layer 633, evaporation chamber 660 can be connected to ALD system 200 using sealable connections to maintain the substrate, which is substrate 210 in FIG. 2 and substrate 610 of FIG. 6, in an appropriate environment between ALD processing of the HfO₂ layer and Zr evaporation. Other means as are known to those skilled in the art can be employed for maintaining an appropriate environment between different processing procedures.

[0091] FIGS. 7A-7C show a low temperature oxidation process that is used in one embodiment to form a layer of ZrO₂ on a layer of HfO₂. FIG. 7A shows an embodiment of a zirconium layer 720 deposited on a HfO₂ layer 710, according to the teachings of the present invention. The HfO₂ layer 710 is formed on substrate 700 using an ALD process, as previously discussed, having an substrate interface 730. The Zr layer 720 is deposited on the HfO₂ layer 710 by electron beam evaporation, as discussed above, forming an interface 740 with the HfO₂ layer 710 and having an outer surface 750. The combined film with the Zr layer 720 deposited on the HfO₂ layer 710 has a total thickness 752. The layers 710, 720 are deposited over a body region of a transistor, however the layers may be deposited on any surface within the scope of the invention.

[0092] FIG. 7B shows an embodiment of a partially oxidized zirconium layer 770 deposited on a HfO₂ layer 710, according to the teachings of the present invention. In FIG. 7B, the layer 720 is in the process of being oxidized. In one embodiment, the oxidation process includes a krypton/oxygen mixed plasma oxidation process. The mixed plasma process generates atomic oxygen or oxygen radicals in contrast to molecular oxygen or O₂ used in conventional thermal oxidation. The atomic oxygen is introduced to the layer from all exposed directions as indicated by arrows 760, creating an oxide portion 770. The atomic oxygen continues to react with the layer and creates an oxidation interface 742. As the reaction progresses, atomic oxygen diffuses through the oxide portion 770 and reacts at the oxidation interface 742 until the layer is completely converted to an oxide of the deposited material layer.

[0093] FIG. 7C shows an embodiment of a ZrO₂ substantially completely oxidized and formed on a layer of HfO₂ to form a nanolaminate of HfO₂/ZrO₂, according to the teachings of the present invention. FIG. 7C shows the resulting oxide layer 770 which spans a physical thickness 772 from the outer surface 750 to the interface 740. The overall thickness 752 of the HfO₂/ZrO₂ composite in FIG. 7C has increased from that of the Zr layer deposited on the HfO₂ layer in FIG. 7A, due to the oxidation of the zirconium.

[0094] In an embodiment, the processing variables for the mixed plasma oxidation include a low ion bombardment energy of less than 7 eV, a high plasma density above 10¹²/cm³ and a low electron temperature below 1.3 eV. In another embodiment, the substrate temperature is approximately 400° C. In another embodiment, a mixed gas of 3% oxygen with the balance being krypton at a pressure of 1 Torr is used. In one embodiment, a microwave power density of 5 W/cm² is used. The oxidation process provides a growth rate of 1.5 nm/min.

[0095] The low temperature mixed plasma oxidation process described above allows the deposited layer to be oxidized at a low temperature. The mixed plasma process in one embodiment is performed at approximately 400° C. in contrast to prior thermal oxidation processes that are performed at approximately 1000° C.

[0096] FIG. 8 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and chemical vapor deposition (CVD), according to the teachings of the present invention. This embodiment of the method includes forming a layer of hafnium oxide on a substrate in a reaction chamber by atomic layer deposition using a HfI₄ precursor, at block 805, and forming a layer of zirconium oxide on the layer of hafnium oxide by chemical vapor deposition to form a HfO₂/ZrO₂ composite, at block 810. The HfO₂ layer is formed by ALD as discussed in the embodiments above. In one embodiment, the ZrO₂ layer is formed by rapid thermal CVD at about 500° C. Subsequently, a nitrogen anneal is performed between about 700° C. and about 800° C. for about 30 sec. A rapid thermal CVD system, as is known to those skilled in the art, is used to form the ZrO₂ layer.

[0097] FIG. 9 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and pulsed-laser deposition, according to the teachings of the present invention. This embodiment of the method includes forming a layer of hafnium oxide on a substrate in a reaction chamber by atomic layer deposition using a HfI₄ precursor, at block 905, and forming a layer of zirconium oxide on the layer of hafnium oxide by pulsed-laser deposition to form a HfO₂/ZrO₂ composite, at block 910. The HfO₂ layer is formed by ALD as discussed in the embodiments above. A pulsed-laser deposition system is similar to the electron beam evaporation system 660 of FIG. 6 with the electron gun 663 replaced by a laser and focusing optics, though the laser and focusing optics need not be located in the evaporation reaction chamber. A beam from the laser is focused on a target, which causes an ablation of material from the target. The material removed from the target deposits on an unmasked HfO₂ layer located on a substrate. Controlling the focusing of the beam from the laser on the source target provides for precision growth rate of the ZrO₂ layer.

[0098] In one embodiment, a substrate temperature is maintained between about 200° C. to about 800° C. during pulsed-laser deposition. A beam from a laser source such as a excimer laser is focused on a rotating zirconium target source in a deposition chamber with an O₂ pressure of about 0.2 Torr to form a ZrO₂ layer on a HfO₂ layer. Other laser sources and configurations can be used as is known by those skilled in the art.

[0099] FIG. 10 illustrates a flow diagram of elements for an embodiment of a method to process a nanolaminate of HfO₂/ZrO₂ using atomic layer deposition and jet-vapor deposition, according to the teachings of the present invention. This embodiment of the method includes forming a layer of hafnium oxide on a substrate in a reaction chamber by atomic layer deposition using a HfI₄ precursor, at block 1005, and forming a layer of zirconium oxide on the layer of hafnium oxide by jet-vapor deposition to form a HfO₂/ZrO₂ composite, at block 1010. The HfO₂ layer is formed by ALD as discussed in the embodiments above. The ZrO₂ layer can be formed using jet-vapor deposition techniques as is known to those skilled in the art.

[0100] In one embodiment, the jet-vapor deposition zirconium and oxygen vapors are directed to the HfO₂ layer out of source nozzles by supersonic Ar jets. Using jet-vapor deposition in a low pressure atmosphere allows for forming the ZrO₂ layer at at room temperature. In one embodiment, annealing is performed subsequent to forming the ZrO₂ layer at a about 800° C. In one embodiment, the annealing is performed using a nitrogen rapid thermal annealing (RTA). The annealing can be performed after each ZrO₂ layer is formed in the composite of alternating layers of the HfO₂/ZrO₂ nanolaminate and/or at the completion of the HfO₂/ZrO₂ nanolaminate.

[0101] In each of the various embodiments for forming ZrO₂ layers, the HfO₂/ZrO₂ nanolaminates can be annealed in a temperature range from between 300° C. to 800° C. Typically the annealing is for a short time and in performed in a nitrogen atmosphere or in some other inert atmosphere.

[0102] Bulk layers of HfO₂ and bulk layers of ZrO₂ both have a dielectric constant of about 25. Consequently, a material film composed of bulk layers of HfO₂ and ZrO₂ will also have a dielectric constant of about 25. However, thin layers of a material, typically, have dielectric constants somewhat less than their bulk counterparts. The reduced value of the dielectric constants for ultra thin material films is due in part to the formation of an interfacial layer between the material film and the substrate. Some materials formed on silicon substrates form a SiO₂ interfacial layer, while other materials form an silicide interfacial layer. The material silicide in many cases will have a dielectric greater than SiO₂, but less than the bulk material dielectric constant. ZrO₂ formed on silicon substrates may result in an interfacial region where silicon diffuses through a layer of ZrO₂ to form a poly-silicon/ZrO₂/silicon interfacial region, as reported by C. H. Lee et al., IEDM 2000, 27-30 (2000). Further, nanolaminates of ZrO₂/HfO₂ were reported to have SiO₂ interfacial layer when formed by ALD using ZrCl₄ and HfCl₄ precursors. See H. Zhang et al., Journal of the Electrochemical Society, vol. 148, no. 4, pp. F63-F66 (2001). To eliminate the SiO₂ interfacial layer, Zhang et al. grew ZrO₂/HfO₂ nanolaminates on nitrated Si substrates producing dielectric constants ranging from 9 to 14 with low leakage currents ranging from 2.2×10⁻⁶ to 1.2×10⁻⁸ Å/cm³ at 1 MV/cm.

[0103] In the various embodiments according to the teachings of the present invention, HfO₂/ZrO₂ nanolaminates are formed by ALD of HfO₂ on substrates using a HfI₄ precursor. Subsequently, a layer of ZrO₂ is formed on the HfO₂ layer by various deposition techniques. These HfO₂/ZrO₂ nanolaminates form a stable interface with a silicon substrate. Using ALD, the size and effect of interfacial layer between the silicon substrate and the first HfO₂ layer will depend on the reactivity of the HfO₂ in forming an abrupt transition from silicon surface to HfO₂ layer. Consequently, dielectric films containing HfO₂/ZrO₂ nanolaminates can have dielectric constants ranging from 9 or 10 to 25. Additionally, forming the HfO₂ layer at relatively low temperatures provides a means for enabling the formation of HfO₂/ZrO₂ nanolaminates that are amorphous.

[0104] Another factor setting a lower limit for the scaling of a dielectric layer is the number of monolayers of the dielectric structure necessary to develop a full band gap such that good insulation is maintained between an underlying silicon layer and an overlying conductive layer on the dielectric layer or film. This requirement is necessary to avoid possible short circuit effects between the underlying silicon layer and the overlying conductive layer used. In one embodiment, for several HfO₂ monolayers and several ZrO₂ monolayers forming a nanolaminate, an expected lower limit for the physical thickness of a dielectric layer grown by forming HfO₂/ZrO₂ nanolaminates is anticipated to be in about the 2-4 nm range. Consequently, typical dielectric layers or films can be grown by forming HfO₂/ZrO₂ nanolaminates having physical thickness in the range of 4 to 10 nm. HfO₂ used as the initial layer is expected to provide excellent overall results with respect to reliability, current leakage, and ultra-thin t_eq. Further, using ALD for processing all layers of a HfO₂/ZrO₂ nanolaminate, the transitions between such oxide layers can be engineered to be abrupt or graded. Thus, the number of layers used, the thickness of each layer, and the nature of the interface between each layer can be engineered to provide the desired electrical characteristics.

[0105] With HfO₂ layers formed by ALD and ZrO₂ layers formed according to one of the various embodiments described herein, HfO₂/ZrO₂ nanolaminates can have a wide range of thicknesses and dielectric constants. The physical thicknesses can range from about 2 nm to about 10 nm with typical thickness ranging from about 4 nm to about 10 nm. Such layers have an effective dielectric constant ranging from 9 or 10 to 25. The expected t_eq ranges for various effective dielectric constants are shown in the following:

	Physical Thickness	Physical Thickness	Physical Thickness
	t = 0.5 nm (5 Å)	t = 1.0 nm (10 Å)	t = 5.0 nm (50 Å)
κ	teq (Å)	teq (Å)	teq (Å)
9	2.17	4.33	21.67
17	1.15	2.29	11.47
21	.93	1.86	9.29
25	.78	1.56	7.8

[0106] As mentioned, the lower limit on the scaling of a layer containing HfO₂/ZrO₂ nanolaminates depends on the monolayers of the film necessary to develop a full band gap such that good insulation is maintained between an underlying silicon layer and an overlying conductive layer to the HfO₂/ZrO₂ nanolaminate film. From above, it is apparent that a film containing HfO₂/ZrO₂ nanolaminates can be attained with a t_eq ranging from 3 Å to 12 Å. Further, a dielectric film with completely formed band structures and monolayer formations can provide a t_eq significantly less than 2 or 3 Å.

[0107] The novel process described above provides significant advantages by performing atomic layer deposition of HfO₂/ZrO₂ in a hafnium sequence using HfI₄ precursors followed by the formation of a ZrO₂ layer on the HfO₂ layer. Further, by independently controlling the various parameters for each sequence a gate dielectric with a selected dielectric constant can be formed. Additionally, the novel process can be implemented to form transistors, memory devices, and information handling devices. With careful preparation and engineering of the HfO₂/ZrO₂ nanolaminates limiting the size of interfacial regions, a teq down to 2.5 Å or lower is anticipated.

[0108] A transistor 100 as depicted in FIG. 1 can be formed by forming a source/drain region 120 and another source/drain region 130 in a silicon based substrate 110 where the two source/drain regions 120, 130 are separated by a body region 132. The body region 132 separated by the source/drain 120 and the source/drain 130 defines a channel having a channel length 134. A dielectric film is formed on the substrate 110 by forming a layer of hafnium oxide on substrate 110 in a reaction chamber by atomic layer deposition using a HfI₄ precursor and forming a layer of zirconium oxide on the layer of hafnium oxide to form a HfO₂/ZrO₂ composite. The resulting HfO₂/ZrO₂ composite is a nanolaminate. These HfO₂/ZrO₂ nanolaminates can be formed using any of the various embodiments previously discussed. These HfO₂/ZrO₂ nanolaminates are contained in a dielectric film defining the gate dielectric 140.

[0109] A gate is formed over the gate dielectric 140. Typically, forming the gate includes forming a polysilicon layer, though a metal gate can be formed in an alternative process. Forming the substrate, source/region regions, and the gate is performed using standard processes known to those skilled in the art. Additionally, the sequencing of the various elements of the process for forming a transistor is conducted with standard fabrication processes, also as known to those skilled in the art.

[0110] Embodiments of the method of forming HfO₂/ZrO₂ nanolaminates as a gate dielectric can be applied to other transistor structures having dielectric layers. For example, FIG. 11 shows an embodiment of a configuration of a transistor capable of being fabricated, according to the teachings of the present invention. The transistor 1100 includes a silicon based substrate 1110 with two source/drain regions 1120, 1130 separated by a body region 1132. The body region 1132 between the two source/drain regions 1120, 1130 defines a channel region having a channel length 1134. Located above the body region 1132 is a stack 1155 including a gate dielectric 1140, a floating gate 1152, a floating gate dielectric 1142, and control gate 1150. The gate dielectric 1140 containing HfO₂/ZrO₂ nanolaminates is formed according to the teachings of the present invention as described above with the remaining elements of the transistor 1100 formed using processes known to those skilled in the art. Alternately, both the gate dielectric 1140 and the floating gate dielectric 1142 can be formed containing HfO₂/ZrO₂ nanolaminates, in accordance with the present invention as described above.

[0111] Transistors created by the methods described above may be implemented into memory devices and electronic systems including information handling devices. Information handling devices having a dielectric layer containing HfO₂/ZrO₂ nanolaminates can be constructed using various embodiments of the methods described above. Such information devices can include wireless systems, telecommunication systems, and computers. An embodiment of a computer having a dielectric layer containing HfO₂/ZrO₂ nanolaminates is shown in FIGS. 12-14 and described below. While specific types of memory devices and computing devices are shown below, it will be recognized by one skilled in the art that several types of memory devices and electronic systems including information handling devices utilize the invention.

[0112] FIG. 12 shows an embodiment of a personal computer 1200 incorporating devices, according to the teachings of the present invention. Personal computer 1200 includes a monitor 1201, keyboard input 1202 and a central processing unit 1204.

[0113] FIG. 13 illustrates a schematic view of an embodiment of a central processing unit 1204 incorporating devices, according to the teachings of the present invention. The central processing unit 1204 typically includes microprocessor 1306, memory bus circuit 1308 having a plurality of memory slots 1312(a-n), and other peripheral circuitry 1310. Peripheral circuitry 1310 permits various peripheral devices 1324 to interface processor-memory bus 1320 over input/output (I/O) bus 1322. The personal computer 1200 shown in FIGS. 12 and 13 also includes at least one transistor having a gate dielectric containing HfO₂/ZrO₂ nanolaminates in an embodiment according to the teachings of the present invention.

[0114] Microprocessor 1306 produces control and address signals to control the exchange of data between memory bus circuit 1308 and microprocessor 1306 and between memory bus circuit 1308 and peripheral circuitry 1310. This exchange of data is accomplished over high speed memory bus 1320 and over high speed I/O bus 1322.

[0115] Coupled to memory bus 1320 are a plurality of memory slots 1312(a-n) which receive memory devices well known to those skilled in the art. For example, single in-line memory modules (SIMMs) and dual in-line memory modules (DIMMs) may be used in the implementation of the present invention.

[0116] These memory devices can be produced in a variety of designs which provide different methods of reading from and writing to the dynamic memory cells of memory slots 1312. One such method is the page mode operation. Page mode operations in a DRAM are defined by the method of accessing a row of a memory cell arrays and randomly accessing different columns of the array. Data stored at the row and column intersection can be read and output while that column is accessed. Page mode DRAMs require access steps which limit the communication speed of memory circuit 1308.

[0117] An alternate type of device is the extended data output (EDO) memory which allows data stored at a memory array address to be available as output after the addressed column has been closed. This memory can increase some communication speeds by allowing shorter access signals without reducing the time in which memory output data is available on memory bus 1320. Other alternative types of devices include SDRAM, DDR SDRAM, SLDRAM and Direct RDRAM as well as others such as SRAM or Flash memories.

[0118] FIG. 14 illustrates a schematic view of an embodiment of a DRAM memory device 1400 according to the teachings of the present invention. DRAM device 1400 is compatible with memory slots 1312(a-n). The description of DRAM 1400 has been simplified for purposes of illustrating a DRAM memory device and is not intended to be a complete description of all the features of a DRAM. Those skilled in the art will recognize that a wide variety of memory devices may be used in the implementation of the present invention. The example of a DRAM memory device shown in FIG. 14 includes at least one transistor having a gate dielectric containing HfO₂/ZrO₂ nanolaminates in an embodiment according to the teachings of the present invention.

[0119] Control, address and data information provided over memory bus 1320 is further represented by individual inputs to DRAM 1400, as shown in FIG. 14. These individual representations are illustrated by data lines 1402, address lines 1404 and various discrete lines directed to control logic 1406.

[0120] As is well known in the art, DRAM 1400 includes memory array 1410 which in turn comprises rows and columns of addressable memory cells. Each memory cell in a row is coupled to a common word line. The word line is coupled to gates of individual transistors, where at least one transistor has a gate coupled to a gate dielectric containing HfO₂/ZrO₂ nanolaminates in accordance with the method and structure previously described above. Additionally, each memory cell in a column is coupled to a common bit line. Each cell in memory array 1410 includes a storage capacitor and an access transistor as is conventional in the art.

[0121] DRAM 1400 interfaces with, for example, microprocessor 1306 through address lines 1404 and data lines 1402. Alternatively, DRAM 1400 may interface with a DRAM controller, a micro-controller, a chip set or other electronic system. Microprocessor 1306 also provides a number of control signals to DRAM 1400, including but not limited to, row and column address strobe signals RAS and CAS, write enable signal WE, an output enable signal OE and other conventional control signals.

[0122] Row address buffer 1412 and row decoder 1414 receive and decode row addresses from row address signals provided on address lines 1404 by microprocessor 1306. Each unique row address corresponds to a row of cells in memory array 1410. Row decoder 1414 includes a word line driver, an address decoder tree, and circuitry which translates a given row address received from row address buffers 1412 and selectively activates the appropriate word line of memory array 1410 via the word line drivers.

[0123] Column address buffer 1416 and column decoder 1418 receive and decode column address signals provided on address lines 1404. Column decoder 1418 also determines when a column is defective and the address of a replacement column. Column decoder 1418 is coupled to sense amplifiers 1420. Sense amplifiers 1420 are coupled to complementary pairs of bit lines of memory array 1410.

[0124] Sense amplifiers 1420 are coupled to data-in buffers 1422 and data-out buffers 1424. Data-in buffers 1422 and data-out buffers 1424 are coupled to data lines 1402. During a write operation, data lines 1402 provide data to data-in buffers 1422. Sense amplifier 1420 receives data from data-in buffers 1422 and stores the data in memory array 1410 as a charge on a capacitor of a cell at an address specified on address lines 1404.

[0125] During a read operation, DRAM 1400 transfers data to microprocessor 1306 from memory array 1410. Complementary bit lines for the accessed cell are equilibrated during a precharge operation to a reference voltage provided by an equilibration circuit and a reference voltage supply. The charge stored in the accessed cell is then shared with the associated bit lines. A sense amplifier of sense amplifiers 1420 detects and amplifies a difference in voltage between the complementary bit lines. The sense amplifier passes the amplified voltage to data-out buffers 1424.

[0126] Control logic 1406 is used to control the many available functions of DRAM 1400. In addition, various control circuits and signals not detailed herein initiate and synchronize DRAM 1400 operation as known to those skilled in the art. As stated above, the description of DRAM 1400 has been simplified for purposes of illustrating the present invention and is not intended to be a complete description of all the features of a DRAM. Those skilled in the art will recognize that a wide variety of memory devices, including but not limited to, SDRAMs, SLDRAMs, RDRAMs and other DRAMs and SRAMs, VRAMs and EEPROMs, may be used in the implementation of the present invention. The DRAM implementation described herein is illustrative only and not intended to be exclusive or limiting.

[0127] A gate dielectric containing HfO₂/ZrO₂ nanolaminates and a method of fabricating such a gate produces a reliable gate dielectric having an equivalent oxide thickness thinner than attainable using SiO₂. Gate dielectrics containing HfO₂/ZrO₂ nanolaminates formed using the methods described herein are thermodynamically stable such that the gate dielectrics formed will have minimal reactions with a silicon substrate or other structures during processing.

[0128] Transistors, higher level ICs or devices, and systems are constructed utilizing the novel process for forming a gate dielectric having an ultra thin equivalent oxide thickness, t_eq. Gate dielectric layers or films containing HfO₂/ZrO₂ nanolaminates are formed having a high dielectric constant (κ), where the gate dielectrics are capable of a t_eq thinner than 10 Å, thinner than the expected limit for SiO₂ gate dielectrics. At the same time, the physical thickness of the HfO₂/ZrO₂ nanolaminates is much larger than the SiO₂ thickness associated with the t_eq limit of SiO₂. Forming the larger thickness provides advantages in processing the gate dielectric. Further, HfO₂/ZrO₂ nanolaminates processed in relatively low temperatures can provide amorphous dielectric films having relatively low leakage current for use as dielectric layers in electronic devices and systems.

[0129] Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that any arrangement which is calculated to achieve the same purpose may be substituted for the specific embodiment shown. This application is intended to cover any adaptations or variations of the present invention. It is to be understood that the above description is intended to be illustrative, and not restrictive. Combinations of the above embodiments, and other embodiments will be apparent to those of skill in the art upon reviewing the above description. The scope of the invention includes any other applications in which the above structures and fabrication methods are used. The scope of the invention should be determined with reference to the appended claims, along with the full scope of equivalents to which such claims are entitled.