Bush insert, bush assembly including the same and upper electrode assembling structure including the same

[0001] This U.S. non-provisional patent application claims priority under 35 U.S.C. § 119 of Korean Patent Application Nos. 10-2023-0017762, filed on Feb. 10, 2023, and 10-2023-0092024, filed on Jul. 14, 2023, the entire contents of which are hereby incorporated by reference.

[0002] The present disclosure herein relates to a bush insert, a bush assembly including the same, and an upper electrode assembling structure including the same, and more particularly, to a bush insert that is capable of being easily assembled, a bush assembly including the same, and an upper electrode assembling structure including the same.

[0003] Semiconductor devices may be manufactured through various processes. For example, semiconductor devices may be manufactured by performing a photo process, an etching process, a deposition process, and the like on a wafer such as silicon. A material that is in a plasma state may be used in each process of manufacturing a semiconductor element. In the process using plasma, an electrode for generating and controlling the plasma may be used within a semiconductor manufacturing equipment. The electrode for the plasma may be disposed at each of upper and lower portions of a chamber. The electrode for the plasma may be provided by coupling a plurality of components.

[0004] The present disclosure provides a bush insert capable of preventing rotation, a bush assembly including the same, and an upper electrode assembling structure including the same.

[0005] The present disclosure also provides a bush insert capable of being easily assembled, a bush assembly including the same, and an upper electrode assembling structure including the same.

[0006] The object of the present invention is not limited to the aforesaid, but other objects not described herein will be clearly understood by those skilled in the art from descriptions below.

[0007] An embodiment of the inventive concept provides a bush insert coupled to a plasma electrode plate, wherein the bush insert is configured to provide an insert inner hole that passes through the bush insert in a first direction, an inner surface of the bush insert that defines the insert inner hole is configured to provide a female screw structure, and an outer surface of the bush insert has a non-circular shape in a plan view.

[0008] In an embodiment of the inventive concept, an upper electrode assembling structure includes: a first electrode plate; and a bush assembly coupled to the first electrode plate, wherein the first electrode plate is configured to provide a first insertion hole that is recessed to a predetermined depth downward from a top surface of the first electrode plate, and the bush assembly includes: a bush; and a bush insert coupled to the bush so as to surround the bush, wherein each of the first insertion hole and the bush insert has a rounded square shape in a plan view, and the push insert is inserted into the first insertion hole.

[0009] In an embodiment of the inventive concept, a bush assembly includes: a bush insert; and a bush inserted into the bush insert, wherein the bush is configured to provide an internal through-hole that passes through the bush in a first direction, a male screw structure is provided on an outer surface of the bush, the bush insert is configured to provide an insert inner hole that passes through the bush insert in the first direction, an inner surface of the bush insert that defines the insert inner hole is configured to a female screw structure engaged with the male screw structure, an outer surface of the bush insert has a non-circular shape in a plan view, and an outer surface of the bush has a circular shape in the plan view.

[0010] Particularities of other embodiments are included in the detailed description and drawings.

[0024] Advantages and features of the present invention, and implementation methods thereof will be clarified through following embodiments described with reference to the accompanying drawings. The present invention may, however, be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the present invention to those skilled in the art. Further, the present invention is only defined by scopes of claims. Like reference numerals refer to like elements throughout.

[0025] In the following description, the technical terms are used only for explaining a specific embodiment while not limiting the present invention. In this specification, the terms of a singular form may comprise plural forms unless specifically mentioned. The meaning of ‘comprises’ and/or ‘comprising’ specifies a component, a step, an operation and/or an element does not exclude other components, steps, operations and/or elements. Hereinafter, embodiments according to the inventive concept will be described in detail.

[0026] FIG. 1 is a perspective view of an upper electrode assembling structure according to embodiments of the inventive concept, and FIG. 2 is a partial exploded perspective view of the upper electrode assembling structure according to embodiments of the inventive concept.

[0027] Hereinafter, a direction D1 in FIG. 1 will be referred to as a first direction, a direction D2 intersecting the first direction D1 will be referred to as a second direction, and a direction D3 intersecting the first direction D1 and the second direction D2 will be referred to as a third direction. Each of the second direction D2 and the third direction D3 may be referred to as a horizontal direction. The first direction D1 may be referred to as a vertical direction. In addition, the first direction D1 may be referred to as an upward direction, and a direction opposite to the first direction D1 may be referred to as a downward direction.

[0028] Referring to FIGS. 1 and 2, an upper electrode assembling structure U may be provided. The upper electrode assembling structure U may be installed in a chamber for a process using plasma. For example, the upper electrode assembling structure U may be installed in a chamber for etching a semiconductor. More specifically, the upper electrode assembling structure U may be an electrode installed at a position spaced upward from a lower electrode (not shown) within the etching chamber. The upper electrode assembling structure U may include a first electrode plate U1, a second electrode plate U2, a bush assembly A, and a coupling member M.

[0029] The first electrode plate U1 may have a disk shape. The first electrode plate U1 may include a material such as silicon (Si), but is not limited thereto. The first electrode plate U1 may provide a first insertion hole U1h and a microhole (not shown). The first insertion hole U1h may be a hole recessed to a certain depth downward from a top surface of the first electrode plate U1. The first insertion hole U1h may have a rounded square shape in the plan view. Details on this process will be described later. At least a portion of the bush assembly A and the coupling member M may be inserted into the first insertion hole U1h. A portion of the bush assembly A and the coupling member M may be inserted into the first insertion hole U1h, and thus, the first electrode plate U1 and the second electrode plate U2 may be coupled to each other. The first insertion hole U1h may be provided in plurality. The plurality of first insertion holes U1h may be spaced apart from each other in a circumferential direction. However, hereinafter, unless there are special circumstances, the first insertion hole U1h will be described in singular for convenience. A size of the microhole may be less than that of the first insertion hole U1h. A microhole may be a hole through which a process gas passes, but is not limited thereto. The microhole may be provided in plurality.

[0030] The second electrode plate U2 may be coupled to the first electrode plate U1. The second electrode plate U2 may have a disk shape. The second electrode plate U2 may include a material such as silicon (Si), but is not limited thereto. The second electrode plate U2 may provide a second insertion hole U2h and a microhole (not shown). The second insertion hole U2h may be a hole punched downward from a top surface of the second electrode plate U2. The second insertion hole U2h may be defined on the first insertion hole U1h. A portion of the coupling member M may be inserted into the second insertion hole U2h. A portion of the coupling member M may be inserted into the second insertion hole U2h, and thus, the first electrode plate U1 and the second electrode plate U2 may be coupled to each other. The second insertion hole U2h may be provided in plurality. The plurality of second insertion holes U2h may be spaced apart from each other in a circumferential direction. However, hereinafter, unless there are special circumstances, the second insertion hole U2h will be described in singular for convenience. A diameter of the microhole may be less than that of the second insertion hole U2h. A microhole may be a hole through which a process gas passes, but is not limited thereto. The microhole may be provided in plurality.

[0031] The bush assembly A may be inserted into the first insertion hole U1h. The bush assembly A may mediate the first electrode plate U1 and the coupling member M. That is, the first electrode plate U1 and the coupling member M may be coupled to each other by the bush assembly A. The bush assembly A may be provided in plurality. For example, the bush assembly A may be provided as many as the first insertion holes U1h. However, hereinafter, unless there are special circumstances, the bush assembly A will be described in singular for convenience. Details with respect to the bush assembly A will be described later.

[0032] The coupling member M may extend vertically. The coupling member M may be inserted into the first insertion hole U1h and the second insertion hole U2h. The coupling member M may couple the first electrode plate U1 to the second electrode plate U2. The coupling member M may be coupled to the bush assembly A within the first insertion hole U1h. More specifically, the coupling member M may be inserted into the bush assembly A within the first insertion hole U1h. The coupling member M may include a metal. A male screw structure may be provided on an outer circumferential surface of the coupling member M. The coupling member M may be screw-coupled to the bush assembly A. That is, the coupling member M may be a bolt, but is not limited thereto. The coupling member M may be provided in plurality. For example, the coupling members M may be provided as many as the bush assemblies A. However, hereinafter, unless there are special circumstances, the coupling member M will be described in singular for convenience.

[0033] FIG. 3 is a cross-sectional view illustrating a portion of the upper electrode assembling structure according to embodiments of the inventive concept, FIG. 4 is a cross-sectional view illustrating a portion of the first electrode plate according to embodiments of the inventive concept, and FIG. 5 is a plan view illustrating a portion of the first electrode plate according to embodiments of the inventive concept.

[0034] Referring to FIGS. 3 to 5, the first insertion hole U1h may be defined by being recessed to a certain depth downward from a top surface U1u of the first electrode plate U1. A height of the first insertion hole U1h may be less than that of the first electrode plate U1. Thus, the first insertion hole U1h may not be connected to a bottom surface U1b of the first electrode plate U1. However, the embodiment of the inventive concept is not limited thereto. The first insertion hole U1h may have a non-circular shape in the plan view. For example, the first insertion hole U1h may have a rounded square shape in the plan view. That is, a circumference of the first insertion hole U1h in the plan view may be a rectangle with rounded corners. However, the embodiment of the inventive concept is not limited thereto. The bush assembly A may be inserted into the first insertion hole U1h. The bush assembly A may include a bush insert 3 and a bush 1. Details about these will be described later.

[0035] FIG. 6 is an exploded perspective view of the bush assembly according to embodiments of the inventive concept, FIG. 7 is a cross-sectional view of the bush insert according to embodiments of the inventive concept, FIG. 8 is a perspective view of the bush insert according to embodiments of the inventive concept, FIG. 9 is a plan view of the bush insert according to embodiments of the inventive concept, and FIG. 10 is a bottom view of the bush insert according to embodiments of the inventive concept.

[0036] Referring to FIGS. 6 to 8, the bush insert 3 may provide an insert inner hole 3h. The insert inner hole 3h may be defined by be recessed downward from a top surface 3u of the bush insert 3. For example, the insert inner hole 3h may pass through the bush insert 3 in the first direction D1. An inner surface 3i defining the insert inner hole 3h may include a first inner surface 3ib and a second inner surface 3ia. The portion defined by the first inner surface 3ib of the insert inner hole 3h may be referred to as a first inner hole 3hb. The first inner hole 3hb may be defined by being recessed downward from the top surface 3u of the bush insert 3. The first inner hole 3hb may have a circular shape in the plan view. A female screw structure (not shown) may be provided on the first inner surface 3ib. A portion defined by the second inner surface 3ia of the insert inner hole 3h may be referred to as a second inner hole 3ha. The second inner hole 3ha may extend upward from the first inner hole 3hb. The second inner hole 3ha may be connected to the top surface 3u of the bush insert 3. A width of the first inner hole 3hb may be less than or equal to that of the second inner hole 3ha, but is not limited thereto.

[0037] Referring to FIGS. 6 to 8 and 10, the bush insert 3 may further provide a shrinkage hole 3s. The shrinkage hole 3s may have a shape defined by cutting a portion of the insert inner hole 3h and extend in a horizontal direction so as to be connected to an outer surface 3e of the bush insert 3. A length L2 of the shrinkage hole 3s in the first direction D1 may be less than a length L1 of the bush insert 3 in the first direction D1. The shrinkage hole 3s may be connected to the bottom surface 3b of the bush insert 3. The shrinkage hole 3s may be provided in plurality. For example, four shrinkage holes 3s may be provided. The plurality of shrinkage holes 3s may be spaced apart from each other in a circumferential direction.

[0038] Referring to FIG. 9, the bush insert 3 may have a non-circular shape in the plan view. For example, the bush insert 3 may have a rounded square shape in the plan view. More specifically, a shape of the outer surface 3e of the bush insert 3 may be a square shape with rounded corners in the plan view. That is, the outer surface 3e of the bush insert 3 may include a first outer surface 3e1, a second outer surface 3e2, a third outer surface 3e3, a fourth outer surface 3e4, and a curved surface.

[0039] The first outer surface 3e1 may be parallel to a straight line extending in the first direction D1. The first outer surface 3e1 may be a plane. For example, the first outer surface 3e1 may be perpendicular to the second direction D2.

[0040] The second outer surface 3e2 may be parallel to a straight line extending in the first direction D1. The second outer surface 3e2 may be a plane. For example, the second outer surface 3e2 may be perpendicular to the second direction D2. The second outer surface 3e2 may be disposed on an opposite side of the first outer surface 3e1. More specifically, the second outer surface 3e2 may be disposed on an opposite side of the first outer surface 3e1 based on the insert inner hole 3h.

[0041] The third outer surface 3e3 may be parallel to a straight line extending in the first direction D1. The third outer surface 3e3 may be a plane. For example, the third outer surface 3e3 may be perpendicular to the third direction D3. The third outer surface 3e3 may be disposed between the first outer surface 3e1 and the second outer surface 3e2.

[0042] The fourth outer surface 3e4 may be parallel to a straight line extending in the first direction D1. The fourth outer surface 3e4 may be a plane. For example, the fourth outer surface 3e4 may be perpendicular to the third direction D3. The fourth outer surface 3e4 may be disposed on an opposite side of the third outer surface 3e3. More specifically, the fourth outer surface 3e4 may be disposed on an opposite side of the third outer surface 3e3 based on the insert inner hole 3h.

[0043] The curved surface may include a first curved surface 3ec. The first curved surface 3ec may connect the third outer surface 3e3 to the second outer surface 3e2. Three or more curved surfaces may be provided. That is, each of the four curved surfaces may connect two adjacent outer surfaces of the four outer surfaces to each other. However, it is not limited thereto, and the outer surface 3e of the bush insert 3 may have a hexagonal shape with rounded corners or an octagonal shape with rounded corners in the plan view.

[0044] FIG. 11 is a cross-sectional view of the bush according to embodiments of the inventive concept, and FIG. 12 is a plan view of the bush according to embodiments of the inventive concept.

[0045] Referring to FIGS. 10, 11, and 12, the bush 1 may provide an internal through-hole 1h. The internal through-hole 1h may be defined by being recessed to a certain depth downward from a top surface 1u of the bush 1. For example, the internal through-hole 1h may pass through the bush 1 in the first direction D1. An inner surface 1i of the bush 1 defining the internal through-hole 1h may provide a female screw structure. An outer surface 1e of the bush 1 may have a circular shape in the plan view. A male screw structure (not shown) may be provided on the outer surface 1e of the bush 1. The external screw structure provided on the outer surface 1e of the bush 1 may be engaged with the female screw structure provided on the first inner surface 3ib (see FIG. 7) of the bush insert 3 (see FIG. 7) that defines the insert inner hole 3h (see FIG. 7).

[0046] In the bush insert, the bush assembly including the same, and the upper electrode assembling structure including the same according to the embodiments of the inventive concept, each of the bush insert and the first insertion hole may have the non-circular shape in the plan view. Therefore, the bush insert may be prevented from rotating within the first insertion hole. Therefore, the bush insert may be easily and quickly coupled to the first electrode plate.

[0047] In the bush insert, the bush assembly including the same, and the upper assembling structure including the same according to the embodiments of the inventive concept, the rotation may be prevented.

[0048] In the bush insert, the bush assembly including the same, and the upper assembling structure including the same according to the embodiments of the inventive concept, the simple assembly may be realized.

[0049] The effects of the inventive concept invention are not limited to the aforementioned object, but other effects not described herein will be clearly understood by those skilled in the art from descriptions below.

[0050] Although the embodiment of the present invention is described with reference to the accompanying drawings, those with ordinary skill in the technical field of the present invention pertains will be understood that the present invention can be carried out in other specific forms without changing the technical idea or essential features. Thus, the above-disclosed embodiments are to be considered illustrative and not restrictive.