Electrostatic discharge protection circuit using GaN-based devices

[0001] The present invention relates generally to an electrostatic discharge (ESD) protection circuit, and more specifically, to an ESD protection circuit using GaN devices.

[0002] Most of semiconductor devices currently available in the world are silicon-based semiconductor using silicon as their basic materials and channel. However, in the application of high-voltage or high-power devices, silicon-based devices may suffer high power consumption since their on-state resistance is too large. Furthermore, in high-frequency operation, silicon-based device has relatively lower switch frequency, thus its performance is no match for wide band gap compound semiconductor material like gallium nitride (GaN) or silicon carbide (SiC). In comparison to conventional silicon-based material, wide band gap compound semiconductor material like GaN is provided with larger band gap and lower on-state resistance, thus it is more durable and applicable in high temperature, high voltage, high frequency and high current applications, and also has better energy conversion efficiency. Thus, GaN device is provided with all kinds of excellent properties required in semiconductor device, like good heat dissipation, small size, lower power consumption and high power, which is suitable for the application of power semiconductor devices. With the urgent demand in high-end industry like 5G communication and electric car, GaN material emerges to be a promising candidate of the third generation semiconductor materials in the future.

[0003] Nevertheless, GaN device is usually provided with smaller gate-to-source breakdown voltage (ex. less than 10V), and this makes the gate of GaN device susceptible to gate voltage overshoot and causes damage. Electrostatic discharge (ESD) is one type of voltage overshoot, resulting from sudden release of electrostatic charges, inducing high intense electric field and current in ICs, thereby damaging the GaN devices in the circuit, especially the power GaN device that bears the brunt of the ESD. Accordingly, those of skilled in the art needs to design and develop a kind of circuit and structure capable of protecting GaN devices, especially against the weakness of smaller gate-to-source breakdown voltage, in hope of providing better application of GaN devices.

[0004] In the light of the aforementioned weakness of GaN device susceptible to the damage of voltage overshoot, the present invention hereby provides a novel ESD protection circuit, with feature that components in the ESD protection circuit may all be GaN-based devices, including resistor, capacitor, diode or high electron mobility transistor (HEMT), so that those devices may be made on the same GaN substrate and integrated in the same process.

[0005] The objective of the present invention is to provide an ESD protection circuit using GaN devices, with structure including a power HEMT having a gate, a source and a drain, the source and the drain are coupled respectively to a first reference voltage and a second reference voltage. An ESD protection block includes a first sub-block and a second sub-block. The first sub-block includes a first trigger with one terminal coupled to the gate, a first 2DEG resistor with one terminal coupled to another terminal of the first trigger, a first LV-HEMT with a first gate, a first source and a first drain, with the first gate coupled to the another terminal of the first trigger and the terminal of the first 2DEG resistor and with the first source having one terminal coupled to the gate and the terminal of first trigger. A first lateral field effect rectifier with one terminal coupled to the first gate, the another terminal of the first trigger and the terminal of the first 2DEG resistor. The second sub-block includes a second trigger with one terminal coupled to the source and the first reference voltage, a second 2DEG resistor with one terminal coupled to another terminal of the second trigger, a second LV-HEMT having a second gate, a second source and a second drain, with the second gate coupled to the another terminal of the second trigger and the terminal of the second 2DEG resistor, with the second source coupled to the source and the first reference voltage. A second lateral field effect rectifier with one terminal coupled to the second gate, the another terminal of the second trigger and the terminal of the second 2DEG resistor, wherein the another terminal of the first 2DEG resistor, another terminal of the second 2DEG resistor, another terminal of the first lateral field effect rectifier, another terminal of the second lateral field effect rectifier, the first drain and the second drain are coupled with each other.

[0006] These and other objectives of the present invention will no doubt become obvious to those of ordinary skill in the art after reading the following detailed description of the preferred embodiment that is illustrated in the various figures and drawings.

[0018] Relative dimensions and proportions of parts of the drawings have been shown exaggerated or reduced in size, for the sake of clarity and convenience in the drawings. The same reference signs are generally used to refer to corresponding or similar features in modified and different embodiments.

[0019] Reference will now be made in detail to exemplary embodiments of the invention, which are illustrated in the accompanying drawings in order to understand and implement the present disclosure and to realize the technical effect. It can be understood that the following description has been made only by way of example, but not to limit the present disclosure. Various embodiments present disclosure and various features in the embodiments that are not conflicted with each other can be combined and rearranged in various ways. Without departing from the spirit and scope of the present disclosure, modifications, equivalents, or improvements to the present disclosure are understandable to those skilled in the art and are intended to be encompassed within the scope of the present disclosure.

[0020] It should be readily understood that the meaning of “on,” “above,” and “over” in the present disclosure should be interpreted in the broadest manner such that “on” not only means “directly on” something but also includes the meaning of “on” something with an intermediate feature or a layer therebetween, and that “above” or “over” not only means the meaning of “above” or “over” something but can also include the meaning it is “above” or “over” something with no intermediate feature or layer therebetween (i.e., directly on something). Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper,” and the like, may be used herein for ease of description to describe one element or feature relationship to another element(s) or feature(s) as illustrated in the figures.

[0021] As used herein, the term “substrate” refers to a material onto which subsequent material layers are added. The substrate itself can be patterned, and the materials added on top of the substrate can be patterned or remain unpatterned. The substrate in the specification is specified as GaN-based substrate, with semiconductor device manufactured thereon being specified generally as GaN-based device.

[0022] As used herein, the term “layer” refers to a material portion including a region with thickness. A layer can extend over the entirety of an underlying or overlying structure, or may have an extent less than the extent of an underlying or overlying structure. Further, a layer can be a region of a homogeneous or inhomogeneous continuous structure that has a thickness less than the thickness of the continuous structure. For example, a layer can be located between any pair of horizontal planes between, or at, a top surface and a bottom surface of the continuous structure. A layer can extend horizontally, vertically, and/or along a tapered surface. A substrate can be a layer, can include one or more layers therein, and/or can have one or more layer thereupon, thereabove, and/or therebelow. A layer can include multiple layers. For example, an interconnect layer can include one or more conductor and contact layers (in which contacts, interconnect lines, and/or through holes are formed) and one or more dielectric layers.

[0023] In general, terminology may be understood at least in part from usage in context. For example, the term “one or more” as used herein, depending at least in part upon context, may be used to describe any feature, structure, or characteristic in a singular sense or may be used to describe combinations of features, structures or characteristics in a plural sense. Similarly, terms, such as “a,” “an,” or “the,” again, may be understood to convey a singular usage or to convey a plural usage, depending at least in part upon context. Additionally, the term “based on” may be understood as not necessarily intended to convey an exclusive set of factors, but may allow for the presence of other factors not necessarily expressly described, again depending at least in part on the context.

[0024] It will be further understood that the terms “includes,” “including,” “comprises,” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.

[0025] The subject of present invention is to provide an electrostatic discharge (ESD) protection circuit based on GaN-based devices. In comparison to conventional Si-based MOSFET, GaN-based high electron mobility transistor (HEMT) has lower threshold voltage and smaller gate-to-source on-state resistance. In one aspect, these properties render the HEMT with lower necessary gate driving force and higher current and switching frequency. In another aspect, lower gate breakdown voltage of HEMT may also induce the damage of gate terminal, since voltage surge of gate overshoot may easily exceed the breakdown voltage of the gate. Accordingly, in actual implementation, protective circuit for gate is usually adopted in industry to protect GaN-based HEMTs in order to avoid device damage caused by the generated voltage surge during device switching or electrostatic discharging. In the embodiment of present invention, the referred HEMT devices are all considered as enhancement mode E-HEMTs with normally-off property, unless otherwise stated.

[0026] First, please refer to FIG. 1, which is a schematic diagram of an ESD protection circuit using GaN-based devices in accordance with one embodiment of the present invention, illustrating various GaN-based devices that constitute the ESD protection circuit of the present invention. As shown in FIG. 1, the ESD protection circuit of present invention includes a power E-HEMT T, which may be used to amplify power in amplifying circuit, suitable in the field of radio frequency, microwave or mmWave, etc. Since the power E-HEMT T is GaN-based transistor, its gate terminal is susceptible to the damage due to the surge of voltage overshoot. As shown in FIG. 1, the power E-HEMT T includes a gate G, a source S and a drain D, wherein the source S and drain D are coupled respectively to a first reference voltage V_R1 (ex. ground voltage V_SS) and a second reference voltage V_R2 (ex. operating voltage V_DD). In order to protect the gate G of power E-HEMT T, an ESD protection block B is designed in the circuit, coupling between the gate G and source S of the power E-HEMT T to provide ESD protective function. In normal operating voltage condition, ESD protection block B is inactive and the power E-HEMT T operates in normal mode. However, voltage overshoot may be generated during device switching or ESD, the ESD protection block B is designedly active at this time to protect power E-HEMT T from the impact of voltage surge and avoid gate damage. In the embodiment, the gate G of power E-HEMT T may be coupled directly to an I/O terminal of a IC chip through the ESD protection block B, and a resistor R (ex. a two-dimensional electron gas (2DEG) resistor, referred hereinafter as a main resistor) may be set designedly between the ESD protection block B and the gate G to further lower the voltage applied on the gate G. One or more other circuit may be further set between the ESD protection block B and I/O terminal, but not limited thereto.

[0027] Refer still to FIG. 1. The ESD protection block B is composed of a lateral field effect rectifier FER, a first 2DEG resistor R₁ and a first low-voltage HEMT (LV-HEMT) T₁. In the embodiment, the lateral field effect rectifier FER functions as one of triggers in the ESD protection circuit, which may include at least one FER devices in serial connection, and the whole lateral field effect rectifier FER has a predetermined trigger voltage. One terminal of the lateral field effect rectifier FER is coupled to the gate G of power E-HEMT T (may pass through main resistor R) and the I/O terminal and with another terminal coupled to one terminal of the first 2DEG resistor R₁ and a first gate G₁ of the first LV-HEMT T₁. The first 2DEG resistor R₁ functions as a voltage divider, with one terminal coupled to another terminal of the lateral field effect rectifier FER and the first gate G₁ of first LV-HEMT T₁ and with another terminal coupled to the first reference voltage V_R1 and the source S of power E-HEMT T. The first LV-HEMT T₁ is designedly as a switching device in discharging path, with a specific threshold voltage. The first LV-HEMT T₁ further includes a first gate G₁, a first source S₁ and a first drain D₁, wherein the first gate G₁ is coupled to another terminal of the lateral field effect rectifier FER and one terminal of the first 2DEG resistor R₁. The first source S₁ is coupled to the gate G of power E-HEMT T (may pass through main resistor R) and the I/O terminal. The first drain D₁ is coupled to the first reference voltage V_R1 and the source S of power E-HEMT T. In operation, when the voltage of first source S₁ or first drain D₁ is greater than the voltage of first gate G₁ and the voltage difference therebetween exceeds the threshold voltage of first LV-HEMT T₁, the first LV-HEMT T₁ is conducted.

[0028] Refer still to FIG. 1. In actual operation, when a positive voltage surge resulted from ESD enters the chip from I/O terminal, the voltage of one terminal of the lateral field effect rectifier FER will be asserted upward to an active level. When the terminal of lateral field effect rectifier FER is asserted upward to an extent exceeding another terminal and with a voltage difference therebetween exceeding the predetermined trigger voltage of the lateral field effect rectifier FER, the lateral field effect rectifier FER is conducted. The lateral field effect rectifier FER is then asserted upward continuously to further increase the voltage of the another terminal, until the voltage of the another terminal exceeds the threshold voltage of first LV-HEMT T₁, so that the first LV-HEMT T₁ is conducted, thereby forming a conduction path from the I/O terminal to the first reference voltage V_R1 through the first LV-HEMT T₁. In the embodiment of present invention, the first LV-HEMT T₁ is designedly robust, for example having larger area and able to withstand larger current, thus the conduction path is in fact a channel for releasing ESD surge. That is the mechanism of ESD protection in the present invention.

[0029] Please refer now to FIG. 2, which is a schematic diagram of an ESD protection circuit using GaN-based devices in accordance with another embodiment of the present invention. The circuit components in this embodiment is much the same as the embodiment of FIG. 1, with the difference only that an additional first lateral field effect rectifier FER₁ is designed in the ESD protection block B. As shown in the figure, one terminal of the first lateral field effect rectifier FER₁ in the ESD protection block B is coupled with the first gate G₁ of first LV-HEMT T₁, another terminal of the lateral field effect rectifier FER and one terminal of the first 2DEG resistor R₁, and with another terminal coupled to the first reference voltage V_R1 and the source S of power HEMT T. In this embodiment, the presence of first lateral field effect rectifier FER₁ can improve ESD protective function of the ESD protection block B. The first lateral field effect rectifier FER₁ is coupled with the gate of first LV-HEMT T₁ in serial connection, which has higher capacity for instantaneous current and reverse blocking property to withstand high voltage peak produced during ESD. In addition, when a negative voltage surge enters from the terminal of first reference voltage V_R1 and greater than the trigger voltage of first lateral field effect rectifier FER₁, the first lateral field effect rectifier FER₁ is conducted to protect the first LV-HEMT T₁ that is connected therewith.

[0030] The aforementioned embodiments of FIG. 1 and FIG. 2 are circuit designs specific for the protection of unidirectional ESD surge. Please refer now to FIG. 3, which is a schematic diagram of an ESD protection circuit using GaN-based devices in accordance with one embodiment of the present invention, wherein various GaN-based devices that constitutes the ESD protection circuit of present invention is illustrated in the figure, and the ESD protection block is divided into two sub-blocks respectively for forward voltage surge and reverse voltage surge.

[0031] As shown in FIG. 3, the power E-HEMT T in this embodiment includes a gate G, a source S and a drain D, wherein the source S and drain D are coupled respectively to a first reference voltage V_R1 (ex. ground voltage V_SS) and a second reference voltage V_R2 (ex. operating voltage V_DD). In order to protect the gate G of power E-HEMT T, an ESD protection block B is designed in the circuit, coupling between the gate G and source S of the power E-HEMT T to provide ESD protective function. In the embodiment, the gate G of power E-HEMT T may be coupled directly to the I/O terminal of a IC chip through the ESD protection block B, and a resistor R (ex. a 2DEG resistor) may be set designedly between the ESD protection block B and the gate G to further lower the voltage applied on the gate G. One or more other circuit may be further set between the ESD protection block B and the I/O terminal, but not limited thereto.

[0032] Refer still to FIG. 3. The ESD protection block B is divided into a first sub-block B₁ and a second sub-block B₂ with different trigger voltages respectively. In the embodiment of present invention, the first sub-block B₁ and second sub-block B₂ are both coupled between the gate G and source S of power E-HEMT T in serial connection, but in inverted configuration. More specifically, the first sub-block B₁ is composed of a third lateral field effect rectifier FER₃, a first 2DEG resistor R₁ and a first LV-HEMT T₁, wherein the third lateral field effect rectifier FER₃ functions as one of triggers in the ESD protection circuit, which may include at least one FER devices in serial connection, and the whole third lateral field effect rectifier FER₃ has a predetermined trigger voltage, with one terminal coupled to the gate G of power E-HEMT T (may pass through main resistor R) and the I/O terminal and with another terminal coupled to one terminal of the first 2DEG resistor R₁ and a first gate G₁ of the first LV-HEMT T₁. The first 2DEG resistor R₁ functions as a voltage divider, with one terminal coupled to another terminal of the third lateral field effect rectifier FER₃ and the first gate G₁ of first LV-HEMT T and with another terminal coupled to a second 2DEG resistor R₂ in the second sub-block B₂. The first LV-HEMT T₁ is designedly as one of switching device in discharging path, with a specific threshold voltage. The first LV-HEMT T₁ further includes a first gate G₁, a first source S₁ and a first drain D₁, wherein the first gate G₁ is coupled to another terminal of the third lateral field effect rectifier FER₃ and one terminal of the first 2DEG resistor R₁. The first source S₁ is coupled to the gate of power HEMT T (may pass through main resistor R) and the I/O terminal, while the first drain D₁ is coupled to the second drain D₂ of second LV-HEMT T₂ in the second sub-block B₂. In operation, when the voltage of first source S₁ or first drain D₁ is greater than the voltage of first gate G₁ and the voltage difference therebetween exceeds the threshold voltage of first LV-HEMT T₁, the first LV-HEMT T₁ is conducted.

[0033] Refer still to FIG. 3. The structure of second sub-block B₂ is much the same as the first sub-block B₁, but in inverted circuit configuration coupled with the first sub-block B₁ in serial connection. As shown in FIG. 4, the second sub-block B₂ is composed of a fourth lateral field effect rectifier FER₄, a second 2DEG resistor R₂ and a second LV-HEMT T₂, wherein the fourth lateral field effect rectifier FER₄ functions as another trigger in the ESD protection circuit, which may include at least one FER devices in serial connection, and the whole fourth lateral field effect rectifier FER₄ has a predetermined trigger voltage. One terminal of the fourth lateral field effect rectifier FER₄ is coupled to the first reference V_R1 and the source S of power HEMT T, and another terminal is coupled to one terminal of the second 2DEG resistor R₂ and the second gate G₂ of second LV-HEMT T₂. The second 2DEG resistor R₂ functions as a voltage divider, with one terminal coupled to another terminal of the fourth lateral field effect rectifier FER₄ and a second gate G₂ of the second LV-HEMT T and with another terminal coupled to another terminal of the first 2DEG resistor R₁ in the first sub-block B₁. The second LV-HEMT T₂ is designedly as one of switching device in discharging path and has a specific threshold voltage. The second LV-HEMT T₂ further includes a second gate G₂, a second source S₂ and a second drain D₂, wherein the second gate G₂ is coupled to one terminal of the second 2DEG resistor R₂ and another terminal of the fourth lateral field effect rectifier FER₄. The second source S₂ is coupled to the first reference voltage V_R1 and the source S of power HEMT T, while the second drain D₂ is coupled to the first drain D₁ of first LV-HEMT T₁ in the first sub-block B₁. In operation, when the voltage of second source S₂ or second drain D₂ is greater than the voltage of second gate G₂ and with a voltage difference therebetween exceeding the threshold voltage of second LV-HEMT T₂, the second LV-HEMT T₂ is conducted.

[0034] In actual operation, when a positive voltage surge resulted from ESD enters the chip from I/O terminal, the voltage of one terminal of the third lateral field effect rectifier FER₃ will be asserted upward to an active level. When the terminal of third lateral field effect rectifier FER₃ is asserted upward to an extent exceeding another terminal and with a voltage difference therebetween exceeding the predetermined trigger voltage of the third lateral field effect rectifier FER₃, the third lateral field effect rectifier FER₃ is conducted. The third lateral field effect rectifier FER₃ is then asserted upward continuously to further increase the voltage of another terminal, until the voltage difference of the another terminal of the fourth lateral field effect rectifier FER₄ and the first reference voltage V_R1 exceeds the threshold voltage of second LV-HEMT T₂, so that the second LV-HEMT T₂ is conducted, thereby forming a first conduction path from the I/O terminal to the first reference voltage V_R1 through the third lateral field effect rectifier FER₃, the first 2DEG resistor R₁, the second 2DEG resistor R₂ and the second LV-HEMT T₂. Thereafter, when the current flowing through the aforementioned first conduction path is greater enough to make the voltage difference between the two terminals of first 2DEG resistor R₁ exceeding the threshold voltage of first LV-HEMT T₁, the first LV-HEMT T₁ is conducted, thereby forming a second conduction path from the I/O terminal to the first reference voltage V_R1 through the first LV-HEMT T₁ and the second LV-HEMT T₂. In the embodiment of present invention, since the first LV-HEMT T₁ and second LV-HEMT T₂ are designedly robust, for example having larger area and able to withstand larger current, the second conduction path is in fact a channel for releasing ESD surge. That is the mechanism of ESD protection in the present invention.

[0035] Conversely, when a negative voltage surge enters the chip from the first reference voltage V_R1, the protection mechanism would be completely opposite to the aforementioned mechanism, with the fourth lateral field effect rectifier FER₄ asserted upward and conducted firstly, then the first LV-HEMT T₁ conducted, and the second LV-HEMT T₂ is active and conducted lastly, so as to establish a second conduction path for releasing ESD surge.

[0036] Please refer now to FIG. 4, which is a schematic diagram of an ESD protection circuit using GaN-based devices in accordance with another embodiment of the present invention. The circuit components in this embodiment is much the same as the embodiment of FIG. 3, with the difference only that additional first lateral field effect rectifier FER₁ and second lateral field effect rectifier FER₂ are designed respectively in the first sub-block B₁ and second sub-block B₂. As shown in the figure, one terminal of the first lateral field effect rectifier FER₁ in the first sub-block B₁ is coupled with one terminal of the second lateral field effect rectifier FER₂ in the second sub-block B₂ and with another terminal coupled to the gate of first LV-HEMT T₁, another terminal of the third lateral field effect rectifier FER₃ and one terminal of the first 2DEG resistor R₁. One terminal of the second lateral field effect rectifier FER₂ in the second sub-block B₂ is coupled with one terminal of the first lateral field effect rectifier FER₁ in the first sub-block B₁, and another terminal of the second lateral field effect rectifier FER₂ is coupled with the second gate G of second LV-HEMT T₂, another terminal of the fourth lateral field effect rectifier FER₄ and one terminal of the second 2DEG resistor R₂.

[0037] In this embodiment, the presence of first lateral field effect rectifier FER₁ and second lateral field effect rectifier FER₂ can improve ESD protective function of the ESD protection block B. Take the first sub-block B₁ as an example, the first lateral field effect rectifier FER₁ is coupled with the gate of first LV-HEMT T₁ in serial connection, which has higher capacity for instantaneous current and reverse blocking property to withstand high voltage peak produced during ESD. In addition, when a negative voltage surge enters from the terminal of first reference voltage V_R1 and greater than the trigger voltage of first lateral field effect rectifier FER₁, the first lateral field effect rectifier FER₁ is conducted to protect the first LV-HEMT T₁. The function of second lateral field effect rectifier FER₂ is the same as the aforementioned mechanism, but in inverted configuration. That is, when a positive voltage surge enters from the I/O terminal and exceeding the trigger voltage of second lateral field effect rectifier FER₂, the second lateral field effect rectifier FER₂ is conducted to protect the second LV-HEMT T₁.

[0038] Please refer now to FIG. 5, which is a schematic diagram of an ESD protection circuit using GaN-based devices in accordance with another embodiment of the present invention. The circuit components in this embodiment is much the same as the embodiment of FIG. 4, with the difference only that the two triggers in this embodiment are changed from lateral field effect rectifiers FER₃/FER₄ to capacitors C₁/C₂. The capacitors C₁/C₂ may achieve the same purpose as the lateral field effect rectifiers FER₃/FER₄ in the protection circuit of present invention, and its operating mechanism is the same as the aforementioned embodiments, thus redundant description will be herein omitted.

[0039] After the circuit structure of ESD protection circuit of the present invention is explained, following figures and embodiments will describe various GaN-based devices used in the circuit in cross-sectional view. One essential feature of the present invention lies that the components in the circuit may all be GaN-based devices, which may be made on the same GaN substrate and integrated in the same process.

[0040] Please refer first to FIG. 6, which is a schematic cross-section of a capacitor in accordance with one embodiment of the present invention, illustrating detailed structure of the first capacitor C₁ or second capacitor C₁ in FIG. 5. As shown in FIG. 6, the capacitors C₁/C₂ of present invention may be GaN-based capacitors, which set on a GaN substrate 100. Alternatively, the GaN substrate 100 may be a GaN epitaxial layer formed on conventional silicon substrate, with layer structure like buffer layers and superlattice layers formed therebetween, but not limited thereto. Following figures will use only one GaN substrate 100 as a representative. In the embodiment, an aluminum gallium nitride (AlGaN) layer 102 is formed on the GaN substrate 100, and a heterojunction having band gap discontinuity is formed between the AlGaN layer 102 and the GaN substrate 100, thus electrons generated from piezoelectric effect in the AlGaN layer 102 will be trapped into the GaN substrate 100, thereby forming a high mobile and conductive electron film adjacent to the interface of two layer structures, i.e. 2DEG, which may function as a channel for transistor devices. Furthermore, since enhancement mode GaN device with normally-off property is preferred in the present invention, a patterned p-type GaN layer 104 (p-GaN, for example using GaN doped with elements like C, Fe, Mg or Zn) is further formed on the AlGaN layer 102 to deplete the 2DEG right thereunder to form non-conductive depletion region.

[0041] Refer still to FIG. 6. In addition to the conductive region and non-conductive region formed by the GaN material, the first capacitor C₁ or second capacitor C₂ further include an anode C_A formed on the p-GaN layer 104 and a cathode C_C formed on the GaN substrate 100 and AlGaN layer 102 at one side of the p-GaN layer 104 to function as two electrodes of the capacitor. The material of anode C_A and cathode C_C may include refractory metal or conductive layer of relevant compound, like Ti, TiN, TiW and W, or may include Ni, Au, Cu or the alloy thereof. In the embodiment of present invention, the anode C_A and cathode C_C are conductive terminals at two ends of the GaN capacitor, while the non-conductive region therebetween is capacitive dielectric layer, ex. AlGaN layer 102 and p-GaN layer 104. When there is voltage applied between the two conductors insulated by the non-conductive region, electric field will be formed on the non-conductive region, so as to make positive charges concentrating on one conductor and negative charges concentrating on another conductor. For example, take the first capacitor C₁ as an example, when positive voltage surge enters the chip from I/O terminal, the cathode C_C is equivalent to the another terminal that is coupled with the I/O terminal, while anode C_A is equivalent to the terminal that is coupled with the first reference voltage V_R1. The second capacitor C₂ is in inverted configuration in the condition of negative voltage surge. In other embodiment, the positions of cathode C_C and anode C_A may be interchanged, but not limited thereto. The capacitance produced by this GaN-based capacitor is preferably between 1 pF-50 pF.

[0042] Please refer now to FIG. 7, which is a schematic cross-section of a capacitor in accordance with another embodiment of the present invention. In addition to the aforementioned GaN-based capacitor, the first capacitor C₁ or second capacitor C₂ of present invention may also be common metal-insulator-metal (MIM) capacitor. As shown in FIG. 7, similarly, the first capacitor C₁ or second capacitor C₂ is manufactured on the GaN substrate 100. Different from the previous embodiment that AlGaN layer 102 is formed to generate 2DEG, instead, an ion implant isolation layer 106 is formed on the GaN substrate 100, for example by heavily doping the surface of GaN substrate 100 to form a non-conductive layer, in order to avoid electrical coupling between the GaN substrate and the conductive layer formed thereon. A passivation layer 108 is formed on the ion implant isolation layer 106, with material like one or more layer of SiO₂, SiN, SiON, USG (undoped silicate glass) or PSG (phosphosilicate glass). In the embodiment, an anode metal layer 110 and a cathode metal layer 112 may be formed respectively in or on the passivation layer 108 to function as two electrodes of the capacitor. The material of anode metal layer 110 and cathode metal layer 112 may include refractory metal or conductive layer of relevant compound, like Ti, TiN, TiW and W, or may include Ni, Au, Cu or the alloy thereof. The passivation layer 108, anode metal layer 110 and cathode metal layer 112 may be integrally formed in semiconductor BEOL (back-end-of-line) process. Similarly, in the embodiment of present invention, the anode metal layer 110 and cathode metal layer 112 are the conductors at two terminals of the MIM capacitor, while the passivation layer 108 therebetween is capacitive dielectric layer. When there is voltage applied between the anode metal layer 110 and the cathode metal layer 112, electric field will be formed in the passivation layer 108, so as to make positive charges concentrating on one conductor and negative charges concentrating on another conductor. For example, take the first capacitor C₁ as an example, when positive voltage surge enters the chip from I/O terminal, the cathode metal layer 112 is equivalent to the another terminal that is coupled with the I/O terminal, while the anode metal layer 110 is equivalent to the terminal that is coupled with the first reference voltage V_R1. The second capacitor C₂ is in inverted configuration in the condition of negative voltage surge. In other embodiment, the positions of anode metal layer 110 and cathode metal layer 112 may be interchanged, but not limited thereto. The capacitance produced by this MIM capacitor is preferably between 1 pF-50 pF.

[0043] Please refer now to FIG. 8, which is a schematic cross-section of a GaN-based resistor in accordance with one embodiment of the present invention, illustrating detailed structures of the main resistor R, first 2DEG resistor R₁ and/or second 2DEG resistor R₂ in the embodiments above. As shown in FIG. 8, likewise, the resistors R/R₁/R₂ of present invention are set on GaN substrate 100. An AlGaN layer 102 is formed on the GaN substrate 100, so as to form a 2DEG as conductive channel. Different from the previous embodiments, there is no pattern of p-GaN layer 104 formed on the AlGaN layer 102 to produce non-conductive depletion region. In other word, the entire 2DEG is the main body of resistor. A high-voltage terminal R_H and a low-voltage terminal R_L are formed on the AlGaN layer 102 and GaN substrate 100 respectively at two terminals of the resistor R/R₁/R₂. Take the second 2DEG resistor R₂ as an example, the high-voltage terminal R_H is the terminal coupled with the I/O terminal and the gate G of power HEMT T (may pass through the main resistor R), while the low-voltage terminal R_L is the another terminal coupled with the second capacitor C₂. The resistance produced by this GaN-based resistor is preferably between 500-100 kΩ.

[0044] Please refer now to FIG. 9, which is a schematic cross-section of a lateral field effect rectifier functioning as a trigger in accordance with one embodiment of the present invention, illustrating detailed structures of lateral field effect rectifiers FER and FER₁-FER₄ in FIG. 2. As shown in FIG. 9, likewise, the lateral field effect rectifiers FER, FER₁-FER₄ are set on the GaN substrate 100. An AlGaN layer 102 is formed on the GaN substrate 100 so as to form a 2DEG as conductive channel. A p-GaN layer 104 is further formed on the AlGaN layer 102 to deplete the 2DEG right thereunder in order to form non-conductive depletion region. Furthermore, the lateral field effect rectifiers FER, FER₁-FER₄ further includes a first anode D_A1 formed on the p-GaN layer 104, and a second anode D_A2 and a cathode D_C formed on the GaN substrate 100 and AlGaN layer 102 respectively at two sides of the p-GaN layer 104. Specifically, the first anode D_A1 and second anode D_A2 are coupled with each other to fulfill the rectifying function like forward conducting and reverse blocking of the diode device with properties like low on-state resistance and high reverse withstand. In the embodiment, the width of first anode D_A1 (in the direction perpendicular to page) is preferably between 50 μm-1000 μm. Likewise, the material of first anode D_A1, second anode D_A2 and cathode D_C may include refractory metal or conductive layer of relevant compound, like Ti, TiN, TiW and W, or may include Ni, Au, Cu or the alloy thereof. In the embodiment of present invention, take the third lateral field effect rectifier FER₃ as an example, when a positive voltage surge enters the chip from I/O terminal, cathode D_C is equivalent to the another terminal that is coupled with the I/O terminal, while the first anode D_A1 and second anode D_A2 are equivalent to the terminal that is coupled with the first reference voltage V_R1. The fourth lateral field effect rectifier FER₄ is in inverted configuration in the condition of negative voltage surge.

[0045] Please refer now to FIG. 100, which is a schematic cross-section of a LV-HEMT in accordance with one embodiment of the present invention, illustrating detailed structures of first LV-HEMT T₁/second LV-HEMT T₂ in FIG. 1. As shown in FIG. 10, likewise, the first LV-HEMT T₁/second LV-HEMT T₂ in the present invention are set on GaN substrate 100. An AlGaN layer 102 is formed on the GaN substrate 100 so as to form a 2DEG as conductive channel. A pattern of p-GaN layer 104 is further formed on the AlGaN layer 102 to deplete the 2DEG right thereunder in order to form non-conductive depletion region as the channel of transistor. Furthermore, the LV-HEMT T₁/T₂ further includes a gate G₁/G₂ formed on the p-GaN layer 104, and a source S₁/S₂ and a drain D₁/D₂ formed on the GaN substrate 100 and AlGaN layer 102 respectively at two sides of the p-GaN layer 104. In the embodiment, the width of gate G₁/G₂ (in the direction perpendicular to page) is preferably greater than 1000 μm. In addition, the gate-to-drain length L_GD of HEMT may have different dimension correspondingly for different operating voltages. For example, with respect to high-voltage (HV) device, the length L_GD is preferably between 15 μm-20 μm. With respect to moderate voltage device, the length L_GD is preferably between 1.8 μm-5 μm. With respect to low-voltage (LV) device, the length L_GD is preferably between 1 μm-1.8 μm. Likewise, the material of gate G₁/G₂, source S₁/S₂ and drain D₁/D₂ may include refractory metal or conductive layer of relevant compound, like Ti, TiN, TiW and W, or may include Ni, Au, Cu or the alloy thereof. In the embodiment of present invention, take the second LV-HEMT T₂ as an example, when a positive voltage surge enters the chip from I/O terminal, the second gate G₂ is asserted upward to an active level and conducted, then when the first LV-HEMT T₁ coupling with the second drain D₂ is also turned on, the second conduction path from the I/O terminal to first reference voltage V_R1 through the first LV-HEMT T₁ and second LV-HEMT T₂ is therefore established to release ESD surge.

[0046] According to the aforementioned embodiments, it may be understood that one major feature of the present invention is that all components in the ESD protection circuit may be GaN-based devices and/or may be compatible with the process of GaN-based devices, including resistors, capacitors, lateral field effect rectifiers or HEMTs. These devices may be manufactured on the same GaN substrate and integrally formed in the same process. For example, the main resistor R and first/second 2DEG resistors R₁/R₂, the first/second triggers FER₁-FER₄ or C₁/C₂ or, and the power HEMT T and first/second LV-HEMTs T₁/T₂ may share the same GaN substrate 100 and the same AlGaN layer 102. Furthermore, the first/second triggers FER₁-FER₄ or C₁/C₂, and the power HEMT T and first/second LV-HEMTs T₁/T₂ may further share the same p-GaN layer 104. This scheme is beneficial for the circuit design and process integration of power HEMT device, reducing necessary cost and steps, which is the advantage of the present invention.

[0047] Those skilled in the art will readily observe that numerous modifications and alterations of the device and method may be made while retaining the teachings of the invention. Accordingly, the above disclosure should be construed as limited only by the metes and bounds of the appended claims.