Imaging optical unit and projection exposure apparatus including same

[0001] The present application is a continuation of, and claims benefit under 35 U.S.C. 120 to, international application PCT/EP2016/061516, filed May 23, 2016, which claims benefit under 35 U.S.C. 119 of German Application Nos. 10 2015 209 827.3, filed May 28, 2015 and 10 2015 221 985.2, filed Nov. 9, 2015, the contents of which are incorporated herein by reference.

[0002] The disclosure relates to an imaging optical unit for imaging an object field into an image field. Furthermore, the disclosure relates to an optical system including such an imaging optical unit, a projection exposure apparatus including such an optical system, a method for producing a micro- or nanostructured component using such a projection exposure apparatus, and a micro- or nanostructured component produced by the method.

[0003] Projection optical units of the type set forth at the outset are known from DE 10 2015 209 827 A1, from DE 10 2012 212 753 A1, from US 2010/0149509 A1 and from U.S. Pat. No. 4,964,706.

[0004] The disclosure seeks to develop an imaging optical unit of the type mentioned in the introduction in such a way that an imaging optical unit that is well defined with regard to its pupil and is optimized for projection lithography results.

[0005] In one aspect, the disclosure provides an imaging optical unit for projection lithography. The imaging optical unit includes a plurality of mirrors for imaging an object field in an object plane into an image field in an image plane with imaging light guided along an imaging beam path between the object field and the image field. The plurality of mirrors includes a penultimate mirror in the beam path without a passage opening for passage of the imaging light. The imaging optical unit also includes a stop for predefining at least one section of an outer marginal contour of a pupil of the imaging optical unit. The stop is arranged spatially between the penultimate mirror in the beam path and a last mirror in the beam path.

[0006] In another aspect, the disclosure provides an imaging optical unit for projection lithography that includes a plurality of mirrors for imaging an object field in an object plane into an image field in an image plane with imaging light guided along an imaging beam path between the object field and the image field. The plurality of mirrors includes a penultimate mirror in the beam path without a passage opening for pas-sage of the imaging light. The imaging optical system includes a stop for predefining at least one section of an outer marginal contour of a pupil of the imaging optical unit. The stop is arranged spatially between the penultimate mirror in the beam path and a last mirror in the beam path. An entrance pupil of the imaging optical unit is arranged in the beam path of the imaging light upstream of the object field

[0007] It has been recognized according to the disclosure that a structural space between the penultimate mirror in the beam path and the last mirror in the beam path, despite the fact that a plurality of imaging light partial beams penetrate through there, is suitable for arranging a pupil-defining stop. This makes use of the circumstance that one of the imaging light partial beams penetrating through in the structural space between the penultimate and last mirrors is generally significantly larger than the other imaging light partial beams with regard to its diameter, such that a marginal delimitation at any rate of an outer marginal contour section of the pupil of the imaging optical unit is possible there. The imaging optical unit can have exactly one object field and can have exactly one image field. The imaging optical unit can have an entrance pupil arranged in the beam path of illumination and imaging light upstream of the object field. The imaging optical unit can correspondingly have a negative front focal length or a negative input pupil position. In the case of such imaging optical units, the arrangement of a stop spatially between the last two mirrors in the beam path has been found to be particularly suitable. It is then possible to realize a well corrected imaging optical unit having a high image-side numerical aperture. The stop can have a bent profile. The imaging optical unit can have at least one GI mirror, that is to say a grazing incidence mirror having an angle of incidence that is greater than 45°. The angle of incidence on the GI mirror can be greater than 50°, can be greater than 55°, can be greater than 60°, can be greater than 65°, can be greater than 70°, can be greater than 75° and can be greater than 80°. The effect of the stop as an aperture stop can be brought about by the shading of the beam path between the penultimate mirror in the beam path and the last mirror in the beam path in the imaging optical unit. The imaging optical unit can have exactly one stop for predefining at least one section of an outer marginal contour of a pupil of the imaging optical unit. Alternatively, provision can be made of a plurality of such stops for predefining sections of the outer marginal contour of the pupil of the imaging optical unit that supplement one another in particular complementarily. In addition to the stop predefining the outer marginal contour of the pupil, provision can be made of an obscuration stop for predefining an inner marginal contour of an obscuration of the pupil.

[0008] The last mirror in the beam path can have a passage opening for passage of the imaging light. In such an imaging optical unit, the stop arrangement according to the disclosure is likewise manifested particularly well. The stop can then additionally serve as an obscuration stop, that is to say predefine an obscuration of the pupil. An obscuration effect of the stop can be brought about by the shading of the imaging light in the imaging beam path between an antepenultimate mirror in the beam path and the penultimate mirror in the beam path.

[0009] The stop can cover the outer marginal contour of the pupil in an azimuth range around a center of the pupil that is greater than 180°. Such an azimuthal covering has the consequence that, if at all, only a small pupil azimuth range not predefined by the stop remains. The azimuth range predefined by the stop can be 200°, 220°, 240° or even greater. In the extreme case, the azimuth range is 360°. In this case, the stop delimits the pupil marginal contour fully circumferentially.

[0010] The imaging optical unit can have exactly one stop for predefining the complete outer marginal contour of the pupil of the imaging optical unit. This leads to a compact construction. The exactly one stop can be embodied in a plane fashion, that is to say in a manner lying in exactly one plane.

[0011] The stop can be embodied in a plane fashion at least in sections. Such a stop has little structural complexity. The stop can be embodied in a plane fashion in its entirety. An arrangement plane of the stop, which is predefined by the plane stop profile at least in sections, can be tilted relative to the object plane and/or relative to the image plane.

[0012] A marginal contour of the stop can have a three-dimensional profile. This allows a particularly precise pupil predefinition. The attention devoted to the stop in the design of the imaging optical unit then need not be all that great.

[0013] The stop can delimit the marginal contour of the pupil in more than one plane. Such a marginal contour delimitation increases the degrees of freedom in the stop design. The stop can have a bent and/or kinked profile and/or topography and thereby define for example two, three or even more delimitation planes.

[0014] A pupil azimuth range—possibly present—that is not predefined by the stop arranged spatially between the penultimate mirror in the beam path and the last mirror in the beam path can be corrected with the aid of further stops. Insofar as at least one further stop is provided, the latter can be arranged for example on the last mirror in the beam path or on the penultimate mirror in the beam path. It is also possible to arrange the at least one further stop at a different location, for example in the beam path upstream of the penultimate mirror, for example on another of the mirrors or in the region of other imaging light partial beams.

[0015] The features of the imaging optical unit in accordance with the two aspects can be combined with one another.

[0016] The advantages of an optical system including an imaging optical unit described above correspond to those which have already been explained above with reference to the imaging optical unit according to the disclosure.

[0017] The advantages of a projection exposure apparatus, of a production method and of a micro- or nanostructured component can correspond to those which have already been explained above with reference to the projection optical unit and the optical system and the projection exposure apparatus.

[0018] In particular, a semiconductor component, for example a memory chip, may be produced using the projection exposure apparatus.

[0033] A microlithographic projection exposure apparatus 1 has a light source 2 for illumination light or imaging light 3. The light source 2 is an EUV light source, which produces light in a wavelength range of e.g. between 5 nm and 30 nm, in particular between 5 nm and 15 nm. In particular, the light source 2 may be a light source with a wavelength of 13.5 nm or a light source with a wavelength of 6.9 nm. Other EUV wavelengths are also possible. In general, even arbitrary wavelengths are possible for the illumination light 3 guided in the projection exposure apparatus 1, for example visible wavelengths or else other wavelengths which may find use in microlithography (for example, DUV, deep ultraviolet) and for which suitable laser light sources and/or LED light sources are available (e.g. 365 nm, 248 nm, 193 nm, 157 nm, 129 nm, 109 nm). A beam path of the illumination light 3 is depicted very schematically in FIG. 1.

[0034] An illumination optical unit 6 serves to guide the illumination light 3 from the light source 2 to an object field 4 in an object plane 5. Using a projection optical unit or imaging optical unit 7, the object field 4 is imaged into an image field 8 in an image plane 9 with a predetermined reduction scale. The projection optical unit 7 has exactly one object field 4. The projection optical unit 7 has exactly one image field 8.

[0035] In order to facilitate the description of the projection exposure apparatus 1 and the various embodiments of the projection optical unit 7, a Cartesian xyz-coordinate system is indicated in the drawing, from which system the respective positional relationship of the components illustrated in the figures is evident. In FIG. 1, the x-direction runs perpendicular to the plane of the drawing into the latter. The y-direction runs toward the left, and the z-direction runs upward.

[0036] The object field 4 and the image field 8 are rectangular. Alternatively, it is also possible for the object field 4 and the image field 8 to have a bent or curved embodiment, that is to say, in particular, a partial ring shape. The object field 4 and the image field 8 have an x/y-aspect ratio of greater than 1. Therefore, the object field 4 has a longer object field dimension in the x-direction and a shorter object field dimension in the y-direction. These object field dimensions extend along the field coordinates x and y.

[0037] One of the exemplary embodiments depicted in FIG. 2 et seq. can be used for the projection optical unit 7. The projection optical unit 7 is anamorphic, i.e. it has a different reduction scale in the x-direction (reduction scale in the xz-plane) than in the y-direction (reduction scale in the yz-plane). The projection optical unit 7 has a reduction scale of 4 in the x-direction. The projection optical unit 7 has a reduction scale of 8 in the y-direction. Other reduction scales for the reduction in the x-direction and/or for the reduction in the y-direction are also possible, for example 4×, 5× or even reduction scales that are greater than 8×. An embodiment of the projection optical unit 7 with the same reduction scales as these in, firstly, the xz-plane and, secondly, in the yz-plane is also possible.

[0038] The image plane 9 is arranged parallel to the object plane 5 in the case of the projection optical unit 7. What is imaged in this case is a section of a reflection mask 10, also referred to as reticle, coinciding with the object field 4. The reticle 10 is carried by a reticle holder 10a. The reticle holder 10a is displaced by a reticle displacement drive 10b.

[0039] The imaging by way of the projection optical unit 7 is implemented on the surface of a substrate 11 in the form of a wafer, which is carried by a substrate holder 12. The substrate holder 12 is displaced by a wafer or substrate displacement drive 12a.

[0040] FIG. 1 schematically illustrates, between the reticle 10 and the projection optical unit 7, a ray beam 13 of the illumination light 3 that enters into the projection optical unit and, between the projection optical unit 7 and the substrate 11, a ray beam 14 of the illumination light 3 that emerges from the projection optical unit 7. An image field-side numerical aperture (NA) of the projection optical unit 7 is not reproduced to scale in FIG. 1.

[0041] The projection exposure apparatus 1 is of the scanner type. Both the reticle 10 and the substrate 11 are scanned in the y-direction during the operation of the projection exposure apparatus 1. A stepper type of the projection exposure apparatus 1, in which a stepwise displacement of the reticle 10 and of the substrate 11 in the y-direction is effected between individual exposures of the substrate 11, is also possible. These displacements are effected synchronously to one another by an appropriate actuation of the displacement drives 10b and 12a.

[0042] FIG. 2 shows the optical design of a first embodiment of the projection optical unit 7. FIG. 2 depicts the beam path of in each case three individual rays 15 emanating from a plurality of object field points which are spaced apart from one another in the y-direction in FIG. 2. What is depicted are chief rays 16, i.e. individual rays 15 which pass through the center of a pupil in a pupil plane of the projection optical unit 7, and in each case an upper coma ray and a lower coma ray of these two object field points. Proceeding from the object field 4, the chief ray 16 of a central object field point includes an angle CRAO of 5.5° with a normal of the object plane 5.

[0043] The projection optical unit 7 has an image-side numerical aperture of 0.55.

[0044] An entrance pupil EP is arranged in the beam path of the imaging light 3 upstream of the object field 4. Possible positions of the entrance pupil EP above the object plane 5 with the use of a reticle 10 that transmits the imaging light 3 and below the object plane 5 with the use of a reflective reticle 10 are indicated in each case in FIG. 2. This results in a divergent course of the chief rays 16 between the object field 4 and the mirror M1.

[0045] The projection optical unit 7 according to FIG. 2 has a total of ten mirrors, which are numbered consecutively by M1 to M10 in the order of the beam path of the individual rays 15, proceeding from the object field 4. The projection optical unit 7 is a purely catoptric optical unit. The imaging optical unit 7 can also have a different number of mirrors, for example four mirrors, six mirrors or eight mirrors. An odd number of mirrors is also possible in the projection optical unit 7.

[0046] FIG. 2 illustrates the calculated reflection surfaces of the mirrors M1 to M10. What can be identified in the illustration according to FIG. 2 is that only a portion of these calculated reflection surfaces is used. Only this actually used region of the reflection surfaces is actually present in the real mirrors M1 to M10. These used reflection surfaces are carried in a known manner by mirror bodies (not shown).

[0047] In the case of the projection optical unit 7 according to FIG. 2, the mirrors M1, M9 and M10 are embodied as normal incidence mirrors, that is to say as mirrors on which the imaging light 3 is incident with an angle of incidence that is less than 45°. Overall, the projection optical unit 7 according to FIG. 2 thus has three normal incidence mirrors M1, M9 and M10. Below, these mirrors are also referred to as NI mirrors.

[0048] The mirrors M2 to M8 are mirrors for grazing incidence of the illumination light 3, that is to say mirrors onto which the illumination light 3 impinges with angles of incidence that are greater than 45°. A typical angle of incidence of the individual rays 15 of the imaging light 3 on the mirrors M2 to M8 for grazing incidence lies in the region of 80°. Overall, the projection optical unit 7 according to FIG. 2 has exactly seven mirrors M2 to M8 for grazing incidence. Below, these mirrors are also referred to as GI mirrors.

[0049] The mirrors M2 to M8 reflect the imaging light 3 such that the angles of reflection of the individual rays 15 on the respective mirrors M2 to M8 add up.

[0050] The mirrors M1 to M10 carry a coating optimizing the reflectivity of the mirrors M1 to M10 for the imaging light 3. The coating can be, in particular for the GI mirrors, a ruthenium coating, a molybdenum coating or a molybdenum coating with a topmost layer of ruthenium. Other coating materials can also be used. A coating including for example a layer of molybdenum or ruthenium can be used in the case of the grazing incidence mirrors M2 to M8. The highly reflecting layers, in particular of the mirrors M1, M9 and M10 for normal incidence, can be configured as multi-ply layers, wherein successive layers can be manufactured from different materials. Alternating material layers can also be used. A typical multi-ply layer can have fifty bilayers, respectively made of a layer of molybdenum and a layer of silicon.

[0051] Information concerning reflection at a GI mirror (grazing incidence mirror) can be found in WO 2012/126867 A. Further information concerning the reflectivity of NI mirrors (normal incidence mirrors) can be found in DE 101 55 711 A.

[0052] An overall reflectivity or system transmission of the projection optical unit 7, emerging as a product of the reflectivities of all mirrors M1 to M10 of the projection optical unit 7, is approximately R=8.49%.

[0053] The mirror M10, that is to say the last mirror upstream of the image field 8 in the imaging beam path, has a passage opening 17 for the passage of the imaging light 3 which is reflected from the antepenultimate mirror M8 toward the penultimate mirror M9. The mirror M10 is used in a reflective manner around the passage opening 17. None of the other mirrors M1 to M9 have passage openings and the mirrors are used in a reflective manner in a continuous region without gaps.

[0054] The mirrors M1 to M10 are embodied as free-form surfaces which cannot be described by a rotationally symmetric function. Other embodiments of the projection optical unit 7, in which at least one of the mirrors M1 to M10 is embodied as a rotationally symmetric asphere, are also possible. It is also possible for all mirrors M1 to M10 to be embodied as such aspheres.

[0055] A free-form surface can be described by the following free-form surface equation (equation 1):

[0056] $\begin{array}{cc}Z=\frac{c_x{x}^2+c_y{y}^2}{1+\sqrt{1-\left(1+k_x\right){\left(c_{x}x\right)}^2-\left(1+k_y\right){\left(c_{y}y\right)}^2}}+C_{1}x+C_{2}y+C_3{x}^2+C_4\mathrm{xy}+C_5{y}^2+C_6{x}^3+C_9{y}^3+C_{10}{x}^4+\dots +C_{12}{x}^2{y}^2+{\mathrm{\dots C}}_{14}{y}^4+C_{15}{x}^5+\dots +C_{20}{y}^5+C_{21}{x}^6+\dots +C_{24}{x}^3{y}^3+\dots +C_{27}{y}^6+\dots & \left(1\right)\end{array}$

[0057] The following applies to the parameters of this equation (1):

[0058] Z is the sag of the free-form surface at the point x, y, where x²+y²=r². Here, r is the distance from the reference axis of the free-form equation
(x=0; y=0).

[0059] In the free-form surface equation (1), C₁, C₂, C₃ . . . denote the coefficients of the free-form surface series expansion in powers of x and y.

[0060] In the case of a conical base area, c_x, c_y is a constant corresponding to the vertex curvature of a corresponding asphere. Thus, c_x=1/R_x and c_y=1/R_y applies. Here, k_x and k_y each correspond to a conical constant of a corresponding asphere. Thus, equation (1) describes a biconical free-form surface.

[0061] An alternative possible free-form surface can be generated from a rotationally symmetric reference surface. Such free-form surfaces for reflection surfaces of the mirrors of projection optical units of microlithographic projection exposure apparatuses are known from US 2007 0 058 269 A1.

[0062] Alternatively, free-form surfaces can also be described with the aid of two-dimensional spline surfaces. Examples for this are Bezier curves or non-uniform rational basis splines (NURBS). By way of example, two-dimensional spline surfaces can be described by a grid of points in an xy-plane and associated z-values, or by these points and gradients associated therewith. Depending on the respective type of the spline surface, the complete surface is obtained by interpolation between the grid points using for example polynomials or functions which have specific properties in respect of the continuity and the differentiability thereof. Examples for this are analytical functions.

[0063] FIG. 5A shows marginal contours of the reflection surfaces impinged on in each case by the imaging light 3 on the mirrors M1 to M10 of the projection optical unit 7, that is to say the so-called footprints of the mirrors M1 to M10. These marginal contours are in each case depicted in an x/y-diagram, which corresponds to the local x- and y-coordinates of the respective mirror M1 to M10. The illustrations are to scale in millimeters. Moreover, the form of the passage opening 17 is depicted in the illustration relating to the mirror M10.

[0064] The two tables below summarize the parameters “Maximum angle of incidence”, “Extent of the reflection surface in the x-direction”, “Extent of the reflection surface in the y-direction” and “Maximum mirror diameter” for the mirrors M1 to M10.

[0065]

	M1	M2	M3	M4	M5
Maximum angle of	12.0	83.3	78.4	81.9	81.0
incidence [°]
Extent of the reflection	684.0	419.4	360.4	310.9	369.2
surface in the x-direction
[mm]
Extent of the reflection	278.6	353.5	256.2	289.9	340.8
surface in the y-direction
[mm]
Maximum mirror	684.3	437.3	364.4	359.4	398.8
diameter [mm]
	M6	M7	M8	M9	M10
Maximum angle of	81.7	80.8	78.8	21.2	8.1
incidence [°]
Extent of the reflection	387.2	372.1	322.2	350.8	924.0
surface in the x-direction
[mm]
Extent of the reflection	195.6	107.2	208.7	170.7	897.6
surface in the y-direction
[mm]
Maximum mirror	388.2	372.1	322.3	350.9	924.2
diameter [mm]

[0066] The mirror M10 that predefines the image-side numerical aperture has the largest maximum mirror diameter, with a diameter of 924.2 mm. None of the other mirrors M1 to M9 has a maximum diameter that is greater than 700 mm. Eight of the ten mirrors, namely the mirrors M2 to M9, have a maximum mirror diameter that is less than 450 mm. Seven of the ten mirrors, namely the mirrors M3 to M9, have a maximum mirror diameter that is less than 400 mm.

[0067] The optical design data of the reflection surfaces of the mirrors M1 to M10 of the projection optical unit 7 can be gathered from the following tables. These optical design data in each case proceed from the image plane 9, i.e. describe the respective projection optical unit in the reverse propagation direction of the imaging light 3 between the image plane 9 and the object plane 5.

[0068] The first of these tables provides an overview of the design data of the projection optical unit 7 and summarizes the numerical aperture NA, the calculated design wavelength for the imaging light, the dimensions of the image field in the x-direction and y-direction, image field curvature and stop locations. This curvature is defined as the inverse radius of curvature of the field.

[0069] The image field 8 has an x-extent of two-times 13 mm and a y-extent of 1 mm. The projection optical unit 7 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm.

[0070] The second of these tables indicates vertex point radii (Radius_x=R_x, Radius_y=R_y) and refractive power values (Power_x, Power_y) for the optical surfaces of the optical components. Negative radii values denote curves that are concave toward the incident illumination light 3 at the intersection of the respective surface with the considered plane (xz, yz) that is spanned by a surface normal at the vertex point with the respective direction of curvature (x, y). The two radii Radius_x, Radius_y may explicitly have different signs.

[0071] The vertex points at each optical surface are defined as points of incidence of a guide ray which travels from an object field center to the image field 8 along a plane of symmetry x=0, i.e. the plane of the drawing of FIG. 2 (meridional plane).

[0072] The refractive powers Power_x (P_x), Power_y (P_y) at the vertex points are defined as:

[0073] $P_x=-\frac{2\cos \mathrm{AOI}}{R_x}$ $P_y=-\frac{2}{R_y\cos \mathrm{AOI}}$

[0074] Here, AOI denotes an angle of incidence of the guide ray with respect to the surface normal.

[0075] The third table indicates for the mirrors M1 to M10 in mm the conic constants k_x and k_y, the vertex point radius R_x (=Radius_x) and the free-form surface coefficients C_n. Coefficients C_n that are not tabulated have the value 0 in each case.

[0076] The fourth table also indicates the magnitude along which the respective mirror, proceeding from a reference surface, was decentred (DCY) in the y-direction, and displaced (DCZ) and tilted (TLA, TLB, TLC) in the z-direction. This corresponds to a parallel shift and a tilting in the case of the freeform surface design method. Here, a displacement is carried out in the y-direction and in the z-direction in mm, and tilting is carried out about the x-axis, about the y-axis and about the z-axis. In this case, the angle of rotation is specified in degrees. Decentering is carried out first, followed by tilting. The reference surface during decentering is in each case the first surface of the specified optical design data. Decentring in the y-direction and in the z-direction in the object plane 5 is also specified for the object field 4. Besides the surfaces assigned to the individual mirrors, the image plane as first surface, the object plane as last surface and a plurality of stop surfaces (having the stop designation “AS”) are also tabulated in the fourth table.

[0077] A first stop AS2 is arranged in a plane E_AS2 in the imaging light beam path between the mirrors M4 and M5. A further stop AS (cf. FIG. 3) is arranged in the imaging light beam path between the mirrors M9 and M10 in a plane E_AS. Further steps AS3 and AS4 are arranged on the mirrors M9 and M10. Alternatively, the stops AS3 and AS4 can also be arranged adjacent to and at a distance from the mirrors.

[0078] The fifth table specifies the transmission data of the mirrors M10 to M1, namely the reflectivity thereof for the angle of incidence of an illumination light ray incident centrally on the respective mirror. The overall transmission is specified as a proportional factor remaining from an incident intensity after reflection at all mirrors in the projection optical unit.

[0079] The sixth table indicates a boundary of the stop AS4 (surface M10) as a polygon progression in local coordinates xyz. The stop is arranged at the location of the mirror M10. As described above, the stop is decentred and tilted. The respective stop type of the polygon progression indicated is also mentioned in the last column of table 6. “CLA” here denotes a stop boundary that is transparent inward, that is to say toward a stop center, and is blocking outward (type aperture stop). The stop type “OBS” indicates a stop boundary that is blocking inward, that is to say toward a stop center, and is transparent outward (type obscuration stop). An aperture stop boundary serves to define an outer delimitation of a pupil of the projection optical unit 7. An obscuration stop serves to define an obscured region situated in the interior of the pupil. The stops AS to AS4 serve jointly both for predefining the outer boundary of the system pupil and for predefining the inner boundary of the obscuration region of the system pupil. In the embodiment of the projection optical unit 7 according to FIGS. 2 to 5, all the stops AS, AS2, AS3 and AS4 are of the type aperture stop. The stop AS4 is additionally of the type obscuration stop. A different distribution of the types “aperture stop” and “obscuration stop” among the stops of the projection optical unit is also possible.

[0080] The seventh table correspondingly indicates the boundary of the stop AS3 (surface M9) as polygon progression data corresponding to table 6.

[0081] The eighth table correspondingly indicates the boundary of the stop AS2 in the imaging light beam path between the mirrors M4 and M5 as polygon progression data corresponding to table 6.

[0082] The ninth table correspondingly indicates the boundary of the stop AS in the imaging light beam path between the mirrors M9 and M10 as polygon progression data corresponding to table 6.

[0083] A boundary of a stop surface of the stops AS to AS4 (also cf. table 6 et seq. concerning FIG. 2) results from intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate at selected field points in the direction of the stop surface with a complete image-side telecentric aperture. To predetermine the edge of the stop surface of the stop AS, use is made of the intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate from the field centre point in the direction of the stop surface with a complete image-side telecentric aperture. In the case of the other stops AS2, AS3 and AS4, the intersection points result from the use of all rays of the illumination light 3 which, on the image side, propagate from all field points of the image field 8 in the direction of the stop surface with a complete image-side telecentric aperture. In principle, there may also be a different selection of the employed image-side field points when defining the stop. The “field centre point” and “overall field” selections, specified above, are the possible extreme situations in this case.

[0084] When the stop is embodied as an aperture stop, the boundary is an inner boundary. In the case of an embodiment as an obscuration stop, the boundary is an outer boundary.

[0085] The respective stop AS to AS4 can lie in a plane or else be embodied three-dimensionally. The extent of the stop 18 can be smaller in the scanning direction (y) than in the cross scanning direction (x).

[0086] The non-illuminated obscuration region in the system pupil can be round, elliptical, square or rectangular. Moreover, this surface in the system pupil which cannot be illuminated can be decentered in the x-direction and/or in the y-direction in relation to a center of the system pupil.

[0087]

TABLE 1
for FIG. 2
	Exemplary embodiment	FIG. 2
	NA	0.55
	Wavelength	13.5 nm
	Field dimension x	26.0 mm
	Field dimension y	1.0 mm
	Field curvature	−0.012345 1/mm
	Stops	AS, AS2, AS3 (on M9), AS4 (on M10)

[0088]

TABLE 2
for FIG. 2
	Radius_x	Power_x	Radius_y	Power_y	Operating
Surface	[mm]	[1/mm]	[mm]	[mm]	mode
M10	−924.4981198	0.0021492	−841.5674623	0.0023921	REFL
M9	1845.8313982	−0.0010835	356.4114777	−0.0056115	REFL
M8	−807.7853011	0.0006289	−16794.6817783	0.0004689	REFL
M7	−633.7019549	0.0007380	20332.8433550	−0.0004206	REFL
M6	−1159.7877847	0.0003528	−7078.0588424	0.0013813	REFL
M5	−7911.6202298	0.0000533	−2197.1749958	0.0043148	REFL
M4	6252.7176733	−0.0000660	−2753.7274849	0.0035212	REFL
M3	1718.6984546	−0.0002678	−10060.7554809	0.0008638	REFL
M2	1592.6268445	−0.0002500	2592.5626309	−0.0038746	REFL
M1	−2135.9876330	0.0009216	−1377.1202039	0.0014756	REFL

[0089]

TABLE 3a
for FIG. 2
Coeffi-
cient	M10	M9	M8
KY	0.00000000	0.00000000	0.00000000
KX	0.00000000	0.00000000	0.00000000
RX	−924.49811980	1845.83139800	−807.78530110
C7	5.32161644e−09	−7.17957299e−07	3.61958396e−07
C9	1.2051462e−08	1.48021766e−06	4.61852728e−08
C10	−4.28738318e−12	3.94779844e−10	1.36275822e−10
C12	−3.49709402e−11	2.67402017e−09	4.92199166e−11
C14	−9.81786584e−12	6.31481582e−09	−4.23949539e−10
C16	−3.40219667e−15	−2.74047503e−12	1.12548598e−12
C18	1.60335869e−14	2.04228406e−14	3.71761249e−13
C20	1.30399612e−14	3.2725238e−11	−2.05971586e−12
C21	−1.15274335e−17	2.35879877e−15	1.09054091e−15
C23	−6.9260806e−17	1.00239611e−14	1.70911423e−15
C25	−7.13524377e−17	5.05529889e−14	−3.62622238e−15
C27	−1.67322747e−17	1.78538542e−13	−7.36849912e−15
C29	−7.92528578e−21	−4.11347975e−18	−2.59696939e−18
C31	1.27834004e−20	−5.83032641e−17	1.25679501e−17
C33	3.27119661e−20	1.71591989e−16	−1.04543394e−17
C35	1.71377495e−20	1.22876874e−15	−3.91086555e−17
C36	−1.89551894e−23	−4.14843428e−22	5.26679107e−21
C38	−1.11996388e−22	1.06656248e−19	2.8502374e−20
C40	−1.96750203e−22	2.08419251e−19	6.3260457e−20
C42	−1.2392523e−22	8.95301505e−19	4.7233819e−21
C44	−2.47458966e−23	8.36809183e−18	−2.27707911e−19
C46	−9.77909864e−27	−1.02394711e−22	1.39450428e−23
C48	5.19824336e−27	−7.95041789e−23	1.68839235e−22
C50	5.59498452e−26	8.75666056e−22	2.79254271e−22
C52	6.43656264e−26	4.60087068e−21	−9.11661464e−23
C54	1.96031627e−26	4.50459082e−20	1.98458883e−22
C55	−1.9734083e−29	2.61667221e−26	−4.54521391e−26
C57	−1.39192995e−28	−1.48955085e−25	1.23387971e−24
C59	−3.49342237e−28	2.18616238e−24	4.57708029e−24
C61	−3.79015472e−28	8.50729665e−24	6.06052772e−24
C63	−1.77868817e−28	2.63725246e−23	−9.61661588e−26
C65	−2.61320106e−29	1.37431086e−22	9.18355997e−24
C67	−1.75320584e−32	1.91491617e−28	−2.00093096e−27
C69	−1.49695509e−32	−5.27938029e−27	2.16982668e−27
C71	6.84912486e−32	−5.29216183e−27	−7.30096104e−27
C73	1.54586906e−31	4.04146338e−26	−4.93769708e−27
C75	1.15783975e−31	2.37812676e−25	−4.16594376e−26
C77	4.14587364e−32	1.20314674e−24	−1.62235584e−25
C78	−5.34426777e−35	4.49836368e−31	6.13330316e−30
C80	−4.27488688e−34	1.29694668e−29	−1.62333428e−29
C82	−1.25436413e−33	3.24280489e−29	−1.68167617e−28
C84	−1.71502766e−33	3.00254831e−29	−4.89454528e−28
C86	−1.25734127e−33	7.46446045e−28	−6.5895393e−28
C88	−5.19929261e−34	5.84363659e−27	−1.5416679e−27
C90	−9.42013117e−35	2.61240017e−26	−3.38007496e−27
C92	1.00872668e−38	−4.95175891e−33	1.78435553e−32
C94	−1.45968234e−39	2.0913161e−33	1.10022934e−32
C96	2.49294655e−38	9.54156933e−32	1.00044858e−30
C98	1.25738947e−37	−7.47916509e−33	1.98972461e−30
C100	1.6844889e−37	7.35199153e−30	−3.47483305e−30
C102	7.66863005e−38	5.82871085e−29	−1.47027148e−29
C104	−1.4887687e−38	2.15570834e−28	−2.0886266e−29
C105	3.84331333e−41	−2.72151554e−36	−1.09100622e−34
C107	4.50330303e−40	−6.8970507e−35	3.91399908e−34
C109	1.60900752e−39	−2.41557224e−34	4.01031765e−33
C111	2.46751199e−39	1.07560857e−33	1.8289791e−32
C113	1.94052198e−39	8.96263507e−33	2.87152163e−32
C115	9.9606188e−40	4.77961552e−32	−4.19223781e−33
C117	4.55475999e−40	2.14647641e−31	−4.42634085e−32
C119	9.96424428e−41	6.08163641e−31	−4.46533131e−32
C121	−6.67748909e−44	0	0
C123	−1.35652075e−43	0	0
C125	1.98636308e−43	0	0
C127	1.25607622e−42	0	0
C129	2.10051386e−42	0	0
C131	1.77289428e−42	0	0
C133	7.94693346e−43	0	0
C135	1.74862061e−43	0	0
C136	−1.77390976e−46	0	0
C138	−2.00142247e−45	0	0
C140	−8.6258998e−45	0	0
C142	−1.91465627e−44	0	0
C144	−2.50271596e−44	0	0
C146	−2.03958823e−44	0	0
C148	−1.04613962e−44	0	0
C150	−3.18867421e−45	0	0
C152	−4.17582475e−46	0	0

[0090]

TABLE 3b
for FIG. 2
Coeffi-
cient	M7	M6	M5
KY	0.00000000	0.00000000	0.00000000
KX	0.00000000	0.00000000	0.00000000
RX	−633.70195490	−1159.78778500	−7911.62023000
C7	−3.6838108e−08	8.9762673e−08	1.29208819e−08
C9	1.66051547e−07	5.4606184e−08	−4.52621083e−08
C10	2.70786958e−11	−4.84436976e−10	−5.84676904e−10
C12	−4.05365907e−10	4.4034394e−11	3.29353371e−11
C14	1.17570885e−09	−8.49494866e−10	3.27657845e−11
C16	5.32058235e−13	−1.22366579e−12	−4.06185258e−13
C18	−2.33907349e−12	3.31495258e−12	−3.05655881e−13
C20	1.03622586e−11	4.74017946e−12	−9.90515078e−14
C21	1.84951658e−17	4.70815441e−16	6.8177486e−16
C23	1.97362743e−16	−5.63918759e−15	1.78311332e−16
C25	−4.50645748e−14	−2.04438614e−14	1.92769745e−15
C27	1.22197136e−13	−4.46320586e−14	1.11134948e−15
C29	−8.3397015e−19	3.12037967e−18	1.20925734e−18
C31	5.73336291e−17	2.52930984e−17	−2.68755339e−18
C33	−4.26965471e−16	2.57659349e−16	−5.94759876e−18
C35	1.12309508e−15	3.62043368e−16	−4.78247891e−18
C36	−2.54002154e−21	−2.33285817e−21	8.64176325e−21
C38	6.58698589e−22	6.78093367e−21	2.69603122e−21
C40	9.19834216e−19	−6.09316184e−19	1.90190625e−20
C42	−5.20603364e−18	−2.48560476e−18	2.06136053e−20
C44	1.95177251e−17	−3.71987432e−18	1.52178482e−20
C46	5.11031274e−23	−2.36475219e−24	1.40723013e−23
C48	−5.22351362e−22	1.08955249e−21	−1.74886691e−23
C50	1.29955621e−20	6.28062297e−21	−1.31280422e−22
C52	−7.19352591e−20	2.83502526e−20	−1.33189978e−22
C54	3.01583882e−19	4.05968238e−20	−5.11578136e−23
C55	−3.2378259e−26	5.04920803e−26	−9.74226056e−26
C57	2.56114803e−26	−1.66126857e−24	1.25073538e−25
C59	−2.15568526e−23	−1.21962666e−23	3.61644254e−25
C61	7.54597503e−23	−7.85294647e−23	6.17670028e−25
C63	−1.37768633e−21	−2.60819335e−22	3.1972004e−25
C65	−9.91159698e−22	−3.82043453e−22	5.14604952e−26
C67	8.86143266e−29	1.38719494e−27	−4.85096213e−29
C69	2.95926995e−28	1.1409927e−26	−1.52883817e−29
C71	−4.08946521e−25	1.70193798e−25	−2.99192047e−28
C73	1.1764e−24	5.79647838e−25	1.27326956e−27
C75	−1.82271068e−23	1.8185183e−24	2.14215183e−27
C77	−6.0476105e−23	2.47496013e−24	−2.43586456e−28
C78	−1.46974123e−31	−2.48880617e−30	2.2910216e−30
C80	−1.62035317e−29	−3.63910799e−30	−2.10355105e−30
C82	2.64119709e−28	−1.39124488e−28	−3.56165247e−30
C84	−2.75435112e−27	−9.92371827e−28	−1.25073816e−29
C86	6.06493358e−26	−2.9562807e−27	−1.02346615e−29
C88	−1.82794269e−25	−7.99387324e−27	1.25693216e−30
C90	8.10897778e−25	−1.01333935e−26	6.64972771e−30
C92	−5.94852836e−33	−2.20554773e−33	1.22259104e−33
C94	7.23973112e−32	1.10525284e−31	−1.24849687e−32
C96	7.40539289e−30	−4.613537e−32	−3.29652704e−32
C98	4.88216265e−30	4.80483016e−30	−8.41705133e−32
C100	9.65449531e−28	6.23756899e−30	−1.57134898e−31
C102	−1.70876067e−27	2.1445453e−29	−1.2032548e−31
C104	2.67082934e−26	2.28654521e−29	−3.36577402e−32
C105	2.35094421e−36	2.08468354e−35	−1.08251776e−35
C107	3.37747137e−34	−1.04397603e−34	3.142163e−35
C109	7.70896596e−34	2.85346997e−34	8.01180965e−35
C111	6.84579774e−32	−8.80664689e−35	3.89769754e−34
C113	−9.31004972e−32	−9.19882787e−33	7.80016296e−34
C115	5.48180337e−30	−1.39857273e−33	7.27970094e−34
C117	−9.40923091e−30	−2.85191959e−32	3.44660803e−34
C119	1.58250782e−28	−2.04899764e−32	5.28320959e−35

[0091]

TABLE 3c
for FIG. 2
Coeffi-
cient	M4	M3	M2
KY	0.00000000	0.00000000	0.00000000
KX	0.00000000	0.00000000	0.00000000
RX	6252.71767300	1718.69845500	1592.62684400
C7	2.02039657e−07	−7.72442186e−08	−2.81200257e−07
C9	6.26194854e−08	−6.39011454e−08	−4.33420894e−07
C10	−1.17096485e−10	5.38504965e−10	2.16914992e−10
C12	1.65918593e−10	1.54474735e−10	−2.43233271e−10
C14	2.6047855e−11	−5.67012949e−11	1.0908048e−09
C16	1.53352973e−13	−1.28128634e−12	−1.3249687e−12
C18	6.85280998e−14	3.29016521e−13	2.3245033e−12
C20	1.33134745e−14	−7.9135182e−14	−2.74288101e−12
C21	9.63392843e−16	−2.23006179e−16	−3.54173468e−16
C23	−2.56356327e−16	8.08610012e−16	5.15456653e−15
C25	−4.93143601e−16	−1.64061139e−16	−1.06774698e−14
C27	−3.50827102e−17	−8.3638218e−18	5.96789915e−15
C29	−1.32470314e−18	2.06883208e−18	1.70541615e−18
C31	−1.08456401e−18	−3.75046097e−18	−2.42446489e−17
C33	−3.23480928e−19	1.52741866e−18	4.43191025e−17
C35	−3.72075346e−19	1.62584985e−18	−1.05861269e−17
C36	−3.85707039e−21	−2.85425871e−21	1.53834046e−21
C38	7.16357253e−21	4.79674043e−21	−1.1251108e−20
C40	−1.76766744e−21	6.62315222e−22	1.18315789e−19
C42	−5.70159933e−21	−2.6546097e−21	−1.77703731e−19
C44	−3.65158025e−21	1.5355861e−20	1.37862764e−20
C46	−2.99726604e−23	−7.26058549e−23	−2.55922076e−23
C48	−4.17503344e−23	−9.21476496e−23	1.00193833e−22
C50	−4.7884568e−23	−2.35567601e−22	−5.31735424e−22
C52	−6.91516977e−24	−1.35526865e−22	6.79507546e−22
C54	1.98546253e−23	9.61975988e−23	4.01660209e−23
C55	−1.94031018e−26	1.56888015e−25	−1.38213528e−26
C57	−3.42382432e−25	2.2750218e−25	1.79376182e−25
C59	−2.2756817e−25	−1.23549695e−25	−5.94897934e−25
C61	2.01539859e−25	2.29974662e−25	2.27901415e−24
C63	4.95631548e−25	8.59833428e−25	−2.22922414e−24
C65	1.12176727e−25	1.26876311e−24	−7.70058057e−25
C67	9.06942404e−28	9.3079309e−28	3.74223228e−28
C69	1.9957938e−27	4.99157193e−27	−9.62902214e−28
C71	3.12476201e−27	1.58761398e−26	2.15189986e−27
C73	4.54981924e−27	1.53821757e−26	−8.59545995e−27
C75	6.59335485e−28	3.62238546e−27	5.36715829e−27
C77	−1.58015986e−27	−1.19949042e−27	5.14863336e−27
C78	4.37655985e−30	−2.15256015e−30	−6.68041182e−32
C80	8.62343063e−30	−8.27474872e−30	−2.88698633e−30
C82	1.3965552e−29	−1.85964202e−29	2.97808799e−30
C84	1.2610299e−29	−5.63075807e−29	−9.25513518e−30
C86	−4.82567841e−30	−7.58802797e−29	2.1567675e−29
C88	−1.35566233e−29	−6.2816052e−29	−8.2378632e−30
C90	8.35698293e−31	−2.48292667e−29	−1.8363031e−29
C92	−6.20912191e−33	−1.53848466e−33	−2.72722676e−33
C94	−3.03339233e−32	−5.56751434e−32	9.35668771e−33
C96	−4.15846221e−32	−2.81174802e−31	1.01318148e−32
C98	−1.20240425e−31	−5.69729421e−31	4.31201041e−32
C100	−1.23999978e−31	−3.40400557e−31	−2.58821352e−32
C102	1.77507014e−33	−9.97858945e−32	6.91936623e−33
C104	3.83557979e−32	1.09580074e−31	3.45333625e−32
C105	−1.52261212e−35	5.38313447e−37	2.4018539e−36
C107	−7.96360046e−35	8.5583118e−35	1.94949839e−35
C109	−2.50162343e−34	3.84351739e−34	−2.7269109e−35
C111	−2.81541874e−34	1.85492006e−33	−5.57867255e−35
C113	−6.28531061e−34	2.60940268e−33	−8.0628501e−35
C115	2.25293161e−35	2.55655776e−33	6.48059264e−36
C117	7.79107372e−35	1.01920129e−33	−2.46632816e−36
C119	−1.12500845e−34	7.43677377e−34	−2.70846382e−35

[0092]

TABLE 3d
for FIG. 2
	Coefficient	M1
	KY	0.00000000
	KX	0.00000000
	RX	−2135.98763300
	C7	−3.62667214e−08
	C9	−8.77001096e−09
	C10	−7.9878408e−12
	C12	3.57622422e−11
	C14	5.67666306e−11
	C16	−1.00670933e−14
	C18	−6.43363507e−14
	C20	3.49263438e−14
	C21	−1.83622059e−18
	C23	1.63146414e−17
	C25	2.33281554e−16
	C27	−2.13403252e−16
	C29	−7.17734463e−22
	C31	−7.76916167e−20
	C33	−2.45391831e−19
	C35	9.06895125e−19
	C36	−2.87240432e−24
	C38	−5.67479156e−24
	C40	2.53075334e−22
	C42	2.33441297e−22
	C44	−4.90816027e−21
	C46	−1.82993123e−26
	C48	1.40735408e−25
	C50	−1.62994831e−25
	C52	4.12295522e−24
	C54	2.26175423e−23
	C55	6.84620783e−30
	C57	−8.9211373e−29
	C59	3.99552919e−28
	C61	2.87701829e−26
	C63	7.90515964e−26
	C65	4.93963599e−26
	C67	8.37008672e−32
	C69	−9.8548077e−31
	C71	−7.50758997e−30
	C73	−6.72582496e−30
	C75	2.5702957e−28
	C77	−1.08487883e−27
	C78	4.88158898e−36
	C80	1.55182242e−33
	C82	1.52095525e−32
	C84	−1.27781492e−31
	C86	−1.81913568e−30
	C88	−5.89459163e−30
	C90	2.69055495e−30
	C92	−4.03243187e−38
	C94	3.64827588e−36
	C96	3.2629352e−35
	C98	1.58289449e−34
	C100	−1.41502554e−34
	C102	−7.52721979e−33
	C104	1.42550505e−32
	C105	−9.85463233e−41
	C107	−4.7133732e−39
	C109	−9.62905307e−38
	C111	−4.88592887e−38
	C113	5.89605443e−36
	C115	4.37586765e−35
	C117	1.2944388e−34
	C119	−5.79847892e−35

[0093]

TABLE 4a
for FIG. 2
Surface	DCX	DCY	DCZ
Image	0.00000000	0.00000000	0.00000000
M10 (AS4)	0.00000000	0.00000000	805.12545493
AS	0.00000000	121.91685762	283.85220626
M9 (AS3)	−0.00000000	161.70815863	113.71871405
M8	0.00000000	−95.26534725	1237.21684296
M7	−0.00000000	−33.77425023	1447.75579022
M6	0.00000000	65.18321239	1551.64751609
M5	0.00000000	416.29245364	1699.16961083
AS2	−0.00000000	446.29210651	1699.02529226
M4	−0.00000000	1004.20719186	1696.34134424
M3	−0.00000000	1452.13094016	1490.08513977
M2	0.00000000	1660.63260708	1219.01552868
M1	−0.00000000	1898.51696847	380.25896967
Object	−0.00000000	2052.66210418	2142.14593325

[0094]

TABLE 4b
for FIG. 2
Surface	TLA[deg]	TLB[deg]	TLC[de2]
Image	−0.00000000	0.00000000	−0.00000000
M10 (AS4)	6.58193819	0.00000000	−0.00000000
AS	−11.93243779	180.00000000	0.00000000
M9 (AS3)	193.02365372	−0.00000000	0.00000000
M8	88.30109261	−0.00000000	0.00000000
M7	60.05609350	0.00000000	0.00000000
M6	34.59181790	−0.00000000	−0.00000000
M5	11.25728686	−0.00000000	−0.00000000
AS2	269.72437077	0.00000000	0.00000000
M4	−12.50018064	0.00000000	−0.00000000
M3	−38.57896098	0.00000000	0.00000000
M2	−63.29951574	−0.00000000	0.00000000
M1	185.41707922	0.00000000	−0.00000000
Object	0.00000000	0.00000000	0.00000000

[0095]

TABLE 5
for FIG. 2
		Angle of
	Surface	incidence [deg]	Reflectivity
	M10	6.54595976	0.66117442
	M9	0.00927824	0.66565898
	M8	75.28640231	0.80872358
	M7	76.47602867	0.82797480
	M6	78.19600462	0.85363243
	M5	77.82112299	0.84823720
	M4	78.09659958	0.85221174
	M3	76.69475350	0.83137235
	M2	78.51548223	0.85815147
	M1	10.19566395	0.65421760
	Overall transmis-		0.0849

[0096]

TABLE 6
Stop polygon AS4 on M10
X[mm]	Y[mm]	Z[mm]	Type
−461.17630000	−10.30450000	−123.68161700	CLA
−461.14370000	−10.80690000	−123.67061100	CLA
−461.11090000	−11.30930000	−123.65984400	CLA
−458.94680000	−34.79650000	−123.19019500	CLA
−455.54960000	−58.06020000	−122.77715600	CLA
−450.94270000	−81.03510000	−122.42063900	CLA
−445.15300000	−103.65790000	−122.11947100	CLA
−438.21120000	−125.86830000	−121.87186800	CLA
−430.15080000	−147.60870000	−121.67507300	CLA
−421.00830000	−168.82430000	−121.52571100	CLA
−410.82240000	−189.46380000	−121.41976700	CLA
−399.63390000	−209.47900000	−121.35274200	CLA
−387.48550000	−228.82490000	−121.31983600	CLA
−374.42100000	−247.45960000	−121.31578700	CLA
−360.48530000	−265.34480000	−121.33532100	CLA
−345.72420000	−282.44490000	−121.37301600	CLA
−330.18380000	−298.72750000	−121.42343900	CLA
−313.91070000	−314.16310000	−121.48136900	CLA
−296.95130000	−328.72480000	−121.54158300	CLA
−279.35240000	−342.38840000	−121.59932900	CLA
−261.16010000	−355.13180000	−121.64979700	CLA
−242.42050000	−366.93550000	−121.68877800	CLA
−223.17950000	−377.78180000	−121.71231900	CLA
−203.48240000	−387.65510000	−121.71685900	CLA
−183.37420000	−396.54150000	−121.69922000	CLA
−162.89950000	−404.42860000	−121.65654300	CLA
−142.10260000	−411.30570000	−121.58649000	CLA
−121.02740000	−417.16350000	−121.48711600	CLA
−99.71750000	−421.99390000	−121.35681900	CLA
−78.21660000	−425.79020000	−121.19454200	CLA
−56.56780000	−428.54670000	−120.99947300	CLA
−34.81460000	−430.25900000	−120.77135000	CLA
−13.00000000	−430.92370000	−120.51021500	CLA
13.00000000	−430.92370000	−120.51021500	CLA
34.81460000	−430.25900000	−120.77135000	CLA
56.56780000	−428.54670000	−120.99947300	CLA
78.21660000	−425.79020000	−121.19454200	CLA
99.71750000	−421.99390000	−121.35681900	CLA
121.02740000	−417.16350000	−121.48711600	CLA
142.10260000	−411.30570000	−121.58649000	CLA
162.89950000	−404.42860000	−121.65654300	CLA
183.37420000	−396.54150000	−121.69922000	CLA
203.48240000	−387.65510000	−121.71685900	CLA
223.17950000	−377.78180000	−121.71231900	CLA
242.42050000	−366.93550000	−121.68877800	CLA
261.16010000	−355.13180000	−121.64979700	CLA
279.35240000	−342.38840000	−121.59932900	CLA
296.95130000	−328.72480000	−121.54158300	CLA
313.91070000	−314.16310000	−121.48136900	CLA
330.18380000	−298.72750000	−121.42343900	CLA
345.72420000	−282.44490000	−121.37301600	CLA
360.48530000	−265.34480000	−121.33532100	CLA
374.42100000	−247.45960000	−121.31578700	CLA
387.48550000	−228.82490000	−121.31983600	CLA
399.63390000	−209.47900000	−121.35274200	CLA
410.82240000	−189.46380000	−121.41976700	CLA
421.00830000	−168.82430000	−121.52571100	CLA
430.15080000	−147.60870000	−121.67507300	CLA
438.21120000	−125.86830000	−121.87186800	CLA
445.15300000	−103.65790000	−122.11947100	CLA
450.94270000	−81.03510000	−122.42063900	CLA
455.54960000	−58.06020000	−122.77715600	CLA
458.94680000	−34.79650000	−123.19019500	CLA
461.11090000	−11.30930000	−123.65984400	CLA
461.14370000	−10.80690000	−123.67061100	CLA
461.17630000	−10.30450000	−123.68161700	CLA
462.07200000	13.33840000	−124.23127700	CLA
461.70020000	37.06640000	−124.83493200	CLA
460.05040000	60.80860000	−125.48977700	CLA
457.11670000	84.49360000	−126.19215400	CLA
452.89790000	108.04900000	−126.93756000	CLA
447.39740000	131.40220000	−127.72066800	CLA
440.62340000	154.48080000	−128.53554800	CLA
432.58870000	177.21270000	−129.37563400	CLA
423.31070000	199.52670000	−130.23393200	CLA
412.81130000	221.35250000	−131.10306200	CLA
401.11660000	242.62130000	−131.97536300	CLA
388.25720000	263.26580000	−132.84316100	CLA
374.26750000	283.22060000	−133.69864500	CLA
359.18570000	302.42230000	−134.53401400	CLA
343.05410000	320.81000000	−135.34191300	CLA
325.91810000	338.32500000	−136.11492000	CLA
307.82680000	354.91130000	−136.84610300	CLA
288.83230000	370.51600000	−137.52897300	CLA
268.98990000	385.08880000	−138.15736000	CLA
248.35740000	398.58260000	−138.72547500	CLA
226.99570000	410.95380000	−139.22831200	CLA
204.96780000	422.16200000	−139.66114600	CLA
182.33920000	432.17040000	−140.01989100	CLA
159.17740000	440.94580000	−140.30093200	CLA
135.55190000	448.45910000	−140.50142200	CLA
111.53350000	454.68480000	−140.61880600	CLA
87.19500000	459.60160000	−140.65130300	CLA
85.03370000	459.95990000	−140.64206700	CLA
82.87420000	460.27350000	−140.61012400	CLA
60.44340000	463.51260000	−140.63406900	CLA
58.27810000	463.78840000	−140.64763800	CLA
56.11400000	464.01970000	−140.63824200	CLA
31.35000000	466.15680000	−140.63405600	CLA
29.18360000	466.30570000	−140.64689700	CLA
27.01770000	466.41010000	−140.63648800	CLA
2.16670000	467.12350000	−140.63527200	CLA
0.00000000	467.14560000	−140.64684300	CLA
−2.16670000	467.12350000	−140.63527200	CLA
−27.01770000	466.41010000	−140.63648800	CLA
−29.18360000	466.30570000	−140.64689700	CLA
−31.35000000	466.15680000	−140.63405600	CLA
−56.11400000	464.01970000	−140.63824200	CLA
−58.27810000	463.78840000	−140.64763800	CLA
−60.44340000	463.51260000	−140.63406900	CLA
−82.87420000	460.27350000	−140.61012400	CLA
−85.03370000	459.95990000	−140.64206700	CLA
−87.19500000	459.60160000	−140.65130300	CLA
−111.53350000	454.68480000	−140.61880600	CLA
−135.55190000	448.45910000	−140.50142200	CLA
−159.17740000	440.94580000	−140.30093200	CLA
−182.33920000	432.17040000	−140.01989100	CLA
−204.96780000	422.16200000	−139.66114600	CLA
−226.99570000	410.95380000	−139.22831200	CLA
−248.35740000	398.58260000	−138.72547500	CLA
−268.98990000	385.08880000	−138.15736000	CLA
−288.83230000	370.51600000	−137.52897300	CLA
−307.82680000	354.91130000	−136.84610300	CLA
−325.91810000	338.32500000	−136.11492000	CLA
−343.05410000	320.81000000	−135.34191300	CLA
−359.18570000	302.42230000	−134.53401400	CLA
−374.26750000	283.22060000	−133.69864500	CLA
−388.25720000	263.26580000	−132.84316100	CLA
−401.11660000	242.62130000	−131.97536300	CLA
−412.81130000	221.35250000	−131.10306200	CLA
−423.31070000	199.52670000	−130.23393200	CLA
−432.58870000	177.21270000	−129.37563400	CLA
−440.62340000	154.48080000	−128.53554800	CLA
−447.39740000	131.40220000	−127.72066800	CLA
−452.89790000	108.04900000	−126.93756000	CLA
−457.11670000	84.49360000	−126.19215400	CLA
−460.05040000	60.80860000	−125.48977700	CLA
−461.70020000	37.06640000	−124.83493200	CLA
−462.07200000	13.33840000	−124.23127700	CLA
−80.22010000	−4.03830000	−3.49703600	OBS
−79.85040000	−8.24600000	−3.49589700	OBS
−79.26240000	−12.42650000	−3.49682100	OBS
−78.45800000	−16.56850000	−3.49976000	OBS
−77.43970000	−20.66080000	−3.50464600	OBS
−76.21070000	−24.69220000	−3.51139700	OBS
−74.77460000	−28.65180000	−3.51989700	OBS
−73.13550000	−32.52900000	−3.53001100	OBS
−71.29830000	−36.31350000	−3.54161400	OBS
−69.26820000	−39.99490000	−3.55452900	OBS
−67.05090000	−43.56360000	−3.56858700	OBS
−64.65270000	−47.01010000	−3.58360900	OBS
−62.08040000	−50.32510000	−3.59939800	OBS
−59.34100000	−53.49990000	−3.61574600	OBS
−56.44210000	−56.52620000	−3.63245400	OBS
−53.39170000	−59.39590000	−3.64930800	OBS
−50.19820000	−62.10160000	−3.66610900	OBS
−46.87020000	−64.63610000	−3.68263800	OBS
−43.41690000	−66.99280000	−3.69870200	OBS
−39.84750000	−69.16560000	−3.71410300	OBS
−36.17180000	−71.14880000	−3.72865900	OBS
−32.39950000	−72.93730000	−3.74219000	OBS
−28.54080000	−74.52650000	−3.75454100	OBS
−24.60620000	−75.91210000	−3.76555400	OBS
−20.60600000	−77.09070000	−3.77510700	OBS
−16.55090000	−78.05910000	−3.78307400	OBS
−12.45190000	−78.81500000	−3.78938100	OBS
−8.31970000	−79.35630000	−3.79393700	OBS
−4.16540000	−79.68160000	−3.79668900	OBS
0.00000000	−79.79010000	−3.79760700	OBS
4.16540000	−79.68160000	−3.79668900	OBS
8.31970000	−79.35630000	−3.79393700	OBS
12.45190000	−78.81500000	−3.78938100	OBS
16.55090000	−78.05910000	−3.78307400	OBS
20.60600000	−77.09070000	−3.77510700	OBS
24.60620000	−75.91210000	−3.76555400	OBS
28.54080000	−74.52650000	−3.75454100	OBS
32.39950000	−72.93730000	−3.74219000	OBS
36.17180000	−71.14880000	−3.72865900	OBS
39.84750000	−69.16560000	−3.71410300	OBS
43.41690000	−66.99280000	−3.69870200	OBS
46.87020000	−64.63610000	−3.68263800	OBS
50.19820000	−62.10160000	−3.66610900	OBS
53.39170000	−59.39590000	−3.64930800	OBS
56.44210000	−56.52620000	−3.63245400	OBS
59.34100000	−53.49990000	−3.61574600	OBS
62.08040000	−50.32510000	−3.59939800	OBS
64.65270000	−47.01010000	−3.58360900	OBS
67.05090000	−43.56360000	−3.56858700	OBS
69.26820000	−39.99490000	−3.55452900	OBS
71.29830000	−36.31350000	−3.54161400	OBS
73.13550000	−32.52900000	−3.53001100	OBS
74.77460000	−28.65180000	−3.51989700	OBS
76.21070000	−24.69220000	−3.51139700	OBS
77.43970000	−20.66080000	−3.50464600	OBS
78.45800000	−16.56850000	−3.49976000	OBS
79.26240000	−12.42650000	−3.49682100	OBS
79.85040000	−8.24600000	−3.49589700	OBS
80.22010000	−4.03830000	−3.49703600	OBS
80.37020000	0.18500000	−3.50026800	OBS
80.29980000	4.41230000	−3.50557800	OBS
80.00890000	8.63210000	−3.51295600	OBS
79.49790000	12.83260000	−3.52234900	OBS
78.76800000	17.00240000	−3.53370200	OBS
77.82080000	21.12970000	−3.54691100	OBS
76.65870000	25.20320000	−3.56187600	OBS
75.28450000	29.21160000	−3.57845900	OBS
73.70190000	33.14350000	−3.59652000	OBS
71.91490000	36.98800000	−3.61588400	OBS
69.92820000	40.73430000	−3.63637100	OBS
67.74710000	44.37190000	−3.65778900	OBS
65.37750000	47.89050000	−3.67993500	OBS
62.82570000	51.28020000	−3.70259000	OBS
60.09880000	54.53140000	−3.72554400	OBS
57.20400000	57.63490000	−3.74855800	OBS
54.14950000	60.58180000	−3.77141500	OBS
50.94340000	63.36380000	−3.79387700	OBS
47.59480000	65.97300000	−3.81573800	OBS
44.11290000	68.40190000	−3.83677000	OBS
40.50730000	70.64350000	−3.85675400	OBS
36.78810000	72.69160000	−3.87551000	OBS
32.96560000	74.54010000	−3.89282800	OBS
29.05060000	76.18390000	−3.90855500	OBS
25.05390000	77.61810000	−3.92250900	OBS
20.98680000	78.83880000	−3.93457400	OBS
16.86070000	79.84230000	−3.94461000	OBS
12.68720000	80.62590000	−3.95253200	OBS
8.47800000	81.18720000	−3.95824500	OBS
4.24500000	81.52460000	−3.96169400	OBS
0.00000000	81.63720000	−3.96285000	OBS
−4.24500000	81.52460000	−3.96169400	OBS
−8.47800000	81.18720000	−3.95824500	OBS
−12.68720000	80.62590000	−3.95253200	OBS
−16.86070000	79.84230000	−3.94461000	OBS
−20.98680000	78.83880000	−3.93457400	OBS
−25.05390000	77.61810000	−3.92250900	OBS
−29.05060000	76.18390000	−3.90855500	OBS
−32.96560000	74.54010000	−3.89282800	OBS
−36.78810000	72.69160000	−3.87551000	OBS
−40.50730000	70.64350000	−3.85675400	OBS
−44.11290000	68.40190000	−3.83677000	OBS
−47.59480000	65.97300000	−3.81573800	OBS
−50.94340000	63.36380000	−3.79387700	OBS
−54.14950000	60.58180000	−3.77141500	OBS
−57.20400000	57.63490000	−3.74855800	OBS
−60.09880000	54.53140000	−3.72554400	OBS
−62.82570000	51.28020000	−3.70259000	OBS
−65.37750000	47.89050000	−3.67993500	OBS
−67.74710000	44.37190000	−3.65778900	OBS
−69.92820000	40.73430000	−3.63637100	OBS
−71.91490000	36.98800000	−3.61588400	OBS
−73.70190000	33.14350000	−3.59652000	OBS
−75.28450000	29.21160000	−3.57845900	OBS
−76.65870000	25.20320000	−3.56187600	OBS
−77.82080000	21.12970000	−3.54691100	OBS
−78.76800000	17.00240000	−3.53370200	OBS
−79.49790000	12.83260000	−3.52234900	OBS
−80.00890000	8.63210000	−3.51295600	OBS
−80.29980000	4.41230000	−3.50557800	OBS
−80.37020000	0.18500000	−3.50026800	OBS

[0097]

TABLE 7
Stop polygon AS3 on M9
X[mm]	Y[mm]	Z[mm]	Type
4.84286400	−99.11799200	13.02505600	CLA
7.85158500	−99.08636500	13.03128500	CLA
10.85934400	−99.01479100	13.03396300	CLA
13.86529000	−98.90330900	13.03309700	CLA
16.86857600	−98.75198300	13.02870000	CLA
19.86835400	−98.56090100	13.02079000	CLA
22.86377600	−98.33017600	13.00939400	CLA
25.85399400	−98.05994200	12.99454200	CLA
28.83816300	−97.75035900	12.97627200	CLA
31.81543500	−97.40160900	12.95462800	CLA
34.78496400	−97.01390100	12.92965900	CLA
37.74590400	−96.58746300	12.90142000	CLA
40.69741000	−96.12254800	12.86997200	CLA
43.63863800	−95.61943400	12.83538200	CLA
46.56874100	−95.07841700	12.79772100	CLA
49.48687600	−94.49982100	12.75706600	CLA
52.39220000	−93.88398800	12.71349900	CLA
55.28386700	−93.23128500	12.66710800	CLA
58.16103600	−92.54210000	12.61798300	CLA
61.02286300	−91.81684200	12.56622100	CLA
63.86850500	−91.05594200	12.51192300	CLA
66.69712100	−90.25985100	12.45519300	CLA
69.50786800	−89.42904300	12.39613800	CLA
72.29990300	−88.56401000	12.33487100	CLA
75.07238700	−87.66526400	12.27150700	CLA
77.82447700	−86.73333900	12.20616400	CLA
80.55533200	−85.76878700	12.13896300	CLA
83.26411300	−84.77217700	12.07002700	CLA
85.94997800	−83.74410000	11.99948200	CLA
88.61208700	−82.68516400	11.92745500	CLA
91.24960200	−81.59599200	11.85407600	CLA
93.86168200	−80.47722800	11.77947400	CLA
96.44749000	−79.32953100	11.70378200	CLA
99.00618600	−78.15357600	11.62713100	CLA
101.53693500	−76.95005500	11.54965500	CLA
104.03889900	−75.71967300	11.47148400	CLA
106.51124400	−74.46315300	11.39275200	CLA
108.95313400	−73.18123000	11.31359000	CLA
111.36373800	−71.87465300	11.23412900	CLA
113.74222400	−70.54418400	11.15449900	CLA
116.08776400	−69.19059800	11.07482700	CLA
118.39952900	−67.81468200	10.99523900	CLA
120.67669700	−66.41723400	10.91585800	CLA
122.91844500	−64.99906200	10.83680800	CLA
125.12395600	−63.56098300	10.75820500	CLA
127.29241500	−62.10382700	10.68016600	CLA
129.42301300	−60.62842900	10.60280200	CLA
131.51494400	−59.13563200	10.52622100	CLA
133.56740800	−57.62628900	10.45052900	CLA
135.57961200	−56.10125500	10.37582600	CLA
137.55076900	−54.56139500	10.30220800	CLA
139.48009800	−53.00757600	10.22976600	CLA
141.36682700	−51.44067000	10.15858700	CLA
143.21019400	−49.86155100	10.08875200	CLA
145.00944500	−48.27109700	10.02033800	CLA
146.76383500	−46.67018700	9.95341600	CLA
148.47263400	−45.05970100	9.88805200	CLA
150.13511900	−43.44051700	9.82430600	CLA
151.75058600	−41.81351600	9.76223200	CLA
153.31833900	−40.17957300	9.70188000	CLA
154.83770000	−38.53956200	9.64329100	CLA
156.30800600	−36.89435500	9.58650400	CLA
157.72861100	−35.24481700	9.53154900	CLA
159.09888600	−33.59180900	9.47845200	CLA
160.41822100	−31.93618600	9.42723300	CLA
161.68602700	−30.27879600	9.37790600	CLA
162.90173400	−28.62047800	9.33047800	CLA
164.06479400	−26.96206400	9.28495300	CLA
165.17468100	−25.30437400	9.24132800	CLA
166.23089600	−23.64822000	9.19959500	CLA
167.23296000	−21.99440100	9.15974000	CLA
168.18042200	−20.34370400	9.12174400	CLA
169.07285800	−18.69690500	9.08558600	CLA
169.90987000	−17.05476300	9.05123700	CLA
170.69108900	−15.41802500	9.01866400	CLA
171.41617600	−13.78742200	8.98783100	CLA
172.08482000	−12.16366800	8.95869900	CLA
172.69674200	−10.54746200	8.93122200	CLA
173.25169300	−8.93948200	8.90535300	CLA
173.74945900	−7.34039300	8.88104200	CLA
174.18985600	−5.75083700	8.85823500	CLA
174.57273400	−4.17143900	8.83687700	CLA
174.89797700	−2.60280200	8.81690800	CLA
175.16550300	−1.04551200	8.79826900	CLA
175.37526600	0.49987000	8.78089700	CLA
175.52725300	2.03280000	8.76473000	CLA
175.62148800	3.55276000	8.74970400	CLA
175.65802900	5.05924900	8.73575300	CLA
175.63697200	6.55179200	8.72281100	CLA
175.55844600	8.02993500	8.71081500	CLA
175.42261700	9.49324500	8.69969700	CLA
175.38539800	9.80003000	8.69732700	CLA
175.34809200	10.10667300	8.69525000	CLA
175.15412300	11.55752300	8.68773500	CLA
174.90330200	12.99272200	8.68099300	CLA
174.59590200	14.41190500	8.67496000	CLA
174.23223100	15.81472800	8.66957100	CLA
173.81263200	17.20086900	8.66476500	CLA
173.33748100	18.57003000	8.66048000	CLA
172.80718800	19.92193100	8.65665800	CLA
172.22219700	21.25631700	8.65324100	CLA
171.58298300	22.57295200	8.65017400	CLA
170.89005200	23.87162200	8.64740500	CLA
170.14394200	25.15213000	8.64488200	CLA
169.34522100	26.41430400	8.64255700	CLA
168.49448300	27.65798500	8.64038500	CLA
167.59235100	28.88303600	8.63832200	CLA
166.63947600	30.08933900	8.63632700	CLA
165.63653300	31.27679100	8.63436300	CLA
164.58422100	32.44530500	8.63239300	CLA
163.48326100	33.59481300	8.63038500	CLA
162.33439800	34.72526000	8.62830800	CLA
161.13839400	35.83660600	8.62613300	CLA
159.89603300	36.92882800	8.62383600	CLA
158.60811400	38.00191100	8.62139200	CLA
157.27545200	39.05585700	8.61878100	CLA
155.89887800	40.09067900	8.61598400	CLA
154.47923500	41.10640100	8.61298400	CLA
153.01737700	42.10305600	8.60976600	CLA
151.51416800	43.08069100	8.60631800	CLA
149.97048100	44.03935900	8.60262700	CLA
148.38719700	44.97912400	8.59868500	CLA
146.76520100	45.90005600	8.59448400	CLA
145.10538200	46.80223400	8.59001600	CLA
143.40863300	47.68574500	8.58527800	CLA
141.67584700	48.55068000	8.58026500	CLA
139.90791900	49.39713900	8.57497400	CLA
138.10574000	50.22522400	8.56940300	CLA
136.27020000	51.03504600	8.56355300	CLA
134.40218600	51.82671600	8.55742300	CLA
132.50257900	52.60035400	8.55101300	CLA
130.57225300	53.35607900	8.54432600	CLA
128.61207800	54.09401600	8.53736300	CLA
126.62291300	54.81429200	8.53012900	CLA
124.60561000	55.51703600	8.52262400	CLA
122.56100900	56.20238000	8.51485500	CLA
120.48994200	56.87045700	8.50682400	CLA
118.39322700	57.52140200	8.49853600	CLA
116.27167300	58.15535000	8.48999600	CLA
114.12607300	58.77243800	8.48121000	CLA
111.95721000	59.37280200	8.47218200	CLA
109.76585200	59.95657900	8.46291800	CLA
107.55275100	60.52390700	8.45342400	CLA
105.31864900	61.07492200	8.44370700	CLA
103.06426900	61.60976000	8.43377100	CLA
100.79032200	62.12855600	8.42362400	CLA
98.49750200	62.63144500	8.41327300	CLA
96.18649100	63.11855800	8.40272300	CLA
93.85795200	63.59002800	8.39198300	CLA
91.51253500	64.04598500	8.38105800	CLA
89.15087400	64.48655600	8.36995600	CLA
86.77358900	64.91186800	8.35868400	CLA
84.38128500	65.32204300	8.34725000	CLA
81.97455100	65.71720500	8.33566100	CLA
78.45385800	66.27039900	8.31981800	CLA
76.01539200	66.63736900	8.30974800	CLA
73.56432400	66.98967000	8.29955700	CLA
71.10119300	67.32741100	8.28925400	CLA
67.51185900	67.79723300	8.27551900	CLA
65.02213500	68.10760200	8.26679900	CLA
62.52204800	68.40372000	8.25799800	CLA
60.01208900	68.68568400	8.24912300	CLA
57.49274100	68.95358600	8.24018000	CLA
56.36541400	69.07342900	8.23728900	CLA
53.83371600	69.32874400	8.23006100	CLA
51.29372900	69.57017000	8.22278900	CLA
48.74590700	69.79778900	8.21547800	CLA
46.19069200	70.01168000	8.20813500	CLA
45.05275500	70.10458800	8.20539400	CLA
42.48779600	70.30617100	8.19979100	CLA
39.91648700	70.49416600	8.19417400	CLA
37.33924700	70.66863900	8.18855000	CLA
34.75648600	70.82965300	8.18292200	CLA
31.02012900	71.04435900	8.17624900	CLA
28.42562400	71.17993400	8.17239700	CLA
25.82698800	71.30220600	8.16856000	CLA
23.22460800	71.41121700	8.16474300	CLA
20.61886600	71.50700800	8.16094900	CLA
19.46491600	71.54680900	8.15967700	CLA
16.85499600	71.63071000	8.15767300	CLA
14.24266800	71.70145500	8.15570100	CLA
11.62830600	71.75906800	8.15376400	CLA
9.01227700	71.80357000	8.15186200	CLA
6.39495000	71.83497800	8.14999800	CLA
5.23741300	71.84868600	8.15017200	CLA
2.61888900	71.86829900	8.15011200	CLA
0.00000000	71.87483500	8.15009100	CLA
−2.61888900	71.86829900	8.15011200	CLA
−5.23741300	71.84868600	8.15017200	CLA
−6.39495000	71.83497800	8.14999800	CLA
−9.01227700	71.80357000	8.15186200	CLA
−11.62830600	71.75906800	8.15376400	CLA
−14.24266800	71.70145500	8.15570100	CLA
−16.85499600	71.63071000	8.15767300	CLA
−19.46491600	71.54680900	8.15967700	CLA
−20.61886600	71.50700800	8.16094900	CLA
−23.22460800	71.41121700	8.16474300	CLA
−25.82698800	71.30220600	8.16856000	CLA
−28.42562400	71.17993400	8.17239700	CLA
−31.02012900	71.04435900	8.17624900	CLA
−34.75648600	70.82965300	8.18292200	CLA
−37.33924700	70.66863900	8.18855000	CLA
−39.91648700	70.49416600	8.19417400	CLA
−42.48779600	70.30617100	8.19979100	CLA
−45.05275500	70.10458800	8.20539400	CLA
−46.19069200	70.01168000	8.20813500	CLA
−48.74590700	69.79778900	8.21547800	CLA
−51.29372900	69.57017000	8.22278900	CLA
−53.83371600	69.32874400	8.23006100	CLA
−56.36541400	69.07342900	8.23728900	CLA
−57.49274100	68.95358600	8.24018000	CLA
−60.01208900	68.68568400	8.24912300	CLA
−62.52204800	68.40372000	8.25799800	CLA
−65.02213500	68.10760200	8.26679900	CLA
−67.51185900	67.79723300	8.27551900	CLA
−71.10119300	67.32741100	8.28925400	CLA
−73.56432400	66.98967000	8.29955700	CLA
−76.01539200	66.63736900	8.30974800	CLA
−78.45385800	66.27039900	8.31981800	CLA
−81.97455100	65.71720500	8.33566100	CLA
−84.38128500	65.32204300	8.34725000	CLA
−86.77358900	64.91186800	8.35868400	CLA
−89.15087400	64.48655600	8.36995600	CLA
−91.51253500	64.04598500	8.38105800	CLA
−93.85795200	63.59002800	8.39198300	CLA
−96.18649100	63.11855800	8.40272300	CLA
−98.49750200	62.63144500	8.41327300	CLA
−100.79032200	62.12855600	8.42362400	CLA
−103.06426900	61.60976000	8.43377100	CLA
−105.31864900	61.07492200	8.44370700	CLA
−107.55275100	60.52390700	8.45342400	CLA
−109.76585200	59.95657900	8.46291800	CLA
−111.95721000	59.37280200	8.47218200	CLA
−114.12607300	58.77243800	8.48121000	CLA
−116.27167300	58.15535000	8.48999600	CLA
−118.39322700	57.52140200	8.49853600	CLA
−120.48994200	56.87045700	8.50682400	CLA
−122.56100900	56.20238000	8.51485500	CLA
−124.60561000	55.51703600	8.52262400	CLA
−126.62291300	54.81429200	8.53012900	CLA
−128.61207800	54.09401600	8.53736300	CLA
−130.57225300	53.35607900	8.54432600	CLA
−132.50257900	52.60035400	8.55101300	CLA
−134.40218600	51.82671600	8.55742300	CLA
−136.27020000	51.03504600	8.56355300	CLA
−138.10574000	50.22522400	8.56940300	CLA
−139.90791900	49.39713900	8.57497400	CLA
−141.67584700	48.55068000	8.58026500	CLA
−143.40863300	47.68574500	8.58527800	CLA
−145.10538200	46.80223400	8.59001600	CLA
−146.76520100	45.90005600	8.59448400	CLA
−148.38719700	44.97912400	8.59868500	CLA
−149.97048100	44.03935900	8.60262700	CLA
−151.51416800	43.08069100	8.60631800	CLA
−153.01737700	42.10305600	8.60976600	CLA
−154.47923500	41.10640100	8.61298400	CLA
−155.89887800	40.09067900	8.61598400	CLA
−157.27545200	39.05585700	8.61878100	CLA
−158.60811400	38.00191100	8.62139200	CLA
−159.89603300	36.92882800	8.62383600	CLA
−161.13839400	35.83660600	8.62613300	CLA
−162.33439800	34.72526000	8.62830800	CLA
−163.48326100	33.59481300	8.63038500	CLA
−164.58422100	32.44530500	8.63239300	CLA
−165.63653300	31.27679100	8.63436300	CLA
−166.63947600	30.08933900	8.63632700	CLA
−167.59235100	28.88303600	8.63832200	CLA
−168.49448300	27.65798500	8.64038500	CLA
−169.34522100	26.41430400	8.64255700	CLA
−170.14394200	25.15213000	8.64488200	CLA
−170.89005200	23.87162200	8.64740500	CLA
−171.58298300	22.57295200	8.65017400	CLA
−172.22219700	21.25631700	8.65324100	CLA
−172.80718800	19.92193100	8.65665800	CLA
−173.33748100	18.57003000	8.66048000	CLA
−173.81263200	17.20086900	8.66476500	CLA
−174.23223100	15.81472800	8.66957100	CLA
−174.59590200	14.41190500	8.67496000	CLA
−174.90330200	12.99272200	8.68099300	CLA
−175.15412300	11.55752300	8.68773500	CLA
−175.34809200	10.10667300	8.69525000	CLA
−175.38539800	9.80003000	8.69732700	CLA
−175.42261700	9.49324500	8.69969700	CLA
−175.55844600	8.02993500	8.71081500	CLA
−175.63697200	6.55179200	8.72281100	CLA
−175.65802900	5.05924900	8.73575300	CLA
−175.62148800	3.55276000	8.74970400	CLA
−175.52725300	2.03280000	8.76473000	CLA
−175.37526600	0.49987000	8.78089700	CLA
−175.16550300	−1.04551200	8.79826900	CLA
−174.89797700	−2.60280200	8.81690800	CLA
−174.57273400	−4.17143900	8.83687700	CLA
−174.18985600	−5.75083700	8.85823500	CLA
−173.74945900	−7.34039300	8.88104200	CLA
−173.25169300	−8.93948200	8.90535300	CLA
−172.69674200	−10.54746200	8.93122200	CLA
−172.08482000	−12.16366800	8.95869900	CLA
−171.41617600	−13.78742200	8.98783100	CLA
−170.69108900	−15.41802500	9.01866400	CLA
−169.90987000	−17.05476300	9.05123700	CLA
−169.07285800	−18.69690500	9.08558600	CLA
−168.18042200	−20.34370400	9.12174400	CLA
−167.23296000	−21.99440100	9.15974000	CLA
−166.23089600	−23.64822000	9.19959500	CLA
−165.17468100	−25.30437400	9.24132800	CLA
−164.06479400	−26.96206400	9.28495300	CLA
−162.90173400	−28.62047800	9.33047800	CLA
−161.68602700	−30.27879600	9.37790600	CLA
−160.41822100	−31.93618600	9.42723300	CLA
−159.09888600	−33.59180900	9.47845200	CLA
−157.72861100	−35.24481700	9.53154900	CLA
−156.30800600	−36.89435500	9.58650400	CLA
−154.83770000	−38.53956200	9.64329100	CLA
−153.31833900	−40.17957300	9.70188000	CLA
−151.75058600	−41.81351600	9.76223200	CLA
−150.13511900	−43.44051700	9.82430600	CLA
−148.47263400	−45.05970100	9.88805200	CLA
−146.76383500	−46.67018700	9.95341600	CLA
−145.00944500	−48.27109700	10.02033800	CLA
−143.21019400	−49.86155100	10.08875200	CLA
−141.36682700	−51.44067000	10.15858700	CLA
−139.48009800	−53.00757600	10.22976600	CLA
−137.55076900	−54.56139500	10.30220800	CLA
−135.57961200	−56.10125500	10.37582600	CLA
−133.56740800	−57.62628900	10.45052900	CLA
−131.51494400	−59.13563200	10.52622100	CLA
−129.42301300	−60.62842900	10.60280200	CLA
−127.29241500	−62.10382700	10.68016600	CLA
−125.12395600	−63.56098300	10.75820500	CLA
−122.91844500	−64.99906200	10.83680800	CLA
−120.67669700	−66.41723400	10.91585800	CLA
−118.39952900	−67.81468200	10.99523900	CLA
−116.08776400	−69.19059800	11.07482700	CLA
−113.74222400	−70.54418400	11.15449900	CLA
−111.36373800	−71.87465300	11.23412900	CLA
−108.95313400	−73.18123000	11.31359000	CLA
−106.51124400	−74.46315300	11.39275200	CLA
−104.03889900	−75.71967300	11.47148400	CLA
−101.53693500	−76.95005500	11.54965500	CLA
−99.00618600	−78.15357600	11.62713100	CLA
−96.44749000	−79.32953100	11.70378200	CLA
−93.86168200	−80.47722800	11.77947400	CLA
−91.24960200	−81.59599200	11.85407600	CLA
−88.61208700	−82.68516400	11.92745500	CLA
−85.94997800	−83.74410000	11.99948200	CLA
−83.26411300	−84.77217700	12.07002700	CLA
−80.55533200	−85.76878700	12.13896300	CLA
−77.82447700	−86.73333900	12.20616400	CLA
−75.07238700	−87.66526400	12.27150700	CLA
−72.29990300	−88.56401000	12.33487100	CLA
−69.50786800	−89.42904300	12.39613800	CLA
−66.69712100	−90.25985100	12.45519300	CLA
−63.86850500	−91.05594200	12.51192300	CLA
−61.02286300	−91.81684200	12.56622100	CLA
−58.16103600	−92.54210000	12.61798300	CLA
−55.28386700	−93.23128500	12.66710800	CLA
−52.39220000	−93.88398800	12.71349900	CLA
−49.48687600	−94.49982100	12.75706600	CLA
−46.56874100	−95.07841700	12.79772100	CLA
−43.63863800	−95.61943400	12.83538200	CLA
−40.69741000	−96.12254800	12.86997200	CLA
−37.74590400	−96.58746300	12.90142000	CLA
−34.78496400	−97.01390100	12.92965900	CLA
−31.81543500	−97.40160900	12.95462800	CLA
−28.83816300	−97.75035900	12.97627200	CLA
−25.85399400	−98.05994200	12.99454200	CLA
−22.86377600	−98.33017600	13.00939400	CLA
−19.86835400	−98.56090100	13.02079000	CLA
−16.86857600	−98.75198300	13.02870000	CLA
−13.86529000	−98.90330900	13.03309700	CLA
−10.85934400	−99.01479100	13.03396300	CLA
−7.85158500	−99.08636500	13.03128500	CLA
−4.84286400	−99.11799200	13.02505600	CLA

[0098]

TABLE 8
Stop polygon AS2
X[mm]	Y[mm]	Z[mm]	Type
0.00000000	−51.07217300	0.00000000	CLA
2.66162300	−51.05712900	0.00000000	CLA
5.32262300	−51.01202200	0.00000000	CLA
7.98237900	−50.93692400	0.00000000	CLA
10.64026700	−50.83195500	0.00000000	CLA
13.29566300	−50.69728600	0.00000000	CLA
16.66141500	−50.51366500	0.00000000	CLA
19.31292800	−50.34884700	0.00000000	CLA
21.96055600	−50.15484900	0.00000000	CLA
24.60366900	−49.93198400	0.00000000	CLA
27.24163700	−49.68060900	0.00000000	CLA
29.87382300	−49.40112300	0.00000000	CLA
32.49958900	−49.09397300	0.00000000	CLA
35.11829400	−48.75964300	0.00000000	CLA
37.72929300	−48.39866000	0.00000000	CLA
40.33193500	−48.01158900	0.00000000	CLA
42.92556700	−47.59903300	0.00000000	CLA
46.28092200	−47.05364500	0.00000000	CLA
48.86277100	−46.61658100	0.00000000	CLA
51.43416400	−46.15546400	0.00000000	CLA
53.99443400	−45.67100300	0.00000000	CLA
56.54291400	−45.16393500	0.00000000	CLA
59.07892900	−44.63502300	0.00000000	CLA
61.60180100	−44.08505900	0.00000000	CLA
64.11084700	−43.51485800	0.00000000	CLA
66.60538000	−42.92525600	0.00000000	CLA
69.08470900	−42.31710800	0.00000000	CLA
71.54813700	−41.69128700	0.00000000	CLA
73.99496400	−41.04868100	0.00000000	CLA
77.32711100	−40.16178300	0.00000000	CLA
79.75318800	−39.50583000	0.00000000	CLA
82.16115000	−38.83509200	0.00000000	CLA
84.55029100	−38.15048500	0.00000000	CLA
86.91990000	−37.45293200	0.00000000	CLA
89.26926400	−36.74335900	0.00000000	CLA
91.59766700	−36.02268900	0.00000000	CLA
93.90439200	−35.29184800	0.00000000	CLA
96.18871900	−34.55175500	0.00000000	CLA
98.44992800	−33.80332300	0.00000000	CLA
100.68729600	−33.04745700	0.00000000	CLA
102.90010300	−32.28505400	0.00000000	CLA
105.08762600	−31.51699400	0.00000000	CLA
107.24914300	−30.74414800	0.00000000	CLA
110.53967800	−29.56667400	0.00000000	CLA
112.66988600	−28.79613300	0.00000000	CLA
114.77260000	−28.02271900	0.00000000	CLA
116.84710900	−27.24724600	0.00000000	CLA
118.89270500	−26.47050500	0.00000000	CLA
120.90868100	−25.69326600	0.00000000	CLA
122.89433700	−24.91627500	0.00000000	CLA
124.84897500	−24.14025500	0.00000000	CLA
126.77190300	−23.36590300	0.00000000	CLA
128.66243200	−22.59388900	0.00000000	CLA
130.51988200	−21.82485700	0.00000000	CLA
132.34357700	−21.05942300	0.00000000	CLA
134.13284800	−20.29817500	0.00000000	CLA
139.12975100	−18.15044400	0.00000000	CLA
140.84325800	−17.41013300	0.00000000	CLA
142.52041200	−16.67583600	0.00000000	CLA
144.16058200	−15.94802200	0.00000000	CLA
145.76315200	−15.22712800	0.00000000	CLA
147.32751100	−14.51356500	0.00000000	CLA
148.85306200	−13.80771400	0.00000000	CLA
150.33921700	−13.10992800	0.00000000	CLA
151.78540100	−12.42053200	0.00000000	CLA
153.19104900	−11.73982500	0.00000000	CLA
157.77094000	−9.51969600	0.00000000	CLA
159.08933500	−8.87263300	0.00000000	CLA
160.36567200	−8.23521200	0.00000000	CLA
161.59944400	−7.60762000	0.00000000	CLA
162.79016200	−6.99001600	0.00000000	CLA
168.25884800	−4.10019400	0.00000000	CLA
169.31360100	−3.53291500	0.00000000	CLA
170.32361200	−2.97624700	0.00000000	CLA
171.28847200	−2.43022900	0.00000000	CLA
172.20778900	−1.89488100	0.00000000	CLA
173.08118800	−1.37020400	0.00000000	CLA
173.90830900	−0.85618200	0.00000000	CLA
174.68881100	−0.35278100	0.00000000	CLA
175.42236900	0.14004600	0.00000000	CLA
176.10867700	0.62236100	0.00000000	CLA
176.74744700	1.09424200	0.00000000	CLA
177.33840900	1.55577700	0.00000000	CLA
177.88131100	2.00706600	0.00000000	CLA
178.37592300	2.44822100	0.00000000	CLA
178.82203000	2.87936300	0.00000000	CLA
179.21943900	3.30062300	0.00000000	CLA
179.56797700	3.71213700	0.00000000	CLA
179.86749000	4.11405300	0.00000000	CLA
180.11784600	4.50652200	0.00000000	CLA
180.31893000	4.88970200	0.00000000	CLA
180.47065100	5.26375500	0.00000000	CLA
180.57293600	5.62884900	0.00000000	CLA
180.62573500	5.98515500	0.00000000	CLA
180.62901800	6.33284500	0.00000000	CLA
180.33196700	9.56040600	0.00000000	CLA
180.27786300	9.81759200	0.00000000	CLA
180.17435700	10.06691200	0.00000000	CLA
180.02149000	10.30860600	0.00000000	CLA
179.81932900	10.54291500	0.00000000	CLA
179.56796000	10.77007600	0.00000000	CLA
179.26749000	10.99032400	0.00000000	CLA
178.91804700	11.20389000	0.00000000	CLA
178.51978200	11.41100300	0.00000000	CLA
178.07286600	11.61188400	0.00000000	CLA
177.57749000	11.80675200	0.00000000	CLA
177.03386800	11.99581700	0.00000000	CLA
176.44223200	12.17928800	0.00000000	CLA
175.80283600	12.35736300	0.00000000	CLA
175.11595400	12.53023600	0.00000000	CLA
174.38187900	12.69809300	0.00000000	CLA
173.60092400	12.86111400	0.00000000	CLA
172.77342100	13.01947100	0.00000000	CLA
171.89972000	13.17333000	0.00000000	CLA
170.98019200	13.32284900	0.00000000	CLA
170.01522300	13.46817800	0.00000000	CLA
169.00522000	13.60946100	0.00000000	CLA
167.95060400	13.74683400	0.00000000	CLA
166.85181400	13.88042800	0.00000000	CLA
165.70930800	14.01036400	0.00000000	CLA
164.52355600	14.13675900	0.00000000	CLA
163.29504700	14.25972400	0.00000000	CLA
162.02428100	14.37936100	0.00000000	CLA
160.71177700	14.49576800	0.00000000	CLA
159.35806500	14.60903800	0.00000000	CLA
157.96368900	14.71925700	0.00000000	CLA
156.52920600	14.82650700	0.00000000	CLA
155.05518600	14.93086500	0.00000000	CLA
153.54220900	15.03240400	0.00000000	CLA
151.99086900	15.13119100	0.00000000	CLA
150.40176700	15.22729100	0.00000000	CLA
148.77551600	15.32076500	0.00000000	CLA
140.28917500	15.78795200	0.00000000	CLA
138.45153000	15.88904100	0.00000000	CLA
136.58103900	15.98734800	0.00000000	CLA
134.67837300	16.08292400	0.00000000	CLA
132.74420600	16.17581600	0.00000000	CLA
130.77921500	16.26607100	0.00000000	CLA
128.78408300	16.35373200	0.00000000	CLA
126.75949200	16.43884200	0.00000000	CLA
124.70613000	16.52144200	0.00000000	CLA
122.62468400	16.60157100	0.00000000	CLA
120.51584300	16.67926800	0.00000000	CLA
118.38029500	16.75456800	0.00000000	CLA
116.21873100	16.82751000	0.00000000	CLA
114.03183800	16.89812500	0.00000000	CLA
111.82030400	16.96645000	0.00000000	CLA
109.58481400	17.03251500	0.00000000	CLA
107.32605400	17.09635200	0.00000000	CLA
105.04470300	17.15799200	0.00000000	CLA
102.74144100	17.21746500	0.00000000	CLA
100.41694300	17.27479900	0.00000000	CLA
98.07188300	17.33002300	0.00000000	CLA
95.70692900	17.38316200	0.00000000	CLA
93.32274600	17.43424400	0.00000000	CLA
90.91999500	17.48329300	0.00000000	CLA
88.49933400	17.53033300	0.00000000	CLA
86.06141500	17.57538800	0.00000000	CLA
83.60688700	17.61847900	0.00000000	CLA
81.13639500	17.65962900	0.00000000	CLA
78.65057900	17.69885600	0.00000000	CLA
76.15007600	17.73618100	0.00000000	CLA
73.63551600	17.77162000	0.00000000	CLA
71.10752900	17.80519100	0.00000000	CLA
68.56673900	17.83690900	0.00000000	CLA
66.01376800	17.86678700	0.00000000	CLA
63.44923300	17.89484000	0.00000000	CLA
60.87374900	17.92107700	0.00000000	CLA
58.28792900	17.94551000	0.00000000	CLA
55.69238400	17.96814600	0.00000000	CLA
53.08772000	17.98899400	0.00000000	CLA
50.47454600	18.00805700	0.00000000	CLA
47.85346800	18.02534000	0.00000000	CLA
45.22509000	18.04084600	0.00000000	CLA
42.59001700	18.05457500	0.00000000	CLA
39.94885600	18.06652700	0.00000000	CLA
37.30221200	18.07669900	0.00000000	CLA
34.65069400	18.08508600	0.00000000	CLA
31.99491000	18.09168300	0.00000000	CLA
29.33547200	18.09648300	0.00000000	CLA
26.67299600	18.09947600	0.00000000	CLA
24.00809900	18.10065300	0.00000000	CLA
−24.00809900	18.10065300	0.00000000	CLA
−26.67299600	18.09947600	0.00000000	CLA
−29.33547200	18.09648300	0.00000000	CLA
−31.99491000	18.09168300	0.00000000	CLA
−34.65069400	18.08508600	0.00000000	CLA
−37.30221200	18.07669900	0.00000000	CLA
−39.94885600	18.06652700	0.00000000	CLA
−42.59001700	18.05457500	0.00000000	CLA
−45.22509000	18.04084600	0.00000000	CLA
−47.85346800	18.02534000	0.00000000	CLA
−50.47454600	18.00805700	0.00000000	CLA
−53.08772000	17.98899400	0.00000000	CLA
−55.69238400	17.96814600	0.00000000	CLA
−58.28792900	17.94551000	0.00000000	CLA
−60.87374900	17.92107700	0.00000000	CLA
−63.44923300	17.89484000	0.00000000	CLA
−66.01376800	17.86678700	0.00000000	CLA
−68.56673900	17.83690900	0.00000000	CLA
−71.10752900	17.80519100	0.00000000	CLA
−73.63551600	17.77162000	0.00000000	CLA
−76.15007600	17.73618100	0.00000000	CLA
−78.65057900	17.69885600	0.00000000	CLA
−81.13639500	17.65962900	0.00000000	CLA
−83.60688700	17.61847900	0.00000000	CLA
−86.06141500	17.57538800	0.00000000	CLA
−88.49933400	17.53033300	0.00000000	CLA
−90.91999500	17.48329300	0.00000000	CLA
−93.32274600	17.43424400	0.00000000	CLA
−95.70692900	17.38316200	0.00000000	CLA
−98.07188300	17.33002300	0.00000000	CLA
−100.41694300	17.27479900	0.00000000	CLA
−102.74144100	17.21746500	0.00000000	CLA
−105.04470300	17.15799200	0.00000000	CLA
−107.32605400	17.09635200	0.00000000	CLA
−109.58481400	17.03251500	0.00000000	CLA
−111.82030400	16.96645000	0.00000000	CLA
−114.03183800	16.89812500	0.00000000	CLA
−116.21873100	16.82751000	0.00000000	CLA
−118.38029500	16.75456800	0.00000000	CLA
−120.51584300	16.67926800	0.00000000	CLA
−122.62468400	16.60157100	0.00000000	CLA
−124.70613000	16.52144200	0.00000000	CLA
−126.75949200	16.43884200	0.00000000	CLA
−128.78408300	16.35373200	0.00000000	CLA
−130.77921500	16.26607100	0.00000000	CLA
−132.74420600	16.17581600	0.00000000	CLA
−134.67837300	16.08292400	0.00000000	CLA
−136.58103900	15.98734800	0.00000000	CLA
−138.45153000	15.88904100	0.00000000	CLA
−140.28917500	15.78795200	0.00000000	CLA
−148.77551600	15.32076500	0.00000000	CLA
−150.40176700	15.22729100	0.00000000	CLA
−151.99086900	15.13119100	0.00000000	CLA
−153.54220900	15.03240400	0.00000000	CLA
−155.05518600	14.93086500	0.00000000	CLA
−156.52920600	14.82650700	0.00000000	CLA
−157.96368900	14.71925700	0.00000000	CLA
−159.35806500	14.60903800	0.00000000	CLA
−160.71177700	14.49576800	0.00000000	CLA
−162.02428100	14.37936100	0.00000000	CLA
−163.29504700	14.25972400	0.00000000	CLA
−164.52355600	14.13675900	0.00000000	CLA
−165.70930800	14.01036400	0.00000000	CLA
−166.85181400	13.88042800	0.00000000	CLA
−167.95060400	13.74683400	0.00000000	CLA
−169.00522000	13.60946100	0.00000000	CLA
−170.01522300	13.46817800	0.00000000	CLA
−170.98019200	13.32284900	0.00000000	CLA
−171.89972000	13.17333000	0.00000000	CLA
−172.77342100	13.01947100	0.00000000	CLA
−173.60092400	12.86111400	0.00000000	CLA
−174.38187900	12.69809300	0.00000000	CLA
−175.11595400	12.53023600	0.00000000	CLA
−175.80283600	12.35736300	0.00000000	CLA
−176.44223200	12.17928800	0.00000000	CLA
−177.03386800	11.99581700	0.00000000	CLA
−177.57749000	11.80675200	0.00000000	CLA
−178.07286600	11.61188400	0.00000000	CLA
−178.51978200	11.41100300	0.00000000	CLA
−178.91804700	11.20389000	0.00000000	CLA
−179.26749000	10.99032400	0.00000000	CLA
−179.56796000	10.77007600	0.00000000	CLA
−179.81932900	10.54291500	0.00000000	CLA
−180.02149000	10.30860600	0.00000000	CLA
−180.17435700	10.06691200	0.00000000	CLA
−180.27786300	9.81759200	0.00000000	CLA
−180.33196700	9.56040600	0.00000000	CLA
−180.62901800	6.33284500	0.00000000	CLA
−180.62573500	5.98515500	0.00000000	CLA
−180.57293600	5.62884900	0.00000000	CLA
−180.47065100	5.26375500	0.00000000	CLA
−180.31893000	4.88970200	0.00000000	CLA
−180.11784600	4.50652200	0.00000000	CLA
−179.86749000	4.11405300	0.00000000	CLA
−179.56797700	3.71213700	0.00000000	CLA
−179.21943900	3.30062300	0.00000000	CLA
−178.82203000	2.87936300	0.00000000	CLA
−178.37592300	2.44822100	0.00000000	CLA
−177.88131100	2.00706600	0.00000000	CLA
−177.33840900	1.55577700	0.00000000	CLA
−176.74744700	1.09424200	0.00000000	CLA
−176.10867700	0.62236100	0.00000000	CLA
−175.42236900	0.14004600	0.00000000	CLA
−174.68881100	−0.35278100	0.00000000	CLA
−173.90830900	−0.85618200	0.00000000	CLA
−173.08118800	−1.37020400	0.00000000	CLA
−172.20778900	−1.89488100	0.00000000	CLA
−171.28847200	−2.43022900	0.00000000	CLA
−170.32361200	−2.97624700	0.00000000	CLA
−169.31360100	−3.53291500	0.00000000	CLA
−168.25884800	−4.10019400	0.00000000	CLA
−162.79016200	−6.99001600	0.00000000	CLA
−161.59944400	−7.60762000	0.00000000	CLA
−160.36567200	−8.23521200	0.00000000	CLA
−159.08933500	−8.87263300	0.00000000	CLA
−157.77094000	−9.51969600	0.00000000	CLA
−153.19104900	−11.73982500	0.00000000	CLA
−151.78540100	−12.42053200	0.00000000	CLA
−150.33921700	−13.10992800	0.00000000	CLA
−148.85306200	−13.80771400	0.00000000	CLA
−147.32751100	−14.51356500	0.00000000	CLA
−145.76315200	−15.22712800	0.00000000	CLA
−144.16058200	−15.94802200	0.00000000	CLA
−142.52041200	−16.67583600	0.00000000	CLA
−140.84325800	−17.41013300	0.00000000	CLA
−139.12975100	−18.15044400	0.00000000	CLA
−134.13284800	−20.29817500	0.00000000	CLA
−132.34357700	−21.05942300	0.00000000	CLA
−130.51988200	−21.82485700	0.00000000	CLA
−128.66243200	−22.59388900	0.00000000	CLA
−126.77190300	−23.36590300	0.00000000	CLA
−124.84897500	−24.14025500	0.00000000	CLA
−122.89433700	−24.91627500	0.00000000	CLA
−120.90868100	−25.69326600	0.00000000	CLA
−118.89270500	−26.47050500	0.00000000	CLA
−116.84710900	−27.24724600	0.00000000	CLA
−114.77260000	−28.02271900	0.00000000	CLA
−112.66988600	−28.79613300	0.00000000	CLA
−110.53967800	−29.56667400	0.00000000	CLA
−107.24914300	−30.74414800	0.00000000	CLA
−105.08762600	−31.51699400	0.00000000	CLA
−102.90010300	−32.28505400	0.00000000	CLA
−100.68729600	−33.04745700	0.00000000	CLA
−98.44992800	−33.80332300	0.00000000	CLA
−96.18871900	−34.55175500	0.00000000	CLA
−93.90439200	−35.29184800	0.00000000	CLA
−91.59766700	−36.02268900	0.00000000	CLA
−89.26926400	−36.74335900	0.00000000	CLA
−86.91990000	−37.45293200	0.00000000	CLA
−84.55029100	−38.15048500	0.00000000	CLA
−82.16115000	−38.83509200	0.00000000	CLA
−79.75318800	−39.50583000	0.00000000	CLA
−77.32711100	−40.16178300	0.00000000	CLA
−73.99496400	−41.04868100	0.00000000	CLA
−71.54813700	−41.69128700	0.00000000	CLA
−69.08470900	−42.31710800	0.00000000	CLA
−66.60538000	−42.92525600	0.00000000	CLA
−64.11084700	−43.51485800	0.00000000	CLA
−61.60180100	−44.08505900	0.00000000	CLA
−59.07892900	−44.63502300	0.00000000	CLA
−56.54291400	−45.16393500	0.00000000	CLA
−53.99443400	−45.67100300	0.00000000	CLA
−51.43416400	−46.15546400	0.00000000	CLA
−48.86277100	−46.61658100	0.00000000	CLA
−46.28092200	−47.05364500	0.00000000	CLA
−42.92556700	−47.59903300	0.00000000	CLA
−40.33193500	−48.01158900	0.00000000	CLA
−37.72929300	−48.39866000	0.00000000	CLA
−35.11829400	−48.75964300	0.00000000	CLA
−32.49958900	−49.09397300	0.00000000	CLA
−29.87382300	−49.40112300	0.00000000	CLA
−27.24163700	−49.68060900	0.00000000	CLA
−24.60366900	−49.93198400	0.00000000	CLA
−21.96055600	−50.15484900	0.00000000	CLA
−19.31292800	−50.34884700	0.00000000	CLA
−16.66141500	−50.51366500	0.00000000	CLA
−13.29566300	−50.69728600	0.00000000	CLA
−10.64026700	−50.83195500	0.00000000	CLA
−7.98237900	−50.93692400	0.00000000	CLA
−5.32262300	−51.01202200	0.00000000	CLA
−2.66162300	−51.05712900	0.00000000	CLA