Apparatus and methods for launching and receiving a broad wavelength range source

[0001] This application is related to abandoned application Ser. No. 09/433,667, filed Nov. 4, 1999, and to copending application Ser. No. 09/522,915, filed Mar. 10, 2000 and No. 60/334,273, filed Nov. 30, 2001, all of which are incorporated herein by reference. This application claims the benefit of U.S. Provisional Application No. 60/334,273, filed Nov. 30, 2001.

[0003] 1. Brief Description of the Invention

[0004] This invention relates generally to apparatus and methods for monitoring and/or control of industrial processes using diode laser-based sensors, in particular monitoring and/or control of combustion processes.

[0005] 2. Related Art

[0006] Monitoring and control of combustion processes requires the use of sensors to provide information on gas species composition and temperature. Information on the combustion state of the process from the sensor can be assessed either by an operator or by automated process control system to determine the necessary operating parameter adjustments needed. Effective control of the process parameters provides an optimization scheme that can impact the energy efficiency, product quality, production rate, and pollutant reduction.

[0007] For combustion processes operating with hydrocarbon fuels, knowledge of the O₂ and CO concentration is essential to determine whether the combustion space is reducing or oxidizing. Typically, combustion space monitoring is conducted either by using extractive sampling probes or by in-situ probes. Extractive sampling uses water or gas cooled probe inserted into the process stream. The sample is extracted by drawing the process gas through the probe using a pump followed by a chiller system to remove the water vapor before reaching the gas analyzer. This technology suffers from probe and sample line plugging and other maintenance issues such as corrosion when applied to harsh process environments as encountered in glass melting tanks, steel processing furnaces, chemical processing systems, etc. In addition to maintenance issues, long sampling lines reaching up to several hundred feet are not uncommon resulting in sampling delay times that can range form seconds to several minutes. For control and optimization on dynamic processes (time varying O₂ and CO concentration) such as electric arc furnaces or secondary aluminum melters, a real-time measure of the combustion state is needed to adequately control the process. Sensor systems that introduce long delay times reduce the controllability and observability of the system.

[0008] In-situ monitoring of the combustion space reduces the effect of delay time; however, true in-situ probes for monitoring both O₂ and CO are not commercially available. Instead hybrid in-situ systems are used such as AMETEK model WDG-HPII that continuously extracts the gas sample to the analyzer mounted on the process. This system analyzes the O₂ concentration with a zirconium oxide probe and the combustibles (CO, H₂, C_xH_y) with a catalytic detector before returning the gas stream back to the process. Despite the elimination of the sampling line, response times are still on the order of 10's of seconds and maintenance issues persist on high particle density applications, since the gas is drawn through the instrument.

[0009] The drawbacks associated with conventional monitoring technologies can be avoided by using non-intrusive optical techniques based on measuring absorbed radiation from a source that propagates through a medium. In particular, the emergence of tunable diode lasers in the near-infrared provide a source of radiation that can access absorption transitions of important chemical species such as CO, O₂, H₂O, CO₂, etc. providing an alternative analytical measurement technique that has been demonstrated in both laboratory and industrial settings. The measurement is conducted by launching a beam of radiation across the process to a receiver that monitors the modulated radiation intensity. By ramping the injection current to the device the laser can be rapidly tuned across a resonance absorption transition of the targeted specie to record an absorption spectrum that contains both the baseline and the absorption line feature. The Beer-Lambert relation describes the resulting absorption of the laser radiation along the measurement path for a single species given by

[0010] where I_v is the laser intensity at frequency v measured after the beam has propagated across a path l with N absorbing molecules per volume. The incident laser intensity is I_v,o and is referred to as the reference. The amount of laser radiation attenuated is determined by the temperature dependent linestrength S(T) and the lineshape function g(vv_o). Inversion of Eq. 1 relates the number density N to the measured laser intensities and known linestrength and pathlength given by $\begin{array}{cc}N=\frac{1}{S\left(T\right)l}\ln \left(\frac{I_{\mathrm{vo}}}{I_v}\right)v& \left(2\right)\end{array}$

[0011] The rapid tunability of the diode laser (reported values up to 1000 Hz by Allen, M. G., Diode Laser Absorption Sensors for Gas-Dynamic and Combustion Flows, Measurement Science and Technology, Vol. 9, pg. 545-562, 1998) allows signal averaging of several hundreds of spectra over a short time interval (<1 sec). The fast time response of the technique provides essentially real-time process monitoring suitable for dynamic monitoring and control.

[0012] In monitoring applications on industrial processes, multiple species or multiple absorption line detection is often required to obtain sufficient information on the state of the process for monitoring and control purposes. However, the current tuning range for standard diode lasers, for example, distributed feedback or vertical cavity surface emitting lasers (VCSEL's), are limited to only 1-3 cm¹. Therefore, in only few selected examples can multiple species (or absorption lines) be monitored using a single laser. For example, Thomson et al. (Laser Based Optical Measurements of Electric Arc Furnace Off-Gas For Pollution Control and Energy Efficiency, Innovative Technologies for Steel and Other Materials, Met Soc., The Conference of Metallurgists, Toronto, August 2000) demonstrated CO and H₂O monitoring at 1577.96 and 1578.1 nm, respectively, using a single diode laser and jump scan technique to monitor both species.

[0013] To expand the number of monitored species, systems have been designed utilizing fiber optic components to integrate multiple lasers together. The compatibility of near-infrared (NIR) lasers with fiber optic components provides a means to multiplex systems together using several diode lasers to access the targeted wavelength regions. A demonstration of the multiplexing capability is shown by Furlong et al., Diode-Laser Sensors for Real-Time Control of Temperature and H₂O in Pulsed Combustion Systems, 34th AIAA/ASME/SAE/ASEE Joint Propulsion Conference, AIAA-98-3949, 1998, where multiple H₂O absorption lines are monitored using two lasers at 1.392 and 1.343 m. Here fiber optic couplers were used to combine the output of each laser into a single fiber to transport the radiation to the process. The ability to launch the radiation across the process from a single fiber minimizes optical access requirements and reduces the complexity of the optical system. However, at the receiver side, the beam is composed of multiple wavelengths that must be demultiplexed using dispersive elements to separate the radiation and direct it to individual detectors. Alternatively, time domain multiplexing can be used, where the laser scans are conducted at different phases providing near simultaneous detection of the species at the receiver. (Allen, M. Diode laser absorption sensors for gas-dynamics and combustion flows, Meas. Sci. Technol. 9 (1998) pp. 545-562.) Regardless of the means used, multiplexing into a single fiber with the criteria of maintaining single-mode transmission, minimum energy loses, and insensitivity to mechanical stress such as bending and vibration requires that the input wavelengths are reasonably close. The constraint placed on utilizing a single fiber for transporting multiple wavelengths while maintaining single mode transmission is described by $\begin{array}{cc}D<\frac{2.4}{\sqrt{n_o^2-n_1^2}}& \left(3\right)\end{array}$

[0014] where D is the maximum core fiber diameter, is the wavelength, no is the refractive index of the fiber core and n₁ is the refractive index of the fiber cladding. If the core diameter, D, is larger than the right hand side (RHS) of the inequality, then the fiber can carry multiple modes. Rearranging equation 3 to solve for defines the cutoff wavelength, i.e., for single mode transmission, the wavelength must be greater than the cutoff wavelength for a given set of fiber parameters.

[0015] For combustion monitoring applications to monitor and/or control the degree of reducing or oxidizing atmosphere, the important combustion species are CO and O₂. In the near infrared CO absorption is described by the second overtone (3,0) band near 1560 nm whereas O₂ absorption is monitored from the b-X (0,0) band near 760 nm. In this case, the large difference in wavelengths prohibits combining the output of each laser into a single fiber while minimizing energy loses and maintaining single-mode transmission. To maintain single-mode transmission, a fiber diameter of 5 m is required for 760 nm and 9 m for 1560 nm.

[0016] In addition to fiber incompatibility over the broad wavelength range, any transparent optics used in the system such as beam expanders, collimators, focusing lenses, windows, and the like, preferably have an antireflective coating to minimize reflections propagating through the optical train. Without suppressing the resulting reflections from the optical surfaces, interference fringe patterns (etalons) on the recorded absorbance spectrum are produced, thus degrading the quality of the measurement. In the case of O₂ and CO detection an antireflective coating functioning over the broad wavelength range spanning 800 nm is required. The maximum off-the-shelf broadband antireflective coating available can approach 500 nm in the NIR over the range of 1050-1600 nm, which is not sufficient for use in an O₂ and CO monitoring application. Instead a double vee anti-reflective (AR) coating that has a minimum reflectivity over a narrow bandwidth at 760 and 1560 nm can be used. The wavelength dependence on AR coated optics and fiber optic diameter constraints have led to previous multiple species detection schemes to use separate optical access for monitoring CO and O², as disclosed by Frontini et al. of Finmeccanica S.p.A. (U.S. Pat. No. 5,832,842) where a single laser plus detector system is used per species requiring multiple line-of-sight access points on the process. Similarly, commercially available diode laser systems for monitoring O₂ and CO are presently manufactured by Norsk Electroptics (Norway) and Altoptronic (Sweden). However, in both cases each species is monitored using a dedicated beam launch and receiver unit for each species. Multiple species monitoring would require not only additional dedicated systems, but also additional line-of-sight optical access ports on the process. This approach is both costly and cumbersome, limiting the application to only cases where the additional cost can be justified. It is therefore desirable to interface the optical system to the process with minimum components and minimum optical access points.

[0017] A demonstration of the integration of a broad range of wavelengths into a single system was shown by Ebert et al. for O₂ (760 nm), H₂O (812 nm), and CH₄ (1650 nm) monitoring on a 1 GW powerplant (Ebert, V., et al., Simultaneous Diode Laser-Based In situ Detection of Multiple Species and Temperature in Gas-Fired Power Plant, Proceedings of the Twenty-Eighth Symposium (International) on Combustion, The Combustion Institute, Vol. 28, pp. 423-430, 2000) and O₂ (760 nm) and H₂O (812 nm) monitoring on a 20 MW waste incinerator (Ebert, V., et al., Simultaneous Laser-based In situ Detection of Oxygen and Water in a Waste Incinerator For Active Combustion Control Purposes, Proceedings of the Twenty-Seventh Symposium (International) on Combustion, The Combustion Institute, Vol. 27, pp. 1301-1308, 1998). In this case, all lasers were mounted close to the process with associated optics for collimating and overlapping the beams. On the receiver side, the multiple wavelength-transmitted beam was separated onto multiple detectors using narrowband interference filters and focusing mirrors. In this case, the measurements were conducted by direct absorption using lasers that were not fiber optically coupled, thus having a specific polarization allowing the use of non-anti-reflective coated Brewster angled windows. Though the system incorporates a broad wavelength range, issues related to placement of the sensitive lasers and associated electronics near the harsh combustion process and the complexity of the optical arrangement to collimate and combine the beams are significant drawbacks. For industrial applications, the lack of robustness is not acceptable for continues day-to-day operation.

[0018] In accordance with the present invention, launch and receiver designs are described that address the drawbacks outlined above. The innovative designs are adaptable to broad wavelength range sources with minimum number of optical components. The simplicity of the designs enhances overall robustness of the optical beam transport, which is advantageous in industrial applications. The designs presented here are preferably can be divided into separate categories; launch and receiver; and near and far field. A complete description is presented herein.

[0019] A first aspect of the invention is apparatus for simultaneous detection of X gas species through laser radiation attenuation techniques where the distance between a beam launch module and a receiver module is sufficiently short, preferably not more than about 30 centimeters, to permit capturing of the multiple wavelength beams at the receiver, each of the X species having a near-infrared spectral absorption band separated by at least 500 nanometers from each other, the apparatus comprising:

[0020] (a) N laser sources, wherein each of the N laser sources is adapted to operate at a wavelength _N in a near-infrared spectral absorption band separated by at least 500 nanometers from each other, and each laser source corresponding to a gas species;

[0021] (b) each of the N laser sources adapted to transmit radiation through an optical fiber (preferably dedicated), each optical fiber having single-mode optical fiber characteristics sufficient to insure single-mode transmission with minimal power loss to a beam splitter, said beam splitter sending a first portion of each of the N laser's radiation to a balanced ratiometric detector, and a second portion to a compound ferrule;

[0022] (c) the compound ferrule designed so that each single-mode optical fiber terminating therein is held at a separation distance which is small relative to a focal length of a collimating optical component (preferably an off-axis parabolic or an achromate lens) to which the N beams are directed by the compound ferrule, the collimating optical component adapted to route N collimated laser beams through a process containing N gas species to be detected;

[0023] (d) means for receiving and detecting nonabsorbed radiation from each laser and creating N outputs for each laser wavelength _N; and

[0024] (e) means for routing the N outputs to the balanced ratiometric detector.

[0025] Preferred apparatus are those wherein each of the N laser sources transmits through a dedicated corresponding single-mode optical fiber to the compound ferrule, and apparatus wherein the compound ferrule is positioned within the beam launch module. Yet other preferred apparatus are those wherein the means for collimating is an off-axis parabolic mirror; apparatus comprising a multi-chromic mirror having reflectance only for narrow bandpasses around the _N wavelengths, the multi-chromic mirror directing nonabsorbed radiation onto a second off-axis parabolic mirror, then through an iris, and then to an enhanced short wavelength InGaAs photodetector, the photodetector producing an output for each _N wavelength that is sent to the balanced ratiometric detector. Still other preferred apparatus are those wherein the balanced ratiometric detector produces an output that is digitized and analyzed by a means for data acquisition; apparatus wherein the _N laser wavelengths are launched such that each beam is spatially separated from the other beams; and apparatus wherein the gas being measured is bound by inlet and outlet windows coated on a portion thereof with antireflection coatings specific to each of the _N wavelengths. Preferably, the receiving module includes N mirrors each having a narrow bandpass reflectance specific to each _N wavelength and letting all other wavelengths pass through, and preferably each N mirror has a corresponding off-axis parabolic mirror, an iris, and a detector, each detector optically connected to the balance ratiometric detector. In other preferred embodiments, the off-axis parabolic mirror directs the N beams through the process and hence onto a grating, and each N mirror has a corresponding off-axis parabolic mirror, an iris, and a detector, each detector optically connected to the balance ratiometric detector. Preferably, the beams from the grating are reflected by and forwarded by N spherical mirrors, to respective iris and detectors, and then to the balanced ratiometric detector.

[0026] A second aspect of the invention is a method for simultaneous detection of N gas species through laser radiation attenuation techniques where the distance between a beam launch module and a receiver module is short (preferably not more than 30 centimeters), each of the N gas species having a near-infrared spectral absorption band separated by at least 500 nanometers from each other, the method comprising:

[0027] (a) launching N laser wavelengths from N laser sources, wherein each of the N laser sources operates at a wavelength _N in a near-infrared spectral absorption band, each wavelength _N separated by at least 500 nanometers from each other, and each laser source corresponds to a gas species;

[0028] (b) transmitting radiation from each of the N laser sources through an optical fiber (preferably dedicated), each optical fiber having single-mode optical fiber characteristics sufficient to insure single-mode transmission with minimal power loss to a beam splitter, the beam splitter sending a first portion of each of the N laser's radiation to a balanced ratiometric detector, and a second portion to a compound ferrule;

[0029] (c) separating each single-mode optical fiber using the compound ferrule at a separation distance which is relatively short, preferably less than 10 percent and perhaps even less than 1 percent of the focal length of a collimating optical component (preferably selected from the group consisting of an of-axis parabolic and an achromate lens) to which the N laser beams are directed by the compound ferrule, thus creating N collimated laser beams;

[0030] (d) routing the N collimated laser beams through a process having N species to be detected; and

[0031] (e) receiving and detecting nonabsorbed radiation corresponding to the N gas species.

[0032] Preferred methods are those wherein each of the N laser sources transmits through a dedicated corresponding single-mode optical fiber to the compound ferrule, and the compound ferrule is positioned within the beam launch module. Yet other preferred methods are those wherein the means for collimating is an off-axis parabolic mirror; methods further employing a multi-chromic mirror having reflectance only for narrow bandpasses around the _N wavelengths, the multi-chromic mirror directing nonabsorbed radiation onto a second off-axis parabolic mirror, then through an iris, and then to an enhanced short wavelength InGaAs photodetector, the photodetector producing an output for each _N wavelength that is sent to the balanced ratiometric detector. Yet other preferred methods are those wherein the balanced ratiometric detector produces an output, and that output is digitized and analyzed by a means for data acquisition. Preferably, the N laser beams are launched such that each beam is spatially separated from the other beams, and the beams are routed through the gas being measured which is bound by inlet and outlet windows coated on a portion thereof with antireflection coatings specific to each of the _N wavelengths. Preferably, the beams are then routed to a receiving module that includes N mirrors each having a narrow bandpass reflectance specific to each _N wavelength, the mirrors letting all other wavelengths pass through. Preferably, each of said N mirrors routes a beam to a corresponding off-axis parabolic mirror, an iris, and a detector, each detector optically connected to the balanced ratiometric detector. In some preferred embodiments, the off-axis parabolic mirror directs the N beams through the gas and hence onto a grating, each N mirror having a corresponding off-axis parabolic mirror, an iris, and a detector, each detector optically connected to the balanced ratiometric detector. Preferably, the grating reflects the N beams and forwards the reflected beams to N spherical mirrors, to respective iris and detectors, and then to the balanced ratiometric detector.

[0033] A third aspect of the invention is apparatus for simultaneous detection of N gas species through laser radiation attenuation techniques where the distance between a beam launch module and a receiver module is short (preferably not more than 30 centimeters) to capture the multiple wavelength beams at the receiver, each of the N species having a near-infrared spectral absorption band separated by at least 500 nanometers from each other, the apparatus comprising:

[0034] (a) N laser sources, wherein each of the N laser sources is adapted to operate at a wavelength _N in a near-infrared spectral absorption band separated by at least 500 nanometers from each other, and each laser source corresponding to a gas species;

[0035] (b) each of the N laser sources adapted to transmit radiation through an optical fiber (preferably dedicated), each optical fiber having single-mode optical fiber characteristics sufficient to insure single-mode transmission with minimal power loss to N achromate lenses, each achromate lens having a proper wavelength-specific anti-reflective coating, the N achromate lens adapted to create N collimated laser beams;

[0036] (c) means for launching the N collimated laser beams into the process containing the N gas species to be detected (the means for launching preferably selected from the group consisting of a dichroic beam combiner or a system of mirrors); and

[0037] (d) means for receiving and detecting nonabsorbed portions of the N collimated laser beams.

[0038] Preferred apparatus are those wherein the means for receiving and detecting comprises a prism and an achromate lens, and spherical lens combination that provides wavelength dispersion, beam focusing, and spatial control. The wavelength dispersion provides a means to separate the individual N wavelengths launched through the process, while focusing controls the beam spatial position relative to the detection means. Apparatus embodiments within the third aspect of the invention are less sensitive to beam steering effects that can occur due to process vibration, alignment drifting, and refractive index changes due to hot gas environments.

[0039] Further aspects and advantages of the invention will become apparent after reviewing the following non-limiting description.

[0040] FIG. 1 is a schematic illustration of one preferred apparatus and method embodiment in accordance with the invention, illustrating launching multiple diode laser beams with collimated and expand beam diameter through a process, receiving the beams in a time domain demultiplexing mode to a single detector;

[0041] FIG. 2 is a schematic illustration of another preferred apparatus and method embodiment in accordance with the invention, illustrating launching multiple diode lasers beams with a collimated and expanded beam diameter through a process, with discrimination carried out by narrowband reflectors and reflectors/transmitters with dedicated detectors for each wavelength;

[0042] FIG. 3 is a schematic illustration of another preferred apparatus and method embodiment in accordance with the invention, illustrating launching multiple diode laser beams with a collimated and expanded beam diameter through a process with discrimination carried out by a dispersing element and dedicated detectors for each wavelength;

[0043] FIG. 4 is a schematic illustration of calculated spot diagrams for different distances from the launch position using the multiple diode laser beam launch methodology illustrated in FIGS. 1-3;

[0044] FIG. 5 is a schematic illustrating a preferred multiple wavelength beam launch apparatus and method adaptable to near or far field detection with enhanced discrimination of receiving beams;

[0045] FIG. 6 is a schematic illustrating a preferred multiple wavelength beam launch apparatus and method adaptable to near or far field detection with receiving beam area minimized;

[0046] FIG. 7 is a schematic illustrating another preferred optical apparatus and method for receiving and detecting multiple wavelength radiation sources; and

[0047] FIG. 8 is a schematic illustrating another preferred optical apparatus and method for receiving and detecting multiple wavelength radiation sources with enhanced discrimination of the dispersed beam.

[0048] FIG. 9 is a schematic illustrating expected data for the O₂ spectrum.

[0049] FIG. 10 is a schematic illustrating expected data for the H₂O spectrum.

[0050] FIG. 11 is a schematic illustrating expected data for the CO spectrum.

[0051] To integrate multiple wavelength lasers into a single beam launch and receiving apparatus, three key design features are used in each apparatus and method embodiment of the invention. The first key design feature addresses the issue of transporting multiple wavelengths to the launch module that is mounted on or very near the process being measured, monitored, and/or controlled. Since a single optical fiber cannot be used to transport broadly separated wavelengths, for example, wavelengths used for O₂ and CO monitoring, a means for launching and controlling the beam geometry is required. For cases where the distance between the launch module and receiver module is sufficiently short (say no more than 30 centimeters) a combination compound ferrule housing separate fibers for each wavelength and off-axis paraboloid mirror is one preferred means. Use of a compound ferrules allows interfacing a plurality of separate fibers that preferably have low power loses, operate at single-mode, and are insensitive to mechanical stresses, for the transport of a corresponding plurality of laser beams having respective wavelengths to a launch module. In a preferred embodiment, the compound ferrule allows interfacing a 5 micrometer (m) diameter fiber for transporting a 760 nanometer (nm) beam in single-mode with a 9 m diameter fiber for transporting a 1560 nm beam, also in single mode. At the end of each of the plurality of fibers, preferably no additional optics are used (except a collimating optical element), thus each single-mode beam is allowed to exit its respective optical fiber and expand with a divergence set by the wavelength-fiber combination, in other words a numerical aperture. Alternatively, in place of a compound ferrule, each single-mode optical fiber feeds an expanded beam to a respective collimating achromate lens.

[0052] The combination of a collimating optical component (for example an off-axis parabolic mirror, an achromate lens, or other beam collimating means) with wavelength-fiber pairing is a second key design feature of apparatus and methods of the invention. This combination provides the desired beam diameter, with minimum divergence. An expanded diameter beam, with the desired beam diameter, propagates through the process to be measured, monitored, and/or controlled to minimize the effect of particulate laden flow streams and refractive index gradients, as discussed in Von Drasek, W., et al., Multi-functional Industrial Combustion Process Monitoring with Tunable Diode Lasers, Proceedings of SPIE, Vol. 4201, 2000.

[0053] Finally, use of means for reducing or eliminating secondary reflections, such as one or more off-axis parabolic mirrors, or mirrors and lenses having anti-reflective coatings, addresses a third key design feature of apparatus and methods of the invention. These components produce no secondary reflections that degrade measurement quality, and the use of off-axis parabolic mirrors both focus and collimate the beams to the desired diameter independent of the wavelength. In one preferred embodiment, collecting the plurality of beams on the receiver side with a matched second off-axis parabolic mirror directs and focuses the light onto one or more detectors. An additional discriminating optical element can be used to reject background radiation from a high temperature process. Demultiplexing of the collected signal beams are achieved either by dispersing the wavelengths to separate detectors or scanning the lasers out of phase as shown by Allen et al., supra. In another embodiment of the invention, achromate lenses as discussed herein, in combination with a prism and a spherical mirror may be used.

[0054] FIG. 1 illustrates one preferred apparatus and method of the invention. In this embodiment a dual laser system is illustrated, where a first optical fiber-coupled laser 101 preferably represents a 760 nm AlGaAs diode laser, for example those commercially available from Sarnoff Corp., Princeton, N.J., and a second fiber-coupled laser 102 preferably represents a 1560 nm InGaAsP laser, for example those commercially available from NEL America, Inc. Saddle Brook, N.J. An output of optical fiber-coupled laser 101 is fiber optically coupled to transport the radiation to a beam splitter 104, which splits the output into two beams, the split preferably ranging from about 60 to about 90 power percent into one leg, and from about 10 to about 40 power percent in a second leg (distributes from about 60 to about 90 percent of the input laser power to one optical fiber, and from about 10 to about 40 percent to the another optical fiber). In the configuration illustrated in FIG. 1 the larger power percentage beam is directed by an optical fiber 105 to a photo detector 106. A signal from photo detector 106 is processed by means for suppressing the amplitude noise inherent in semiconductor lasers, preferably a balanced ratiometric detector (BRD) circuit 107 substantially as disclosed in U.S. Pat. No. 5,134,276(IBM) which is incorporated herein by reference for its teaching of a BRD circuit; further detail on this aspect will be discussed below. The lower power percent beam is directed by an optical fiber 108 that terminates at a compound ferrule 110.

[0055] Similarly, an output of a second optical fiber-coupled laser 102 is preferably split the same percentage as first optical fiber-coupled laser 101 by a second splitter 104, with a higher power percent beam routed by an optical fiber 105 to a second photo detector 106, and a lower power percent beam routed by an optical fiber 108 that terminates at compound ferrule 110. Though the configuration for lasers 101 and 102 is substantially the same, optical fibers 105 and 108 transporting the radiation are preferably different than optical fibers 105 and 108 to maintain single-mode transmission in each set.

[0056] Compound ferrule 110 is preferably designed so that each single-mode fiber transporting their respective wavelengths are held in a mount at a separation distance at least equal to the sum of cladding layer radii of each fiber within compound ferrule 110. Since the separation distance is small (preferably ranging from about 100 to 500 m), each laser beam preferably effectively originates from the same location, which is the effective focal position of the parabolic mirror. Further, each beam has essentially identical divergence angles as determined by the single-mode beam propagation at the respective wavelength.

[0057] The beams exit compound ferrule 110 diverging at an angle ranging from about 10 to about 25 solid angle propagating to an off-axis parabolic reflector (OAP) 111, such as that supplied by Melles Griot Photonics Components, Irvine, Calif. Preferably, the OAP is coated with a highly reflective surface coating, preferable rhodium or the like, for high reflectivity in the near-IR. This preferably results in collimated overlapping beams that are co-propagating through process 100 where the combined beams enter process 100 by optical access port 131. Compound ferrule 110 and OAP 111 are preferably housed in a hardened case 109 protecting them from the surrounding environment. Coupling of case 109 to the process is obtained by water or gas cooled pipe fixtures (not illustrated). For O₂ monitoring, case 109 along with the mounting fixture should be purged by a non-corrosive gas, preferably a gas having O₂ concentration less than 100 parts per million (ppm).

[0058] A beam receiver section is preferably housed in a hardened case 113. The beam receiver section preferably includes a high reflectivity dichroic mirror 130 to direct the 760 nm and 1560 nm beams toward a second matched OAP 121. Dichroic mirror 130 is designed to reflect only radiation at 760 and 1560 nm with 100 nm bandpass at each wavelength, thereby reducing background radiation from the hot process. The beams are preferably directed and focused by OAP 121 on an enhanced short wavelength InGaAs photo detector 117. In front of photo detector 117, an iris 116 is preferably used to further restrict the field of view on the detector, thus reducing noise contributed from the background radiation. The output from detector 117 is sent to means for suppressing amplitude noise inherent in semiconductor lasers, preferably BRD circuit 107, with the processed signal preferably digitized and analyzed by an acquisition system 123. Discrimination between the two or more wavelengths is preferably achieved by operating the system in a time-domain-multiplexed mode whereby lasers 101 and 102 are tuned out of phase.

[0059] In the description of the apparatus embodiment in FIG. 1 the preferred means for suppressing amplitude noise inherent in semiconductor lasers is a BRD circuit. The noise canceling electronic circuitry output gives the log ratio measured intensity from the detector 117 and the reference intensity from detector 106. Alternatives to the BRD approach, whose advantages are fully discussed by Allen et al., supra, and Sonnenfroh et al., supra, for suppressing amplitude noise inherent in semiconductor lasers, such as direct absorption, frequency modulation, wavelength modulation, noise subtraction, and the like may preferably be used. Independent of the noise reduction means selected, the basic concepts of beam launch and reception of the apparatus illustrated in FIG. 1 applies.

[0060] Regarding the interface to the process in FIG. 1, the line-of-sight optical access is illustrated by the hole 131. Since both the 760 and 1560 nm beams are co-propagating along the same path, a window at 131 is preferably not used, thus minimizing reflections. However, in this embodiment, there is no protection from hot process gases flowing into beam launch case 109 or receiver case 113. Purging of both cases is preferred for cooling, removing residual O₂, and ensuring a positive pressure exists for protection against hot process gas. Anti-reflective coated windows are commercially available from CVI Laser Corporation, Putnam, Conn., which might provide the preferred 800 nm wavelength range needed for O₂ and CO monitoring. As an alternative, a window placed at Brewster's angle, (56) could be used to eliminate any reflections from its surface.

[0061] The embodiment illustrated in FIG. 1 relies on one InGaAs detector for monitoring 760 and 1560 nm radiation. Generally, InGaAs detectors response covers 850-1600 nm, but special short wave enhanced detectors are available such as the model 575L from RIFCOS Corp., Camarillo, Calif. that claims detection down to 600 nm. However, the responsivity of the detector below 800 nm is a factor of five lower than 1560 nm. Therefore the current detector technology precludes its use due to the unacceptable performance at short wavelengths and receiver designs using multiple detectors optimized for the selected wavelengths is preferred.

[0062] Characteristic calculated spot diagrams of the multiple beams launched using the apparatus of FIG. 1 (that is, a combination ferrule and OAP) are illustrated in FIG. 4 for beams at 760 and 1560 nm. These results were obtained using ray-tracing optical modeling software known under the trade designation ZEMAX from Focus Software, Inc. Tucson Ariz. The spot diagram in FIG. 4A illustrates an ideal compound ferrule with the fibers separated at 125 m. At short distances, e.g., 1000 mm, both beams overlap and are centered within a 3 inch (7.5 cm) diameter circle. However, at larger distances 7500 and 15,000 mm the separation between the two beams increases in addition to the diameter of the beams. The diameter increase is due to divergence while the beam separation results from the separation of the two fibers mounted in the compound ferrule. The effect of beam divergence and beam separation limits the practical working distance using the combination ferrule and off-axis parabolic mirror. This limitation is due to the constraint placed on the receiver aperture. For combustion applications, where the launch and receiver modules are preferably mounted on the process, this requires line-of-sight optical access. This access is obtained by boring opposing holes through the process refractory to allow the launched beams to enter and exit the process. In general, the diameter bored in the refractory should be as small as possible to minimize heat losses from the process, minimize the exposed area of the receiver unit, and minimize the required cooling. Because of these constraints, optical access diameters typically range from 2-4 inches (5-10 cm) and are dependent on the process. In addition, a large receiving diameter also requires large optic components to collect the beam. Optical components larger than 3 inches (7.5 cm) in diameter are both costly and have limited off-the-shelf availability. Furthermore, the selection and availability of mechanical mounts and translation stages for optical components larger in diameter than 3 inches (7.5 cm) is also limited. For these reasons, the preferred approach is to minimize the size of the receiving aperture, which in turn reduces process heat losses, reduces the required cooling, utilizes off the shelf optical components and hardware, and minimizes overall size of the receiver unit. Using the combination ferrule and off-axis parabolic mirror to launch the beam 15,000 mm through a process requires a receiving aperture greater than 3 inches (7.5 cm), as illustrated in FIG. 4, to account for alignment errors, mechanical vibration, and beam steering effects. An acceptable receiving aperture diameter to use is a factor of 2-3 times the beam diameter to allow for misalignment errors and beam steering effects.

[0063] Two adaptations using multiple detectors are illustrated in the embodiments of FIGS. 2 and 3. In both of these configurations, the beam launch module uses an OAP 111 to collimate the beams from lasers 101, 102, and 103 traversing optical fibers 108, 108, and 108, respectively, at the desired diameter, and direct them through the process. The main differences are in the means of wavelength discrimination, and in the case of the embodiment illustrated in FIG. 2, the beams are launched such that they are spatially separated. The spatially separated beam case illustrated in FIG. 2 allows the use of anti-reflective (AR) coated windows with more standard dichroic reflectors 114 and 115. For the AR coated windows, a coating specific to 760 nm and 1560 nm are deposited on each half of the window. This is accomplished by using masking techniques in the CVD process. To achieve the desired beam separation the angle between the fibers of the compound ferrule are preferably greater than the half angle of the beam divergence to prevent beam overlapping. For the 760 and 1560 nm cases this angle is about 8. Beam 122 propagates through the process and is transmitted through a dichroic mirror 114 and reflected by a narrowband dichroic mirror 115. The beam is then focused by an OAP 121, though an iris 116, and onto detector 117, which for the case of 760 nm radiation would preferably be a standard silicon photo detector such as is available from EG&G Optoelectronics of Gaithersburg, Md., model UV-245BQ. Similarly, beam 124 is preferably reflected by dichroic reflector 114 and focused onto detector 118 by OAP 121. In front of both detectors, an iris 116 and 116 are used to minimize background radiation from the process leaking through to the detector. In a preferred case of beam 124 being 1560 nm radiation, detector 118 is an InGaAs detector such as is commercially available from Fermionics of Simi Valley, Calif., model FD3000W. Detectors 117 and 118, respectively, generate signals which are transmitted by wire or wireless means 110 and 120, to noise reduction circuitry 107, and preferably to a digitizing and analysis system 123.

[0064] Further extension of the wavelength operating range of the system illustrated in FIG. 2 is seen by the additional laser 103 added to the that embodiment. In this case laser 103 is introduced to the beam launch module using compound ferrule 110 that preferably accepts three fibers. Alternatively, lasers 102 and 103 are preferably multiplexed using a 22 fiber coupler with a single fiber from the two lasers connecting to the compound ferrule. In fact, N lasers can be added to the system using a N2 fiber coupler with the limitation being compatibility of the laser wavelengths with the fiber characteristics to insure single-mode transmission with minimal power loses. These principles apply not only to the embodiment illustrated in FIG. 2, but also to the embodiments of FIGS. 1, 3, 5 and 6.

[0065] The system illustrated in FIG. 3 is identical to the embodiment of FIG. 1 except for the receiver optics. In this embodiment, the beams are preferably introduced into the process either by the overlapping method (as in FIG. 1) or spatially separated (as in FIG. 2). In either case, the wavelength discrimination is preferably controlled using a grating 140, as illustrated in FIG. 3. Use of a planer grating requires spherical focusing elements 141 and 141 to direct and focus the separated wavelengths to the appropriate detectors 118 and 117, respectively. Alternatively, a concave holographic grating is preferably used for wavelength discrimination with the additional feature of focusing the reflected radiation onto the detector, thereby eliminating the need for elements 141 and 141 in the embodiment illustrated in FIG. 3.

[0066] Another preferred means to launch multiple wavelengths is to use an apparatus as illustrated in FIGS. 5 or 6. In each case separate beams are delivered to a launch module (not shown) by fibers 300 and 306, each fiber being specific to the transported wavelength to maintain minimum loses and single-mode transmission. The radiation 301 and 304 exiting fibers 300 and 306 diverges and is collimated by collimating means, such as an achromat or gradium lens 302 and 305, to avoid spherical aberration. Lenses 302 and 305 preferably have an anti-reflective coating specific to the wavelength. After collimation the beams are reflected off a mirrored prism 303 and directed into the process (not illustrated). This configuration allows the beams to propagate parallel to one another (as illustrated in FIG. 5 or by slightly angling the fiber-lens combination by an angle (as illustrated in FIG. 6) the beams can be set to overlap at any distance. The flexibility incorporated into the design provides the user the ability to set-up the launch with completely separated beams that can improve wavelength discrimination on the receiver side. A side-by-side beam configuration (FIG. 5) is preferred when alignment and beam steering issues are not a factor, e.g., short pathlength. For long path lengths, alignment and beam steering become important requiring higher tolerances on the receiver aperture, thus favoring an overlapped beam configuration such that the beams overlap on the receiver aperture (FIG. 6).

[0067] Preferred means to collect launched multiple wavelength beams is to use a prism-achromat lens combination, as illustrated in FIG. 7. This approach is advantageous when beam steering effects are present, caused by either refractive index gradients or mechanical movement of the receiver relative to the launch. For O₂ and CO monitoring, a system of the invention preferably comprises a prism 200, achromat lens comprising a convex lens 201a and a concave lens 201b, separated either by an air gap or cement, and spherical lens 202. The combination of these three optical elements disperses multiple wavelengths received and focuses the radiation to a spatial target, e.g., detector. The incoming multiple beams can be received anywhere within the shaded area 210, which represents the same diameter as the receiving window. In practice, the combined incident spot diameter of the received beams diameter is on the order of 1 inch (2.5 cm). Therefore, a 3 inch (7.5 cm) diameter receiving window followed by the prism-achromate lens combination scaled to accept a 3 inch (7.5 cm) diameter beam provides up to 90% variation in beam position that can be caused by mechanical vibration, beam steering due to thermal gradients and/or misalignment. This figure of 90% was obtained from the formula: 100*(A1-A2)/A1 where A1 is the area of the receiver window and A2 is the area of the beam (multiple beams) incident on the window. This is only one way of expressing this point.

[0068] For prism 200 the material used should have a high refractive index to provide sufficient dispersion, e.g., a prism made with Schott Glass SFL6 results in a dispersion of 13.7 micron/nm over a distance of 450 mm from the prism. The dispersion can be increased by using either a larger prism angle or stronger convex mirror. For a larger prism, caution is needed, since the angle of the incident laser beam will also increase reducing the efficiency of the AR coating which works best a small incident angles. Using a stronger convex mirror 202 will enhance the dispersion at a longer focal position and increasing the astigmatism. For example, decreasing the focal length 20 mm (going from 270 to 250 mm) results in a dispersion of 16.2 micron/nm. The resulting larger spot sizes and astigmatism can be reduced by incorporating additional focusing elements.

[0069] After the multiple dispersed beams focus off the spherical mirror 202 the beams are focused into detector 205 which can be a Si photodiode for monitoring the 760 nm radiation used for O₂ absorption measurements. Since the dispersion between the two beams is relatively small for inserting standard size optical components, mirror 203 (standard flat mirror with high reflectivity for 1560 nm) can be used to divert the 1560 nm radiation used for CO and H₂O monitoring to an InGaAs detector 204. Alternatively, a side-by-side detector arrangement could be implemented to element mirror 203. Adapting this configuration would just require a dual detector mount to support both detectors. In addition, an iris in front of each detector is desirable to reduce background radiation. For monitoring on high temperature processes, the background radiation level reaching the detector can be high. This is particularly problematic for monitoring O₂, since the incident laser power from fiber coupled AlGaAs DFB lasers is typically only a few 100 W. In this case the background radiation can be on the same order as the laser radiation despite the dispersion by the prism configuration. FIG. 8 illustrates a mechanism to solve this problem. Here enhanced discrimination is preferred, such as by introducing a high efficiency grating 207, e.g., 830 grooves/mm blazed at 800 nm from Edmund Industrial Optics, Barrington, N.J., is illustrated in FIG. 8. The grating can be angled to reflect the 1^st order diffracted 760 nm beam across an off-axis parabolic mirror 208 to focus the beam on detector 205. For the 1560 nm radiation, a grating is not needed since the incident laser power is several milliwatts. This level of laser power is sufficiently larger than the radiation emitted by the process in addition to the InGaAs detector having a weaker response requires no additional discrimination. In FIG. 8, an off axis parabolic mirror 206 is illustrated to deflect the 1560 nm beam into detector 204. OAP 206 provides additional beam focusing that reduces the spot size to allow a smaller diameter iris for improved background rejection. Note that it s not required that reflectors 206 and 208 be OAPs, but they are preferred for their ability to both reflect and focus.

[0070] In the achromat lenses illustrated in FIGS. 7 and 8, lenses 201a and 201b are separated either by an air gap, or by a cement. An air gap is preferred for high temperature applications, but the tradeoff is that it is not the best choice for reducing optical reflections. The use of a cemented achromat lens is beneficial for optical reflections, but not as good for high temperature applications. Most cemented achromat lenses are limited to use in temperatures of up to 100 C.

[0071] Using either configuration illustrated in FIG. 7 or 8, and using optical components that are readily available, the receiver module footprint may be constructed to be on the order of 16 inches (40 cm) long and 12 to 16 inches (30 to 40 cm) wide. This size is well within the acceptable range for mounting a receiving unit on an industrial process. Higher dispersion between the two beams using different optic specifications, e.g., decreasing the convex mirror 202 focal length can result in an increase in the system footprint. Therefore dispersion and overall system size becomes a tradeoff. The three-component receiver modules illustrated in FIGS. 7 and 8 provide zero order dispersion, easy alignment, and insensitivity to beam steering and misalignment effects. The detail design specifications for the receiver optical components are preferably obtained from Optical Design Services, Tucson, Ariz. A company such as Optimax Systems Inc., Ontario, N.Y., then uses the specifications and fabricates the receiver optical components.

[0072] Using the receiver module illustrated in FIG. 8, sample sets of data were collected from an industrial 30 MW furnace installation and on a 500 kW pilot furnace. For the industrial furnace, the beam launch system illustrated in FIG. 6 was employed with a 48 foot (14.6 meters) pathlength across the process to the receiver module. In this case, O₂ and H₂O were detected in the process by scanning a diode laser at 200 Hz over a wavelength range to collect the full lineshape. A detailed description of the monitoring methodology is described in assignee's copending published patent application 20020031737, Ser. No. 09/964,017, published Mar. 14, 2002, incorporated herein by reference. The resulting absorbance spectrum for O₂ monitoring is illustrated in FIG. 9, with absorbance defined as

[0073] Where A is the absorbance, is the absorptivity, 1 is the pathlength, and c is the concentration of the species being monitored. This relationship comes directly out of Beer's Law. The raw data for the spectrum of FIG. 9 is listed in Table 2. The concentration of O₂ is determined by integrating the area under the curve, knowing the linestrength for O₂ absorption transition and temperature. Therefore, before the O₂ concentration can be determined the gas temperature must be determined. For the multi-species monitoring system, gas temperature is obtained from the H₂O absorbance spectrum, which is collected simultaneously or nearly simultaneously with the O₂ spectrum. In this example, the H₂O spectrum collected is illustrated in FIG. 10 with the raw data listed in Table 3. As in the case of the O₂ spectrum the laser scan rate is 200 Hz, thus the spectrum shown in FIGS. 9 and 10 represent 200 averaged spectra. The gas temperature is obtained from the H₂O spectrum by ratioing the area under peaks A and B and using an empirical formula that was obtained by conducting a calibration under controlled conditions, i.e., known temperature and H₂O concentration. In this example, the temperature was determined to be 1547 K, resulting in an O₂ concentration of 5.95% and a H₂O concentration of 7.58%.

[0074] An example illustrating simultaneous H₂O concentration, gas temperature and CO concentration from a 500 kW pilot furnace is illustrated in FIG. 11, with the raw data listed in Table 4. In this example, the furnace pathlength as only 1 foot (30.5 cm) and no O₂ was present. (Note, the spectral region and simultaneous detection of H₂O and CO in this region is discussed in assignee's U.S. Provisional Application No. 60/349,638, filed Jan. 17, 2002, incorporated herein by reference. In this example, the gas temperature was 1387 K based on the H₂O peaks A and B resulting in a CO concentration of 4.7%. In addition, the H₂O concentration based on peak A, 36.6% for this example can also be obtained.

[0075] Examples 1 and 2 illustrate the multi-species detection capabilities of the apparatus of the invention under industrial operating conditions where high levels of background radiation are present, strong thermal gradients are present resulting in the beam spatial position changing in time, and attenuation effects are present due to particulate matter.

[0076] Distances between optical components for the receiver module of FIG. 8 are listed in Table 1. The dimensions are relative to the entrance window center (y0, z0). The y and z values listed are relative to the center of each optic component at the surface in the direction of the propagating beam, in other words, form left to right in FIG. 8.

[0077] Although the description herein is intended to be representative of the invention, it is not intended to limit the scope of the appended claims. While in the foregoing specification this invention has been described in relation to certain preferred embodiments thereof, and many details have been set forth for purpose of illustration, it will be apparent to those skilled in the art that the invention is susceptible to additional embodiments and that certain of the details described herein can be varied considerably without departing from the basic principles of the invention.

TABLE 1
Optical Component Configuration for Examples, FIG. 8
	Optical Element	Y (mm)	Z (mm)
	Prism (200)
	Surface 1	0.00	40.00
	Surface 2	2.90	60.78
	Achromat Lens (201)
	Spherical lens
	Element (201a)
	Surface 1	16.40	107.21
	Surface 2	22.68	128.92
	Concave lens Element
	(201b)
	Surface 1	22.97	129.91
	Surface 2	24.36	134.71
	Spherical mirror (202)
	Surface 1	104.12	371.62

[0078]

TABLE 2
Recorded absorbance values for oxygen monitoring
referenced to spectrum in FIG. 9. Dispersion value
for each channel is
1.39 103 cm1.
	Channel	Absorbance
	0	2.0635E04
	1	5.0784E06
	2	6.1479E05
	3	4.8688E06
	4	1.6310E04
	5	2.4419E04
	6	1.5129E04
	7	5.1808E06
	8	2.1229E05
	9	2.5064E05
	10	6.4891E05
	11	3.6957E05
	12	1.7335E04
	13	2.6268E04
	14	1.9980E04
	15	1.0734E04
	16	6.7003E05
	17	7.2896E05
	18	1.3672E04
	19	1.2435E04
	20	2.8173E05
	21	1.7898E05
	22	5.6126E05
	23	2.1156E04
	24	2.7930E04
	25	1.6007E04
	26	1.3394E04
	27	1.2507E04
	28	1.3345E04
	29	1.5690E05
	30	1.4158E04
	32	2.7249E05
	33	4.8915E05
	34	6.6780E06
	35	2.8605E05
	36	6.2310E05
	37	7.2853E05
	38	4.8549E05
	39	1.1165E04
	40	1.4569E04
	41	1.6819E04
	42	2.0817E04
	43	2.5981E04
	44	1.7199E04
	45	2.0047E04
	46	1.5920E04
	47	1.4701E04
	48	2.1041E04
	49	1.1099E04
	50	9.8770E05
	51	1.1565E04
	52	8.0124E05
	53	9.1109E05
	54	8.4608E05
	55	7.2245E05
	56	7.1462E05
	57	7.6435E06
	58	1.7336E05
	59	9.4304E05
	60	1.3615E04
	61	1.3728E04
	62	1.2685E04
	63	1.2233E04
	64	1.2374E04
	65	1.1942E04
	66	1.4432E04
	67	2.2766E04
	68	1.3039E04
	69	5.0772E05
	70	8.7783E05
	71	4.3349E05
	72	3.4015E05
	73	3.0630E05
	74	2.1555E06
	75	9.9964E05
	76	7.3666E05
	77	2.8169E05
	78	3.0876E05
	79	4.3368E06
	80	6.7606E06
	82	9.8457E05
	83	1.0625E04
	84	2.4304E06
	85	6.5592E06
	86	4.7337E05
	87	8.3621E05
	88	4.8959E05
	89	8.2809E05
	90	6.3606E05
	91	1.1670E04
	92	1.2659E05
	93	7.9973E05
	94	5.6384E05
	95	7.7587E05
	96	7.8065E06
	97	1.7858E04
	98	1.5556E04
	99	4.6934E06
	100	1.1098E05
	101	2.0390E04
	102	1.8147E04
	103	2.1153E06
	104	4.4008E05
	105	2.1994E04
	106	3.4376E04
	107	1.8224E04
	108	9.5158E05
	109	6.0991E06
	110	1.4713E04
	111	1.9248E06
	112	1.4483E04
	113	7.8531E05
	114	1.5073E04
	115	9.5263E05
	116	1.6335E04
	117	2.3582E04
	118	5.2817E05
	119	3.1642E06
	120	2.4361E04
	121	2.9816E04
	122	8.0018E05
	123	8.6258E05
	124	1.5964E04
	125	2.4855E04
	126	8.2191E05
	127	4.3795E05
	128	7.3152E06
	129	1.2190E04
	130	6.5309E05
	132	2.4911E05
	133	9.8100E05
	134	4.5852E05
	135	1.6679E04
	136	3.2287E05
	137	1.2516E04
	138	5.9675E05
	139	1.8086E04
	140	2.3481E05
	141	1.4520E04
	142	2.9815E05
	143	3.3532E05
	144	4.2241E05
	145	2.5200E05
	146	1.7170E04
	147	2.0628E04
	148	5.5214E05
	149	9.5627E05
	150	1.3611E04
	151	8.9629E05
	152	7.7970E05
	153	2.0555E04
	154	2.6938E04
	155	2.5780E04
	156	2.7525E04
	157	3.9726E04
	158	4.0894E04
	159	4.3226E04
	160	4.8465E04
	161	5.3125E04
	162	4.0933E04
	163	4.2689E04
	164	5.3738E04
	165	5.2006E04
	166	5.2018E04
	167	6.0165E04
	168	6.5988E04
	169	5.9601E04
	170	6.3094E04
	171	6.8331E04
	172	7.1243E04
	173	6.6012E04
	174	7.5314E04
	175	7.7638E04
	176	7.7049E04
	177	7.0644E04
	178	7.4703E04
	179	8.0502E04
	180	7.9902E04
	182	9.3231E04
	183	9.4364E04
	184	1.0015E03
	185	1.1001E03
	186	1.1929E03
	187	1.1807E03
	188	1.2676E03
	189	1.3836E03
	190	1.4238E03
	191	1.4172E03
	192	1.6618E03
	193	1.7603E03
	194	1.8413E03
	195	1.9692E03
	196	2.1733E03
	197	2.3248E03
	198	2.4234E03
	199	2.5162E03
	200	2.7974E03
	201	2.9787E03
	202	3.0066E03
	203	3.1880E03
	204	3.5057E03
	205	3.6342E03
	206	3.6857E03
	207	3.8735E03
	208	4.1210E03
	209	4.3212E03
	210	4.4083E03
	211	4.7459E03
	212	5.0483E03
	213	5.3093E03
	214	5.3787E03
	215	5.6521E03
	216	5.9681E03
	217	6.1278E03
	218	6.2816E03
	219	6.5684E03
	220	6.8012E03
	221	6.9796E03
	222	7.0672E03
	223	7.3491E03
	224	7.6983E03
	225	7.9080E03
	226	8.0690E03
	227	8.2912E03
	228	8.5687E03
	229	8.8038E03
	230	8.8610E03
	232	9.1904E03
	233	9.3337E03
	234	9.4216E03
	235	9.4602E03
	236	9.7083E03
	237	9.8332E03
	238	9.8470E03
	239	9.8237E03
	240	9.9176E03
	241	9.9559E03
	242	9.9262E03
	243	9.9274E03
	244	9.9902E03
	245	9.9727E03
	246	9.8748E03
	247	9.7709E03
	248	9.8272E03
	249	9.7232E03
	250	9.4837E03
	251	9.3490E03
	252	9.2452E03
	253	8.9757E03
	254	8.6639E03
	255	8.4809E03
	256	8.2982E03
	257	8.1340E03
	258	7.8481E03
	259	7.6479E03
	260	7.4297E03
	261	7.1209E03
	262	6.9337E03
	263	6.7226E03
	264	6.4575E03
	265	6.1328E03
	266	5.8508E03
	267	5.6473E03
	268	5.2587E03
	269	4.9248E03
	270	4.7107E03
	271	4.5504E03
	272	4.3072E03
	273	4.0823E03
	274	3.8991E03
	275	3.6276E03
	276	3.3448E03
	277	3.2568E03
	278	3.0925E03
	279	2.8402E03
	280	2.7585E03
	282	2.3670E03
	283	2.2622E03
	284	2.1517E03
	285	1.9364E03
	286	1.7855E03
	287	1.7337E03
	288	1.6703E03
	289	1.4792E03
	290	1.4102E03
	291	1.3992E03
	292	1.2666E03
	293	1.1168E03
	294	1.1813E03
	295	1.1069E03
	296	9.1114E04
	297	8.7166E04
	298	8.4378E04
	299	7.8710E04
	300	6.0367E04
	301	6.3365E04
	302	5.5998E04
	303	4.0009E04
	304	3.7269E04
	305	4.0290E04
	306	3.6990E04
	307	2.4502E04
	308	2.3517E04
	309	2.8286E04
	310	1.8126E04
	311	1.0853E04
	312	1.9084E04
	313	1.6994E04
	314	9.7464E05
	315	7.6721E05
	316	1.9950E04
	317	1.7891E04
	318	1.0679E04
	319	1.3803E04
	320	1.7508E04
	321	1.6634E04
	322	1.4274E05
	323	1.7305E05
	324	1.6362E04
	325	1.7820E04
	326	4.3836E05
	327	9.2983E05
	328	1.5943E04
	329	1.1135E04
	330	3.3972E05
	332	3.6504E05
	333	3.4685E05
	334	5.2883E05
	335	1.4464E05
	336	9.2799E05
	337	5.9549E06
	338	5.8773E05
	339	1.4387E05
	340	1.1057E04
	341	9.2345E05
	342	3.4192E05
	343	1.2421E05
	344	6.6935E05
	345	1.0063E04
	346	1.4359E05
	347	2.0527E05
	348	2.4845E05
	349	9.7419E06
	350	7.8513E05
	351	1.6429E04
	352	9.0074E05
	353	5.5741E05
	354	1.3557E04
	355	1.4676E04
	356	9.5113E05
	357	7.7646E05
	358	1.6285E04
	359	1.2243E04
	360	7.6245E05
	361	4.7135E05
	362	1.0356E04
	363	9.7166E05
	364	1.1981E05
	365	4.1269E05
	366	6.0663E05
	367	4.2733E05
	368	6.6535E05
	369	6.1684E05
	370	1.1169E06
	371	5.1993E05
	372	8.1390E05
	373	2.5204E05
	374	6.5193E05
	375	3.5855E05
	376	1.7916E05
	377	8.5527E05
	378	3.9211E05
	379	4.7003E05
	380	1.3432E05
	382	7.7223E05
	383	6.6251E05
	384	1.5273E05
	385	7.2831E06
	386	2.7044E05
	387	6.4083E05
	388	9.8339E05
	389	4.3769E05
	390	2.6296E05
	391	2.7346E06
	392	1.9313E05
	393	4.6873E05
	394	3.4397E05
	395	1.8152E05
	396	8.2836E06
	397	6.3990E05
	398	3.9219E05
	399	8.8217E05
	400	1.3696E04
	401	1.2847E04
	402	4.5638E05
	403	6.5016E05
	404	1.4667E04
	405	6.8574E05
	406	7.5525E05
	407	4.7953E05
	408	1.9790E05
	409	5.3812E05
	410	2.5726E05
	411	9.4710E05
	412	9.5932E05
	413	3.5101E05
	414	2.4786E06
	415	4.5713E05
	416	8.8738E05
	417	7.2787E06
	418	3.9523E05
	419	4.5047E05
	420	6.1986E05
	421	4.5490E05
	422	7.5096E05
	423	1.8670E06
	424	5.2758E08
	425	5.3899E07
	426	9.6381E07
	427	4.0139E08
	428	7.9427E07
	429	4.3056E07
	430	4.2744E09
	432	7.0102E07
	433	2.8529E07
	434	2.7842E07
	435	1.3991E06
	436	5.3527E07
	437	4.2601E08

[0079]

TABLE 3
Recorded absorbance values for H2O monitoring referenced
to spectrum in FIG. 10. Dispersion value for each channel is
2.58 103 cm1.
	Channel	Absorbance
	0	9.6969E04
	1	6.7374E04
	2	3.2638E04
	3	1.8694E04
	4	1.0781E04
	5	2.4667E04
	6	2.8203E04
	7	6.7917E04
	8	8.6887E04
	9	9.5499E04
	10	1.0927E03
	11	1.1268E03
	12	1.1092E03
	13	1.4010E03
	14	1.5891E03
	15	1.6224E03
	16	1.6558E03
	17	1.8946E03
	18	1.6701E03
	19	1.6514E03
	20	1.7354E03
	21	1.4592E03
	22	1.6458E03
	23	1.1641E03
	24	1.0933E03
	25	8.6860E04
	26	7.4635E04
	27	3.1600E04
	28	9.1233E05
	29	3.9066E04
	30	7.6966E04
	31	1.1487E03
	32	1.7331E03
	33	2.1634E03
	34	2.9535E03
	35	3.8469E03
	36	4.3801E03
	37	5.5309E03
	38	6.3217E03
	39	7.4219E03
	40	8.5741E03
	41	9.5206E03
	42	1.0984E02
	43	1.2396E02
	44	1.3913E02
	45	1.5483E02
	46	1.7158E02
	47	1.9198E02
	48	2.1137E02
	49	2.3599E02
	50	2.5909E02
	51	2.8640E02
	52	3.1114E02
	53	3.4381E02
	54	3.7497E02
	55	4.0620E02
	56	4.4226E02
	57	4.8373E02
	58	5.2426E02
	59	5.6972E02
	60	6.1587E02
	61	6.6326E02
	62	7.1405E02
	63	7.6885E02
	64	8.1567E02
	65	8.7031E02
	66	9.2022E02
	67	9.6975E02
	68	1.0106E01
	69	1.0482E01
	70	1.0781E01
	71	1.0986E01
	72	1.1074E01
	73	1.1107E01
	74	1.1000E01
	75	1.0821E01
	76	1.0520E01
	77	1.0165E01
	78	9.7066E02
	79	9.2885E02
	80	8.8013E02
	81	8.3380E02
	82	7.9040E02
	83	7.4502E02
	84	7.0844E02
	85	6.7147E02
	86	6.4265E02
	87	6.1339E02
	88	5.9219E02
	89	5.6733E02
	90	5.5259E02
	91	5.3683E02
	92	5.2268E02
	93	5.1014E02
	94	4.9605E02
	95	4.8513E02
	96	4.7423E02
	97	4.6126E02
	98	4.4571E02
	99	4.3227E02
	100	4.1626E02
	101	4.0184E02
	102	3.8019E02
	103	3.6326E02
	104	3.4430E02
	105	3.2385E02
	106	3.0602E02
	107	2.8515E02
	108	2.6998E02
	109	2.5075E02
	110	2.3667E02
	111	2.2059E02
	112	2.0911E02
	113	1.9563E02
	114	1.8319E02
	115	1.7382E02
	116	1.6547E02
	117	1.5764E02
	118	1.5336E02
	119	1.4908E02
	120	1.4329E02
	121	1.4004E02
	122	1.3729E02
	123	1.3303E02
	124	1.2979E02
	125	1.2605E02
	126	1.2231E02
	127	1.1708E02
	128	1.1136E02
	129	1.0764E02
	130	1.0044E02
	131	9.4239E03
	132	8.7055E03
	133	8.1377E03
	134	7.5710E03
	135	6.7564E03
	136	6.2413E03
	137	5.8758E03
	138	5.5604E03
	139	4.8988E03
	140	4.7825E03
	141	4.6172E03
	142	4.4520E03
	143	4.1886E03
	144	4.3205E03
	145	4.4031E03
	146	4.5845E03
	147	5.0130E03
	148	5.1451E03
	149	5.3759E03
	150	5.8538E03
	151	6.0846E03
	152	6.3156E03
	153	6.8919E03
	154	7.2709E03
	155	7.4526E03
	156	7.7330E03
	157	8.1613E03
	158	8.4910E03
	159	8.4751E03
	160	8.6076E03
	161	8.5430E03
	162	8.5770E03
	163	8.2170E03
	164	7.9070E03
	165	7.3517E03
	166	7.3376E03
	167	6.5871E03
	168	6.0832E03
	169	5.6781E03
	170	5.0289E03
	171	4.8207E03
	172	4.5641E03
	173	4.0149E03
	174	3.8570E03
	175	3.6018E03
	176	3.4933E03
	177	3.5312E03
	178	3.7639E03
	179	3.9482E03
	180	4.2296E03
	181	4.5113E03
	182	5.1339E03
	183	5.6103E03
	184	6.2816E03
	185	7.1969E03
	186	8.2588E03
	187	9.2721E03
	188	1.0286E02
	189	1.1594E02
	190	1.2658E02
	191	1.3967E02
	192	1.4542E02
	193	1.6785E02
	194	1.8048E02
	195	1.9410E02
	196	2.0675E02
	197	2.1941E02
	198	2.3108E02
	199	2.4277E02
	200	2.5298E02
	201	2.6319E02
	202	2.7192E02
	203	2.8264E02
	204	2.8692E02
	205	2.9665E02
	206	3.0341E02
	207	3.0621E02
	208	3.1248E02
	209	3.1776E02
	210	3.2105E02
	211	3.2236E02
	212	3.2170E02
	213	3.2054E02
	214	3.1790E02
	215	3.1773E02
	216	3.1214E02
	217	3.0408E02
	218	3.0146E02
	219	2.9146E02
	220	2.8148E02
	221	2.7397E02
	222	2.6451E02
	223	2.5214E02
	224	2.4028E02
	225	2.3137E02
	226	2.1469E02
	227	2.0340E02
	228	1.8922E02
	229	1.7652E02
	230	1.6434E02
	231	1.5219E02
	232	1.4006E02
	233	1.2700E02
	234	1.1781E02
	235	1.0529E02
	236	9.3746E03
	237	8.5097E03
	238	7.7899E03
	239	7.0236E03
	240	6.4017E03
	241	5.6858E03
	242	4.9712E03
	243	4.4477E03
	244	3.9727E03
	245	3.7353E03
	246	3.3090E03
	247	2.9778E03
	248	2.4584E03
	249	2.5538E03
	250	2.4131E03
	251	2.2257E03
	252	2.2272E03
	253	2.4174E03
	254	2.5606E03
	255	2.7040E03
	256	2.6116E03
	257	3.1321E03
	258	3.3696E03
	259	3.6544E03
	260	3.9863E03
	261	4.6481E03
	262	5.1213E03
	263	5.4061E03
	264	6.0677E03
	265	6.5882E03
	266	7.1086E03
	267	7.7235E03
	268	8.2912E03
	269	8.6702E03
	270	9.2850E03
	271	1.0089E02
	272	1.0704E02
	273	1.1508E02
	274	1.2312E02
	275	1.3259E02
	276	1.4300E02
	277	1.5200E02
	278	1.6100E02
	279	1.7665E02
	280	1.8661E02
	281	1.9752E02
	282	2.0939E02
	283	2.2080E02
	284	2.3173E02
	285	2.3933E02
	286	2.4741E02
	287	2.5597E02
	288	2.6119E02
	289	2.6737E02
	290	2.7164E02
	291	2.7591E02
	292	2.7683E02
	293	2.8014E02
	294	2.7964E02
	295	2.7819E02
	296	2.8245E02
	297	2.8529E02
	298	2.8241E02
	299	2.8429E02
	300	2.8428E02
	301	2.8426E02
	302	2.8282E02
	303	2.8233E02
	304	2.8089E02
	305	2.7566E02
	306	2.7423E02
	307	2.6760E02
	308	2.6192E02
	309	2.5625E02
	310	2.4209E02
	311	2.3221E02
	312	2.2047E02
	313	2.0829E02
	314	1.9660E02
	315	1.8214E02
	316	1.6958E02
	317	1.5565E02
	318	1.4595E02
	319	1.3208E02
	320	1.2104E02
	321	1.1186E02
	322	1.0225E02
	323	9.2654E03
	324	8.5843E03
	325	7.9507E03
	326	7.4101E03
	327	6.8707E03
	328	6.5614E03
	329	5.9778E03
	330	5.5782E03
	331	5.4539E03
	332	4.9642E03
	333	4.7037E03
	334	4.2155E03
	335	3.7284E03
	336	3.5152E03
	337	3.2569E03
	338	2.9082E03
	339	2.6056E03
	340	2.2580E03
	341	2.0472E03
	342	1.6557E03
	343	1.4458E03
	344	1.0555E03
	345	7.1111E04
	346	2.3178E04
	347	2.4666E04
	348	4.5380E04
	349	7.5054E04
	350	1.1816E03
	351	1.4771E03
	352	1.7272E03
	353	1.9319E03
	354	2.2259E03
	355	2.7434E03
	356	2.9465E03
	357	2.9703E03
	358	3.3068E03
	359	3.4194E03
	360	3.7995E03
	361	3.9114E03
	362	4.0676E03
	363	4.1786E03
	364	4.3786E03
	365	4.5337E03
	366	4.7327E03
	367	4.8870E03
	368	4.8633E03
	369	4.7064E03
	370	4.9487E03
	371	4.8358E03
	372	4.7228E03
	373	4.8755E03
	374	4.6737E03
	375	4.4275E03
	376	4.3142E03
	377	4.2008E03
	378	3.8218E03
	379	3.9295E03
	380	3.8157E03
	381	3.2599E03
	382	3.2787E03
	383	3.0766E03
	384	3.0951E03
	385	2.8927E03
	386	2.9111E03
	387	2.7969E03
	388	2.6824E03
	389	2.7445E03
	390	2.8061E03
	391	3.0436E03
	392	3.1927E03
	393	3.4294E03
	394	3.7094E03
	395	3.8133E03
	396	3.9609E03
	397	4.2833E03
	398	4.6491E03
	399	4.3576E03
	400	4.9411E03
	401	5.0430E03
	402	5.1444E03
	403	5.2020E03
	404	5.3029E03
	405	5.2291E03
	406	5.3297E03
	407	5.2991E03
	408	5.1814E03
	409	5.0200E03
	410	4.8151E03
	411	4.6102E03
	412	4.2747E03
	413	3.9392E03
	414	3.6471E03
	415	3.3116E03
	416	2.9761E03
	417	2.6842E03
	418	2.3052E03
	419	2.0131E03
	420	1.7644E03
	421	1.3420E03
	422	1.2673E03
	423	1.1490E03
	424	7.2659E04
	425	5.6484E04
	426	5.3322E04
	427	1.9761E04
	428	4.6950E04
	429	9.0495E05
	430	2.3188E04
	431	6.0483E05
	432	6.2668E06
	433	8.2109E05
	434	2.0133E04

[0080]

TABLE 4
Recorded absorbance values for CO and H2O monitoring referenced
to spectrum in FIG. 11. Dispersion value for each channel is
2.58 103 cm1.
	Channel	Absorbance
	0	9.6969E04
	1	6.7374E05
	2	3.2638E05
	3	1.8694E05
	4	1.0781E05
	5	2.4667E05
	6	2.8203E05
	7	6.7917E05
	8	8.6887E05
	9	9.5499E05
	10	1.6094E05
	11	6.7056E05
	12	4.7727E05
	13	2.0327E04
	14	5.1860E06
	15	5.7742E05
	16	1.2466E04
	17	2.1998E05
	18	8.7111E05
	19	3.4418E05
	20	2.3741E04
	21	1.5846E04
	22	1.9432E04
	23	2.1447E04
	24	4.1209E04
	25	2.3902E04
	26	3.6856E04
	27	4.8247E04
	28	5.1803E04
	29	5.1700E04
	30	6.0466E04
	31	7.3411E04
	32	6.8064E04
	33	7.2639E04
	34	9.6024E04
	35	8.7520E04
	36	9.4171E04
	37	1.1442E03
	38	1.1530E03
	39	1.1671E03
	40	1.4010E03
	41	1.4254E03
	42	1.4603E03
	43	1.7048E03
	44	1.7501E03
	45	1.7847E03
	46	2.0716E03
	47	2.0957E03
	48	2.2091E03
	49	2.4227E03
	50	2.4782E03
	51	2.6550E03
	52	2.8372E03
	53	2.8820E03
	54	3.1120E03
	55	3.2573E03
	56	3.2914E03
	57	3.5232E03
	58	3.6619E03
	59	3.7170E03
	60	3.9743E03
	61	3.9389E03
	62	4.1165E03
	63	4.2994E03
	64	4.2744E03
	65	4.4307E03
	66	4.4429E03
	67	4.4710E03
	68	4.6593E03
	69	4.5165E03
	70	4.5979E03
	71	4.5885E03
	72	4.4778E03
	73	4.5909E03
	74	4.4004E03
	75	4.3432E03
	76	4.3284E03
	77	4.1650E03
	78	4.1927E03
	79	4.0402E03
	80	3.9302E03
	81	3.8997E03
	82	3.7372E03
	83	3.7488E03
	84	3.5656E03
	85	3.4773E03
	86	3.4363E03
	87	3.2119E03
	88	3.2549E03
	89	3.0518E03
	90	3.0006E03
	91	2.8973E03
	92	2.7108E03
	93	2.7483E03
	94	2.5569E03
	95	2.5787E03
	96	2.4604E03
	97	2.3266E03
	98	2.3277E03
	99	2.1270E03
	100	2.2003E03
	101	2.0877E03
	102	2.0371E03
	103	2.0225E03
	104	1.8587E03
	105	1.8699E03
	106	1.7218E03
	107	1.7022E03
	108	1.6517E03
	109	1.5604E03
	110	1.5919E03
	111	1.4444E03
	112	1.4503E03
	113	1.3081E03
	114	1.3038E03
	115	1.2383E03
	116	1.1932E03
	117	1.2651E03
	118	1.1335E03
	119	1.1697E03
	120	1.0586E03
	121	1.0338E03
	122	1.0090E03
	123	9.2849E04
	124	1.0100E03
	125	8.7384E04
	126	9.3501E04
	127	8.3431E04
	128	8.0946E04
	129	7.6442E04
	130	6.8914E04
	131	7.3987E04
	132	6.2936E04
	133	7.1021E04
	134	6.0477E04
	135	6.2007E04
	136	5.9009E04
	137	5.0991E04
	138	5.4518E04
	139	4.0489E04
	140	5.0020E04
	141	3.8504E04
	142	4.6517E04
	143	4.4510E04
	144	3.9003E04
	145	4.1493E04
	146	2.9991E04
	147	3.6469E04
	148	2.5474E04
	149	3.4434E04
	150	3.2911E04
	151	3.7369E04
	152	3.9331E04
	153	3.2813E04
	154	4.0744E04
	155	2.8251E04
	156	4.0150E04
	157	3.1139E04
	158	3.6555E04
	159	3.5500E04
	160	3.4443E04
	161	4.0838E04
	162	3.1821E04
	163	4.3170E04
	164	3.1669E04
	165	3.7543E04
	166	3.2992E04
	167	3.2902E04
	168	3.8756E04
	169	3.5685E04
	170	4.1528E04
	171	3.5972E04
	172	4.4777E04
	173	3.8719E04
	174	4.7017E04
	175	4.4416E04
	176	4.5279E04
	177	5.2075E04
	178	4.8474E04
	179	6.1198E04
	180	5.5112E04
	181	6.8817E04
	182	6.6182E04
	183	7.0473E04
	184	7.5256E04
	185	7.4091E04
	186	8.4308E04
	187	8.1650E04
	188	9.7306E04
	189	9.1663E04
	190	1.0434E03
	191	1.0562E03
	192	1.0194E03
	193	1.1807E03
	194	1.1389E03
	195	1.2456E03
	196	1.1789E03
	197	1.3004E03
	198	1.2385E03
	199	1.3252E03
	200	1.3326E03
	201	1.3548E03
	202	1.4414E03
	203	1.3347E03
	204	1.4558E03
	205	1.3837E03
	206	1.4354E03
	207	1.3980E03
	208	1.4643E03
	209	1.4416E03
	210	1.4239E03
	211	1.4654E03
	212	1.4130E03
	213	1.4889E03
	214	1.3673E03
	215	1.4283E03
	216	1.3414E03
	217	1.3431E03
	218	1.3251E03
	219	1.2431E03
	220	1.2989E03
	221	1.1629E03
	222	1.2382E03
	223	1.1169E03
	224	1.1577E03
	225	1.0906E03
	226	1.0675E03
	227	1.0788E03
	228	9.6759E04
	229	9.8362E04
	230	8.5308E04
	231	9.1786E04
	232	8.2154E04
	233	8.2767E04
	234	7.9477E04
	235	7.5699E04
	236	7.8249E04
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